JPS60171612A - Multi-element thin film magnetic head - Google Patents

Multi-element thin film magnetic head

Info

Publication number
JPS60171612A
JPS60171612A JP2705484A JP2705484A JPS60171612A JP S60171612 A JPS60171612 A JP S60171612A JP 2705484 A JP2705484 A JP 2705484A JP 2705484 A JP2705484 A JP 2705484A JP S60171612 A JPS60171612 A JP S60171612A
Authority
JP
Japan
Prior art keywords
magnetic
thin film
thin films
substrate
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2705484A
Other languages
Japanese (ja)
Inventor
Masamichi Yamada
雅通 山田
Katsuo Konishi
小西 捷雄
Masakatsu Saito
斉藤 正勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2705484A priority Critical patent/JPS60171612A/en
Publication of JPS60171612A publication Critical patent/JPS60171612A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/3116Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3186Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes parallel to the gap plane, e.g. "vertical head structure"

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To reduce crosstalks of a multi-element thin film magnetic head and, at the same time, to manufacture the magnetic head through a simple process by forming the 1st and 2nd thin films of a magnetic substance on a non-magnetic substrate, then, the 3rd and 4th thin films of the magnetic substance on them in interposing a magnetic gap between them. CONSTITUTION:Holes 12a and 12b for windings are provided through a non-magnetic substrate 11 of ferrite, etc., and the 1st and 2nd thin films 13a and 13b of a magnetic substance, such as ''Sendust'', etc., are formed on the substrate 11. The substrate 11 is covered with a non-magnetic substance 14 and the 3rd and 4th thin films 17a and 17b of the magnetic substance are formed on the non-magnetic substance with magnetic gaps 15a and 15b between the non-magnetic substance 14 and thin films 17a and 17b. Then coils 18a and 18b are wound around them through the holes 12a and 12b. Since the thins films 13a and 17a and 13b and 17b of the magnetic substance having thicknesses of ten to serveral tens micrometer are used as the head core and core facing areas between adjacent magnetic head elements are small and, at the same time, the thin films of the magnetic substance are sufficiently separated trom each other, crosstalks can be minimized sufficiently. Moreover, since the number of the thin films used is small, this magnetic head can be manufactured through simple processes.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は多素子薄膜磁気ヘッドに係り、特にクロストー
クを低減するのに好適な構造の多素子薄膜磁気ヘッドに
関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a multi-element thin film magnetic head, and more particularly to a multi-element thin film magnetic head having a structure suitable for reducing crosstalk.

〔発明の背景〕[Background of the invention]

第1図は従来の多素子磁気ヘッドの斜視図である。第1
図において、1α、2αおよび1b、2bは、それぞれ
非磁性体よシなる磁気ギャップ6α、 3h全形成する
ように結合しである磁気へラドコア、4α、 4Aは巻
線窓、5α、 5bは巻線コイルで、磁気ヘッドコア1
α、2α、磁気ギャップ6α、巻線コイル5aからなる
磁気ヘッド素子と、磁気へラドコアjA、 2A、磁気
ギャップ3h、巻線コイル5bがらなる磁気ヘッド素子
とはトラック間隔!會離して隣接させ、多素子磁気ヘッ
ド全構成している。
FIG. 1 is a perspective view of a conventional multi-element magnetic head. 1st
In the figure, 1α, 2α and 1b, 2b are magnetic gaps 6α and 3h made of non-magnetic material, respectively. Magnetic helad cores are combined to form a complete magnetic gap, 4α and 4A are winding windows, and 5α and 5b are windings. Magnetic head core 1 with wire coil
A magnetic head element consisting of α, 2α, a magnetic gap 6α, and a winding coil 5a, and a magnetic head element consisting of a magnetic helad core jA, 2A, a magnetic gap 3h, and a winding coil 5b have a track spacing! The multi-element magnetic head is entirely configured by placing them adjacent to each other and separated from each other.

しかし、このような構成では、高密度記録をする場合、
隣接する各磁気ヘッド素子のコア対向面積が大きいこと
から、トラック間隔!が小さくなるにしたがってクロス
トークが増太し、記録再生特性の信頼性が損われるとい
う欠点がある。
However, with this configuration, when performing high-density recording,
Since the core facing area of each adjacent magnetic head element is large, the track spacing! There is a drawback that as the value becomes smaller, the crosstalk increases and the reliability of the recording and reproducing characteristics is impaired.

