JPH0558666B2 - - Google Patents

Info

Publication number
JPH0558666B2
JPH0558666B2 JP233287A JP233287A JPH0558666B2 JP H0558666 B2 JPH0558666 B2 JP H0558666B2 JP 233287 A JP233287 A JP 233287A JP 233287 A JP233287 A JP 233287A JP H0558666 B2 JPH0558666 B2 JP H0558666B2
Authority
JP
Japan
Prior art keywords
container
damper
ceramic substrate
ceramic
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP233287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63170946A (ja
Inventor
Shigeki Okamoto
Katsuhide Natori
Kyoichiro Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP233287A priority Critical patent/JPS63170946A/ja
Publication of JPS63170946A publication Critical patent/JPS63170946A/ja
Publication of JPH0558666B2 publication Critical patent/JPH0558666B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP233287A 1987-01-08 1987-01-08 セラミツク基板の気密接合構造 Granted JPS63170946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP233287A JPS63170946A (ja) 1987-01-08 1987-01-08 セラミツク基板の気密接合構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP233287A JPS63170946A (ja) 1987-01-08 1987-01-08 セラミツク基板の気密接合構造

Publications (2)

Publication Number Publication Date
JPS63170946A JPS63170946A (ja) 1988-07-14
JPH0558666B2 true JPH0558666B2 (cs) 1993-08-27

Family

ID=11526353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP233287A Granted JPS63170946A (ja) 1987-01-08 1987-01-08 セラミツク基板の気密接合構造

Country Status (1)

Country Link
JP (1) JPS63170946A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332437U (cs) * 1989-08-04 1991-03-29

Also Published As

Publication number Publication date
JPS63170946A (ja) 1988-07-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees