JP2791514B2 - Method for manufacturing substrate for magnetic head and thin film coil - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a substrate for a thin film coil mounted on a magnetic head and a method of manufacturing a thin film coil using the substrate.

[0002]

2. Description of the Related Art In a conventional magnetic head, as shown in FIGS. 10 to 12, a magnetic head 3 is provided on a slider 2 on which a rail 1 is formed. As shown in FIGS. 11 and 12, the magnetic head 3 includes an I-shaped core 4 and a U-shaped core 5, and either the I-shaped core 4 or the U-shaped core 5 (in FIG. 11, the I-shaped core 4). ) Is wound with a coil 6 covered with insulation. A very small gap 7 is provided between the I-shaped core 4 and the U-shaped core 5, and a magnetic circuit 8 is formed between the I-shaped core 4 and the U-shaped core 5. It has become.

[0003]

SUMMARY OF THE INVENTION Magnetic recording tends to have a higher density. Therefore, in order to cope with this increase in magnetic recording density, the magnetic head must also be reduced in size and weight. However, the conventional magnetic head has the following problems in reducing the size and weight of the magnetic head.

That is, in the conventional magnetic head, an insulated coil is wound around an I-shaped or U-shaped core.
In order to reduce the size and weight of the magnetic head, an extremely thin coil must be used. For this reason, there is a problem that in the coil winding step, the coil is disconnected or the insulating coating is peeled off, resulting in a defective product and a reduction in yield.

When the size of the magnetic head is reduced,
Since the mold core and the U-shaped core are also small, the automatic winding is performed without breaking the thinned coil on the small I-shaped core or the U-shaped core and without causing the insulation coating to peel off. It will be difficult to do. For this reason, there is a problem that it is difficult to automate the production of the magnetic head, and it is necessary to rely on manual winding, thereby lowering productivity.

[0006] For these reasons, there is a limit to the thinning of the coil and the limit of the yield due to the disconnection of the coil and the peeling of the insulating coating, and to the limit from the automatic productivity due to the downsizing of the I-shaped core and the U-shaped core. There is a limit in reducing the size and weight of the magnetic head, and it is not possible to sufficiently cope with high density magnetic recording.

On the other hand, when the size of the magnetic head is reduced,
Since the mold core and the U-shaped core also become smaller, the cross-sectional area of the magnetic circuit becomes smaller with this miniaturization. Therefore, there is a problem inherent to the magnetic head that the magnetic resistance increases and induces a decrease in recording and reproducing characteristics. As described above, there is a technically difficult problem in reducing the size of the magnetic head. In addition, a balanced winding of the coil is ideal to cancel out external noise. However, when the magnetic head is downsized, there is a problem that it is difficult to perform a balanced winding of the coil due to space and the like.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and improves the yield and productivity, reduces the magnetic reluctance, enables balanced winding of the coil, and maintains the characteristics of the magnetic head. An object of the present invention is to provide a method of manufacturing a thin-film coil substrate for manufacturing a magnetic head which is small and lightweight and which is compatible with high-density recording of a magnetic head, and a method of manufacturing a thin-film coil using this substrate.

[0009]

A first means for solving the above-mentioned problem is to provide a plurality of grooves of a predetermined width and depth at equal intervals on the surface of a substrate material made of a magnetic material. The non-magnetic material is melted and filled into the groove and solidified, and then the back surface of the substrate material is ground by grinding the surface of the substrate material on the side where the groove is provided and the non-magnetic material that has been melt-solidified in the groove is exposed. Characterized in that both sides are mirror-finished

The second means is to provide a plurality of grooves of a predetermined width and depth at regular intervals on the surface of a substrate material made of a magnetic material,
Next, a non-magnetic material is melted into the groove to fill and solidify, and then the surface of the substrate material on the side provided with the groove is processed into a mirror surface, and a thin film conductor coil is formed on the magnetic material on both sides of the non-magnetic material. Then, the back surface of the substrate material is ground and mirror-finished until the non-magnetic material melted and solidified in the groove is exposed, and then the substrate is cut for each of the thin film conductor coils.

