JPH0565923B2 - - Google Patents
Info
- Publication number
- JPH0565923B2 JPH0565923B2 JP13144284A JP13144284A JPH0565923B2 JP H0565923 B2 JPH0565923 B2 JP H0565923B2 JP 13144284 A JP13144284 A JP 13144284A JP 13144284 A JP13144284 A JP 13144284A JP H0565923 B2 JPH0565923 B2 JP H0565923B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- main
- substrate
- head
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 34
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 230000005284 excitation Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 11
- 239000012212 insulator Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 description 12
- 239000002131 composite material Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 229910000859 α-Fe Inorganic materials 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229910018605 Ni—Zn Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910020641 Co Zr Inorganic materials 0.000 description 1
- 229910020521 Co—Zn Inorganic materials 0.000 description 1
- 229910020520 Co—Zr Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はフロツピイデイスク装置等に用いられ
る垂直磁気記録用ヘツドの製造方法に係り、特に
記録・再生効率の良い垂直磁気記録用ヘツドの量
産性の向上を図つた製造方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a perpendicular magnetic recording head used in a floppy disk device, etc., and in particular to a method for manufacturing a perpendicular magnetic recording head with high recording and reproducing efficiency. This invention relates to a manufacturing method aimed at improving mass productivity.
近年、フロツピイデイスク装置、或いは磁気デ
イスク装置等においては、従来から用いられてい
る水平磁気記録方式よりも更に高密度な記録・再
生が可能な垂直磁気記録方式の開発が盛んに進め
られている。かかる垂直磁気記録用の磁気ヘツド
としては小型化、高精度化の傾向にあり、薄膜技
術による一括生産方式によつて特性の均一を図つ
た種々のタイプのものが提案されているが、更に
量産性、低価格化が要望されている。 In recent years, in floppy disk devices, magnetic disk devices, etc., the development of perpendicular magnetic recording methods, which enable even higher density recording and reproduction than the conventionally used horizontal magnetic recording methods, has been actively promoted. There is. Magnetic heads for perpendicular magnetic recording are trending toward smaller size and higher precision, and various types of magnetic heads with uniform characteristics have been proposed using a batch production method using thin-film technology, but mass production is even more difficult. There are demands for improved performance and lower prices.
上記した従来の垂直磁気記録用磁気ヘツドの製
造方法としては、先ず第６図に示すように、例え
ばZnフエライト、又はセラミツク等からなる長
方形の非磁性基板２上に、図示のようにＵ字溝４
が切削形成されたMn−Znフエライト、又はNi−
Znフエライト等からなる磁性基板３をガラス接
着材５により固着して複合基板１を形成する。
As shown in FIG. 6, the method for manufacturing the above-mentioned conventional magnetic head for perpendicular magnetic recording is as follows: First, as shown in FIG. 4
Mn-Zn ferrite formed by cutting, or Ni-
A composite substrate 1 is formed by fixing a magnetic substrate 3 made of Zn ferrite or the like with a glass adhesive 5.
次に該複合基板１の一側面を平面研磨仕上げし
た後、該側面上にスパツタリング法及びフオトリ
ソグラフイ工程によつてNi−Fe、又はCo−Zr等
の軟磁性薄膜からなる主磁極６を図示のように両
基板２，３面に跨るように形成する。 Next, after polishing one side of the composite substrate 1, a main pole 6 made of a soft magnetic thin film such as Ni-Fe or Co-Zr is illustrated on the side by sputtering and photolithography. It is formed so as to span both substrates 2 and 3 as shown in FIG.
