JP7353436B2 - printing device - Google Patents

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JP7353436B2
JP7353436B2 JP2022117712A JP2022117712A JP7353436B2 JP 7353436 B2 JP7353436 B2 JP 7353436B2 JP 2022117712 A JP2022117712 A JP 2022117712A JP 2022117712 A JP2022117712 A JP 2022117712A JP 7353436 B2 JP7353436 B2 JP 7353436B2
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substrate
support member
transport
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unit
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立雄 蛭川
泰範 亀谷
毅 近藤
光昭 加藤
剛 水越
敦志 鳥居
淳 飯阪
一弘 楠
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本発明は、印刷装置及び対基板作業装置に関する。 The present invention relates to a printing device and a substrate-facing device.

従来、基板に対してスクリーンマスクを用いて粘性流体の印刷処理を行う印刷装置において、スクリーンマスクの自動交換を行うものが知られている。例えば、特許文献1には、下方に突出したロッドと、ロッドを移動させることによりスクリーンマスクを摺動させて本体フレームへの出し入れを行う摺動子と、を備えた印刷装置が記載されている。 2. Description of the Related Art Conventionally, among printing apparatuses that perform printing processing of viscous fluid on a substrate using a screen mask, an apparatus that automatically replaces the screen mask is known. For example, Patent Document 1 describes a printing device that includes a rod that protrudes downward and a slider that slides the screen mask to take it in and out of the main body frame by moving the rod. .

特開平04-107146号公報Japanese Patent Application Publication No. 04-107146

ところで、印刷などの基板に対する作業を行う対基板作業装置では、作業時に基板を支持する基板支持部材を用いる場合がある。そして、作業対象の基板の種類に適した支持部材を用いるようにする場合、基板支持部材の交換が必要になる。しかし、特許文献1の印刷装置では、基板支持部材の交換については考慮されていなかった。 By the way, in a substrate working device that performs work on a board such as printing, a board support member is sometimes used to support the board during the work. When using a support member suitable for the type of substrate to be worked on, it is necessary to replace the substrate support member. However, in the printing apparatus of Patent Document 1, no consideration was given to replacing the substrate support member.

本発明はこのような課題を解決するためになされたものであり、基板支持部材の自動交換を行うことを主目的とする。 The present invention has been made to solve such problems, and its main purpose is to automatically replace the substrate support member.

本発明は、上述した主目的を達成するために以下の手段を採った。 The present invention employs the following means to achieve the above-mentioned main objective.

本発明の印刷装置は、
基板支持部材上に固定された基板に対してスクリーンマスクを用いて粘性流体の印刷処理を行う印刷装置であって、
前記スクリーンマスク及び前記基板支持部材を搬出入する支持部材搬送部と、
前記支持部材搬送部を制御して搬出対象のスクリーンマスクを搬出するマスク搬出処理及び搬入対象の前記スクリーンマスクを搬入するマスク搬入処理を含むマスク交換処理を実行可能であり、前記支持部材搬送部を制御して搬出対象の前記基板支持部材を搬出する支持部材搬出処理及び搬入対象の前記基板支持部材を搬入する支持部材搬入処理とを含む支持部材交換処理を実行可能である交換制御部と、
を備えたものである。
The printing device of the present invention includes:
A printing device that performs printing processing of a viscous fluid on a substrate fixed on a substrate support member using a screen mask,
a support member transport unit that carries in and out the screen mask and the substrate support member;
A mask exchange process including a mask carrying-out process of carrying out the screen mask to be carried out and a mask carrying-in process of carrying in the screen mask to be carried in by controlling the supporting member carrying part, and an exchange control unit capable of executing a support member exchange process including a support member carry-out process in which the substrate support member to be carried out is controlled to be carried out and a support member carry-in process to carry in the substrate support member to be carried in;
It is equipped with the following.

この印刷装置は、スクリーンマスク及び基板支持部材を搬出入する支持部材搬送部を備えている。そして、この印刷装置では、この支持部材搬送部を用いて、基板支持部材の搬出及び搬入を含む支持部材交換処理を実行可能である。したがって、この印刷装置は、基板支持部材の自動交換を行うことができる。また、この印刷装置は、この支持部材搬送部を用いて、スクリーンマスクの搬出及び搬入を行うマスク交換処理を行うこともできる。すなわち、同じ支持部材搬送部を用いて基板支持部材の自動交換とスクリーンマスクの自動交換とを共に行うことができる。したがって、例えば印刷装置がスクリーンマスク交換用の搬送部と基板支持部材交換用の搬送部とを別々に備える場合と比較して、装置構成をコンパクトにすることができる。 This printing apparatus includes a support member transport section that carries in and out the screen mask and the substrate support member. In this printing apparatus, using this support member transport section, it is possible to perform a support member replacement process including carrying out and carrying in the substrate support member. Therefore, this printing apparatus can automatically replace the substrate support member. Moreover, this printing apparatus can also perform a mask exchange process of carrying out and carrying in a screen mask using this support member conveying section. That is, automatic exchange of the substrate support member and automatic exchange of the screen mask can be performed together using the same support member transport section. Therefore, the apparatus configuration can be made more compact than, for example, when the printing apparatus separately includes a transport section for replacing the screen mask and a transport section for replacing the substrate support member.

本発明の対基板作業装置は、
基板支持部材上に固定された基板に対して対基板作業を行う対基板作業装置であって、
前記基板支持部材を搬出入する支持部材搬送部と、
前記基板支持部材を配置可能であり、前記対基板作業を行う際に該配置された基板支持部材により前記基板を固定する基板固定部と、
前記基板固定部に配置された前記基板支持部材を移動させて該基板支持部材の水平方向の位置決めを行う位置決め部と、
前記支持部材搬送部を制御して搬出対象の前記基板支持部材を搬出する支持部材搬出処理と、前記支持部材搬送部を制御して搬入対象の前記基板支持部材を前記基板固定部まで搬送し、前記位置決め部を制御して該搬送された基板支持部材の位置決めを行う支持部材搬入処理と、を含む支持部材交換処理を行う交換制御部と、
を備えたものである。
The board-to-board working device of the present invention includes:
A board-to-board work device that performs board-to-board work on a board fixed on a board support member,
a support member transport unit that transports the substrate support member in and out;
a board fixing unit capable of arranging the board support member, and fixing the board by the arranged board support member when performing the board-to-board work;
a positioning section that moves the substrate support member disposed on the substrate fixing section to horizontally position the substrate support member;
a support member unloading process of controlling the support member transport unit to transport the substrate support member to be transported; and controlling the support member transport unit to transport the board support member to be transported to the substrate fixing unit; a replacement control unit that performs a support member exchange process including a support member carry-in process that controls the positioning unit to position the transported substrate support member;
It is equipped with the following.

この対基板作業装置では、基板支持部材を搬出入する支持部材搬送部を用いて、基板支持部材の搬出及び搬入を含む支持部材交換処理を実行可能である。したがって、この対基板作業装置は、基板支持部材の自動交換を行うことができる。また、この対基板作業装置は、支持部材搬入処理において、位置決め部を用いて搬送された基板支持部材の位置決めを行う。そのため、支持部材搬入処理で搬入された基板支持部材の基板固定部内での位置ずれを抑制できる。なお、本発明の対基板作業装置において、本発明の印刷装置の種々の態様を採用してもよいし、本発明の印刷装置が備える種々の構成を追加してもよい。 In this substrate-to-board working device, it is possible to perform a support member replacement process including carrying in and out of the board support member using a support member conveyance unit that carries in and out the substrate support member. Therefore, this substrate working device can automatically replace the substrate support member. Further, in the support member carrying-in process, this substrate-supporting device positions the transported substrate support member using the positioning section. Therefore, it is possible to suppress the displacement of the substrate support member carried in in the support member carry-in process within the substrate fixing part. Note that, in the substrate-to-board working device of the present invention, various aspects of the printing device of the present invention may be adopted, and various configurations included in the printing device of the present invention may be added.

実装システム10の構成の概略の一例を示す構成図。1 is a configuration diagram showing an example of a schematic configuration of a mounting system 10. FIG. 印刷装置20の印刷処理等を実行する構成の説明図。FIG. 2 is an explanatory diagram of a configuration of a printing device 20 that executes printing processing and the like. 印刷装置20の印刷処理等を実行する構成の斜視図。FIG. 2 is a perspective view of a configuration of a printing device 20 that executes printing processing and the like. 印刷装置20の電気的な接続関係を示すブロック図。FIG. 2 is a block diagram showing electrical connections of the printing device 20. FIG. 基板支持部材70及び搬送治具80の斜視図。FIG. 7 is a perspective view of a substrate support member 70 and a transport jig 80. 印刷処理ルーチンの一例を示すフローチャート。5 is a flowchart showing an example of a print processing routine. スクリーンマスクM及び基板支持部材70の交換処理の様子を示す説明図。FIG. 7 is an explanatory diagram showing how the screen mask M and the substrate support member 70 are replaced. スクリーンマスクM及び基板支持部材70の交換処理の様子を示す説明図。FIG. 7 is an explanatory diagram showing how the screen mask M and the substrate support member 70 are replaced. スクリーンマスクM及び基板支持部材70の交換処理の様子を示す説明図。FIG. 7 is an explanatory diagram showing how the screen mask M and the substrate support member 70 are replaced. 基板Sの搬送、吸着、及び印刷処理の説明図。FIG. 4 is an explanatory diagram of conveyance, adsorption, and printing processing of the substrate S. 支持部材搬入処理と支持部材搬出処理とを並行して行う様子を示す説明図。FIG. 7 is an explanatory diagram illustrating how support member import processing and support member export processing are performed in parallel.