The third means is to provide a plurality of grooves of a predetermined width and depth at regular intervals on the surface of a substrate material made of a magnetic material,
Next, a non-magnetic material is melted and filled into the groove to be solidified. Thereafter, the surface of the substrate material on which the groove is provided is processed into a mirror surface, and then a dummy member is bonded to the mirror surface so that the back surface of the substrate material is removed. The substrate was cut for each thin film conductor coil after grinding and mirror finishing until the non-magnetic material melted and solidified in the groove was exposed, forming a thin film conductor coil on the magnetic material on both sides of the nonmagnetic material. It is characterized by the following.

[0012]

According to the present invention, a plurality of grooves having a predetermined width and depth are provided at regular intervals on the surface of a substrate material made of a magnetic material, and then a non-magnetic material is melted in the grooves. After filling and solidifying, the front surface of the substrate material on the side where the groove is provided and the back surface of the substrate material are ground and mirror-finished until the glass material melted and solidified is exposed in the groove, thereby forming a gap between the magnetic material and the magnetic material. A substrate for producing a thin film coil for a magnetic head with a non-magnetic material interposed therebetween is obtained. Since a substrate having a non-magnetic material sandwiched between the magnetic material and the magnetic material has high dimensional accuracy, it is possible to produce a thin-film coil using the substrate on an automatic production line.

Next, in the manufacture of the thin-film magnetic coil, a plurality of grooves having a predetermined width and depth are provided at equal intervals on the surface of a substrate material made of a magnetic material, and then a non-magnetic material is melted in the grooves. After filling and solidifying, the surface of the substrate material on the side provided with the groove is processed into a mirror surface, and a thin-film conductor coil is formed on the mirror surface by a known technology on an automatic production line on the magnetic material on both sides across the non-magnetic material I do. Next, the back surface of the substrate material is automatically ground and mirror-finished until the non-magnetic material melted and solidified in the groove is exposed, and then the substrate is cut mechanically for each of the thin film conductor coils. Be mass produced. When the thin-film magnetic coil is wound in a balanced manner, a thin-film coil wound in a balanced manner is mass-produced.

Further, in the manufacture of another thin-film magnetic coil, a plurality of grooves having a predetermined width and a predetermined depth are provided at equal intervals on the surface of a substrate material made of a magnetic material, and then a non-magnetic material is melted in the grooves. After filling and solidifying, the surface of the substrate material provided with the groove is processed into a mirror surface, and then a dummy member is adhered to the mirror surface to reinforce the substrate material and the back surface of the substrate material is melted and solidified in the groove. The non-magnetic material is ground and mirror-finished until the non-magnetic material is exposed, and a substrate having a non-magnetic material sandwiched between magnetic materials having high dimensional accuracy is created. A thin film magnetic coil is mass-produced by forming a thin film conductor coil on the mirror surface of the magnetic material on both sides of the nonmagnetic material by a known technique on an automatic production line, and then mechanically cutting the thin film conductor coil by unit. Is done. Also,
By making the thin-film conductor coil a balanced winding,
Mass production of thin film coils wound in balance.

[0015]

An embodiment of the present invention will be described below with reference to the drawings. Further, a glass material will be described as an example of the non-magnetic material. In FIG. 1, grooves 10 having a predetermined width and depth are formed at regular intervals on the surface of a substrate material 9 made of a magnetic material in a first step (a). Next, in the second step (b), the glass material 11 which is a nonmagnetic material is melted and filled and solidified in the groove. The substrate material 9 thus filled and solidified with the glass material 11
Then, the surface is processed into a mirror surface 12 in a third step (c). Next, in the fourth step (d), the back surface 13 of the substrate material 9 on which the mirror surface 12 has been processed is ground and mirror-finished, thereby obtaining the substrate 14.
Is completed. This substrate 14 is made of a magnetic material as shown in FIG.
In order to form a thin-film conductor coil for a magnetic head having a magnetic material 15 on both sides of the glass material 16 which is a non-magnetic material and integrated with the glass material 16 which is a non-magnetic material, The substrate 14 is completed. This board 14
In the first step, the groove 10 is accurately machined by machining, and the molten glass material 11 is filled into the groove 10 and solidified, so that the magnetic material 15 and the non-magnetic glass material of the completed substrate 14 are The 16 arrangements are regular and have high dimensional accuracy.
This facilitates the formation of the thin-film conductor coil on the substrate 14, enables automatic production, and enables mass production of thin-film magnetic coils for magnetic heads.