このようなりロストーク全低減した他の従来例として第
2図に示す構成の多素子薄膜磁気ヘッドがある。第2図
において、6は非磁性基板。
Another conventional example in which losstalk is completely reduced is a multi-element thin film magnetic head having the configuration shown in FIG. In FIG. 2, 6 is a non-magnetic substrate.

7a、 7bは下部磁性体、f3a、8hは磁気ギャッ
プ、9α、 9Aは上部磁性体、10α、10hは信号
コイルである。
7a and 7b are lower magnetic bodies, f3a and 8h are magnetic gaps, 9α and 9A are upper magnetic bodies, and 10α and 10h are signal coils.

しかし、第2図に示す構成の多素子薄膜磁気ヘッドでは
、磁性体7α、 7b、 9α、 9bとして薄膜音用
いているので、第1図に示したバルク材を用いた場合と
比較して隣接する各磁気ヘッド素子の磁気コア対向面積
が充分小さくなシ、クロストークの低減をはかることが
できるが、その反面、基板6上に下部磁性体7α、7b
1磁気ギャップ8α、8b1 上部磁性体9α、 9h
%信号コイル10α。
However, in the multi-element thin film magnetic head with the configuration shown in FIG. 2, thin film sound is used as the magnetic materials 7α, 7b, 9α, and 9b, so compared to the case where bulk materials are used as shown in FIG. If the area facing the magnetic core of each magnetic head element is sufficiently small, crosstalk can be reduced.
1 magnetic gap 8α, 8b1 upper magnetic body 9α, 9h
% signal coil 10α.

10A 全形成するのに、薄膜形成技術やフォットエッ
チング等によシ所定形状に順次積層しなければならす、
積層数の増大とともに製造プロセスが複雑困難となシ、
製造歩留りが低下するという問題がある。
10A To form the entire structure, it is necessary to sequentially stack layers in a predetermined shape using thin film formation technology, photo etching, etc.
As the number of laminated layers increases, the manufacturing process becomes more complex and difficult.
There is a problem that manufacturing yield is reduced.

〔発明の目的〕[Purpose of the invention]

本発明は上記に鑑みてなされたもので、その目的とする
ところは、クロストーク全低減することができ、しかも
、簡単な製造プロセスで製造することができる多素子薄
膜磁気ヘッド全提供することにある。
The present invention has been made in view of the above, and its purpose is to provide a multi-element thin film magnetic head that can completely reduce crosstalk and can be manufactured using a simple manufacturing process. be.

〔発明の概要] 本発明の特徴は、第1.第2の巻線穴を設けた非磁性基
板と、この非磁性基板上の上記第1と第2の巻線穴との
間に所定間隔離してそれぞれ形成した所定形状の第1.
第2の磁性体薄膜と、この第1.第2の磁性体薄膜上の
一部とそれぞれ磁気ギャップおよびリヤ接続部を通して
磁気回路全構成するそれぞれ上記第1.第2の巻線への
外側を通るように形成した第3.第4の磁性体薄膜と、
上記第1.第2の巻線大全利用してそれぞれ巻線したコ
イルとよシなる構成とした点にある。
[Summary of the Invention] The features of the present invention are as follows. A first winding hole of a predetermined shape is formed between a non-magnetic substrate having a second winding hole and the first and second winding holes on the non-magnetic substrate and spaced apart from each other by a predetermined distance.
a second magnetic thin film; The entire magnetic circuit is formed through a portion on the second magnetic thin film, a magnetic gap and a rear connection portion, respectively. The third winding was formed so as to pass through the outside to the second winding. a fourth magnetic thin film;
Above 1. The structure is different from that of a coil in which each coil is wound using the entire second winding.

[発明の実施例] 以下本発明を第3図、第4図に示した実施例を用いて詳
細に説明、する。
[Embodiments of the Invention] The present invention will be explained in detail below using the embodiments shown in FIGS. 3 and 4.

第3図は本発明の多素子薄膜磁気ヘッドの一実施例を示
す斜視図である。第3図において、11は巻線穴12α
、12hを設けた非磁性基板、13a。
FIG. 3 is a perspective view showing an embodiment of the multi-element thin film magnetic head of the present invention. In Fig. 3, 11 is the winding hole 12α
, 12h, a non-magnetic substrate 13a.