次に、本発明の実施の形態を図面を用いて説明する。図1は、本発明の一実施形態である実装システム10の構成の概略の一例を示す構成図である。図2は、印刷装置20の印刷処理,マスク交換処理,及び支持部材交換処理を実行する構成であるマスク作業部26、第1基板固定部30、第2基板固定部40,処理部50及び収納部60の説明図である。図3は、印刷装置20の印刷処理等を実行する構成であるマスク作業部26、第1基板固定部30、第2基板固定部40及び処理部50の斜視図である。図4は、印刷装置20の電気的な接続関係を示すブロック図である。図5は、基板支持部材70及び搬送治具80の斜視図である。実装システム10は、粘性流体としてのはんだペーストを基板S上に印刷処理する印刷装置20と、電子部品を基板S上に実装する複数の図示しない実装装置と、印刷装置20や実装装置での処理に関する情報を管理する管理コンピュータ(PC)90とを備えている。粘性流体としては、はんだペーストのほか、例えば導電性ペースト、接着剤などが挙げられる。印刷装置20は、搬送された基板Sを固定する基板固定部を2つ有するデュアルレーンの印刷装置に構成されている。また、印刷装置20は、印刷対象を異なる種類の基板Sに変更する段取り替えを行う際に、印刷処理に用いるスクリーンマスクMの自動交換や、基板Sを支持固定する基板支持部材70の搬送治具80を用いた自動交換が可能な装置として構成されている。本実施形態において、左右方向(X軸)、前後方向(Y軸)及び上下方向(Z軸)は、図1~3に示した通りとする。 Next, embodiments of the present invention will be described using the drawings. FIG. 1 is a configuration diagram showing an example of a schematic configuration of a mounting system 10 that is an embodiment of the present invention. FIG. 2 shows a mask working section 26, a first substrate fixing section 30, a second substrate fixing section 40, a processing section 50, and a storage section, which are configured to execute printing processing, mask replacement processing, and support member replacement processing of the printing device 20. 6 is an explanatory diagram of the section 60. FIG. FIG. 3 is a perspective view of the mask working section 26, the first substrate fixing section 30, the second substrate fixing section 40, and the processing section 50, which are the components that execute printing processing and the like of the printing apparatus 20. FIG. 4 is a block diagram showing the electrical connections of the printing device 20. As shown in FIG. FIG. 5 is a perspective view of the substrate support member 70 and the transport jig 80. The mounting system 10 includes a printing device 20 that prints solder paste as a viscous fluid onto a substrate S, a plurality of mounting devices (not shown) that mounts electronic components on the substrate S, and processing in the printing device 20 and the mounting device. and a management computer (PC) 90 that manages information regarding. Examples of the viscous fluid include solder paste, conductive paste, adhesive, and the like. The printing device 20 is configured as a dual-lane printing device having two substrate fixing parts for fixing the transported substrate S. In addition, when performing setup change to change the printing target to a different type of substrate S, the printing device 20 also automatically replaces the screen mask M used in the printing process, and provides transportation control for the substrate support member 70 that supports and fixes the substrate S. It is configured as a device that can be automatically replaced using a tool 80. In this embodiment, the left-right direction (X-axis), front-back direction (Y-axis), and up-down direction (Z-axis) are as shown in FIGS. 1 to 3.

印刷装置20は、図1~4に示すように、スキージ25を用いてスクリーンマスクM上のはんだをスクリーンマスクMに形成されたパターン孔11,12に押し込むことによりそのパターン孔を介して下方の基板Sにはんだペーストを塗布(印刷)する装置である。印刷装置20は、制御部21と、印刷処理部22と、マスク作業部26と、第1基板固定部30と、第2基板固定部40と、処理部50と、収納部60とを備えている。また、印刷装置20は、表示画面が表示され作業者による各種入力操作が可能な操作パネルと、LANに接続された機器と通信を行う通信部とを備えている。 As shown in FIGS. 1 to 4, the printing device 20 uses a squeegee 25 to push the solder on the screen mask M into the pattern holes 11 and 12 formed in the screen mask M, thereby applying the solder downward through the pattern holes. This is a device that applies (prints) solder paste to a substrate S. The printing device 20 includes a control section 21, a print processing section 22, a mask working section 26, a first substrate fixing section 30, a second substrate fixing section 40, a processing section 50, and a storage section 60. There is. The printing device 20 also includes an operation panel on which a display screen is displayed and on which various input operations can be performed by the operator, and a communication section that communicates with devices connected to the LAN.

制御部21は、CPUを中心とするマイクロプロセッサとして構成されており、処理プログラムを記憶するROM、作業領域として用いられるRAM、各種データを記憶するHDDなどを備えている。 The control unit 21 is configured as a microprocessor centered on a CPU, and includes a ROM that stores processing programs, a RAM that is used as a work area, and an HDD that stores various data.

印刷処理部22は、印刷装置20の上段に配設されており、スクリーンマスクMを用いて粘性流体を基板S上に印刷処理するユニットである。印刷処理部22は、図4に示すように、印刷ヘッド23と、ヘッド移動部24と、スキージ25と、搬送ロッド25aとを備えている。印刷装置20は、スクリーンマスクM上へはんだペーストを加圧供給する印刷ヘッド23を備えている。ヘッド移動部24は、印刷ヘッド23を所定の印刷方向(前後方向)に移動するものであり、前後方向に形成されたガイドとガイドに沿って移動するスライダとスライダを駆動するモータとを備えている。ヘッド移動部24には、印刷ヘッド23を上下動させる機構も配設されている。スキージ25は、上下動可能に印刷ヘッド23に配設されている。このスキージ25は、所定方向(図1のX方向)に長い板状の部材であり、パターン孔11,12よりも長い長さに形成されている。搬送ロッド25aは、図示しないモーターにより昇降可能に印刷ヘッド23に配設されている。この搬送ロッド25aは、スキージ25よりも下方に突出した状態でヘッド移動部24により前後に移動することで、スクリーンマスクMや搬送治具80を前後に押して搬送する。 The print processing section 22 is disposed at the upper stage of the printing device 20, and is a unit that prints viscous fluid onto the substrate S using the screen mask M. As shown in FIG. 4, the print processing section 22 includes a print head 23, a head moving section 24, a squeegee 25, and a conveyance rod 25a. The printing device 20 includes a print head 23 that supplies solder paste onto the screen mask M under pressure. The head moving unit 24 moves the print head 23 in a predetermined printing direction (front-back direction), and includes a guide formed in the front-back direction, a slider that moves along the guide, and a motor that drives the slider. There is. The head moving section 24 is also provided with a mechanism for moving the print head 23 up and down. The squeegee 25 is disposed on the print head 23 so as to be movable up and down. This squeegee 25 is a plate-shaped member that is long in a predetermined direction (X direction in FIG. 1), and is formed to have a longer length than the pattern holes 11 and 12. The transport rod 25a is arranged on the print head 23 so as to be movable up and down by a motor (not shown). The transport rod 25a is moved back and forth by the head moving unit 24 while protruding below the squeegee 25, thereby pushing and transporting the screen mask M and the transport jig 80 back and forth.

マスク作業部26は、印刷処理部22と、第1基板固定部30及び第2基板固定部40との間に配設されており、スクリーンマスクMを固定保持するユニットである。スクリーンマスクMは、所望の配線パターンが形成された、例えば金属の薄板であり、枠体(マスク固定部27)に所定のテンションで固定されている。スクリーンマスクMには、印刷処理の第1,第2レーン(第1,第2基板固定部30,40)の基板Sにそれぞれ配線パターンを形成するパターン孔11,12が形成されている。スクリーンマスクMの下面には位置認識用の識別部(例えばマーク)が形成されている。マスク作業部26は、マスク固定部27と、位置調整部28(図4参照)と、搬送レール29(図4参照)とを備えている。マスク固定部27は、枠体にはめ込まれた状態のスクリーンマスクMを位置決めして水平な姿勢で支持固定するものである。位置調整部28は、第1基板固定部30又は第2基板固定部40に固定された基板Sに対して適正な位置にパターン孔11,12が配置されるようマスク固定部27をXY方向に位置調整するものである。搬送レール29は、前後方向に伸びた左右1対のレールであり、搬送ロッド25aに押されたスクリーンマスクMや搬送治具80が前後方向に沿って移動するようにこれらをガイドする。 The mask working section 26 is disposed between the print processing section 22 and the first substrate fixing section 30 and the second substrate fixing section 40, and is a unit that fixes and holds the screen mask M. The screen mask M is, for example, a thin metal plate on which a desired wiring pattern is formed, and is fixed to a frame (mask fixing part 27) with a predetermined tension. Pattern holes 11 and 12 are formed in the screen mask M to form wiring patterns on the substrates S of the first and second lanes (first and second substrate fixing parts 30 and 40) of the printing process, respectively. An identification portion (for example, a mark) for position recognition is formed on the lower surface of the screen mask M. The mask working section 26 includes a mask fixing section 27, a position adjusting section 28 (see FIG. 4), and a transport rail 29 (see FIG. 4). The mask fixing part 27 positions the screen mask M fitted in the frame and supports and fixes it in a horizontal position. The position adjustment section 28 moves the mask fixing section 27 in the XY directions so that the pattern holes 11 and 12 are arranged at appropriate positions with respect to the substrate S fixed to the first substrate fixing section 30 or the second substrate fixing section 40. This is to adjust the position. The transport rails 29 are a pair of left and right rails extending in the front-rear direction, and guide the screen mask M and the transport jig 80 pushed by the transport rod 25a so that they move along the front-rear direction.

第1基板固定部30は、マスク作業部26の下方に配設され、基板Sを搬入し、搬入した基板Sを位置決めして支持し、所定の配線パターンが形成されたスクリーンマスクMに接触,離間させるユニットである。第1基板固定部30は、印刷処理の第1レーンを構成する。第1基板固定部30は、基板搬送コンベア31と、基板ガイド32と、基板ガイド移動部33(図4参照)と、支持台昇降部35と、固定部昇降部36と、支持台37と、Y軸押圧部38と、Z軸クランプ部39と、を備えている。基板搬送コンベア31は、図2に示すように、1対のサイドフレーム30bの各々に設けられたコンベヤベルトと、コンベヤベルトを周回駆動させるベルト周回装置とを備えている。なお、印刷装置20は、図示は省略したが、基板搬送コンベア31の基板搬送経路の上流側及び下流側(図1の左右側)にもそれぞれ搬入コンベアと搬出コンベアとが内設されている。基板ガイド32は、1対のサイドフレーム30bの各々の上面に設けられた板状部材である。基板ガイド移動部33は、1対のサイドフレーム30bを前後方向に移動させて互いに接近・離間させる機構である。これにより、基板ガイド32も前後方向に移動し、基板Sの上面と基板ガイド32の上面とが面一の状態で基板Sを挟み固定する。支持台昇降部35は、第1基板固定部30の本体30aに対して支持台37を昇降する機構であり、支持台37を上下方向に導きこれを支持する支柱と、支柱を上下動させる駆動モータとを備える。支持台37は、基板支持部材70を配置可能な部材である。基板支持部材70は、基板Sに応じて交換される。 The first board fixing part 30 is disposed below the mask working part 26, carries in the board S, positions and supports the carried board S, contacts the screen mask M on which a predetermined wiring pattern is formed, and This is a unit that separates them. The first substrate fixing section 30 constitutes a first lane of printing processing. The first substrate fixing section 30 includes a substrate conveyor 31, a substrate guide 32, a substrate guide moving section 33 (see FIG. 4), a support platform elevating section 35, a fixed section elevating section 36, a support platform 37, It includes a Y-axis pressing section 38 and a Z-axis clamping section 39. As shown in FIG. 2, the substrate conveyor 31 includes a conveyor belt provided on each of the pair of side frames 30b, and a belt rotation device that drives the conveyor belt in rotation. Note that although not shown in the drawings, the printing apparatus 20 is also provided with an input conveyor and an output conveyor on the upstream and downstream sides (left and right sides in FIG. 1) of the substrate conveyance path of the substrate conveyor 31, respectively. The board guide 32 is a plate-like member provided on the upper surface of each of the pair of side frames 30b. The board guide moving unit 33 is a mechanism that moves the pair of side frames 30b in the front-rear direction to approach and separate them from each other. As a result, the substrate guide 32 also moves in the front-back direction, and the upper surface of the substrate S and the upper surface of the substrate guide 32 sandwich and fix the substrate S in a state where they are flush with each other. The support platform elevating section 35 is a mechanism for raising and lowering the support platform 37 relative to the main body 30a of the first board fixing section 30, and includes a column that guides and supports the support platform 37 in the vertical direction, and a drive that moves the column up and down. and a motor. The support stand 37 is a member on which the substrate support member 70 can be placed. The substrate support member 70 is replaced depending on the substrate S.

