JPH0563017B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cassette for storing substrates such as wafers for integrated circuits.

[Conventional technology]

Figures 8 and 9 are, for example, Utility Model No. 56-24152.
Fig. 8 is a perspective view, and Fig. 9 is a sectional view taken along the line - - of Fig. 8. be.

In the figure, 1 is a cassette with a large number of grooves 2 formed on its inner wall, and 3 is a cassette with an edge inserted into the grooves 2.
Wafers that serve as substrates for integrated circuits, etc.
4 is a holder formed along the longitudinal direction on the outer surface of the cassette 1 and provided with a groove 5 inside; 6 is a wafer 3;
An information card such as an IC card (integrated circuit card) or magnetic card that records information for tracking the manufacturing process (sequence) and quality history corresponding to the lot, and is held by its edge engaging with the groove 5. It is inserted into tool 4.

A conventional substrate storage cassette is constructed as described above, and in a semiconductor manufacturing line for integrated circuits and the like, wafers 3 are stored in the cassette 1 and transported. Wafer 3 is transferred to cassette 1 every time it undergoes production processing.
It is extracted from the cassette 1 and inserted into the cassette 1 again when sent to the next process. On the other hand, the information card 6 is
This is a card showing the details of the manufacturing process of wafer 3.
It is treated accordingly. Therefore, when the wafer 3 is removed from the cassette 1, the information card 6 is also removed from the holder 4, and when one step of the production process is completed, the information card 6 is removed again from the holder 4 of the cassette 1 containing the wafer 3. inserted into.

[Problem that the invention seeks to solve]

In the conventional board storage cassette as mentioned above,
Since the edge of the information card 6 is engaged and in contact with the groove 5 of the holder 4, the friction caused by inserting and removing the information card 6 generates fine particles of dust, which tend to adhere to the wafers 3 and the cassette 1. However, there is a problem in that it has a negative impact on semiconductor production. Further, when cleaning the cassette 1, it is difficult to clean the inner corners of the grooves 5 of the holder 4, and there is also the problem that drainage is difficult, and moisture remains and impedes the next process.

This invention was made to solve the above-mentioned problems, and it is possible to reduce the amount of dust generated when inserting and removing information cards, to facilitate cleaning of the holder, and to improve drainage of the holder after cleaning the cassette. It is an object of the present invention to provide a cassette for storing substrates that can be used for storing substrates.

[Means for solving problems]

In the substrate storage cassette according to the present invention, the holder provided on the outer surface of the cassette is constituted by a plurality of protrusions, which are arranged on the periphery of the information card, and the holder is arranged on the periphery of the information card. [Function] In this invention, the peripheral edge of the information card is supported by a plurality of protrusions, and there is a space between the information card and the cassette, so that the information card is not attached to the holder. Without contact over the entire length, the contact surface is small. Further, spaces are formed between the protrusions.

〔Example〕

1 to 3 are views showing an embodiment of the present invention, in which FIG. 1 is a perspective view, FIG. 2 is a sectional view taken along the line -- in FIG. 1, and FIG. 3 and 6 are similar to the conventional device described above.

In the figure, 8 is an information card 6 on the outside of cassette 1.
A plurality of recesses 9 (in the figure, 3 recesses are provided in the vertical direction on the outer surface of the cassette 1)
10 is a holder made of a cylindrical protrusion placed horizontally on the lower part of the outer surface of the cassette 1. The holders 9 and 10 are arranged at the periphery of the information card 6.

In the substrate storage cassette constructed as described above, the information card 6 is supported by the holder 9 at its side edge and by the holder 10 at its lower edge. Therefore, the peripheral edge of the information card 6 is in point contact with the holders 9 and 10, and unlike the conventional device, which is in surface contact with the holder 4, the contact surface is extremely small. Become. As a result, less dust is generated when the information card 6 is inserted or removed.
In addition, since a recess 8 is formed on the outer surface of the cassette 1 facing the information card 6, the entire surface of the information card 6 does not come into close contact with the outer surface of the cassette 1, so that dust can be removed from this area. will also decrease.
Furthermore, since a space is formed between the holders 9 and 10, cleaning is easy. Further, the entire surfaces of the holders 9 and 10 are exposed, and unlike the holder 4 of the conventional device, there are no inner corners, so water drains well after cleaning.

4 and 5 are views showing other embodiments of the present invention, with FIG. 4 being a partial view of FIG. 2, and FIG. 5 being a front view of the holder.

In this embodiment, the holder 9 is formed of a neck portion 9a and a head portion 9b having a substantially semicircular cross section, and its function is the same as that in FIG. 2.

6 and 7 are also views showing other embodiments of the present invention, FIG. 6 is a partial view of FIG. 2, FIG. 7 is a front view of the holder, and the holder 9 is shown in cross section. It is formed of a substantially trapezoidal neck 9a and head 9b, and its function is similar to that shown in FIG.

In the embodiment, the wafer 3 for manufacturing integrated circuits was described as being stored in the cassette 1, but the cassette 1 is not limited to the wafer 3, but can also be used to handle substrates such as magnetic disks and optical disks in a clean environment. It is also applicable to

〔Effect of the invention〕

As explained above, in this invention, a holder consisting of a plurality of protrusions is arranged on the outer surface of the cassette,
This supports the periphery of the information card and
Since a space is formed between the information card and the cassette, the generation of dust when inserting and removing the information card is reduced, the holder is easier to clean, and the holder drains water better after cleaning the cassette. There is an effect that can be done.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of a substrate storage cassette according to the present invention, and FIG.
3 is a front view of FIG. 1, FIG. 4 is a diagram showing another embodiment of the invention, a partial view of FIG. 2, and FIG. 5 is a view of the holder shown in FIG. The front view and FIG. 6 are also views showing other embodiments of the present invention, and FIG. 7 is a front view of the holder shown in FIG. 6, and FIG. 8 is a view corresponding to a portion of FIG. A perspective view showing a cassette;
FIG. 9 is a sectional view taken along the - line of the eighth selection. In the figure, 1 is a cassette, 3 is a substrate (wafer), and 6 is a cassette.
8 is an information card, 8 is a recessed portion, and 9 and 10 are holders. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Claims] 1. An information card in which the manufacturing process of the board is recorded is inserted into a holder provided on the outer surface of a cassette that stores the board, and the holder is constituted by a plurality of protrusions, and the holder is provided with the information card. A cassette for storing substrates, characterized in that a recess is arranged on the peripheral edge of the card and a recess is formed on the outer surface of the cassette corresponding to the information card.