JPH056300U - Main valve for gas storage container - Google Patents

Abstract

(57) [Summary] (Modified) [Purpose] To provide a main valve that can be installed in a container that stores high-purity process gas and that can purge to the deep part of the connection part of this container. A purge valve 2 and a supply valve 3 for controlling a purge gas and a process gas by directly seating or separating a metal diaphragm 34 on a valve seat portion 22 are provided in a common valve box 4, and a purge gas outlet flow path is provided. 21 is fixed to the valve box 4 with a joint member 5 having a communication passage 8 that surrounds and communicates with the process gas introduction passage 30, and a thin tube 14 extending from the purge gas lead-out passage 21 is provided with the joint. A main valve for a gas storage container, which is eccentric with respect to the central axis of the member 5.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

  The present invention is used by mounting it on a gas storage container filled with liquefied gas or high-pressure gas. The present invention relates to a main valve of a gas storage container used.

[0002]

[Prior art]

  In recent years, ultra-high purity gas has been used in various industrial fields. For example, semiconductor manufacturing There are gases used in the process and the purity of these so-called process gases is It has a significant impact on the quality of the manufactured product. Therefore, it is necessary to maintain the high purity of the gas. Great care must be taken to ensure this. Also, some of these process gases are toxic Some are strong and some are at high risk of explosion, so safety is required when handling. Be done. These process gases are filled in a gas storage container and attached to this container. Supply is performed through the main valve.   The above-mentioned high-purity process gas is passed from the storage container through various valves to various valves. And used through piping. At this time, gas or impurities containing impurities in the piping If there is a clog, or if impure gas is adsorbed on the metal surface in contact with the gas, these The impure gas and particles are released when passing through the high-purity process gas, Degrade the purity of the process gas. To prevent this, for example, gas contact metal surface All of them are electropolished with high precision and mirror-finished, and impure gas is applied to the metal surface as much as possible. There is a measure to prevent adsorption. Also, it is usually done to use the original valve as a storage container. The piping system, and before flowing the high-purity process gas, vacuum the piping system with a vacuum pump. The inside of the piping can be cleaned by purging with an inert gas replacement. Has been done.

[0003]   Conventionally, as a main valve of a storage container when performing such a purging process, for example, as shown in FIG. There is one disclosed in Japanese Utility Model Publication No. 2-34527. This container valve is a stop It is composed of a valve 50 and a purge valve 51 for purging the inside of the pipe. Therefore, the purge valve 51 The high-purity process gas in the storage container is closed by closing the valve and opening the stop valve 50. It is supplied to the take-out conduit 53. On the other hand, by closing the stop valve 50 and opening the purge valve 51, Thus, a purging gas such as an inert gas is supplied into the gas extraction conduit 53.   Another example is the analysis valve 60 disclosed in Japanese Utility Model Publication No. 63-24476. This one too In addition to forming a flow path 62 for introducing the purge gas in the valve stem 61 of the valve, Is continuously extended to the elongated protrusion 63 so that it can enter the gas inlet 66. is there. And the gas inlet path 66 and outlet path 65 from the storage container are for the purge gas. It is constructed using the valve configuration and common parts. That is, when supplying the purge gas, The process gas flow path on the container side can be closed, while supplying process gas In other words, the purge gas passage is closed and the process gas passage is opened. Therefore It is possible to switch between process gas and purge gas with one valve. It

[0004]

[Problems to be solved by the device]

  In the above-mentioned conventional example, the former first closes the stop valve 50, opens the purge valve 51, and When carrying out the treatment, an inert purge gas is introduced into the inlet hole 52, which is a communication path with the storage container. Sus not enter enough. Therefore, from the valve seat portion 59 of the stop valve 50 to the mouth of the storage container. The inside of the inlet hole 52 of the can not be completely purged. Further, the valve chamber 55 of the stop valve 30 and the purge valve 31 Valve-opening springs 56 and 58 are provided in the valves 57 and 57, respectively. Therefore, the sliding of this spring Particles are generated. As a result, the purity of the high-purity process gas is reduced. There was a problem of making it possible.   On the other hand, in the latter, the purge gas allows the thin tube to penetrate deep into the storage container. Therefore, it can be said that the purging capacity is higher than the above. However, of the valve The structure is complicated and the dead space is large, and the valve rod 61 and the thin tube 63 are screwed together 64 Since it is a sliding type that uses particles, the generation of particles is large and high purity as above There is a problem of reducing the purity of the process gas.   The present invention has a valve structure that does not generate particles and is efficient up to the base of the storage container. An object of the present invention is to provide a main valve for a gas storage container that can be purged selectively.