基板支持部材70は、支持台37上に配置され、図示しない減圧装置に配管で接続されて、負圧により基板Sを下面側から支持しつつ吸着固定する部材である。基板支持部材70は、図5に示すように、本体部70aと、本体部70aの左右から突出するように配設された円柱状の一対の突起部71,71と、突起部71よりも前方に配設された一対の突起部72,72と、本体部70aの上面に開口する複数の吸引口73と、傾斜した上面を有し本体部70aの後方に突出している被クランプ部74と、を備えている。また、本体部70aの上面には、位置認識用の識別部75(例えばマーク)と、基板支持部材70の種別認識用のバーコード76とが形成されている。 The substrate support member 70 is a member that is disposed on the support stand 37, is connected to a pressure reducing device (not shown) via piping, and suction-fixes the substrate S while supporting it from the lower surface side using negative pressure. As shown in FIG. 5, the substrate support member 70 includes a main body 70a, a pair of cylindrical protrusions 71, 71 disposed to protrude from the left and right sides of the main body 70a, and a portion in front of the protrusion 71. a pair of protrusions 72, 72 disposed in the main body 70a, a plurality of suction ports 73 opening on the upper surface of the main body 70a, a clamped portion 74 having an inclined upper surface and protruding rearward of the main body 70a, It is equipped with Further, an identification portion 75 (for example, a mark) for position recognition and a barcode 76 for recognition of the type of the substrate support member 70 are formed on the upper surface of the main body portion 70a.

固定部昇降部36は、装置本体に対して第1基板固定部30の全体を昇降する機構であり、第1基板固定部30の本体を上下方向に導きこれを支持する支柱と、支柱を上下動させる駆動モータとを備える。Y軸押圧部38(図2参照)は、基板支持部材70の位置決めに用いられる機構であり、支持台37に配設されている。Y軸押圧部38は、前後方向に移動可能であり基板支持部材70を後方に押圧して移動させるブロック状の本体と、本体を前後に移動させる図示しないシリンダーなどの駆動機構とを備えている。また、Y軸押圧部38は基板支持部材70への負圧の供給機構も兼ねており、本体の後方には、図示しない減圧装置に配管で接続された吸引口が配設されている。Y軸押圧部38の本体が基板支持部材70に押圧されることで、減圧装置から吸引口73までの経路が接続され、負圧が吸引口73に供給される。Z軸クランプ部39は、基板支持部材70の固定に用いられる機構であり、後方のサイドフレーム30bに配設されている。Z軸クランプ部39は、上下方向に移動可能なブロック状の本体と、本体を上下に移動させるシリンダーなどの駆動機構とを備えている。下方に移動したZ軸クランプ部39の本体は、支持台37と共に基板支持部材70の被クランプ部74を挟持して基板支持部材70を固定する。また、Z軸クランプ部39の前方には上下左右方向に沿った支持板39aが配設されている。基板ガイド移動部33によりサイドフレーム30bが前後に移動すると、Z軸クランプ部39及び支持板39aも前後に移動し、これにより基板支持部材70の前後方向の固定位置が変更できるようになっている。 The fixing part elevating part 36 is a mechanism that raises and lowers the entire first board fixing part 30 with respect to the main body of the apparatus, and includes a column that guides the main body of the first board fixing part 30 in the vertical direction and supports it, and a column that moves the column up and down. and a drive motor for moving the motor. The Y-axis pressing unit 38 (see FIG. 2) is a mechanism used for positioning the substrate support member 70, and is disposed on the support base 37. The Y-axis pressing unit 38 is movable in the front-back direction and includes a block-shaped body that presses and moves the substrate support member 70 rearward, and a drive mechanism such as a cylinder (not shown) that moves the body back and forth. . The Y-axis pressing section 38 also serves as a mechanism for supplying negative pressure to the substrate support member 70, and a suction port connected to a pressure reducing device (not shown) via piping is provided at the rear of the main body. By pressing the main body of the Y-axis pressing unit 38 against the substrate support member 70, the path from the pressure reducing device to the suction port 73 is connected, and negative pressure is supplied to the suction port 73. The Z-axis clamp section 39 is a mechanism used to fix the board support member 70, and is disposed on the rear side frame 30b. The Z-axis clamp section 39 includes a block-shaped main body that is movable in the vertical direction and a drive mechanism such as a cylinder that moves the main body up and down. The main body of the Z-axis clamp section 39 that has moved downward clamps the clamped section 74 of the substrate support member 70 together with the support base 37 to fix the substrate support member 70 . Further, in front of the Z-axis clamp section 39, a support plate 39a is provided along the vertical and horizontal directions. When the side frame 30b is moved back and forth by the board guide moving unit 33, the Z-axis clamp unit 39 and the support plate 39a are also moved back and forth, thereby making it possible to change the fixing position of the board support member 70 in the front and back direction. .

第2基板固定部40は、第1基板固定部30に併設され、第1基板固定部30と同様に基板Sを搬送固定するユニットである。第2基板固定部40は、印刷処理の第2レーンを構成する。この第2基板固定部40は、本体40a、サイドフレーム40bを有し、基板搬送コンベア41、基板ガイド42、基板ガイド移動部43、支持台昇降部45、固定部昇降部46、支持台47、Y軸押圧部48及びZ軸クランプ部49を備えている。また、支持台47には基板支持部材70を配置可能である。この第2基板固定部40は、基本構成が第1基板固定部30と同様であるものとしてその説明を割愛する。印刷装置20は、第1基板固定部30と第2基板固定部40との2つの基板搬送装置と、1つのマスク作業部26とを備えた構成となっている。 The second substrate fixing section 40 is a unit that is provided alongside the first substrate fixing section 30 and transports and fixes the substrate S similarly to the first substrate fixing section 30. The second substrate fixing section 40 constitutes a second lane for printing processing. The second substrate fixing section 40 includes a main body 40a, a side frame 40b, a substrate conveyor 41, a substrate guide 42, a substrate guide moving section 43, a support platform elevating section 45, a fixed section elevating section 46, a support platform 47, It includes a Y-axis pressing section 48 and a Z-axis clamping section 49. Furthermore, a substrate support member 70 can be placed on the support stand 47 . The basic configuration of the second board fixing part 40 is the same as that of the first board fixing part 30, so a description thereof will be omitted. The printing apparatus 20 includes two substrate transport devices, a first substrate fixing section 30 and a second substrate fixing section 40, and one mask working section 26.

処理部50は、基板S上に形成された位置認識用の識別部(例えばマークや切り欠き、凹凸、文字など)などを撮像する撮像処理を実行するユニットである。この処理部50は、キャリッジ51と、処理部移動部52と、位置情報取得部55と、を備えている。また、処理部50は、基板搬送コンベア31,41により右方向に搬送された基板Sを左右方向の所定位置で停止させるための基板ストッパー56を備えている。キャリッジ51は、位置情報取得部55と基板ストッパー56とが配設されており、処理部移動部52によってXY方向に移動する。処理部移動部52は、X軸スライダ53とY軸スライダ54とを備えている。Y軸スライダ54は、X軸方向を長手方向とする板状部材であり、装置のY軸方向(前後方向)に形成された支持レール58に沿って移動モータにより移動する。X軸スライダ53は、キャリッジ51が配設されており、Y軸スライダ54上でX軸方向に形成されたガイドに沿って移動モータにより移動する。この処理部50は、第1レーンである第1基板固定部30の領域(第1領域ともいう)と、第2レーンである第2基板固定部40の領域(第2領域ともいう)と、これらから外れた退避領域(図1~3参照)とのいずれかに移動する。位置情報取得部55は、基板Sに形成された識別部と、スクリーンマスクMの下面に形成された識別部と、基板支持部材70の識別部75とを撮像可能であり、撮像によりこれらの位置情報を取得するユニットである。位置情報取得部55は、その下面側と、その上面側とが撮像領域である。基板ストッパー56は、例えば棒状の部材であり、図示しないモーターにより昇降可能にキャリッジ51に配設されている。この基板ストッパー56は、第1,第2基板固定部30,40の上方で支持レール58よりも下方に突出した状態となることにより、基板搬送コンベア31,41により基板支持部材70の上方に搬送された基板Sに当接して、基板Sを停止させる。 The processing section 50 is a unit that executes an imaging process for imaging an identification section for position recognition (for example, a mark, a cutout, an unevenness, a character, etc.) formed on the substrate S. The processing section 50 includes a carriage 51, a processing section moving section 52, and a position information acquisition section 55. Furthermore, the processing section 50 includes a substrate stopper 56 for stopping the substrate S transported rightward by the substrate transport conveyors 31 and 41 at a predetermined position in the left-right direction. The carriage 51 is provided with a position information acquisition section 55 and a substrate stopper 56, and is moved in the XY directions by a processing section moving section 52. The processing section moving section 52 includes an X-axis slider 53 and a Y-axis slider 54. The Y-axis slider 54 is a plate-like member whose longitudinal direction is in the X-axis direction, and is moved by a movement motor along a support rail 58 formed in the Y-axis direction (front-back direction) of the device. The X-axis slider 53 is provided with a carriage 51 and is moved by a movement motor along a guide formed on the Y-axis slider 54 in the X-axis direction. This processing section 50 has an area of the first substrate fixing part 30 (also referred to as a first area) which is a first lane, an area (also referred to as a second area) of the second substrate fixing part 40 which is a second lane, Move to one of the evacuation areas (see FIGS. 1 to 3) outside these areas. The position information acquisition unit 55 is capable of capturing images of the identification portion formed on the substrate S, the identification portion formed on the lower surface of the screen mask M, and the identification portion 75 of the substrate support member 70, and determines the positions of these by imaging. This is a unit that acquires information. The position information acquisition unit 55 has an imaging area on its lower surface side and on its upper surface side. The substrate stopper 56 is, for example, a rod-shaped member, and is disposed on the carriage 51 so as to be movable up and down by a motor (not shown). The substrate stopper 56 is projected above the first and second substrate fixing parts 30 and 40 and below the support rail 58, so that the substrate stopper 56 is transported above the substrate support member 70 by the substrate conveyors 31 and 41. The substrate S is stopped by coming into contact with the substrate S that has been moved.