15Jは非磁性基板11の巻線穴12αと12bとの間
にトラック間隔!たけ離して積層した第1および第2の
磁性体薄膜、14は非磁性基板11上全平坦化するため
の非磁性体、17α、17bは、それぞれ第1および第
2の磁性体薄膜i5a 、13b上の一部と磁気ギャッ
プ154,15Aおよびリヤ接続部16a、16Ai通
して磁気回路を構成するそれぞれ巻線穴12α、12h
の外側全通っている第3および第4の磁性体薄膜、18
α、18bはそれぞれ巻線穴12α、12b’i通して
巻線したコイルである。
15J is the track spacing between the winding holes 12α and 12b of the nonmagnetic substrate 11! First and second magnetic thin films stacked apart, 14 is a nonmagnetic material for flattening the entire surface of the nonmagnetic substrate 11, 17α and 17b are first and second magnetic thin films i5a and 13b, respectively. The winding holes 12α, 12h constitute a magnetic circuit through the upper part, the magnetic gaps 154, 15A, and the rear connection parts 16a, 16Ai, respectively.
third and fourth magnetic thin films passing through the entire outside of the 18
α and 18b are coils wound through winding holes 12α and 12b'i, respectively.

以下、第6図の本発明に係る多素子薄膜磁気ヘッドの製
造法について説明する。非磁性基板11としては、フェ
ライト、セラミック、ガラス等を用い、巻線穴12a、
12A1に機械加工あるいはエツチングによって設ける
。なお、巻線穴12α。
Hereinafter, a method for manufacturing the multi-element thin film magnetic head according to the present invention shown in FIG. 6 will be explained. As the nonmagnetic substrate 11, ferrite, ceramic, glass, etc. are used, and the winding holes 12a,
12A1 by machining or etching. In addition, the winding hole 12α.

12hの形成は、最終製造プロセスで行ってもよいこと
はいうまでもない。また、基板11として感光性ガラス
(感度の程度でエツチングレートに差が生ずる)音用い
れは、より高精度のエツチングを行うことができる。次
に、基板11の上にセンダスト、アモルファス、パーマ
ロイ等ノ磁性体薄膜を形成し、エツチングあるいはリフ
トーク法によシ所定の形状にして第1シよび第2の磁性
体薄膜16α、15bf形成する。次に、基板11上の
磁性体薄膜16α、15b以外の部分にSiO,、A7
?03等の非磁性体14ヲ積層し、ラッピング等によシ
全表面全平坦化する。次に、その上に磁気ギヤツノ15
α、15hとなる非磁性体を所定膜厚に形成した後、そ
の上に第1.第2の磁性体薄膜16α、13bと同様の
材料からなる磁性体薄膜全積層し、第3図に示す所定形
状にエツチングして第3シよび第4の磁性体薄膜17α
It goes without saying that 12h may be formed in the final manufacturing process. Furthermore, if photosensitive glass (the etching rate varies depending on the degree of sensitivity) is used as the substrate 11, etching can be performed with higher precision. Next, a magnetic thin film of sendust, amorphous, permalloy, or the like is formed on the substrate 11, and the first and second magnetic thin films 16α and 15bf are formed into a predetermined shape by etching or lift-talking. Next, SiO, A7 is applied to the parts other than the magnetic thin films 16α and 15b on the substrate 11.
? A non-magnetic material 14 such as 03 is laminated, and the entire surface is flattened by lapping or the like. Next, put the magnetic gear horn 15 on top of it.
After forming a non-magnetic material having a predetermined thickness of α and 15h, the first .alpha. All the magnetic thin films made of the same material as the second magnetic thin films 16α and 13b are laminated and etched into the predetermined shape shown in FIG. 3 to form the third and fourth magnetic thin films 17α.
.

17hとする。最後に第3図には図示を省略しであるが
保護膜全形状した後コイル18α、18bi巻線する。
It will be 17 hours. Finally, although not shown in FIG. 3, after the entire protective film is formed, the coils 18α and 18bi are wound.

以上のようにして構成した本発明に係る多素子薄膜磁気
ヘッドにおいては、ベットコアとして膜厚10〜数10
ミクロンの磁性体薄膜13α、17αシよび15h、1
7A k用いであるので、隣接磁気ヘッド素子間のコア
対向面積が小さく、その上、磁気回路の一部を構成する
第3.第4の磁性体薄膜17α、176間が充分離間し
ているから、クロストークを充分に小さくすることがで
きる。
In the multi-element thin film magnetic head of the present invention constructed as described above, the bed core has a film thickness of 10 to several tens of
Micron magnetic thin films 13α, 17α and 15h, 1
7Ak is used, the core facing area between adjacent magnetic head elements is small, and in addition, the third. Since the fourth magnetic thin films 17α and 176 are sufficiently spaced apart, crosstalk can be sufficiently reduced.