[0005]

[Means for Solving the Problems]

  The purge gas introduction flow path and the purge gas discharge flow path are communicated with each other via a valve seat portion, Purge valve with a metal diaphragm that sits or separates directly from the valve seat And the process gas introduction flow path and the process gas discharge flow path are communicated via the valve seat portion. , A valve having a metal diaphragm that is directly seated or separated from the valve seat portion. It has a valve device with a common valve box for the valve supply, a hollow communication passage inside, and a gas valve at one end. A purge gas discharge passage of the purge valve and the other end of the purge valve. A joint member formed in the valve box to surround the process gas introduction flow path of the supply valve; In the connecting passage of the joint member, eccentric with respect to the central axis of the connecting passage, A thin tube extending from the purge gas outlet passage of the purge valve and the outside of the joint member And a nut member that is connected to the gas storage container via the connecting portion of the joint member. It is a main valve for gas storage consisting of and. Furthermore, in the above, it faces the tip of the thin tube. The main valve for a gas storage container is formed by inclining the inner peripheral wall of the communication passage.

[0006]

[Action]

  Since the present invention has the above-mentioned configuration, first, the valve chambers of the purge valve and the supply valve are made of metal. There is only a diaphragm, and this diaphragm can be directly contacted with or separated from the valve seat. Since there is no need to cause particles, the valve chamber There is little dead space inside. In addition, the purge valve and the supply valve are oppositely arranged in the same valve box. Since it was installed, it became a compact valve device as a whole.   The feature of the present invention is that it is provided with a thin valve that extends from the outlet passage of the purge valve. That is, the pipe is eccentric to the axis of the joint member. With this configuration In addition, the inert purge gas ejected from the tip of the thin tube must be kept inside the inner wall of the joint member. Hit. Then, the gas flow becomes turbulent and the peripheral walls are washed, and You can purge every corner of your body. At this time, the inner peripheral wall at the back of the joint member is inclined If this is done, the gas flow is easy to stir and can be purged more efficiently. is there.

[0007]

【Example】

  Embodiments of the present invention will be described below with reference to the drawings.   FIG. 1 and FIG. 2 are parts of a main valve for a gas storage container (hereinafter referred to as a main valve) showing an embodiment. FIG. 2 is a sectional view taken along line AA of FIG.   The structure of the main valve will be described below. First, the valve device 1 includes the purge valve 2 and the supply valve 3. It is configured so as to face each other in one common valve box 4. Purge valve 2 and supply valve The three valve boxes are common, but each has an independent valve function. Ie purging In the valve 2, a substantially L-shaped purge gas introduction flow path 20 (see FIG. 2) and a substantially L-shaped valve box 4 are provided. V-shaped purge gas lead-out passages 21 are formed, and these passages are valves provided with valve seat portions 22. It communicates in the room 23. The valve seat portion 22 has, for example, a fluorine-based material to improve sealing performance. A sealing member made of resin is fitted, and a metal member is placed at a position facing the valve seat. The diaphragm 24 is installed with the diaphragm holding member 25 sandwiching the outer periphery. It The metal diaphragm 24 has a flat outer peripheral edge and a central portion that bulges upward. It has a partially spherical shell shape. Therefore, the bulged central portion is When pressed, the diaphragm 24 jumps and deforms under a certain load, and the valve seat portion is directly deformed. The seated state where it abuts 22 and the purge valve is closed. And move valve stem 26 upwards Then, the diaphragm 24 returns to its original state due to its own elastic restoring force, and becomes a seated state. The valve will open.   On the other hand, the supply valve 3 is formed on the surface of the valve box 4 facing the purge valve 2, The L-shaped process gas introduction flow path 30 and the substantially L-shaped process gas discharge flow path 31 are illustrated. The valve seat portion 32, the metal diaphragm 34, etc. are configured and function as described above. Since it is the same as the purge valve 2, the description is omitted. Supply with purge valve 2 as described above The valve 3 has only metal diaphragms 24 and 34 in the valve chambers 23 and 33 and is extremely simple. It has a bare structure with little dead space and no particle generation source.

[0008]   The joint member 5 is a valve in which the purge gas outlet passage 21 and the process gas inlet passage 30 are open. It is fixed to one end side surface of the box 4 by welding means so that the two flow paths are communicated with each other. A hollow communication passage 8 is formed inside. The other end of the communication passage is tapered A wall surface 9 is formed, the tip of which forms an inlet hole 10 that leads to a gas storage container (not shown). ing. The connecting portion 6 formed on the outer end is for connecting with a gas storage container, It has a collar portion 19 with which the bridge 17 and the nut member 7 are locked. Therefore, the gas storage container When connecting, as shown by the dotted line, the nut member 7 is moved forward and provided on the inner peripheral surface. The screw 13 is screwed into a male connection screw on the container side for connection.   The thin tube 14 is made of stainless steel and is fixed to the tip of the purge gas outlet channel 21 by welding means. Has been done. The tip end ejection port 15 of the thin tube 14 extends close to the inclined wall surface 9 at the end of the communication passage. ing. The axis 12 of the thin tube 14 is eccentric from the axis of the joint member 5 by the dimension C. Therefore, the purge gas spouted from the spout 15 must hit the wall of the communication passage. Has become. If the eccentricity of the thin tube is achieved at least at the tip including the ejection port Well, therefore, the thin tube is not necessarily a straight tube, but a shape that bends from the middle Good.

Next, the operation of the main valve for gas storage will be described. First, the main valve is connected to the gas storage container using the nut member 7 at the connecting portion. After that, an inert gas such as N ₂ gas is used to perform a purge process to the root portion including the connection portion of the gas storage container. As described above, purging the entire piping system is an important factor affecting the gas purity. First, the valve installed in the gas storage container itself is closed, the purge valve 2 and the supply valve 3 are opened, N ₂ gas is introduced from the purge gas introduction flow passage 20 of the purge valve, and the purge gas discharge flow passage 21 and the flow in the narrow tube are introduced. via the road 16 from the ejection port 15 with jetting N ₂ gas, bumping N ₂ gas to the inclined wall 9, so as to stir the inside communication passage 8 as shown by the solid line arrows, so to speak as a turbulent state The entire part including the peripheral wall of the passage is purged. Then, the N ₂ gas passes through the introduction flow path 30 and the discharge flow path 31 of the supply valve, and the subsequent piping system is purged as usual. After that, when the process gas in the container is allowed to flow, the purge valve 2 is closed, the supply valve 3 is opened, the valve installed in the container is opened, and as shown by a dotted arrow, the communication passage 8 and the process gas introduction It is supplied to the subsequent piping via the flow path 30 and the process gas outlet flow path 31. As described above, according to the present embodiment, the generation of particles is prevented and the purging process can be performed completely and efficiently. In addition, for example, the electrode rod for electrolytic polishing could not be inserted from the inlet hole 10 after the joint member was assembled, but since the thin tube is eccentrically provided, the electrode rod can be easily inserted.

[0010]

[Effect of device]

  According to the present invention, a valve structure that does not generate particles and has a small dead space It is also possible to completely and efficiently purge deep inside the root of the storage container. You can

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part of a main valve for a gas storage container showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a main part showing an AA cross section of FIG.

FIG. 3 is a partial cross-sectional view showing a conventional container main valve.

FIG. 4 is a cross-sectional view showing another conventional analysis valve.

[Explanation of symbols]

1 ... Valve device 2 ... Purge valve 3 ... Supply valve 4 ... Valve box 5: Joint member 6 ... Connection part 7 ... Nut member 8 ... Communication passage 9 ... Inclined wall 11 ... Shaft center of joint member 12 ... Capillary axis 14 ... narrow tube 20 ... Purge gas introduction channel 21 ... Purge gas outlet channel 22 ... Valve seat 24 ... Metal diaphragm 30 ... Process gas introduction flow path 31 ... Process gas outlet channel 32 ... Valve seat 34 ... Metal diaphragm

Claims (2)

[Scope of utility model registration request] 1. A purge valve having a metal diaphragm, which communicates a purge gas introduction flow path and a purge gas discharge flow path through a valve seat portion, and which is directly seated on or separated from the valve seat portion, and a process. A gas inlet passage and a process gas outlet passage are connected to each other through a valve seat portion, and a supply valve having a metal diaphragm that seats or separates directly on the valve seat portion forms a common valve box. A valve device having the same, a hollow communication passage inside, a gas storage container connection portion at one end, and a purge gas outlet passage of the purge valve and a process gas introduction passage of the supply valve at the other end. A coupling member formed in the valve box so as to pass through, and a thin tube provided in the communication passage of the coupling member and extending eccentrically from the central axis of the communication passage and extending from the purge gas outlet passage of the purge valve. And located outside the fitting member A main valve for a gas storage container, which is connected to the gas storage container via a connecting portion of the joint member. 2. The inner peripheral wall of the communication passage facing the tip of the thin tube is formed to be inclined.
The original valve for the gas storage container described.