収納部60は、印刷装置20本体の後方に配設されており、スクリーンマスクMや基板支持部材70の自動交換の際に交換対象(搬入対象及び搬出対象)の部材を収納する機構である。収納部60は、前方が開口した収納箱と、収容箱を昇降させるコンベア昇降部62と、を備えている。収容箱内には、載置された物体を前後方向に搬送する一対の搬送コンベア61が上下に複数段(本実施形態では4段)配設されている。4段の搬送コンベア61のうち3つには、マスク作業部26への搬入対象のスクリーンマスクMと、第1,第2基板固定部30,40への搬入対象の基板支持部材70が取り付けられた搬送治具80と、第1,第2基板固定部30,40からの搬出対象の基板支持部材70を取り付けるための搬送治具80と、が予め作業者によって収納されている。また、残り1段の搬送コンベア61は、マスク作業部26からの搬出対象のスクリーンマスクMを収納できるように空けられている。この収納部60は、コンベア昇降部62によっていずれかの搬送コンベア61の上面が搬送レール29の上面と同じ高さになるようにし、その状態で搬送コンベア61を動作させることで、搬送コンベア61上に載置された部材をマスク作業部26内に搬入したり、マスク作業部26から部材を搬出したりする。 The storage unit 60 is disposed at the rear of the main body of the printing apparatus 20, and is a mechanism for storing members to be replaced (to be carried in and to be carried out) when automatically replacing the screen mask M and the substrate support member 70. The storage unit 60 includes a storage box with an open front and a conveyor elevating section 62 that raises and lowers the storage box. Inside the storage box, a pair of transport conveyors 61 that transport the placed objects in the front-rear direction are arranged in a plurality of stages (four stages in this embodiment) vertically. Screen masks M to be carried into the mask working section 26 and substrate support members 70 to be carried into the first and second substrate fixing parts 30 and 40 are attached to three of the four stages of conveyors 61. A transport jig 80 for attaching the substrate support member 70 to be carried out from the first and second substrate fixing parts 30 and 40 is stored in advance by the operator. Further, the remaining one stage of the conveyor 61 is left open so that it can accommodate the screen mask M to be carried out from the mask working section 26. This storage section 60 is constructed by making the top surface of one of the transport conveyors 61 the same height as the top surface of the transport rail 29 by the conveyor elevating part 62, and operating the transport conveyor 61 in that state. The members placed thereon are carried into the mask working section 26, and the members are carried out from the mask working section 26.

搬送治具80は、搬送コンベア61や搬送ロッド25aを用いて基板支持部材70を搬送可能にするための部材である。搬送治具80は、図5に示すように、枠体85の内側に第1~第4突起保持部81~84が後方から前方に向かってこの順で配設されている。第1~第4突起保持部81~84は、それぞれ左右方向に1対ずつ配設されており、枠体85の下方に伸びる腕部の先端に配設されている。搬送治具80は、図2に示すように、第1,第2突起保持部81,82により基板支持部材70を1つ取り付け可能であり、第3,第4突起保持部83,84により基板支持部材70を1つ取り付け可能である。第1~第4突起保持部81~84の上面には基板支持部材70の突起部71や突起部72の外径よりもわずかに大きい凹部が形成されている。この凹部に突起部71,72が載置されることで、搬送治具80は基板支持部材70の前後方向の位置を固定しつつ搬送可能である。なお、基板支持部材70は、支持する基板Sの種別に応じて複数種が存在するが、いずれも突起部71,72の外径は同じとした。また、第2突起保持部82,第4突起保持部84は前後方向の位置を調整することができ、これにより大きさ(突起部71,突起部72間の距離)の異なる複数種の基板支持部材70を取り付け可能である。搬送治具80は、スクリーンマスクMのマスク固定部27と左右方向の幅が略同一になっている。これにより、搬送治具80はスクリーンマスクMと同じ搬送レール29に沿って搬送可能である。また、搬送治具80とスクリーンマスクMとで同じ収納部60を用いることができるため、搬送治具80とスクリーンマスクMとの前後方向の長さが近い方が好ましい。なお、搬送治具80には枠体85や突出保持部の大きさなどが異なる複数種類が存在していてもよく、枠体85の上面には搬送治具80の種別認識用のバーコード86が取り付けられている。 The transport jig 80 is a member that allows the substrate support member 70 to be transported using the transport conveyor 61 or the transport rod 25a. As shown in FIG. 5, the transport jig 80 has first to fourth protrusion holding parts 81 to 84 arranged inside a frame 85 in this order from the rear to the front. The first to fourth protrusion holding parts 81 to 84 are arranged in pairs in the left-right direction, and are arranged at the tips of the arms extending below the frame 85. As shown in FIG. 2, the transport jig 80 is capable of attaching one substrate support member 70 using first and second protrusion holders 81 and 82, and can attach one substrate support member 70 using third and fourth protrusion holders 83 and 84. One support member 70 can be attached. Recesses slightly larger than the outer diameters of the projections 71 and 72 of the substrate support member 70 are formed on the upper surfaces of the first to fourth projection holders 81 to 84. By placing the protrusions 71 and 72 in the recesses, the transport jig 80 can transport the substrate support member 70 while fixing its position in the front-rear direction. Although there are multiple types of substrate support members 70 depending on the type of substrate S to be supported, the outer diameters of the protrusions 71 and 72 are the same in all of them. In addition, the positions of the second protrusion holding part 82 and the fourth protrusion holding part 84 can be adjusted in the front-rear direction, thereby supporting multiple types of substrates with different sizes (distance between the protrusion 71 and the protrusion 72). Member 70 can be attached. The conveyance jig 80 has substantially the same width in the left-right direction as the mask fixing portion 27 of the screen mask M. Thereby, the transport jig 80 can be transported along the same transport rail 29 as the screen mask M. Further, since the same storage section 60 can be used for the transport jig 80 and the screen mask M, it is preferable that the lengths of the transport jig 80 and the screen mask M in the front-rear direction are similar. Note that the transport jig 80 may have a plurality of types having different sizes of the frame body 85 and the protruding holding portion, and a bar code 86 for recognizing the type of the transport jig 80 is provided on the top surface of the frame body 85. is installed.

次に、印刷装置20がスクリーンマスクMや基板支持部材70の自動交換を実行しつつ基板Sに印刷処理を実行する処理について説明する。図6は、制御部21のCPUが実行する印刷処理ルーチンの一例を示すフローチャートである。図7~9は、スクリーンマスクM及び基板支持部材70の交換処理の様子を示す説明図である。図10は、基板Sの搬送、吸着、及び印刷処理の説明図である。 Next, a description will be given of a process in which the printing apparatus 20 prints on the substrate S while automatically replacing the screen mask M and the substrate support member 70. FIG. 6 is a flowchart showing an example of a print processing routine executed by the CPU of the control unit 21. As shown in FIG. 7 to 9 are explanatory diagrams showing how the screen mask M and the substrate support member 70 are replaced. FIG. 10 is an explanatory diagram of the transportation, adsorption, and printing processing of the substrate S.

印刷処理ルーチンは、制御部21のHDDに記憶され、作業者が印刷装置20に印刷処理を指示したあと実行される。印刷処理ルーチンを実行すると、制御部21のCPUは、まず、マスク作業部26に存在するスクリーンマスクMや第1,第2基板固定部30,40に存在する基板支持部材70の交換処理、すなわち段取り替えが必要か否かを判定する(ステップS100)。制御部21は、例えば管理PC90から取得した印刷処理に関する情報に基づいて、印刷処理に必要なスクリーンマスクMや基板支持部材70が前回と今回とで異なるか否かによって、段取り替えが必要か否かを判定する。なお、段取り替えが必要な場合、図2に示したように収納部60には、搬入対象のスクリーンマスクMと、搬入対象の基板支持部材70が取り付けられた搬送治具80と、搬出対象の基板支持部材70を取り付けるための搬送治具80と、が予め作業者によって収納されているものとする。なお、作業者は、必要に応じてバーコード76やバーコード86をバーコードリーダーで読み取って正しい部材が収納部60に収納されているかの照合を行う。また、作業者は、搬出対象の基板支持部材70を取り付けるための搬送治具80については、予め第2突起保持部82及び第4突起保持部84の前後方向の位置を調整しておく。 The print processing routine is stored in the HDD of the control unit 21 and executed after the operator instructs the printing device 20 to perform print processing. When the print processing routine is executed, the CPU of the control unit 21 first performs a process of replacing the screen mask M existing in the mask working unit 26 and the substrate supporting member 70 existing in the first and second substrate fixing units 30 and 40, that is, It is determined whether a setup change is necessary (step S100). For example, the control unit 21 determines whether setup change is necessary based on the information regarding the printing process acquired from the management PC 90, depending on whether the screen mask M and the substrate support member 70 required for the printing process are different between the previous time and this time. Determine whether In addition, when a setup change is required, as shown in FIG. It is assumed that a transport jig 80 for attaching the substrate support member 70 is stored in advance by the operator. Note that the operator reads the barcode 76 or the barcode 86 with a barcode reader as necessary to check whether the correct member is stored in the storage section 60. Furthermore, the operator adjusts in advance the positions of the second protrusion holding part 82 and the fourth protrusion holding part 84 in the front and back direction of the transport jig 80 for attaching the substrate support member 70 to be carried out.

