JPH01159810A - Manufacture of magnetic head - Google Patents
Manufacture of magnetic headInfo
- Publication number
- JPH01159810A JPH01159810A JP31940287A JP31940287A JPH01159810A JP H01159810 A JPH01159810 A JP H01159810A JP 31940287 A JP31940287 A JP 31940287A JP 31940287 A JP31940287 A JP 31940287A JP H01159810 A JPH01159810 A JP H01159810A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- gap
- magnetic
- soft magnetic
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000010409 thin film Substances 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000004804 winding Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 17
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910018125 Al-Si Inorganic materials 0.000 claims 1
- 229910018520 Al—Si Inorganic materials 0.000 claims 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000000873 masking effect Effects 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910017112 Fe—C Inorganic materials 0.000 description 1
- 229910020018 Nb Zr Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はＶＴＲまたは、ディジタルオーディオ等の高密
度磁気記録再生装置に好適な磁気ヘッドの製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a magnetic head suitable for high-density magnetic recording and reproducing devices such as VTRs and digital audio devices.
従来の技術
従来、ＶＴＲ、ディジタルオーディオ等に用いられる磁
気ヘッドには、フェライトまたはセンダスト等のバルク
磁性材料が用いられてきた。この様な材料によるヘッド
の磁気ギャップの形成は、上述の材料にトラック加工、
巻線溝加工等の形状加工を施したコア半休対を貼合わせ
て形成される。2. Description of the Related Art Hitherto, bulk magnetic materials such as ferrite or sendust have been used in magnetic heads used in VTRs, digital audio, and the like. The magnetic gap of the head can be formed using such materials by machining tracks on the above-mentioned materials.
It is formed by bonding together a half-core pair that has been subjected to shape processing such as winding groove processing.
この為にはコア半休対のギャップ形成面を精度良く研磨
した後、所望の厚さのギャップ部材をスパッタ法等によ
り形成した後ガラス等を接着剤として加熱溶融して行な
われていた。またメタル磁性粉等の高保磁力媒体を用い
た記録再生系に於ては、磁気ギャップ付近に金属磁性薄
膜を形成して記録効率を高めた複合材料から成るヘッド
も用いられているが、製造法、形状等は従来のフェライ
トヘッドと本質的に異なるものではない。For this purpose, the gap-forming surfaces of the half-core pair are polished with high accuracy, a gap member of a desired thickness is formed by a sputtering method, and then glass or the like is used as an adhesive and then heated and melted. In addition, in recording and reproducing systems using high coercive force media such as metal magnetic powder, heads made of composite materials are also used that improve recording efficiency by forming a metal magnetic thin film near the magnetic gap, but the manufacturing method , shape, etc. are not essentially different from conventional ferrite heads.
近年、高密度磁気記録の進展にともなって極めて小さな
磁気ギャップ長の磁気ヘッドが求められるようになって
きた。例えば、ディジタルオーディオテープ（ＤＡＴ）
に於ては、０．３μｍ以下が求められている。従来の貼
合わせによるギャップ形成法では精度のよいギャップ長
を得るためには、ギャップ形成面の仕上精度は勿論のこ
と、ガラス等の異種材料との熱膨張差、加工による歪等
を原因とするコア半休の反りを小さくさせること等が必
要であり高度な研磨技術が要求される。しかしながらこ
の様な技術にも限界があり、これ以上の狭ギャップ長に
於ては、ギャップ長のばらつきのため求めるヘッド特性
が安定して得られず、その結果歩留りを低下させること
になる。In recent years, with the development of high-density magnetic recording, there has been a demand for magnetic heads with extremely small magnetic gap lengths. For example, digital audio tape (DAT)
In this case, a thickness of 0.3 μm or less is required. In the conventional gap forming method by bonding, in order to obtain a precise gap length, not only the finish accuracy of the gap forming surface is required, but also the difference in thermal expansion between different materials such as glass, distortion due to processing, etc. It is necessary to reduce the warpage of the core half-way, and a sophisticated polishing technique is required. However, there is a limit to this technique, and if the gap length is narrower than this, the desired head characteristics cannot be stably obtained due to variations in the gap length, resulting in a decrease in yield.