次に主磁極６が形成された複合基板１と、該複
合基板１と同形状で、かつ主磁極６が形成されて
いない別に用意された複合基板７とを、前記主磁
極６を挟み込む形にエポキシ樹脂系接着剤８等に
より接合し、かかる接合ブロツク９を第７図に示
すように、切断線Ａに沿つてカツテイングマシン
などにより主磁極６単位に切断する。 Next, the composite substrate 1 with the main magnetic pole 6 formed thereon and a separately prepared composite substrate 7 having the same shape as the composite substrate 1 but without the main magnetic pole 6 formed thereon are placed in such a manner that the main magnetic pole 6 is sandwiched therebetween. They are bonded using an epoxy resin adhesive 8 or the like, and the bonded block 9 is cut into 6 units of main poles along cutting line A using a cutting machine or the like, as shown in FIG.
しかる後、該切断ブロツク９ａの非磁性基板２
面をラツピングして主磁極６の一端を露出せし
め、更に前記２つのＵ字溝４を利用して励磁コイ
ル１０を捲着して、第８図に示すように主磁極６
の先端部でのヘツド磁界分布が急峻な記録・再生
効率の高い垂直磁気記録用磁気ヘツドを得るよう
にしている。 After that, the non-magnetic substrate 2 of the cutting block 9a is
The surface is wrapped to expose one end of the main magnetic pole 6, and the excitation coil 10 is wrapped around the two U-shaped grooves 4 to form the main magnetic pole 6 as shown in FIG.
To obtain a magnetic head for perpendicular magnetic recording which has a steep magnetic field distribution at the tip of the head and has high recording and reproducing efficiency.
ところで上記した従来の製造方法においては、
一度に比較的多数の磁気ヘツドを得ることを可能
にしているが、しかし前記接合ブロツクの長さ方
向に複数の単位ヘツドを一列に同時に形成し、そ
の後各単位ヘツドに切断分離する方法がとられて
いるため生産性が低く、更に量産性の向上が要望
されている。又励磁コイルの取り付けが容易でな
く、生産性が阻害される欠点も有していた。
By the way, in the conventional manufacturing method mentioned above,
Although it is possible to obtain a relatively large number of magnetic heads at once, a method is used in which a plurality of unit heads are simultaneously formed in a line along the length of the junction block, and then each unit head is cut and separated. As a result, productivity is low, and further improvement in mass productivity is desired. Furthermore, it is not easy to attach the excitation coil, which hinders productivity.
本発明は上記従来の実情に鑑み、非磁性基板と
磁性基板とからなる複合基板に単位ヘツド部を
縦、横列に同時に多数形成した後、該ヘツド構成
複合基板を各単位ヘツドに切断分離することによ
つて、一度に多数の垂直磁気記録用ヘツドを得る
ことができる生産性の良い新規な製造方法を提供
することを目的とするものである。 In view of the above-mentioned conventional situation, the present invention involves simultaneously forming a large number of unit head portions in vertical and horizontal rows on a composite substrate consisting of a non-magnetic substrate and a magnetic substrate, and then cutting and separating the head-constituting composite substrate into each unit head. It is an object of the present invention to provide a novel manufacturing method with high productivity that allows a large number of perpendicular magnetic recording heads to be obtained at one time.
上記した本発明の目的は、磁性基板の主表面に
互いに直交する所定間隔の複数本の溝を設けて、
その井桁状の溝により囲まれた複数の凸部を形成
し、該各凸部に励磁コイルを外設した後、該磁性
基板の主表面上に、主磁極が非磁性絶縁体により
垂直に被包一体とした主磁極構成体をその主磁極
の下端部が前記磁性基板の凸部と磁気的に接続す
るように固着する本発明の垂直磁気記録用ヘツド
の製造方法によつて達成される。
The object of the present invention described above is to provide a plurality of grooves at predetermined intervals perpendicular to each other on the main surface of a magnetic substrate,
After forming a plurality of convex portions surrounded by the cross-shaped grooves and externally disposing an excitation coil in each of the convex portions, the main magnetic pole is vertically covered with a non-magnetic insulator on the main surface of the magnetic substrate. This is achieved by the method of manufacturing a perpendicular magnetic recording head of the present invention, in which an integral main pole structure is fixed so that the lower end of the main pole is magnetically connected to the convex portion of the magnetic substrate.
