JPH0557875A - Positioning method for substrate - Google Patents

Abstract

PURPOSE:To rapidly position a substrate on a printing table by pressing the substrate having an alignment mark to a reference pin on an alignment table to position the same and correcting the position of the reference pin on the basis of the positional shift quantity of the substrate. CONSTITUTION:In order to position a substrate 3, at first, the substrate 3 having an alignment mark is pressed to a reference pin 31 on an alignment table 1 to be positioned. Next, the substrate 3 is displaced to the predetermined position on a printing table 2 using a feed means 4 accurately performing the displacement of the substrate 3. Continuously, the position of the alignment mark is read by a camera 5 and this position data is compared with reference position data to calculate positional shift quantity. The reference pin 31 is moved to a more accurate position on the basis of the positional shift quantity and the substrate 3 is pressed to the reference pin 31 to be positioned. Thereafter, the substrate 3 is displaced to the printing table 2 using the feed means 4 to be positioned.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention positions a substrate before printing almost accurately at a place different from the printing table so that the substrate on the printing table can be slightly different even if the size of the substrate is slightly different. The present invention relates to a substrate positioning method used in a thin film forming apparatus capable of efficiently performing positioning in a short time.

[0002]

2. Description of the Related Art Conventionally, to form functional thin films for various electronic parts such as liquid crystal alignment films, insulating films, and conductive films,
A thin film forming device is used. This thin film forming apparatus, intaglio roll having a large number of cells on the surface, an ink supply device for supplying ink to the surface of the intaglio roll, the ink supplied to the intaglio roll by contacting the surface of the intaglio roll in the cells A doctor blade for filling and weighing, and the ink in the cells of the intaglio roll transferred to the surface of the relief plate by pressure contact with the intaglio roll having an elastic relief plate on the surface, and then the ink by press contact with the substrate of the surface of the printing medium. It consists of a transfer printing roll, and the substrate is positioned at the substrate mounting position on the printing table that moves on a certain orbit, and then moves to the printing position where the printing table comes into pressure contact with the printing roll. Then, the board is printed, moved to the board unloading position, the board is unloaded, and only the printing table returns to the board mounting position. There.

In this case, the substrate is positioned at a predetermined position on the printing table as follows. That is,
The reference position data of the alignment mark is stored in advance. The reference position data is the position where the alignment mark should be positioned on the substrate. Then, the substrate on which the alignment mark is provided is placed on the printing table, the alignment mark position is read, the positional deviation amount is calculated by comparing with the reference position data, and the positional deviation amount is calculated on the printing table. The position of the substrate is moved by a required amount, and the alignment and positioning is completed so that the alignment mark and the reference position match.

[0004]

Conventionally, a substrate provided with alignment marks is placed at an appropriate position on a printing table. Therefore, since the misalignment between the alignment mark position and the reference position is large, it takes much time and labor to move the reference pin to a large extent, and then to press the substrate against the reference pin. In addition, there are cases where misalignment occurs due to subtle differences in the size of the board, but it takes time and time to move the reference pin on the printing table, and then time and effort to press the board against the reference pin. ..

[0005]

In order to achieve the above object, the present invention has the following construction. In other words, on the alignment table provided separately from the printing table, the substrate having the alignment mark is pressed against the reference pin to be positioned, and then the alignment table is placed on the alignment table by using the transporting device that accurately replaces the substrate. Replace the board in place on the printing table from
Next, the position of the alignment mark is read by the camera on the printing table, the position data is compared with the reference position data stored in advance to calculate the position deviation amount, and the alignment is calculated based on the position deviation amount. Move the reference pin on the table by a necessary amount to set it to a more accurate position, press the substrate with the alignment mark to the reference pin to position it at a predetermined position, and then use a transfer unit that accurately replaces the substrate. Substituting the substrate from the alignment table to the printing table by using the method, the substrate is positioned at an accurate position on the printing table.

[0006]

According to the invention of the present application, since the positioning of the substrate is made more accurate at a place different from the printing table based on the positional displacement amount of the preceding substrate on the printing table, a newly loaded substrate is The substrate can be placed at a more accurate position on the printing table by simply replacing the substrate at a predetermined position on the printing table. Therefore, even if there is a case where misalignment occurs due to a subtle difference in the size of the board,
Since the reference pin of the alignment table is corrected to a more accurate position for each newly loaded substrate, the labor and time for positioning the substrate on the printing table can be reduced.