発明が解決しようとする問題点
高密度磁気記録用の磁気ヘッドに於ては狭ギャップ化、
狭トラツク化が不可欠である。狭ギャップ長、狭トラツ
ク幅のヘッドに対して上に述べた従来の構造、製造法に
よるヘッドでは、磁気ギャップの形成工程が最も保留り
を低下させる工程となっておりギャップ精度の保留りの
低さがコストを高くする大きな原因となっている。また
、１０μｍ以下のような狭トラツク幅のヘッドに対して
、従来の様なバルクの磁性体に機械加工でトラック幅を
規定することは精度の点で大きな問題となる。Problems to be solved by the invention In magnetic heads for high-density magnetic recording, narrowing of the gap,
Narrowing the track is essential. For heads with narrow gap lengths and narrow track widths, with the above-mentioned conventional structure and manufacturing method, the process of forming the magnetic gap is the process that reduces the retention the most, and the gap precision decreases. This is a major cause of high costs. Furthermore, for a head with a narrow track width of 10 .mu.m or less, defining the track width by machining a bulk magnetic material as in the conventional method poses a serious problem in terms of accuracy.
また、コア半休対を貼合わせて形成する従来の工法は、
貼合せ面の接着強度を得るため、ガラス材などを巻線溝
のアペックス部にボンディングしているが、ヘッドチッ
プ幅が１００μｍ前後と薄くなると貼合わせ面の強度不
足からコア間剥離が発生し、結果として保留を低下させ
る要因となる。In addition, the conventional construction method of laminating core and semi-dry pairs,
In order to obtain adhesive strength on the bonding surface, a glass material or the like is bonded to the apex portion of the winding groove, but as the head chip width becomes thinner, around 100 μm, delamination between the cores occurs due to insufficient strength on the bonding surface. As a result, this becomes a factor that reduces the number of reservations.
問題点を解決するための手段
本発明は、上記問題点をについて、予め巻線穴を加工し
た非磁性基板上にギャップ部材を介して主磁路となる軟
磁性薄膜の内、ギャップ面を境界に一方をマスキングし
た後、他方に軟磁性薄膜を形成し、マスキング除去後ギ
ャップ部材及び一方の磁気回路を構成する軟磁性薄膜を
重ねて形成し、前記軟磁性薄膜の厚さがトラック幅を規
制する構造でありギャップ部材の膜厚がギャップ長とな
ることにより解決を図ろうとするものである。Means for Solving the Problems The present invention solves the above-mentioned problems by forming a soft magnetic thin film that forms a main magnetic path through a gap member on a non-magnetic substrate in which winding holes have been formed in advance, and using a gap surface as a boundary. After masking one side, a soft magnetic thin film is formed on the other side, and after removing the masking, the gap member and the soft magnetic thin film constituting one of the magnetic circuits are stacked and formed, and the thickness of the soft magnetic thin film regulates the track width. This problem is solved by making the thickness of the gap member equal to the gap length.
作用
ギャップ形成を、従来の貼合わせによる方法によらず、
薄膜を重ねて形成する方法によっているため、ギャップ
長精度が高く特性が安定し、またトラック幅も薄膜の厚
みにより規定されるので、トラック幅の精度も極めて高
く、主磁路となる軟磁性薄膜を挟持する非磁性基板は接
着面のない一体構造であるため、ギャップ面剥離が発生
せず、結果として磁気ヘッドを保留り良く安価に製造で
きるものである。Functional gap formation is not dependent on the conventional method of lamination,
Because it is formed by layering thin films, the gap length accuracy is high and the characteristics are stable.The track width is also determined by the thickness of the thin film, so the track width accuracy is extremely high. Since the non-magnetic substrates sandwiching the magnetic head have an integral structure with no adhesive surface, peeling of the gap surface does not occur, and as a result, the magnetic head can be manufactured with good quality and at low cost.