Next, a method of manufacturing a thin film coil will be described with reference to FIG. First, grooves 10 having a predetermined width and depth are formed at regular intervals on the surface of a substrate material 9 made of a magnetic material in a first step (a). Next, in the second step (b), the glass material 11 which is a nonmagnetic material is melted and filled and solidified in the groove.
The surface of the substrate material 9 filled and solidified with the glass material 11 is then processed into a mirror surface 12 in a third step (c). Next, in a fourth step (d), the substrate material 9 on both sides of the non-magnetic glass material 11 exposed on the mirror surface 12 is sandwiched.
The thin film conductor coil 17 is formed on the surface by an automatic production line by a known technique. As a result, there is no disconnection of the thin film conductor coil 17 and there is no peeling of the insulating film as in the conventional case, so that the yield is improved and the highly reliable thin film conductor coil 17 is formed.

As shown in FIG. 6 exemplifying the case of balanced winding, a large number of thin film conductor coils 17 are formed in a regular arrangement on the magnetic material 9 located on both sides of the glass material 11. The reason why a large number of sets of the thin film conductor coils 17 are regularly formed is that the magnetic material 9 has high dimensional accuracy, and this thin film conductor coil 17 can be formed by an automatic production line. It is possible. Thereby, productivity is improved.

As described above, the thin film conductor coil is
After forming 17, the back surface 13 of the substrate material 9 is ground and mirror-finished until the glass material 11 filled and solidified in the groove 10 in the fifth step (e) is exposed, so that the substrate 15 has a thin-film conductor coil. 17 will be mounted. Next, in a sixth step (f), the substrate 15 is cut by the cutting section 19 for each thin film conductor coil 17. The grinding of the back surface 13 of the substrate material 9 is machined, and the cutting at the cutting portion 19 can be cut at once by a machine because the thin-film conductor coils 17 are regularly arranged. Mass production becomes possible.

Thus, the thin film coil 20 as shown in FIG.
Is manufactured. The thin-film coil 20 will be described in detail. In the example of FIG. 7, a thin-film conductor coil is formed in two layers, and a magnetic material 15 is integrated on both sides of a glass material 16 which is a non-magnetic material. After forming a first insulating film on the surface of the substrate 14, a first thin-film conductor coil 17A is formed, and then a second insulating film is formed on the first thin-film conductor coil 17A to form a second thin-film conductor coil 17B. Form. Further, an insulating film is formed on the thin film conductor coil 17B. By providing a through hole in the insulating film and forming the thin-film magnetic core 18, the two cores 21 and 22 of the thin-film magnetic core 18 are formed.
The thin film coil 20 is formed with the thin film conductor coil 17 wound therearound. The formation of the thin-film coil 20 can also be performed on an automatic production line by a known technique, so that mass production by automation is possible. 23 is an insulating material.

Next, another method of manufacturing the thin film coil will be described. In FIG. 4, first, grooves 10 having a predetermined width and depth are formed at regular intervals on the surface of a substrate material 9 made of a magnetic material in a first step (a). Next, in the second step (b), the glass material 11 which is a nonmagnetic material is melted and filled and solidified in the groove. The substrate material 9 thus filled and solidified with the glass material 11
Then, the surface is processed into a mirror surface 12 in a third step (c). Next, in a fourth step (d), Dami-24 is bonded to the mirror surface 12. By bonding the dummy 24 in this manner, the substrate material 9 is reinforced, and the handling in the grinding process in the next step is facilitated, and the workability for automation is improved. That is, the substrate material 9 is set on a machine tool such as a grinding machine using the dummy 24 bonded to the mirror surface 12, and the back surface 13 of the substrate material 9 is ground until the glass 11 filled and solidified in the groove 10 is exposed. And finish it to a mirror surface.