[0007]

Embodiments of the present invention will be described in detail below with reference to the drawings. In the invention of the present application, the newly loaded substrate 3 is positioned at a more accurate position on the alignment table 1 based on the displacement of the preceding substrate. The substrate 3 will be described as a substrate that is newly loaded. First, the substrate 13 is positioned at a predetermined position by using the reference pin 31 on the alignment table 1 provided separately from the printing table 2. The alignment table 1 is a table for more accurate positioning before the substrate 13 is placed on the printing table 2. The substrate positioned on the alignment table 1 has an alignment mark 30 (see FIG. 3), and is positioned on the printing table 2 and then brought into contact with the printing roll 6 so that a conductive film or an insulating film is formed. Inks for printing various functional thin films such as coatings are printed. In order to carry the substrate into the alignment table 1, it is preferable to carry it into the alignment table 1 by a carrying fork 7 or the like.

A substrate positioning reference pin 31 is used to position the substrate 13 at a predetermined position on the alignment table 1. That is, the reference pins 31 along at least three of the two adjacent side faces of the four side faces of the plate-shaped substrate 13 are movably provided on the alignment table 1, and the substrate 13 is pressed against the reference pins 31. The pusher pin 32 is provided on the alignment table 1 along the side surface facing the reference pin 31 (see FIGS. 1 and 3).

As described above, the substrate 13 positioned on the alignment table 1 is replaced with a predetermined position on the printing table 2 by using the carrying means 4 for accurately replacing the substrate 13. As a concrete transfer means 4 for accurately replacing the substrate 13, a vertically moving transfer arm is moved upward to lift the substrate 13 at a predetermined position of the alignment table 1, and the printing table 2 is kept in the lifted state. There is a means for moving the transfer arm in parallel along the guide rail 40 to a position above the predetermined position, and then lowering the transfer arm to lower the substrate 3 onto the surface of the printing table 2 and replacing it with the predetermined position of the printing table 2. (See Figure 1).

To move the substrate 13 in parallel with the transfer arm, there is a method of rotating the ball screw with a stepping motor or the like to move the transfer arm in parallel. By using this means, the alignment table 1
It is possible to suppress the error of the positional deviation during the parallel movement from the top to the printing table 2 to about -0.01 to +0.01 mm. Board 1
As a concrete transporting means 4 for accurately performing the replacement of 3, the robot for accurately performing the replacement operation of the substrate may be appropriately used.

Next, the position of the alignment mark 30 is read by the camera 5 on the printing table 2 and the position data is transmitted to the arithmetic unit 50, and the position data and the reference position data stored in advance in the arithmetic unit 50 are stored. To compare. The arithmetic unit 50 calculates the amount of positional deviation between the two and stores it in the arithmetic unit 50 as positional deviation data. Based on the amount of displacement, the reference pin 3 on the alignment table 1
1 is moved by the required amount and set to a more accurate position (Fig. 2
reference).

The reference position data is the print table 2
This is data of the position where the upper alignment mark 30 should be located, and is stored in the arithmetic unit 50 connected to the camera 5. As a method of storing in the arithmetic unit 50, first, the substrate is placed on the printing table 2 and the printing roll 6
Is conveyed to the printing position 10 where is placed, the substrate is brought into contact with the printing roll 6, the ink on the printing roll 6 is transferred onto the substrate, and the reference mark is printed. This reference mark may be read by the camera 5 on the print table 2 and stored in the arithmetic unit 50 as reference position data.

In order to move the reference pin 31 on the alignment table 1 by a necessary amount based on the displacement amount and set it to a more accurate position, the following procedure is performed. That is, the positional deviation data calculated by the arithmetic unit 50 is converted into, for example,
It is transmitted to the reference pin position adjusting motor 33, and the reference pin position adjusting motor 33 is automatically operated to move the reference pin 31 by the amount of position deviation based on the position deviation data and adjust the position of the reference pin 31 ( See FIG. 2). By doing so, the newly loaded substrate 3 is positioned at a more accurate position than the preceding substrate 13.

On the other hand, on the printing table 2, the position of the substrate 13 is adjusted on the basis of the positional deviation amount read by the camera to position the substrate 13 at a more accurate position. To adjust the position of the substrate 13, move the printing table 2 to the following XY
There is a method of setting it on the θ movement table 9.

That is, the X / Y / θ moving table 9 is a combination of an X table 90 that moves only in the vertical direction, a Y table 91 that moves only in the horizontal direction, and a θ table 92 that moves only in the rotating direction. is there. The printing table 2 is placed thereon, and the positional deviation data calculated by the arithmetic unit 50 is used as the movement control device for each table provided in the alignment table 1, for example, the X table position adjusting motor 93, Y table position adjusting motor 94,
The table marks are transmitted to the θ table position adjusting motors 95, and these motors are automatically operated to move the respective tables by the amount of positional deviation based on the positional deviation data.
There is a method of aligning 0 with a more accurate position on the printing table 2 to position the substrate 3 (see FIGS. 1 and 2).