実施例
以下本発明の一実施例について、図面を用いて、詳細に
説明する。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
実施例１
第１図は、本発明の磁気ヘッドのコアチップの構造を示
す斜視図である。主磁路となる軟磁性薄膜２．２゛の両
面を貼合わせ面のない一体構造からなる非磁性基板１．
１゛で挟持し、前記軟磁性薄膜の厚さがトラック幅を規
制する構造であり、軟磁性薄膜の界面には所定の膜厚の
ギャップ部材３を挟んで形成し、非磁性基板１”の接着
界面には軟磁性薄膜の保護材４（本実施例では５ｉｆｔ
を用いた）を形成し磁気ヘッドと成している。また、非
磁性基板１．１゛には、巻線穴５が予め加工してあり、
非磁性基板１°は接着層（本実施例ではガラスを用いた
）を介して加熱圧着しである。Embodiment 1 FIG. 1 is a perspective view showing the structure of a core chip of a magnetic head of the present invention. 1. A non-magnetic substrate consisting of an integral structure with no bonding surfaces, with both sides of a soft magnetic thin film 2.2" serving as the main magnetic path.
1", and the thickness of the soft magnetic thin film regulates the track width. A gap member 3 of a predetermined thickness is formed at the interface of the soft magnetic thin film, and the non-magnetic substrate 1" A soft magnetic thin film protective material 4 (5ift in this example) is placed on the adhesive interface.
) is used to form a magnetic head. In addition, a winding hole 5 is pre-processed in the non-magnetic substrate 1.1.
The nonmagnetic substrate 1° is bonded under heat and pressure via an adhesive layer (glass was used in this embodiment).
第２図は、本発明の磁気ヘッドの製造方法を示す工程図
である。第２図（ａ）に示す非磁性基板１には予め巻線
穴５が加工してあり、従来の磁気ヘッドでギャップ形成
面７となる部分を境に非磁性基板１半面にレジスト８を
塗布する第２図（ｂｌ、更に、上記レジスト８を塗布し
た表面にスパッタリング法等の薄膜形成法により軟磁性
薄膜２（本実施例では、 Ｃｏ−Ｎｂ−Ｚｒ系アモルフ
ァス合金薄膜を用いている）をトラック幅に相当する厚
さに形成し第２図（Ｃ）、レジスト８塗布面の軟磁性薄
膜２を薬剤処理し剥離する第２図（ｄ）。更に、軟磁性
薄膜２の表面に前記第２図（ｂｌと同様の方法でレジス
ト８°を塗布し第２図（ｅｌ所定の膜厚のギャップ部材
３及び他方の軟磁性薄膜２′を順次形成し第２図（ｆ）
、（ｄ）と同様の方法でレジスト８°を剥離し第２図（
ｇ）磁気回路を構成する。更に、軟磁性薄膜２．２”の
保護層４をスパッタリング法等で形成し第２図Ｔｈｌ非
磁性基板１゛を接着層６を介して加熱圧着しヘッドチッ
プを得る。第２図（１）この後、ヘッドチップはベース
接着、巻線、前面研磨工程を経てヘッドとして実用に供
せられる。FIG. 2 is a process diagram showing the method for manufacturing the magnetic head of the present invention. A winding hole 5 is pre-processed in the non-magnetic substrate 1 shown in FIG. 2(a), and a resist 8 is applied to one half of the non-magnetic substrate 1, bordering on the part that will become the gap forming surface 7 in a conventional magnetic head. Further, a soft magnetic thin film 2 (in this example, a Co-Nb-Zr amorphous alloy thin film is used) is formed on the surface coated with the resist 8 by a thin film forming method such as sputtering. The soft magnetic thin film 2 on the coated surface of the resist 8 is treated with a chemical and peeled off as shown in FIG. 2(C). A resist 8° was applied in the same manner as in Fig. 2 (bl), and a gap member 3 and the other soft magnetic thin film 2' of a predetermined thickness were sequentially formed, as shown in Fig. 2 (f).