Next, in a fifth step (e), the dummy 24 is peeled off to obtain the substrate 14. In a sixth step (f), a thin-film conductor coil 17 is formed on the surfaces of the magnetic material 15 on both sides of the non-magnetic glass material 16 exposed on the mirror surface 12 of the substrate 14 by a known technique. I do. As shown in FIG. 6, many thin film conductor coils 17 are formed in a regular arrangement on the magnetic material 9 located on both sides of the glass material 11 therebetween.
Next, in the seventh step (g), the substrate 15
Is cut by the cutting unit 19. As a result, the thin film coil 20 as shown in FIG. 7, which has been described in detail, is manufactured.
Also in this manufacturing method, as described in the manufacturing method of FIG. 3, production on an automatic production line is possible, and the yield is improved to obtain a highly reliable thin film coil 20.

Next, the embodiment shown in FIG. 5 is different from the embodiment shown in FIG. 4 in that the state in which the dummy 24 is adhered to the substrate 14 is maintained even after the fifth step (e). That is the point. That is, in the fifth step (e), Dami-24
Is obtained. Then, in the sixth step (f), the non-magnetic glass material 16 exposed on the mirror surface 12 of the substrate 14
The thin film conductor coil is placed on the surface of the magnetic body 15 on both sides
17 is formed by a known technique. As shown in FIG. 6, many thin film conductor coils 17 are formed in a regular arrangement on the magnetic material 9 located on both sides of the glass material 11 therebetween. Next, in the seventh step (g), the substrate 15 and the dummy 24 are cut by the cutting portion 19 for each thin film conductor coil 17 and then the dummy 15 is cut.
Peel 24. As a result, the thin film coil 20 as shown in FIG. 7, which has been described in detail, is manufactured. In the case of this embodiment as well, the production on the automatic production line is possible, and the yield is improved and the highly reliable thin film coil 20 is obtained, as described in the production method of FIG.

Next, the thin film coil manufactured as described above
Twenty usage modes will be described. In FIG. 8, a substrate 14 is formed by a magnetic material 15 integrated on both sides of a glass material 16 which is a non-magnetic material, and a thin-film conductor coil 17 is wound around a thin-film magnetic core 18 on the surface of the substrate 14. Thus, the thin film coil 20 is manufactured. This thin film coil
An I-type core in which magnetic bodies 25 and 26 are integrally joined by a glass material 27 is adhered to the back surface of the substrate 14 of 20. And this I
A U-shaped core 28 made of a magnetic material is bonded to the mold core. Reference numeral 30 denotes a small gap formed between the magnetic body 26 of the I-shaped core and the U-shaped core 28. By using the thin-film coil 20 in this manner, the magnetic path 29 is formed as shown by the arrow in FIG. Therefore, the magnetic body 25,
By increasing the cross-sectional area of the U-shaped core 26 and the U-shaped core 28, it is possible to reduce the magnetic resistance, and it is possible to improve the recording and reproducing characteristics, which are problems inherent to the magnetic head. Next, the thin film conductor coil 17 can be formed so as to be wound around the thin film magnetic core 18 having two cores,
Balanced winding of the coil becomes possible. As a result, external noise can be canceled. Further, as shown in FIG. 9, since the thin film coil 20 is adhered to the slider 2 having two rails 1, the size and weight of the magnetic head can be reduced.

In the above description, a glass material has been described as an example of the nonmagnetic material, but the present invention is not limited to this. In short, a non-magnetic material having adhesiveness, for example, a resin may be used.