The preceding substrate 13 is placed on the printing table 2 and passes through the printing position 11 where it comes into contact with the printing roll 6, the ink for forming a thin film is printed on the substrate 3, and the unloading position 12 of the substrate 3 is reached. The print table 2 is conveyed and carried out by the carry-out device 8, and only the printing table 2 returns to the placement position 10 of the substrate 3.

The above operation is performed every time the substrate is replaced on the printing table 2.

Embodiment 1 1. Using the camera 5 on the print table 2, the reference position data is stored in the arithmetic unit 50. 2. Alignment mark 30 having the same shape as the reference mark
The substrate 13 having been subjected to the step is positioned and placed at an appropriate position on the alignment table 1 by the reference pin 31 and the pusher pin 32. 3. The substrate 13 placed on the alignment table 1
The substrate 13 is lifted by a transport arm that accurately replaces the substrate 13, accurately transported to the printing table 2, and placed at a predetermined position. 4. The alignment mark 30 is read by the camera 5 on the print table 2, the reference position data and the position data of the alignment mark are compared by the arithmetic unit 50, and the positional deviation amount is calculated and stored in the arithmetic unit 50. 5. The positional deviation data is transmitted to the reference pin 31, the reference pin position adjusting motor 33 of the alignment table 1 is operated, and the reference pin 31 is positioned at a more accurate position.
In parallel, the positional deviation data is transmitted to the printing table 2 and the substrate 3 on the printing table 2 is also aligned. 6. The newly loaded substrate 3 is the alignment table 1
Since it is positioned at a more accurate position than the previous time, the amount of movement of the substrate 3 for alignment on the printing table 2 can be small and the time required can be shortened.

[0019]

According to the present invention, the substrate having the alignment mark is pressed against the reference pin to be positioned on the alignment table provided separately from the printing table, and then the substrate is accurately replaced. The substrate is replaced from the alignment table to a predetermined position on the printing table by using a means, then the position of the alignment mark is read by the camera on the printing table, and the position data and the reference position data stored in advance are read. Calculate the amount of positional deviation by comparison, move the reference pin on the alignment table by the required amount based on the amount of positional deviation, and set it to a more accurate position, and press the substrate with the alignment mark on the reference pin. Position it in a predetermined position, and then use a carrier that accurately replaces the substrate. By replacing the substrate on the print table from the Lee placement table, so that positioning a substrate in the correct position on the print table.

Therefore, since the substrate can be positioned almost accurately at a place different from the printing table,
The substrate can be positioned on the printing table in a short time.

[Brief description of drawings]

FIG. 1 is a diagram showing one step of an embodiment of a substrate positioning method of the present invention.

FIG. 2 is a diagram showing an outline of arithmetic processing of a substrate positioning method of the present invention.

FIG. 3 is a diagram showing one step of an embodiment of the substrate positioning method of the present invention.

[Explanation of symbols]

 1 Alignment Table 2 Printing Table 3 Substrate 30 Alignment Mark 31 Reference Pin 32 Pusher Pin 33 Reference Pin Position Adjustment Motor 4 Conveyor 40 Guide Rail 5 Camera 50 Computing Device 6 Printing Roll 7 Carrying Fork 8 Carrying Out Device 9 X / Y / θ Movement Table 90 X table 91 Y table 92 θ table 93 X table position adjusting motor 94 Y table position adjusting motor 95 θ table position adjusting motor 10 Mounting position 11 Printing position 12 Unloading position 13 Board

Claims (1)

[Claims] 1. A substrate having an alignment mark is pressed against a reference pin to be positioned on an alignment table provided separately from the printing table, and then,
The substrate is replaced from the alignment table to a predetermined position on the printing table by using a transporting device that accurately replaces the substrate, and then the position of the alignment mark is read by the camera on the printing table and stored in advance as position data. The positional deviation amount is calculated by comparing it with the reference position data that has been set, and based on the positional deviation amount, the reference pin on the alignment table is moved by a necessary amount and set to a more accurate position. Press the substrate with the alignment mark to and position it at a predetermined position,
Next, it is used in a thin film forming apparatus characterized in that the substrate is positioned at an accurate position on the printing table by replacing the substrate on the printing table from the alignment table by using a transfer means for accurately replacing the substrate. Substrate positioning method.