, the resist 8° was peeled off in the same manner as in (d), and the result shown in Fig. 2 (
g) Construct a magnetic circuit. Furthermore, a protective layer 4 of a soft magnetic thin film 2.2" is formed by sputtering or the like, and the Thl nonmagnetic substrate 1" shown in FIG. 2 is heat-pressed via an adhesive layer 6 to obtain a head chip. FIG. Thereafter, the head chip is put into practical use as a head through base bonding, wire winding, and front surface polishing steps.
本実施例の磁気ヘッドは、ギャップ精度が良くまた、非
磁性基板が一体構造となるため、従来のヘッドで問題と
なっていたコア間剥離が発生せず、保留り向上コスト低
減の両面で優れたものであり、かつ高周波特性にも優れ
たものであった。The magnetic head of this example has good gap accuracy and has an integral structure with a non-magnetic substrate, so there is no separation between the cores, which was a problem with conventional heads, and it is excellent in terms of improving retention and reducing costs. It also had excellent high frequency characteristics.
実施例２
トラック規制方法として軟磁性薄膜を研磨することで得
ようとするものであり、第３図に製造方法の工程図を示
す。Embodiment 2 The track regulation method is intended to be obtained by polishing a soft magnetic thin film, and FIG. 3 shows a process diagram of the manufacturing method.
第３図ｔａ＋〜第３図（ｄ）は実施例１と同様の工程で
軟磁性薄膜２を形成した後、所定の膜厚のギャップ部材
３及び他方の軟磁性薄膜２゛を形成し第３図ｔｅｌ 磁
気回路を構成する。更に、トラック幅に相当する厚さに
研磨するとともに第３図（ｆ）軟磁性薄膜２．２゛の保
護層４をスパッタリング法等で形成し第３図（ｇ１非磁
性基板１′を接着層６を介して加熱圧着しヘッドチップ
を得る。以下、実施例１として同様にして作製し、得ら
れた磁気ヘッドは実施例１と同様良好なものであった。3(a) to 3(d) show that after forming a soft magnetic thin film 2 in the same process as in Example 1, a gap member 3 with a predetermined thickness and the other soft magnetic thin film 2' are formed. Figure tel Configure a magnetic circuit. Further, the non-magnetic substrate 1' is polished to a thickness corresponding to the track width, and a protective layer 4 with a thickness of 2.2'' is formed using a sputtering method as shown in FIG. 3(f). A head chip was obtained by heat-pressing bonding through a magnetic head 6.The magnetic head was produced in the same manner as Example 1, and the obtained magnetic head was as good as Example 1.
実施例３
実施例１．２で用いたＣＯを主成分とするアモルファス
合金薄膜の代わりに、軟磁性薄膜２．２°としてＦｅ−
Ａｌ−５ｉを主成分とする合金薄膜を用いて実施例１．
２と同様にして磁気ヘッドを作製した。Example 3 Instead of the amorphous alloy thin film mainly composed of CO used in Example 1.2, Fe-
Example 1 using an alloy thin film containing Al-5i as the main component.
A magnetic head was manufactured in the same manner as in Example 2.
得られた磁気ヘッドは実施例１．２と同様良好なもので
あった。The obtained magnetic head was as good as Example 1.2.
実施例４
実施例１．２で用いたＣｏを主成分とするアモルファス
合金薄膜の代わりに軟磁性薄膜２．２°としてＰｅ−Ｎ
ｉを主成分とする合金薄膜を用いて実施例１．２と同様
にして磁気ヘッドを作製した。得られた磁気ヘッドは実
施例１．２．３と同様良好なものであった。Example 4 Instead of the Co-based amorphous alloy thin film used in Example 1.2, a soft magnetic thin film of 2.2° was used as Pe-N.
