JPH0563115B2 - - Google Patents

Info

Publication number

JPH0563115B2

JPH0563115B2 JP62191803A JP19180387A JPH0563115B2 JP H0563115 B2 JPH0563115 B2 JP H0563115B2 JP 62191803 A JP62191803 A JP 62191803A JP 19180387 A JP19180387 A JP 19180387A JP H0563115 B2 JPH0563115 B2 JP H0563115B2

Authority

JP

Japan

Prior art keywords

conductor

wiring

multilayer ceramic

wiring board

temperature

Prior art date

1987-07-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 239000000919 ceramic Substances 0.000 claims description 30
• 239000000463 material Substances 0.000 claims description 11
• 239000005388 borosilicate glass Substances 0.000 claims description 5
• 239000000126 substance Substances 0.000 claims description 5
• BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 claims description 2
• 229910021521 yttrium barium copper oxide Inorganic materials 0.000 claims 1
• 239000004020 conductor Substances 0.000 description 24
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
• 238000000034 method Methods 0.000 description 12
• 239000000758 substrate Substances 0.000 description 10
• 239000011230 binding agent Substances 0.000 description 8
• 229910052751 metal Inorganic materials 0.000 description 7
• 239000002184 metal Substances 0.000 description 7
• 239000007788 liquid Substances 0.000 description 6
• 239000000203 mixture Substances 0.000 description 6
• 229910052757 nitrogen Inorganic materials 0.000 description 6
• 239000000843 powder Substances 0.000 description 6
• IQAKAOAPBMJSGJ-UHFFFAOYSA-N [Cu].[Y].[Ba] Chemical compound [Cu].[Y].[Ba] IQAKAOAPBMJSGJ-UHFFFAOYSA-N 0.000 description 5
• 239000002002 slurry Substances 0.000 description 5
• 238000010304 firing Methods 0.000 description 4
• 239000010970 precious metal Substances 0.000 description 4
• 230000007704 transition Effects 0.000 description 4
• 229910052878 cordierite Inorganic materials 0.000 description 3
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 3
• 238000004519 manufacturing process Methods 0.000 description 3
• 238000002156 mixing Methods 0.000 description 3
• 239000003960 organic solvent Substances 0.000 description 3
• 238000007639 printing Methods 0.000 description 3
• 239000002887 superconductor Substances 0.000 description 3
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
• 238000005266 casting Methods 0.000 description 2
• 229910010293 ceramic material Inorganic materials 0.000 description 2
• 238000005516 engineering process Methods 0.000 description 2
• 230000020169 heat generation Effects 0.000 description 2
• 239000012212 insulator Substances 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• 230000001590 oxidative effect Effects 0.000 description 2
• 239000001301 oxygen Substances 0.000 description 2
• 229910052760 oxygen Inorganic materials 0.000 description 2
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
• 238000010298 pulverizing process Methods 0.000 description 2
• 238000005245 sintering Methods 0.000 description 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
• 239000001856 Ethyl cellulose Substances 0.000 description 1
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
• 229910001252 Pd alloy Inorganic materials 0.000 description 1
• WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 1
• 239000010953 base metal Substances 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 230000007547 defect Effects 0.000 description 1
• SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 229920001249 ethyl cellulose Polymers 0.000 description 1
• 235000019325 ethyl cellulose Nutrition 0.000 description 1
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 239000010931 gold Substances 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 230000010354 integration Effects 0.000 description 1
• 239000011812 mixed powder Substances 0.000 description 1
• 230000007935 neutral effect Effects 0.000 description 1
• 229910000510 noble metal Inorganic materials 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
• SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 239000004014 plasticizer Substances 0.000 description 1
• 229910052697 platinum Inorganic materials 0.000 description 1
• 229920000728 polyester Polymers 0.000 description 1
• 238000007650 screen-printing Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 238000003746 solid phase reaction Methods 0.000 description 1
• 229940116411 terpineol Drugs 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
• 238000005303 weighing Methods 0.000 description 1