ステップS100で段取り替えが必要な場合には、制御部21は、搬出対象のスクリーンマスクMのマスク作業部26から搬出するマスク搬出処理を行う(ステップS110)。制御部21は、搬送ロッド25aを移動させて、図7(a)に示すようにマスク作業部26に存在する搬出対象のスクリーンマスクMを搬送レール29に対して摺動させつつ後方に搬送する。また、コンベア昇降部62及び搬送コンベア61を制御して、空いている搬送コンベア61に搬出対象のスクリーンマスクMを載置する。なお、基板支持部材70の交換処理を行うためにはマスク作業部26内のスクリーンマスクMを一度搬出する必要があるため、制御部21は、スクリーンマスクMが交換対象ではない場合でもスクリーンマスクMの搬出処理を行う。 If a setup change is required in step S100, the control unit 21 performs a mask unloading process to unload the screen mask M to be unloaded from the mask working unit 26 (step S110). The control unit 21 moves the transport rod 25a to transport the screen mask M to be carried out, which is present in the mask working unit 26, to the rear while sliding it on the transport rail 29, as shown in FIG. 7(a). . Furthermore, the conveyor elevating section 62 and the transport conveyor 61 are controlled to place the screen mask M to be carried out on the empty transport conveyor 61. Note that in order to perform the replacement process of the substrate support member 70, it is necessary to take out the screen mask M in the mask working section 26 once. Export process will be carried out.

続いて、制御部21は、搬出対象の基板支持部材70を第1,第2基板固定部30,40から搬出する支持部材搬出処理を行う(ステップS120)。制御部21は、まず、コンベア昇降部62及び搬送コンベア61を制御して空の搬送治具80を搬送レール29上に搬入し、さらに搬送ロッド25aを前方に移動させて第1,第2基板固定部30,40の上方まで搬送治具80を搬送する(図7(b))。このとき、制御部21は、第1~第4突起保持部81~84が基板支持部材70の突起部71,72の直上から前後方向(例えば後方)にずれて位置するようにする。続いて、制御部21は、支持台37,47上の基板支持部材70の固定を解除する。具体的には、制御部21は、Y軸押圧部38,48を前方に移動させ、Z軸クランプ部39,49を上方に移動させると共に、基板ガイド移動部33,43により一対のサイドフレーム30b,40bを前後に離間させる(図7(c))。次に、制御部21は、支持台昇降部35,45及び固定部昇降部36,46により支持台37,47上の基板支持部材70をそれぞれ上昇させる(図8(a))。これにより、基板支持部材70の突起部71,72が第1~第4突起保持部81~84よりも上方まで上昇する。続いて、制御部21は、搬送ロッド25aにより搬送治具80を前方に移動させて、支持台37上の基板支持部材70の突起部71,72の真下に第1,第2突起保持部81,82が位置し、支持台47上の基板支持部材70の突起部71,72の真下に第3,第4突起保持部83,84が位置するようにする(図8(b))。そして、制御部21は、支持台37,47を下降させる。これにより、2つの基板支持部材70は突起部71,72が第1~第4突起保持部81~84上に保持されて、搬送治具80に取り付けられた状態になる(図8(c))。その後、制御部21は、固定部昇降部36,46により第1,第2基板固定部30,40全体を下降させて、搬出対象の2つの基板支持部材70が取り付けられた搬送治具80を搬送ロッド25aにより後方に移動させる(図9)。そして、制御部21は、基板支持部材70が取り付けられた搬送治具80をそのまま空いている搬送コンベア61に載置する。以上のように、制御部21は、搬送治具80の前後の搬送と支持台37,47の昇降とを組み合わせて、基板支持部材70の支持部材搬出処理を行う。 Subsequently, the control unit 21 performs a support member unloading process to unload the substrate supporting member 70 to be unloaded from the first and second substrate fixing units 30 and 40 (step S120). The control unit 21 first controls the conveyor elevating unit 62 and the transport conveyor 61 to carry the empty transport jig 80 onto the transport rail 29, and further moves the transport rod 25a forward to move the first and second substrates. The transport jig 80 is transported to above the fixing parts 30 and 40 (FIG. 7(b)). At this time, the control unit 21 causes the first to fourth protrusion holders 81 to 84 to be positioned offset from directly above the protrusions 71 and 72 of the substrate support member 70 in the front-rear direction (eg, rearward). Subsequently, the control unit 21 releases the fixation of the substrate support member 70 on the support stands 37 and 47. Specifically, the control unit 21 moves the Y-axis pressing units 38, 48 forward, moves the Z-axis clamp units 39, 49 upward, and uses the substrate guide moving units 33, 43 to move the pair of side frames 30b. , 40b are spaced back and forth (FIG. 7(c)). Next, the control unit 21 raises the substrate support members 70 on the support stands 37 and 47 using the support stand lift units 35 and 45 and the fixing unit lift units 36 and 46, respectively (FIG. 8(a)). As a result, the protrusions 71 and 72 of the substrate support member 70 rise above the first to fourth protrusion holding parts 81 to 84. Subsequently, the control unit 21 moves the transport jig 80 forward using the transport rod 25a, and places the first and second protrusion holding parts 81 directly below the protrusions 71 and 72 of the substrate support member 70 on the support stand 37. , 82 are positioned, and the third and fourth protrusion holders 83 and 84 are positioned directly below the protrusions 71 and 72 of the substrate support member 70 on the support stand 47 (FIG. 8(b)). Then, the control unit 21 lowers the support stands 37, 47. As a result, the two substrate supporting members 70 are attached to the transport jig 80 with the protrusions 71 and 72 held on the first to fourth protrusion holding parts 81 to 84 (FIG. 8(c)) ). Thereafter, the control unit 21 lowers the entire first and second substrate fixing parts 30, 40 using the fixing part elevating parts 36, 46, and transfers the transport jig 80 to which the two substrate support members 70 to be carried out are attached. It is moved rearward by the transport rod 25a (FIG. 9). Then, the control unit 21 places the transport jig 80 to which the substrate support member 70 is attached on the empty transport conveyor 61 as it is. As described above, the control unit 21 performs the support member unloading process of the substrate support member 70 by combining the forward and backward transport of the transport jig 80 and the lifting and lowering of the support stands 37 and 47.

ステップS120の支持部材搬出処理のあと、制御部21は、搬入対象の基板支持部材70を第1,第2基板固定部30,40に搬入する支持部材搬入処理を行う(ステップS130)。この処理は、上述した支持部材搬出処理と逆の手順で行うことができる。すなわち、制御部21は、まず、搬入対象の基板支持部材70が2つ取り付けられた搬送治具80を前方に搬送し(図9)、基板支持部材70を支持台37,47の上方まで搬送し(図8(c))、支持台37,47を上昇させて突起部71,72を第1~第4突起保持部81~84から浮き上がらせる(図8(b))。続いて、制御部21は、搬送治具80を後方に移動させてから(図8(a))、支持台37,47を下降させる(図7(c))。次に、制御部21は、搬送治具80を後方に移動させて搬出すると共に、支持台37,47上で基板支持部材70を位置決めして固定する(図7(b))。具体的には、まず、制御部21は、基板ガイド移動部33,43により一対のサイドフレーム30b,40bを前後に接近させて、支持板39a,49aを所定位置まで移動させる。支持板39a,49aを移動させる前後方向の位置は、印刷対象の基板Sの種類や基板支持部材70の種類などに応じて予め定められており、例えば管理PC90から取得する。続いて、制御部21は、Y軸押圧部38,48を後方に移動させて、支持台37,47上の基板支持部材70をそれぞれ支持板39a,49aに当接するまで後方に移動させる。このように、支持板39a,49aとY軸押圧部38,48とを前後に移動させることで、搬送治具80から取り外した基板支持部材70の位置が前後にずれていたとしても、基板支持部材70を適切な位置に位置決めすることができる。基板支持部材70をそれぞれ支持板39a,49aに当接させると、制御部21は、Z軸クランプ部39,49を下方に移動させて被クランプ部74を押圧させ、支持台37,47上の基板支持部材70の位置を固定する。以上のように、制御部21は、搬送治具80の前後の搬送と支持台37,47の昇降とを組み合わせて、基板支持部材70の支持部材搬入処理を行う。また、制御部21は、基板支持部材70の前後方向の位置決めを行う。 After the support member carry-out process in step S120, the control unit 21 performs a support member carry-in process to carry the substrate support member 70 to be carried into the first and second substrate fixing parts 30 and 40 (step S130). This process can be performed in the reverse order of the support member unloading process described above. That is, the control unit 21 first transports the transport jig 80 to the front to which two board support members 70 to be carried are attached (FIG. 9), and transports the board support members 70 to above the support stands 37 and 47. (FIG. 8(c)), and the support stands 37, 47 are raised to lift the protrusions 71, 72 from the first to fourth protrusion holding parts 81 to 84 (FIG. 8(b)). Subsequently, the control unit 21 moves the transport jig 80 backward (FIG. 8(a)), and then lowers the support stands 37, 47 (FIG. 7(c)). Next, the control unit 21 moves the transport jig 80 backward and carries it out, and positions and fixes the substrate support member 70 on the support stands 37, 47 (FIG. 7(b)). Specifically, first, the control unit 21 causes the pair of side frames 30b, 40b to approach each other in the front and rear directions using the board guide moving units 33, 43, and moves the support plates 39a, 49a to predetermined positions. The positions in the front-rear direction to which the support plates 39a and 49a are moved are determined in advance according to the type of the substrate S to be printed, the type of the substrate support member 70, and the like, and are obtained from the management PC 90, for example. Subsequently, the control section 21 moves the Y-axis pressing sections 38 and 48 backward, and moves the substrate support members 70 on the support stands 37 and 47 backward until they abut against the support plates 39a and 49a, respectively. In this way, by moving the support plates 39a, 49a and the Y-axis pressing parts 38, 48 back and forth, even if the position of the substrate support member 70 removed from the transport jig 80 is shifted back and forth, the substrate support The member 70 can be positioned in an appropriate position. When the substrate support member 70 is brought into contact with the support plates 39a, 49a, respectively, the control unit 21 moves the Z-axis clamp parts 39, 49 downward to press the clamped part 74, and presses the clamped part 74 on the support bases 37, 47. The position of the substrate support member 70 is fixed. As described above, the control unit 21 performs the support member loading process of the substrate support member 70 by combining the forward and backward transport of the transport jig 80 and the lifting and lowering of the support stands 37 and 47. Further, the control unit 21 positions the substrate support member 70 in the front-rear direction.