また、従来の多素子薄膜磁気ヘッドと比較して積層する
薄膜の層数が少なく、製造プロセスを簡略化することが
できる。
Furthermore, compared to conventional multi-element thin film magnetic heads, the number of laminated thin film layers is smaller, and the manufacturing process can be simplified.

なお、第3図において、第1.第2の磁性体薄膜16α
、13hと第6.第4の磁性体薄膜17α。
In addition, in FIG. 3, 1. Second magnetic thin film 16α
, 13h and 6th. Fourth magnetic thin film 17α.

17Aとを上下が逆となる構成としてもよく、同一効果
を得ることができる。
17A may be configured upside down, and the same effect can be obtained.

また、第4図は本発明の他の実施例を示す非磁性基板の
斜視図で、第4図においては、非磁性基板11として感
光性ガラスを用い、基板11に巻線穴12α、12A)
−設けるとともに、磁性体薄膜埋込み用溝19α、19
Ai形成し、この基板11の上に磁性体薄膜を積層し、
その後ラッピングを施して溝19α、19h内以外の部
分の磁性体薄膜は完全に除去して平坦して第1および第
2の磁性体薄膜16α、13Aiそれぞれ所定形状に形
成しである。第4図によれば、第6図の平坦化のための
非磁性体14が不要となり、さらに製造プロセスを簡単
化することができる。
4 is a perspective view of a non-magnetic substrate showing another embodiment of the present invention. In FIG. 4, photosensitive glass is used as the non-magnetic substrate 11, and winding holes 12α, 12A) are formed in the substrate 11.
- In addition to providing grooves 19α and 19 for embedding magnetic thin films.
Ai is formed, a magnetic thin film is laminated on this substrate 11,
Thereafter, lapping is performed to completely remove and flatten the magnetic thin film in areas other than the grooves 19α and 19h, and form the first and second magnetic thin films 16α and 13Ai into predetermined shapes, respectively. According to FIG. 4, the non-magnetic material 14 for flattening shown in FIG. 6 is unnecessary, and the manufacturing process can be further simplified.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、クロストークを
低減することができ、しかも、簡単な製造プロセスで製
造することができるという効果がある。
As explained above, according to the present invention, crosstalk can be reduced, and furthermore, it is possible to manufacture with a simple manufacturing process.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の多素子磁気ヘッドの斜視図、第2図は従
来の多素子薄膜磁気ヘッドの斜視図、第6図は本発明の
多素子薄膜磁気ヘッドの一実施例を示す斜視図、第4図
は本発明の他の実施例を示す非磁性基板の斜視図である
。 11・・・非磁性基板 12α、12h・・・巻線穴1
3α、13h・・・第1.第2の磁性体薄膜14・・・
非磁性体 i5(!、15A・・・磁気ギャップ 16α、16h・・・リヤ接続部 17!、17b・・・第3.第4の磁性体薄膜18α、
18h・・・コイル 19α、19b・・・磁性体薄膜埋込み用溝代理人弁理
士 高 橋 明 夫 第1 図 第2図
FIG. 1 is a perspective view of a conventional multi-element magnetic head, FIG. 2 is a perspective view of a conventional multi-element thin film magnetic head, and FIG. 6 is a perspective view of an embodiment of the multi-element thin film magnetic head of the present invention. FIG. 4 is a perspective view of a nonmagnetic substrate showing another embodiment of the present invention. 11...Nonmagnetic board 12α, 12h...Winding hole 1
3α, 13h... 1st. Second magnetic thin film 14...
Non-magnetic material i5 (!, 15A...magnetic gap 16α, 16h...rear connection portion 17!, 17b...third and fourth magnetic thin films 18α,
18h...Coil 19α, 19b...Group for embedding magnetic thin film Akio Takahashi Patent attorney Figure 1 Figure 2

Claims (1)