[0025]

As described in detail above, according to the present invention, a plurality of grooves having a predetermined width and depth are provided at equal intervals on the surface of a substrate material made of a magnetic material, and a non-magnetic material is melted in the grooves. Filled and solidified, the back surface of the substrate material was ground until the non-magnetic material melted and solidified in the surface of the substrate material and the groove was exposed, and both surfaces of the substrate material were mirror-finished. Thus, it is possible to manufacture a substrate having high dimensional accuracy in which the magnetic material is integrated. By forming the thin film conductor coil on the surface of the substrate, the production of the thin film coil can be automated, and the yield can be improved and the thin film coil with high reliability can be mass-produced.

By using the thin-film coil manufactured as described above as a coil of a magnetic head, the magnetic resistance is greatly reduced, the recording and reproduction characteristics are improved, and the coil is balanced-wound to cancel external noise. can do. As described above, the characteristics of the magnetic head are maintained or improved, and the use of the thin-film coil is made possible. Therefore, the size and weight of the magnetic head can be reduced, and a magnetic head corresponding to a high density of magnetic recording can be obtained. be able to.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a manufacturing process of a first embodiment of the present invention.

FIG. 2 is a perspective view of a substrate manufactured in the manufacturing process of FIG.

FIG. 3 is a schematic view showing a manufacturing process of a second embodiment of the present invention.

FIG. 4 is a schematic view showing a manufacturing process of a third embodiment of the present invention.

FIG. 5 is a schematic view showing a manufacturing process according to a fourth embodiment of the present invention.

FIG. 6 is a plan view of the thin film conductor coil portion shown in FIGS. 3, 4 and 5;

FIG. 7 is a longitudinal sectional view of the thin-film conductor coil in FIG. 6;

FIG. 8 is a longitudinal sectional view showing one mode of use of the thin-film coil.

FIG. 9 is an overall perspective view of a magnetic head showing one mode of use of a thin-film coil.

FIG. 10 is a perspective view showing the whole of a conventional magnetic head.

11 is a side view showing a main part of the magnetic head of FIG. 10 in an enlarged manner.

FIG. 12 is a front view of FIG. 11;

[Description of sign]

 9 Substrate material 10 Groove 11 Non-magnetic material (glass material) 12 Mirror surface 14 Substrate 15 Magnetic material 16 Glass material 17 Thin-film conductor coil 18 Thin-film magnetic core 19 Cutting part 20 Thin-film coil 24 Dummy

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G11B 5/17 G11B 5/127 G11B 5/31

Claims (3)

(57) [Claims] 1. A plurality of grooves having a predetermined width and depth are provided at equal intervals on the surface of a substrate material made of a magnetic material, and then the non-magnetic material is melted and filled in the grooves, and then the grooves are formed. A method of manufacturing a substrate for a magnetic head, characterized in that the back surface of the substrate material is ground and both surfaces of the substrate material are mirror-finished until the non-magnetic material melted and solidified in the groove and the surface of the substrate material is exposed. . 2. A plurality of grooves having a predetermined width and depth are provided at regular intervals on the surface of a substrate material made of a magnetic material, and then the nonmagnetic material is melted and filled into the grooves, and then the grooves are formed. The surface of the substrate material on the other side is processed into a mirror surface, a thin film conductor coil is formed on the magnetic material on both sides of the nonmagnetic material, and then the nonmagnetic material obtained by melting and solidifying the back surface of the substrate material in the groove is formed. A method of manufacturing a thin film coil for a magnetic head, wherein the substrate is cut for each of the thin film conductor coils after grinding and mirror finishing until exposed. 3. A plurality of grooves having a predetermined width and depth are provided at equal intervals on the surface of a substrate material made of a magnetic material, and then the non-magnetic material is melted and filled and solidified in the grooves. The surface of the substrate material on the other side is mirror-finished, then a dummy member is adhered to the mirror surface, and the back surface of the substrate material is ground and mirror-finished until the non-magnetic material melted and solidified is exposed in the groove. A method of manufacturing a thin film coil for a magnetic head, comprising: forming a thin film conductor coil on magnetic materials on both sides of a non-magnetic material and cutting the substrate for each thin film conductor coil.