ステップS130の支持部材搬出処理のあと、制御部21は、搬入対象のスクリーンマスクMをマスク作業部26に搬入するマスク搬入処理を行う(ステップS140)。制御部21は、マスク搬出処理とは逆の手順でこの処理を行う。すなわち、制御部21はまずコンベア昇降部62及び搬送コンベア61を制御して搬入対象のスクリーンマスクMを搬送レール29上まで搬送し、搬送ロッド25aによりスクリーンマスクMを前方に移動させてマスク作業部26に搬入する。なお、スクリーンマスクMが交換対象でない場合には、マスク搬出処理で搬出したスクリーンマスクMを搬入する。 After the support member carry-out process in step S130, the control unit 21 performs a mask carry-in process to carry the screen mask M to be carried into the mask working unit 26 (step S140). The control unit 21 performs this process in a reverse procedure to the mask carry-out process. That is, the control section 21 first controls the conveyor elevating section 62 and the transport conveyor 61 to transport the screen mask M to be carried in to the top of the transport rail 29, moves the screen mask M forward by the transport rod 25a, and transfers it to the mask working section. 26. Note that if the screen mask M is not to be replaced, the screen mask M carried out in the mask carrying-out process is carried in.

ステップS110~S140の処理を行ってスクリーンマスクM及び基板支持部材70の交換処理が終了すると、制御部21は、搬入した基板支持部材70の左右方向の位置情報を取得し(ステップS150)、取得した位置情報に基づいて基板Sの停止位置の補正値を決定する(ステップS160)。制御部21は、図10(a)に示すようにキャリッジ51を支持台37の上方に移動させ、基板支持部材70の上面の識別部75を位置情報取得部55に撮像させる。そして、制御部21は、位置情報取得部55から取得した画像における識別部75の位置に基づいて、支持台37上での基板支持部材70の左右方向(基板Sの搬送方向)の位置ずれを求め、基板Sの搬送時の停止位置の補正値を導出してRAMなどに記憶する。ここで、支持台37上で基板支持部材70が基板Sの搬送方向にずれていると、基板Sの停止位置によっては基板Sの吸着固定に不具合が生じる場合がある。制御部21は、基板支持部材70の位置が左右方向にずれていた場合には、その分だけ基板Sの停止位置も補正して、基板支持部材70と基板Sとの位置関係が変わらないようにするのである。制御部21は、支持台47上の基板支持部材70についても、同様に位置情報の取得及び補正値の導出を行う。 When the process of replacing the screen mask M and the substrate support member 70 is completed by performing the processes of steps S110 to S140, the control unit 21 acquires the horizontal position information of the substrate support member 70 that has been carried in (step S150). A correction value for the stop position of the substrate S is determined based on the position information obtained (step S160). The control unit 21 moves the carriage 51 above the support stand 37 as shown in FIG. 10A, and causes the position information acquisition unit 55 to image the identification unit 75 on the upper surface of the substrate support member 70. Then, the control unit 21 detects the positional shift of the substrate support member 70 on the support stand 37 in the left-right direction (the conveyance direction of the substrate S) based on the position of the identification unit 75 in the image acquired from the position information acquisition unit 55. Then, a correction value for the stop position of the substrate S during transportation is derived and stored in a RAM or the like. Here, if the substrate support member 70 is shifted in the transport direction of the substrate S on the support stand 37, a problem may occur in suction and fixation of the substrate S depending on the stop position of the substrate S. If the position of the board support member 70 is shifted in the left-right direction, the control unit 21 also corrects the stop position of the board S by that amount so that the positional relationship between the board support member 70 and the board S does not change. It is to make it. The control unit 21 similarly acquires position information and derives correction values for the substrate support member 70 on the support stand 47.

ステップS160の後、又はステップS100で段取り替えが不要な場合には、制御部21は、基板搬送コンベア31を駆動して第1基板固定部30(第1レーン)へ基板Sを搬送させ、基板Sを基板支持部材70に吸着させる(ステップS170)。第1基板固定部30へ基板Sを搬送させる際には、制御部21は、キャリッジ51を前後左右に移動させると共に基板ストッパー56を下降させ、右方に搬送されてきた基板Sを基板支持部材70上の所定の停止位置で停止させる(図10(b))。このとき、ステップS160で導出した補正値があるときには、補正値を加味した位置に基板ストッパー56を移動させる。また、制御部21は、支持台37を上昇させて、停止した基板Sの下面に基板支持部材70の上面を当接させ、減圧装置からの負圧により基板Sを吸着固定する。 After step S160 or if setup change is not required in step S100, the control unit 21 drives the substrate conveyor 31 to convey the substrate S to the first substrate fixing unit 30 (first lane), and S is adsorbed onto the substrate support member 70 (step S170). When conveying the substrate S to the first substrate fixing section 30, the control section 21 moves the carriage 51 back and forth and left and right, lowers the substrate stopper 56, and moves the substrate S conveyed rightward to the substrate support member. It is stopped at a predetermined stop position on 70 (FIG. 10(b)). At this time, if there is a correction value derived in step S160, the substrate stopper 56 is moved to a position that takes the correction value into consideration. Further, the control unit 21 raises the support stand 37, brings the upper surface of the substrate support member 70 into contact with the lower surface of the stopped substrate S, and fixes the substrate S by suction using the negative pressure from the pressure reducing device.

続いて、制御部21は、位置情報取得部55により基板S及びスクリーンマスクMの識別部の撮像処理を行い(ステップS180)、得られた画像に基づいて基板SとスクリーンマスクMのパターン孔11とが適正な位置になるよう位置調整を行う(ステップS190)。そして、制御部21は、第1基板固定部30での印刷を開始する(ステップS200、図10(c))。制御部21は、第1基板固定部30を上昇させて基板Sの上面とスクリーンマスクMの下面に当接させる。そして、第1レーン側のスクリーンマスクM上に印刷ヘッド23を移動し、印刷ヘッド23からはんだペーストを加圧吐出させ、スキージ25を前後に移動させてはんだペーストを基板S上に印刷する。 Subsequently, the control unit 21 performs imaging processing of the identification portions of the substrate S and screen mask M by the position information acquisition unit 55 (step S180), and identifies the pattern holes 11 of the substrate S and screen mask M based on the obtained images. The positions are adjusted so that they are at appropriate positions (step S190). Then, the control unit 21 starts printing on the first substrate fixing unit 30 (step S200, FIG. 10(c)). The control unit 21 raises the first substrate fixing unit 30 and brings it into contact with the upper surface of the substrate S and the lower surface of the screen mask M. Then, the print head 23 is moved onto the screen mask M on the first lane side, the solder paste is discharged under pressure from the print head 23, and the squeegee 25 is moved back and forth to print the solder paste onto the substrate S.

第1基板固定部30での印刷処理の後、制御部21は、生産処理が完了したか否かを、次に印刷すべき基板Sがあるか否かに基づいて判定する(ステップS210)。生産処理が完了していないときには、第2基板固定部40を用いて基板Sの搬送やスクリーンマスクMの位置調整、印刷処理などを行う(ステップS220~250)。この処理は、上述した第1基板固定部30での処理(ステップS170~200)と同様であるため、具体的な説明を省略する。ステップS250の後、制御部21は、生産が完了したか否かを判定し(ステップS260)、完了していないときにはステップS100移行の処理を実行する。すなわち、必要に応じて段取り替えを行いながら、第1,第2基板固定部30,40に固定した基板Sへの印刷処理を順次実行する。ステップS210又はS260で生産処理が完了したときには、制御部21は本ルーチンを終了する。 After the printing process in the first substrate fixing unit 30, the control unit 21 determines whether the production process is completed based on whether there is a substrate S to be printed next (step S210). If the production processing is not completed, the second substrate fixing section 40 is used to transport the substrate S, adjust the position of the screen mask M, print processing, etc. (steps S220 to S250). This process is similar to the process (steps S170 to S200) in the first substrate fixing section 30 described above, so a detailed explanation will be omitted. After step S250, the control unit 21 determines whether or not production has been completed (step S260), and if it has not been completed, executes the process of moving on to step S100. That is, the printing process is sequentially performed on the substrates S fixed to the first and second substrate fixing parts 30 and 40, while changing the setup as necessary. When the production process is completed in step S210 or S260, the control unit 21 ends this routine.

ここで、本実施形態の構成要素と本発明の構成要素との対応関係を明らかにする。本実施形態の搬送ロッド25aが本発明の支持部材搬送部に相当し、制御部21が交換制御部に相当する。また、第1,第2基板固定部30,40が基板固定部に相当し、Y軸押圧部38,48,基板ガイド移動部33,43,及び支持板39a,49aが位置決め部に相当し、基板搬送コンベア31,41が基板搬送部に相当し、位置情報取得部55が位置情報取得部に相当し、制御部21及び基板ストッパー56が補正部に相当し、支持台37,47が支持台に相当し、支持台昇降部35,45及び固定部昇降部36,46が支持部材昇降部に相当し、搬送治具80が搬送治具に相当する。 Here, the correspondence between the constituent elements of this embodiment and the constituent elements of the present invention will be clarified. The transport rod 25a of this embodiment corresponds to the support member transport section of the present invention, and the control section 21 corresponds to the exchange control section. Further, the first and second substrate fixing parts 30 and 40 correspond to substrate fixing parts, the Y-axis pressing parts 38 and 48, the substrate guide moving parts 33 and 43, and the support plates 39a and 49a correspond to positioning parts, The substrate transport conveyors 31 and 41 correspond to a substrate transport section, the position information acquisition section 55 corresponds to a position information acquisition section, the control section 21 and the substrate stopper 56 correspond to a correction section, and the support stands 37 and 47 correspond to a support stand. The support platform elevating parts 35, 45 and the fixed part elevating parts 36, 46 correspond to the support member elevating part, and the transport jig 80 corresponds to the transport jig.

以上詳述した実施形態の印刷装置20は、スクリーンマスクM及び基板支持部材70を搬出入する支持部材搬送部(搬送ロッド25a)を備えている。そして、この印刷装置20では、この搬送ロッド25aを用いて、基板支持部材70の搬出及び搬入を含む支持部材交換処理(ステップS120,S130)を実行可能であり、基板支持部材70の自動交換を行うことができる。また、この印刷装置20は、搬送ロッド25aを用いて、スクリーンマスクMの搬出及び搬入を行うマスク交換処理(ステップS110,S140)を行うこともできる。すなわち、同じ搬送ロッド25aを用いて基板支持部材70の自動交換とスクリーンマスクMの自動交換とを共に行うことができる。したがって、例えば印刷装置20がスクリーンマスク交換用の搬送部と基板支持部材交換用の搬送部とを別々に備える場合と比較して、装置構成をコンパクトにすることができる。 The printing apparatus 20 of the embodiment described in detail above includes a support member transport section (transport rod 25a) that carries in and out the screen mask M and the substrate support member 70. In this printing device 20, the support member replacement process (steps S120 and S130) including carrying out and carrying in the substrate support member 70 can be executed using the transport rod 25a, and the automatic exchange of the substrate support member 70 can be performed. It can be carried out. Further, this printing device 20 can also perform a mask exchange process (steps S110 and S140) in which the screen mask M is carried in and out using the transport rod 25a. That is, automatic exchange of the substrate support member 70 and automatic exchange of the screen mask M can be performed together using the same transport rod 25a. Therefore, the apparatus configuration can be made more compact than, for example, when the printing apparatus 20 separately includes a transport section for replacing the screen mask and a transport section for replacing the substrate support member.