A magnetic head was produced in the same manner as in Example 1.2 using an alloy thin film containing i as the main component. The obtained magnetic head was good as in Example 1.2.3.
実施例５
実施例１．２で用いたＣｏを主成分とするアモルファス
合金薄膜の代わりに軟性薄膜２．２゛としてＦｅ−Ｃ（
８ａｔ％）化合物薄膜を用して実施例１．２と同様にし
て磁気ヘッドを作製した。得られた磁気ヘッドは実施例
１．２．３．４と同様良好なものであった。他に軟磁性
薄膜２．２゛としてＮ（７ａｔ％） 、Ｐ （１０ａｔ
％）をそれぞれ含む化合物薄膜を用いて作製した磁気ヘ
ッドも上述の実施例同様良好なものであった。Example 5 Instead of the amorphous alloy thin film mainly composed of Co used in Example 1.2, Fe-C (
A magnetic head was produced in the same manner as in Example 1.2 using a thin film of a compound (8at%). The obtained magnetic head was good as in Example 1.2.3.4. In addition, as a soft magnetic thin film 2.2゜N (7at%), P (10at%
Magnetic heads fabricated using compound thin films containing %) were also good as in the above-mentioned examples.
実施例６
実施例１．２では、予め加工された非磁性基板１．１′
上に軟磁性薄膜２．２゛及びギャップ部材３を形成する
方法であるが、単に鏡面加工された非 ｌ磁性基板上に
軟磁性薄膜２．２′およびギャップ部材３を実施例１．
２と同様の方法で形成し、ギャップ部上に巻線穴５を超
音波加工機等で加工し磁気ヘッドを作製した。得られた
磁気ヘッドは実施例１．２．３．４．５同様良好なもの
であった。Example 6 In Example 1.2, a pre-processed non-magnetic substrate 1.1'
In this method, a soft magnetic thin film 2.2' and a gap member 3 are formed on a mirror-finished non-magnetic substrate as in Example 1.
A magnetic head was fabricated by forming the magnetic head in the same manner as in No. 2, and forming a winding hole 5 on the gap portion using an ultrasonic processing machine or the like. The obtained magnetic head was good as in Example 1.2.3.4.5.
発明の効果
以上のように本発明の磁気ヘッドは、ギャップ形成をギ
ャップ部材、軟磁性薄膜の順に薄膜を積み重ねて行なう
ことが出来るため従来行なわれてきた貼合わせ法に比較
して著しくギャップ精度が向上したため特性が安定し、
またトラック幅も薄膜の厚みにより規定されるので、ト
ラック幅の精度も極めて高い。また、従来の貼合わせ法
で問題となり得る。ギャップ形成面での接着強度も主磁
路である軟磁性薄膜を挟持する非磁性基板に接合面が存
在しないため、コア間剥離の問題は考えなくてもよい構
造となった。このように本発明の磁気ヘッドは保留り良
く製造することが出来、ヘッドの製造コストを安価にす
ることが出来る。Effects of the Invention As described above, in the magnetic head of the present invention, the gap can be formed by stacking the thin films in the order of the gap member and the soft magnetic thin film, so the gap accuracy is significantly improved compared to the conventional bonding method. Due to the improved characteristics, the characteristics are stable,
Furthermore, since the track width is also defined by the thickness of the thin film, the accuracy of the track width is also extremely high. It can also be a problem with conventional lamination methods. As for the adhesive strength at the gap-forming surface, there is no bonding surface on the non-magnetic substrates that sandwich the soft magnetic thin film, which is the main magnetic path, so the structure eliminates the problem of core-to-core separation. As described above, the magnetic head of the present invention can be manufactured in a timely manner, and the manufacturing cost of the head can be reduced.