即ち、本発明においては磁性基板の主表面に互
いに直交する複数本の溝を設けることにより、井
桁状の溝によつて囲まれた凸部を縦、横列に同時
に多数個形成する。次に該各凸部にそれぞれ励磁
コイルを容易に配設すると共に、かかる磁性基板
上に、多数の主磁極を非磁性絶縁体により垂直に
被包一体とした主磁極構成体を、その各主磁極の
下端部が対応する前記磁性基板の凸部と磁気的に
接続するように固着する。
That is, in the present invention, by providing a plurality of mutually perpendicular grooves on the main surface of the magnetic substrate, a large number of convex portions surrounded by cross-shaped grooves are simultaneously formed in vertical and horizontal rows. Next, excitation coils are easily disposed in each of the convex portions, and a main magnetic pole structure in which a large number of main magnetic poles are integrally covered vertically with a non-magnetic insulator is formed on the magnetic substrate. The lower ends of the magnetic poles are fixed so as to be magnetically connected to the corresponding convex portions of the magnetic substrate.
しかる後、上記励磁コイル付き磁性基板と主磁
極構成体とからなるヘツド構成ブロツク体を各単
位ヘツドに切断・分離することによつて、励磁コ
イルが磁性体により囲まれて磁気記録・再生効率
が高められた垂直磁気記録用ヘツドを同時に従来
よりも更に多数個製造することが可能となり、生
産性を向上することができる。 Thereafter, by cutting and separating the head component block consisting of the magnetic substrate with the excitation coil and the main pole structure into each unit head, the excitation coil is surrounded by the magnetic material and the magnetic recording/reproducing efficiency is improved. It becomes possible to simultaneously manufacture a larger number of perpendicular magnetic recording heads than ever before, and productivity can be improved.
以下図面を用いて本発明の製造方法の実施例に
ついて詳細に説明する。
Embodiments of the manufacturing method of the present invention will be described in detail below with reference to the drawings.
第１図乃至第４図は本発明に係る垂直磁気記録
用ヘツドの製造方法の一実施例を工程順に示す概
略斜視図、第５図は本発明に係る垂直磁気記録用
ヘツドの完成要部断面図である。 1 to 4 are schematic perspective views illustrating an embodiment of a method for manufacturing a perpendicular magnetic recording head according to the present invention in the order of steps, and FIG. 5 is a cross-sectional view of a completed main part of the perpendicular magnetic recording head according to the present invention. It is a diagram.
先ず第１図に示すように、例えばNi−Znフエ
ライト、又はNi−Znフエライト等からなる磁性
基板２１の主表面に互いに直交する複数本の溝２
２を、切削加工により形成し、井桁状の切削溝２
２によつて囲まれた凸部２３を縦、横列に同時に
多数個形成する。 First, as shown in FIG. 1, a plurality of grooves 2 perpendicular to each other are formed on the main surface of a magnetic substrate 21 made of, for example, Ni-Zn ferrite or Ni-Zn ferrite.
2 is formed by cutting, and a cross-shaped cutting groove 2 is formed.
A large number of convex portions 23 surrounded by 2 are simultaneously formed in vertical and horizontal rows.
次に該各凸部２３にそれぞれ例えばコイル巻線
を30回程度捲着して励磁コイル２４を配設する。 Next, an excitation coil 24 is arranged around each convex portion 23 by winding a coil winding, for example, about 30 times.
尚、励磁コイル２４としては、既に所定リング
形状に巻装された励磁コイルを用意しておき、か
かる励磁コイルを前記磁性基板２１の各凸部２３
にそれぞれ嵌合して配設するようにしてもよい。 As the excitation coil 24, an excitation coil already wound in a predetermined ring shape is prepared, and the excitation coil is connected to each convex portion 23 of the magnetic substrate 21.
They may be disposed so that they fit into each other.