【特許請求の範囲】 1、 第1.第2の巻線穴を設けた非磁性基板と、該非
磁性基板上の前記第1と第2の巻線穴との間に所定間隔
離してそれぞれ形成したトカ定形状の第1.第2の磁性
体薄膜と、該第1゜第2の磁性体薄膜上の一部とそれぞ
れ磁気ギャップおよびリヤ接続部全通して磁気回路を構
成するそれぞれ前記第1.第2の巻線穴の外i++n通
るように形成した第6.第4の磁性体薄膜と、前記第1
.第2の巻線大全利用してそれぞれ巻線したコイルとよ
りなることを特徴とする多素子薄膜磁気ヘッド。 2、前記第1.第2の磁性体薄膜は、それぞれ幅寸法が
トラック幅に一致させである特許請求の範囲第1項記載
の多素子薄映磁気ヘッド。。 3、前記非磁性基板は、感光性ガラスよりなる特許請求
の範囲第1項または第2項記載の多素子薄膜磁気ヘッド
。 4、前記第1.第2の磁性体薄膜は、前記非磁性基板上
面に形成した埋込み用溝内にそれぞれ積層して表面をラ
ッピングした構成としである特許請求の範囲第1項また
は第2項または第3項記載の多素子薄膜磁気ヘッド。
[Claims] 1. 1. A non-magnetic substrate provided with a second winding hole, and a first coil having a regular shape are formed spaced apart from each other by a predetermined distance between the first and second winding holes on the non-magnetic substrate. A second magnetic thin film, a part of the first magnetic thin film, and a portion of the second magnetic thin film pass through the magnetic gap and the rear connection portion, respectively, to form a magnetic circuit. The sixth wire was formed so as to pass i++n outside the second winding hole. a fourth magnetic thin film;
.. A multi-element thin film magnetic head comprising a coil each wound using a second winding. 2. Said 1. 2. The multi-element thin film magnetic head according to claim 1, wherein each of the second magnetic thin films has a width dimension that matches the track width. . 3. A multi-element thin film magnetic head according to claim 1 or 2, wherein the non-magnetic substrate is made of photosensitive glass. 4. Said 1. Claim 1, 2, or 3, wherein the second magnetic thin film is laminated in each embedding groove formed on the upper surface of the non-magnetic substrate and has a surface wrapped. Multi-element thin film magnetic head.
JP2705484A 1984-02-17 1984-02-17 Multi-element thin film magnetic head Pending JPS60171612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2705484A JPS60171612A (en) 1984-02-17 1984-02-17 Multi-element thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2705484A JPS60171612A (en) 1984-02-17 1984-02-17 Multi-element thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS60171612A true JPS60171612A (en) 1985-09-05

Family

ID=12210354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2705484A Pending JPS60171612A (en) 1984-02-17 1984-02-17 Multi-element thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS60171612A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62204420A (en) * 1986-03-03 1987-09-09 Fujitsu Ltd Production of thin-film magnetic head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62204420A (en) * 1986-03-03 1987-09-09 Fujitsu Ltd Production of thin-film magnetic head

Similar Documents

Publication Publication Date Title
JP3394266B2 (en) Method of manufacturing magnetic write / read head
JPS6412003B2 (en)
JPS60171612A (en) Multi-element thin film magnetic head
JPH0664709B2 (en) Thin film magnetic head
JPS60175208A (en) Thin film magnetic head
US5022140A (en) Method of manufacturing magnetic head
JPH0565923B2 (en)
JP2618860B2 (en) Magnetic head and method of manufacturing the same
JPS60177418A (en) Thin film head for vertical magnetic recording and reproduction and its production
JPS59132413A (en) Manufacture for magnetic head core
JPS5873011A (en) Thin film magnetic head
JPS61217921A (en) Thin film video head
JPS60171610A (en) Thin film magnetic head
JPH01277312A (en) Production of thin film magnetic head
JPH08102013A (en) Thin-film magnetic head and its production
JPH01224908A (en) Thin film magnetic head for perpendicular recording
JPS62252508A (en) Manufacture of thin film magnetic head
JPS60170014A (en) Multi-element thin film magnetic head and its production
JPH01159810A (en) Manufacture of magnetic head
JPS62107418A (en) Thin film magnetic head
JPH01158610A (en) Magnetic head
JPS62110612A (en) Thin film magnetic head
JPH06274826A (en) Composite type magnetic head and manufacture of it
JPH05342515A (en) Floating type magnetic head
JPS6352313A (en) Production of thin film magnetic head