また、印刷装置20は、基板支持部材70を配置可能であり、印刷処理を行う際に配置された基板支持部材70により基板Sを固定する第1,第2基板固定部30,40と、第1,第2基板固定部30,40に配置された基板支持部材70を移動させて基板支持部材の水平方向の位置決めを行う位置決め部(Y軸押圧部38,48,基板ガイド移動部33,43,及び支持板39a,49a)と、を備えている。そして、制御部21は、支持部材搬入処理において、搬送ロッド25aを制御して搬入対象の基板支持部材70を第1,第2基板固定部30,40まで搬送し、Y軸押圧部38,48,基板ガイド移動部33,43,及び支持板39a,49aを制御して搬送された基板支持部材70の前後方向の位置決めを行う。したがって、支持部材搬入処理で搬入された基板支持部材70の第1,第2基板固定部30,40内での前後方向の位置ずれを抑制できる。 The printing apparatus 20 also includes first and second substrate fixing parts 30 and 40, which can fix the substrate S by the substrate support member 70 arranged when performing printing processing. 1. A positioning section that moves the substrate support member 70 disposed on the second substrate fixing section 30, 40 and positions the substrate support member in the horizontal direction (Y-axis pressing section 38, 48, substrate guide moving section 33, 43) , and support plates 39a, 49a). In the support member import process, the control unit 21 controls the transport rod 25a to transport the substrate support member 70 to be transported to the first and second substrate fixing parts 30, 40, and the Y-axis pressing parts 38, 48. , the substrate guide moving parts 33, 43, and the support plates 39a, 49a to position the transported substrate support member 70 in the front-rear direction. Therefore, it is possible to suppress the displacement of the substrate support member 70 carried in in the support member carrying process in the front-rear direction within the first and second substrate fixing parts 30 and 40.

さらに、印刷装置20は、第1,第2基板固定部30,40と、基板Sを所定の基板搬送方向(左右方向)に搬送する基板搬送コンベア31,41と、第1,第2基板固定部30,40に配置された基板支持部材70の基板搬送方向の位置に関する位置情報を取得する位置情報取得部55と、を備えている。そして、印刷装置20は、取得された位置情報に基づいて、基板搬送コンベア31,41が基板Sを搬送する際の基板支持部材70上の停止位置を補正する補正部(制御部21及び基板ストッパー56)を備えている。これにより、支持部材搬入処理で第1,第2基板固定部30,40に搬入された基板支持部材70の位置が基板搬送方向にずれていた場合でも、位置情報に基づいて基板Sの停止位置を補正できる。したがって、基板支持部材70による基板Sの固定に不具合が生じるのを抑制できる。 Further, the printing device 20 includes first and second substrate fixing sections 30 and 40, substrate conveyors 31 and 41 that convey the substrate S in a predetermined substrate conveyance direction (left and right direction), and first and second substrate fixing sections 30 and 40, and a position information acquisition section 55 that acquires position information regarding the position of the substrate support member 70 disposed in the sections 30 and 40 in the substrate conveyance direction. Then, the printing device 20 includes a correction unit (control unit 21 and substrate stopper 56). As a result, even if the position of the substrate support member 70 carried into the first and second substrate fixing parts 30 and 40 in the support member carrying process is shifted in the substrate transport direction, the stop position of the substrate S is determined based on the position information. can be corrected. Therefore, problems in fixing the substrate S by the substrate support member 70 can be suppressed.

さらにまた、印刷装置20は、基板支持部材70を配置可能な支持台37,47を有し、印刷処理を行う際に配置された基板支持部材70により基板Sを固定する第1,第2基板固定部30,40と、支持台37,47を昇降させることで支持台37,47に配置された基板支持部材70を昇降させる支持台昇降部35,45及び固定部昇降部36,46と、を備えている。そして、搬送ロッド25aは、基板支持部材70を取り付け可能な搬送治具80を搬出入し、制御部21は、支持部材搬出処理において、搬送ロッド25a及び支持台昇降部35,45,固定部昇降部36,46を制御して、搬送治具80を搬送して第1,第2基板固定部30,40の上方まで搬送し、支持台37,38に配置された搬出対象の基板支持部材70を上昇させて搬送治具80に取り付け、取り付け後の搬送治具80を搬出する処理を行う。また、制御部21は、支持部材搬入処理において、搬送ロッド25a及び支持台昇降部35,45,固定部昇降部36,46を制御して、搬入対象の基板支持部材70が取り付けられた搬送治具80を第1,第2基板固定部30,40の上方まで搬送し、支持台37,47を上昇させて搬入対象の基板支持部材70を搬送治具80から取り外して支持台37,47上に配置し、取り外し後の搬送治具80を搬出する処理を行う。こうすれば、例えば基板支持部材70の形状や大きさが搬送ロッド25aによる搬送に適さない場合でも、搬送治具80を用いて基板支持部材70を搬送することで支持部材交換処理を行うことができる。本実施形態の印刷装置20では、搬送ロッド25aがスクリーンマスクMと基板支持部材70とを共に搬送するが、スクリーンマスクMよりも基板支持部材70は左右方向の幅が小さいため、搬送レール29上を摺動させて基板支持部材70を直接搬送ロッド25aにより搬送することはできない。このようにスクリーンマスクMと基板支持部材70との形状や大きさが異なる場合に、搬送治具80を用いる意義が高い。 Furthermore, the printing device 20 has support stands 37 and 47 on which a substrate support member 70 can be placed, and first and second substrates on which the substrate S is fixed by the substrate support member 70 placed when performing printing processing. Fixing parts 30, 40, support platform elevating parts 35, 45, and fixed part elevating parts 36, 46, which raise and lower the substrate support members 70 disposed on the support stands 37, 47 by raising and lowering the support stands 37, 47, It is equipped with Then, the transport rod 25a carries in and out the transport jig 80 to which the substrate support member 70 can be attached, and the control unit 21 controls the transport rod 25a, the support platform elevating parts 35 and 45, and the fixed part elevating and lowering in the support member transporting process. By controlling the parts 36 and 46, the transport jig 80 is transported to above the first and second substrate fixing parts 30 and 40, and the board support member 70 to be carried out is placed on the support stands 37 and 38. is raised and attached to the transport jig 80, and the mounted transport jig 80 is carried out. In addition, in the support member loading process, the control unit 21 controls the transport rod 25a, the support platform elevating parts 35, 45, and the fixed part elevating parts 36, 46 to The tool 80 is conveyed to above the first and second substrate fixing parts 30, 40, the support stands 37, 47 are raised, and the substrate support member 70 to be carried is removed from the conveyance jig 80 and placed on the support stands 37, 47. The transport jig 80 is disposed in the same place, and the transport jig 80 is transported out after being removed. In this way, even if, for example, the shape or size of the substrate support member 70 is not suitable for transportation by the transportation rod 25a, the support member replacement process can be performed by transporting the substrate support member 70 using the transportation jig 80. can. In the printing apparatus 20 of this embodiment, the transport rod 25a transports the screen mask M and the substrate support member 70 together, but since the substrate support member 70 has a smaller width in the left and right direction than the screen mask M, the transport rod 25a transports the screen mask M and the substrate support member 70. It is not possible to directly transport the substrate support member 70 by the transport rod 25a by sliding the substrate supporting member 70. In this way, when the screen mask M and the substrate support member 70 have different shapes and sizes, the use of the transport jig 80 is highly significant.

そしてまた、印刷装置20は、基板固定部として第1基板固定部30と第2基板固定部40とを有しており、支持部材昇降部として支持台37を昇降させる第1支持部材昇降部(支持台昇降部35及び固定部昇降部36)と、支持台47を昇降させる第2支持部材昇降部(支持台昇降部45及び固定部昇降部46)と、を有している。また、搬送ロッド25aは、基板支持部材70を複数取り付け可能な搬送治具80を搬出入する。そして、制御部21は、支持部材搬出処理において、搬送ロッド25a及び支持台昇降部35,45,固定部昇降部36,46を制御して、搬送治具80を搬入し、支持台37,47に配置された搬出対象の基板支持部材70の各々を上昇させて搬送治具80に取り付け、取り付け後の搬送治具80を搬出する処理を行う。また、制御部21は、支持部材搬入処理において、搬送ロッド25a及び支持台昇降部35,45,固定部昇降部36,46を制御して、支持台37,支持台47にそれぞれ配置する搬入対象の基板支持部材70が取り付けられた搬送治具80を搬入し、支持台37,47を上昇させて搬入対象の基板支持部材70の各々を搬送治具80から取り外して支持台37,47上にそれぞれ配置し、取り外し後の搬送治具80を搬出する処理を行う。これにより、制御部21は、支持台37に配置される基板支持部材70の交換と支持台47に配置される基板支持部材70の交換とを並行して行う。こうすることで、1回の搬送治具80の搬出入で支持台37,47に配置された搬出対象の基板支持部材70を共に搬出でき、1回の搬送治具80の搬出入で支持台37,47に配置する搬入対象の基板支持部材70を共に搬入できるため、支持部材交換処理に要する時間を短縮できる。 The printing apparatus 20 also includes a first substrate fixing section 30 and a second substrate fixing section 40 as a substrate fixing section, and a first support member elevating section (a first support member elevating section for elevating the support table 37 as a supporting member elevating section). It has a support platform elevating section 35 and a fixed section elevating section 36), and a second support member elevating section (supporting platform elevating section 45 and fixed section elevating section 46) that raises and lowers the support platform 47. Further, the transport rod 25a carries in and out a transport jig 80 to which a plurality of substrate support members 70 can be attached. Then, in the support member unloading process, the control unit 21 controls the transport rod 25a, the support platform elevating parts 35, 45, and the fixed part elevating parts 36, 46 to carry in the transport jig 80, Each of the substrate support members 70 to be carried out disposed in is raised and attached to the transport jig 80, and the mounted transport jig 80 is carried out. In addition, in the support member carrying-in process, the control unit 21 controls the transport rod 25a, the support platform elevating parts 35, 45, and the fixing part elevating parts 36, 46 to arrange the objects to be carried in on the support platforms 37 and 47, respectively. The transport jig 80 with the board support members 70 attached thereto is carried in, the support stands 37 and 47 are raised, and each of the board support members 70 to be carried in is removed from the transport jig 80 and placed on the support stands 37 and 47. A process of carrying out the conveyance jig 80 after disposing and removing the conveyance jig 80 is performed. Thereby, the control unit 21 replaces the substrate support member 70 placed on the support stand 37 and the substrate support member 70 placed on the support stand 47 in parallel. By doing this, the substrate supporting members 70 to be carried out placed on the support stands 37 and 47 can be carried out together when the carrying jig 80 is carried in and out once, and the substrate supporting members 70 to be carried out can be carried out together when the carrying jig 80 is carried in and out once. Since the substrate support members 70 to be carried in, which are placed at 37 and 47, can be carried in together, the time required for the support member replacement process can be shortened.