一方、第２図に示すように例えばアルミナ・チ
タンカーバイト（Al2O3・TiC）、或いはZnフエ
ライト等からなる非磁性絶縁基板２６の所定側面
から上面にかけて複数のCo−Zn、又はNi−Feか
らなる主磁極２７がスパツタリング法及びフオト
リソグラフイ工程等によつて形成された主磁極構
成基板２５を複数個用意し、各主磁極構成基板２
５をそれぞれ主磁極２７を挟み込む形にエポキシ
樹脂系接着剤等により固着して第３図に示す主磁
極構成体２８を形成する。 On the other hand, as shown in FIG . 2, a plurality of Co-Zn or Ni- A plurality of main pole constituent substrates 25 on which a main pole 27 made of Fe is formed by a sputtering method, a photolithography process, etc. are prepared, and each main pole constituent substrate 2
5 are fixed with an epoxy resin adhesive or the like so as to sandwich the main magnetic pole 27, thereby forming a main magnetic pole structure 28 shown in FIG.
次に第４図に示すように前記励磁コイル付き磁
性基板２１上に、上記主磁極構成体２８を、その
各主磁極２７の下端部が対応する前記磁性基板２
１の各凸部２７と磁気的に接続するように位置合
わせを行つてエポキシ樹脂系接着剤等により固着
する。この時、前記磁性基板２１の各切削溝２２
内もエポキシ樹脂系接着剤３１等によつて埋めて
しまう。 Next, as shown in FIG. 4, the main magnetic pole structure 28 is placed on the magnetic substrate 21 with the excitation coil, so that the lower end of each main magnetic pole 27 corresponds to the magnetic substrate 21.
It is aligned so as to be magnetically connected to each convex portion 27 of No. 1, and fixed with an epoxy resin adhesive or the like. At this time, each cutting groove 22 of the magnetic substrate 21
The inside is also filled with epoxy resin adhesive 31 or the like.
しかる後、上記した励磁コイル付き磁性基板２
１と主磁極構成体２８とからなるヘツド構成ブロ
ツク体２９を、カツテイングマシンなどによつて
各切断線Ａに沿つて各単位ヘツドに切断・分離
し、該各単位ヘツドの非磁性絶縁基板２６面をラ
ツピングして主磁極６の一端を露出せしめること
により、第５図の要部断面図に示すように励磁コ
イル２４が磁性体により囲まれて磁気記録・再生
効率が高められた垂直磁気記録用ヘツド３０を、
容易に従来よりも更に多数個、同時に製造するこ
とが可能となる。 After that, the above-mentioned magnetic substrate with excitation coil 2
1 and the main magnetic pole structure 28 is cut and separated into unit heads along each cutting line A using a cutting machine or the like, and the non-magnetic insulating substrate 26 of each unit head is cut and separated. By lapping the surface and exposing one end of the main magnetic pole 6, the excitation coil 24 is surrounded by a magnetic material as shown in the cross-sectional view of the main part in FIG. 5, and the magnetic recording/reproducing efficiency is improved. The head 30 for
It becomes possible to easily manufacture a larger number of products at the same time than in the past.
以上の説明から明らかなように、本発明に係る
垂直磁気記録用ヘツドの製造方法によれば、励磁
コイルが磁性体により囲まれた構成の磁気記録・
再生効率の高い垂直磁気記録用ヘツドを、従来よ
りも生産性良く製造することが可能となる。又、
生産性の向上により製造コストが低減される利点
を有する等、この種の磁気ヘツドの製造に適用し
て極めて有利である。
As is clear from the above description, according to the method of manufacturing a perpendicular magnetic recording head according to the present invention, a magnetic recording head in which the excitation coil is surrounded by a magnetic material,
It becomes possible to manufacture a perpendicular magnetic recording head with high reproduction efficiency with higher productivity than before. or,
It is extremely advantageous when applied to the manufacture of this type of magnetic head, as it has the advantage of reducing manufacturing costs due to improved productivity.