第１図は本発明の磁気ヘッドの構造を示す斜視図、第２
図、第３図は本発明の実施例におけるヘッドの製造方法
を説明する工程図である。
■、１゛・・・・・・非磁性基板、２．２′・・・・・
・軟磁性薄膜、３・・・・・・ギャップ部材、４・・・
・・・保護層、５・・・・・・巻線穴、６・・・・・・
接着層、７・・・・・・ギャップ形成面、８．８′・・
・・・・レジスト。
代理人の氏名 弁理士 中尾敏男 はか１名／、１’−
−−非Ｅ＆ａ墓板
２．２’−−一軟扉姓簿屓
３−一−ギャップ部材
１．１’−−一非忌性墓フ
２、２’−−一軟羞捏簿雇
６−−一巻ｌａＣ大
／、／’−−−非道秩五版
２、２’ −−一吹轟姓薄屓FIG. 1 is a perspective view showing the structure of the magnetic head of the present invention, and FIG.
3 are process diagrams illustrating a method for manufacturing a head in an embodiment of the present invention. ■, 1゛...Nonmagnetic substrate, 2.2'...
・Soft magnetic thin film, 3... Gap member, 4...
...Protective layer, 5...Winding hole, 6...
Adhesive layer, 7... Gap forming surface, 8.8'...
...Resist. Name of agent: Patent attorney Toshio Nakao Haka1/, 1'-
--Non-E & a grave board 2.2'--One soft door name list 3-1-Gap member 1.1'--One non-evil grave board 2, 2'--One soft name list 6- -Volume 1 laC large/, /'---Hidochichi 5th edition 2, 2'--Todoroki Ichibuki surname thinly
Claims (3)
成る磁気ヘッドであって、前記軟磁性薄膜の厚さがトラ
ック幅を規制する構造であり、予め巻線穴を加工した非
磁性基板上にスパッタリング法または蒸着法などで主磁
路となる軟磁性薄膜およびギャップ長となる非磁性層を
順次形成した後、前記非磁性基板と同形状の基板で挟持
することを特徴とする磁気ヘッドの製造方法。(1) A magnetic head in which the main magnetic path is a soft magnetic thin film sandwiched between nonmagnetic substrates, the thickness of the soft magnetic thin film regulates the track width, and the winding holes are pre-machined. A soft magnetic thin film serving as a main magnetic path and a nonmagnetic layer serving as a gap length are sequentially formed on a nonmagnetic substrate by sputtering or vapor deposition, and then sandwiched between substrates having the same shape as the nonmagnetic substrate. A method of manufacturing a magnetic head.
金薄膜またはＦｅ−Ａｌ−Ｓｉを主成分とする合金薄膜
またはＦｅ−Ｎｉを主成分とする合金薄膜の何れかを用
いることを特徴とする特許請求の範囲第（１）項記載の
磁気ヘッドの製造方法。(2) The soft magnetic thin film is characterized by using either an amorphous alloy thin film mainly composed of Co, an alloy thin film mainly composed of Fe-Al-Si, or an alloy thin film mainly composed of Fe-Ni. A method for manufacturing a magnetic head according to claim (1).
１つを含むＦｅを主成分とする化合物薄膜であることを
特徴とする特許請求の範囲第（１）項記載の磁気ヘッド
の製造方法。(3) The magnetic head according to claim (1), wherein the soft magnetic thin film is a compound thin film mainly composed of Fe and containing at least one of C, N, and P. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31940287A JPH01159810A (en) | 1987-12-17 | 1987-12-17 | Manufacture of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31940287A JPH01159810A (en) | 1987-12-17 | 1987-12-17 | Manufacture of magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01159810A true JPH01159810A (en) | 1989-06-22 |
Family
ID=18109783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31940287A Pending JPH01159810A (en) | 1987-12-17 | 1987-12-17 | Manufacture of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01159810A (en) |
-
1987
- 1987-12-17 JP JP31940287A patent/JPH01159810A/en active Pending
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