第１図乃至第４図は本発明に係る垂直磁気記録
用ヘツドの製造方法の一実施例を工程順に示す概
略斜視図、第５図は本発明に係る垂直磁気記録用
ヘツドの完成要部断面図、第６図乃至第８図は従
来の垂直磁気記録用ヘツドの製造方法を工程順に
説明するための概略斜視図である。
図中、２１は磁性基板、２２は切削溝、２３は
凸部、２４は励磁コイル、２５は主磁極構成基
板、２６は非磁性絶縁基板、２７は主磁極、２８
は主磁極構成体、２９はヘツド構成ブロツク、３
０は垂直磁気記録用ヘツド、３１はエポキシ樹脂
系接着剤をそれぞれ示す。
1 to 4 are schematic perspective views illustrating an embodiment of a method for manufacturing a perpendicular magnetic recording head according to the present invention in the order of steps, and FIG. 5 is a cross-sectional view of a completed main part of the perpendicular magnetic recording head according to the present invention. 6 to 8 are schematic perspective views for explaining a conventional method of manufacturing a perpendicular magnetic recording head in the order of steps. In the figure, 21 is a magnetic substrate, 22 is a cutting groove, 23 is a convex portion, 24 is an exciting coil, 25 is a main magnetic pole constituent substrate, 26 is a non-magnetic insulating substrate, 27 is a main magnetic pole, 28
29 is the main pole structure, 29 is the head structure block, 3
0 indicates a perpendicular magnetic recording head, and 31 indicates an epoxy resin adhesive.
Claims (1)
の複数本の溝を設けて、その井桁状の溝により囲
まれた複数の凸部を形成し、該各凸部に励磁コイ
ルを外設した後、該磁性基板の主表面上に、主磁
極が非磁性絶縁体により垂直に被包一体とした主
磁極構成体をその主磁極の下端部が前記磁性基板
の凸部と磁気的に接続するように固着したことを
特徴とする垂直磁気記録用ヘツドの製造方法。1. After providing a plurality of grooves at predetermined intervals perpendicular to each other on the main surface of a magnetic substrate, forming a plurality of convex portions surrounded by the cross-shaped grooves, and externally installing an excitation coil in each of the convex portions. , on the main surface of the magnetic substrate, a main magnetic pole structure is formed in which the main magnetic pole is vertically covered with a non-magnetic insulator, and the lower end of the main magnetic pole is magnetically connected to the convex portion of the magnetic substrate. 1. A method for manufacturing a perpendicular magnetic recording head, characterized in that the head is fixed to the perpendicular magnetic recording head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13144284A JPS619813A (en) | 1984-06-25 | 1984-06-25 | Production for vertical magnetic recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13144284A JPS619813A (en) | 1984-06-25 | 1984-06-25 | Production for vertical magnetic recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS619813A JPS619813A (en) | 1986-01-17 |
| JPH0565923B2 true JPH0565923B2 (en) | 1993-09-20 |
Family
ID=15058053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13144284A Granted JPS619813A (en) | 1984-06-25 | 1984-06-25 | Production for vertical magnetic recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS619813A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222007A (en) * | 1985-03-27 | 1986-10-02 | Akai Electric Co Ltd | Magnetic head for vertical recording |
| JPS6236707A (en) * | 1985-08-09 | 1987-02-17 | Akai Electric Co Ltd | Vertical recording and reproducing magnetic head |
| FR2605784B1 (en) * | 1986-10-28 | 1989-04-28 | Europ Composants Electron | METHOD FOR PRODUCING A PLANAR MAGNETIC MEDIUM FOR MAGNETIC READING AND RECORDING HEADS AND MEDIA OBTAINED BY THIS METHOD |
| EP0689707A4 (en) * | 1993-03-16 | 1996-05-29 | Shyam C Das | Mig and thin film hybrid read/write head |
-
1984
- 1984-06-25 JP JP13144284A patent/JPS619813A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS619813A (en) | 1986-01-17 |
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