なお、本発明は上述した実施形態に何ら限定されることはなく、本発明の技術的範囲に属する限り種々の態様で実施し得ることはいうまでもない。 It goes without saying that the present invention is not limited to the embodiments described above, and can be implemented in various forms as long as they fall within the technical scope of the present invention.

例えば、上述した実施形態では、制御部21は、2つの基板支持部材70を取り付け可能な搬送治具80を用いて、支持台37に配置される基板支持部材70の交換と支持台47に配置される基板支持部材70の交換とを並行して行ったが、これに限られない。例えば、支持台37,47上のいずれか一方の基板支持部材70のみを交換してもよい。また、この場合、制御部21は、支持部材搬入処理と支持部材搬出処理とを並行して行ってもよい。図11は、支持部材搬入処理と支持部材搬出処理とを並行して行う様子を示す説明図である。ここでは、第2基板固定部40の基板支持部材70を交換する場合について説明する。制御部21は、まず、搬入対象の基板支持部材70が取り付けられた搬送治具80を第2基板固定部40の上方まで搬送する(図11(a))。続いて、制御部21は、支持台47に配置された搬出対象の基板支持部材70を上昇させて搬送治具80に取り付ける(図11(b)。次に、制御部21は、取り付け後の搬送治具80をさらに前方に搬送して支持台47の上方に搬入対象の基板支持部材70を搬送し、支持台47を上昇させて搬入対象の基板支持部材70を搬送治具80から取り外して支持台47上に配置する(図11(c)。そして、制御部21は、取り外し後の搬送治具80(搬出対象の基板支持部材70が取り付けられた搬送治具80)を後方に搬出する。こうすれば、1回の搬送治具80の搬出入で基板支持部材70の搬出と搬入とを行うことができる。したがって、支持部材交換処理に要する時間を短縮できる。 For example, in the embodiment described above, the control unit 21 uses the transport jig 80 to which two substrate support members 70 can be attached, and replaces the substrate support members 70 placed on the support stand 37 and places them on the support stand 47. Although the replacement of the substrate support member 70 was performed in parallel, the present invention is not limited to this. For example, only one of the substrate support members 70 on the support stands 37, 47 may be replaced. Further, in this case, the control unit 21 may perform the support member import process and the support member export process in parallel. FIG. 11 is an explanatory diagram showing how support member import processing and support member export processing are performed in parallel. Here, a case will be described in which the substrate support member 70 of the second substrate fixing section 40 is replaced. The control unit 21 first transports the transport jig 80 to which the substrate support member 70 to be transported is attached to above the second board fixing unit 40 (FIG. 11(a)). Next, the control unit 21 raises the substrate support member 70 to be carried out placed on the support stand 47 and attaches it to the transport jig 80 (FIG. 11(b)). The transport jig 80 is further transported forward to transport the substrate support member 70 to be carried in above the support stand 47, and the support stand 47 is raised to remove the board support member 70 to be carried in from the transport jig 80. The controller 21 then carries out the removed transport jig 80 (the transport jig 80 to which the substrate support member 70 to be carried out is attached) to the rear. In this way, it is possible to carry out and carry in the substrate support member 70 by carrying in and out the transport jig 80 once. Therefore, the time required for the support member replacement process can be shortened.

上述した実施形態では、印刷装置20は、搬送ロッド25aを用いてスクリーンマスクMと基板支持部材70とを共に搬出入可能であったが、これに限られない。基板支持部材70の搬出入を行う支持部材搬送部を備えていれば、少なくとも基板支持部材交換処理を行うことはできる。また、この場合でも、第1,第2基板固定部30,40に配置された基板支持部材70を移動させて基板支持部材の水平方向の位置決めを行うことで、基板支持部材70の第1,第2基板固定部30,40内での前後方向の位置ずれを抑制する効果が得られる。なお、上述した実施形態では基板支持部材70の交換を行う印刷装置20として説明したが、基板支持部材交換処理を行うものであれば、印刷装置に限られない。本発明は、基板支持部材上に固定された基板に対して対基板作業を行う対基板作業装置について、適用可能である。印刷装置以外の対基板作業装置としては、例えば、基板上への部品の実装処理を行う実装装置が挙げられる。また、上述した実施形態では、印刷装置20は、支持部材搬送部として搬送ロッド25aを備えていたが、基板支持部材70の搬出入を行うことができれば、どのような支持部材搬送部を備えていてもよい。例えば、支持部材搬送部は、コンベヤベルトとコンベヤベルトを周回駆動させるベルト周回装置とを備えた支持部材搬送コンベアであってもよい。 In the embodiment described above, the printing apparatus 20 was able to transport the screen mask M and the substrate support member 70 together using the transport rod 25a, but the present invention is not limited to this. If the support member transport section that carries in and out the substrate support member 70 is provided, at least the substrate support member replacement process can be performed. Also in this case, by moving the substrate supporting members 70 disposed on the first and second substrate fixing parts 30 and 40 and positioning the substrate supporting members in the horizontal direction, the first and second substrate supporting members 70 can be moved. The effect of suppressing displacement in the front-rear direction within the second board fixing parts 30 and 40 can be obtained. Note that although the above-described embodiment has been described as the printing apparatus 20 that replaces the substrate support member 70, the present invention is not limited to a printing apparatus as long as it performs the substrate support member replacement process. INDUSTRIAL APPLICATION This invention is applicable to the board|substrate work apparatus which performs board|substrate work on the board|substrate fixed on the board support member. An example of a board-related work device other than a printing device is a mounting device that performs a process of mounting components onto a board. Further, in the embodiment described above, the printing apparatus 20 was equipped with the transport rod 25a as a support member transport unit, but if it is possible to carry in and take out the substrate support member 70, it may be equipped with any kind of support member transport unit. It's okay. For example, the support member conveyance unit may be a support member conveyor including a conveyor belt and a belt rotation device that rotates the conveyor belt.

上述した実施形態では、搬送治具80を用いて基板支持部材70を搬送したが、例えば搬送レール29と搬送ロッド25aとを用いて基板支持部材70を搬送可能であれば、搬送治具80を用いなくてもよい。 In the embodiment described above, the substrate support member 70 is conveyed using the conveyance jig 80. However, if the substrate support member 70 can be conveyed using the conveyance rail 29 and the conveyance rod 25a, for example, the conveyance jig 80 may be used. It doesn't have to be used.

上述した実施形態では、Y軸押圧部38,基板ガイド移動部33,及び支持板39aを用いて基板支持部材70の前後方向の位置決めを行うものとしたが、水平方向の位置決めを行うものであればこれに限られない。例えば、前後方向の位置決めに加えて又は代えて、左右方向の位置決めもおこなってもよい。 In the embodiment described above, the Y-axis pressing section 38, the substrate guide moving section 33, and the support plate 39a are used to position the substrate support member 70 in the front-rear direction, but it is also possible to position the substrate support member 70 in the horizontal direction. However, it is not limited to this. For example, in addition to or instead of positioning in the front-back direction, positioning in the left-right direction may also be performed.

上述した実施形態では、基板支持部材70の突起部71,72は円柱状としたが、搬送治具80への取り付け及び取り外しができればこれに限られない。例えば、突起部は四角柱形状としてもよいし、板状としてもよいし、2本の円柱を隣接させた1つの部材としてもよい。また、突起部の数も、左右に2本ずつとしたが、これに限らず左右の各々に1本や3本以上の突起部があってもよい。 In the embodiment described above, the protrusions 71 and 72 of the substrate support member 70 have a cylindrical shape, but the shape is not limited to this as long as they can be attached to and removed from the transport jig 80. For example, the protrusion may have a rectangular prism shape, a plate shape, or a single member made of two adjacent cylinders. Furthermore, although the number of protrusions is two on each side, the present invention is not limited to this, and there may be one or more protrusions on each of the left and right sides.

上述した実施形態では、第1~第4突起保持部81~84は凹部により突起部71,72を保持したが、搬送治具80への取り付け及び取り外しができればこれに限られない。例えば、搬送治具80が枠体85の内側に突出する一対の板状部材を備えているものとし、この板状部材の上面に突起部71,72を載置することで搬送治具80への基板支持部材70の取り付けを行ってもよい。また、搬送治具80から基板支持部材70を取り外す際には、基板支持部材70の上昇と搬送治具80の搬送とを組み合わせたが、これに限られない。例えば、搬送治具80が、下方に押下可能なボタンと、ボタンの上下に伴って軸回転し上下方向の運動を左右方向の運動に変換するレバーと、レバーの回転に伴って左右方向に移動する板状部材と、を備えた板状部材移動機構を備えていてもよい。この場合、前後一対の板状部材移動機構の板状部材に基板支持部材70を載置して搬送し、例えば搬送ロッド25aなどで一対の板状部材移動機構のボタンを押下して一対の板状部材を左右に離間させ、これにより搬送治具80から基板支持部材70を取り外してもよい。このような機構を採用すれば、搬送治具80から基板支持部材70を取り外す際に搬送治具80を前後に搬送する動作は必要ない。 In the embodiment described above, the first to fourth protrusion holding parts 81 to 84 hold the protrusions 71 and 72 using recessed parts, but the present invention is not limited to this as long as they can be attached to and removed from the transport jig 80. For example, assume that the transport jig 80 is provided with a pair of plate-like members protruding inside the frame 85, and by placing the protrusions 71 and 72 on the upper surface of the plate-like members, the transport jig 80 The substrate support member 70 may be attached. Furthermore, when removing the substrate support member 70 from the transport jig 80, the lifting of the substrate support member 70 and the transport of the transport jig 80 are combined, but the present invention is not limited to this. For example, the transport jig 80 includes a button that can be pressed downward, a lever that rotates on its axis as the button moves up and down and converts the vertical movement into horizontal movement, and moves in the horizontal direction as the lever rotates. A plate-like member moving mechanism may be provided. In this case, the substrate supporting member 70 is placed on the plate-like members of the pair of front and rear plate-like member moving mechanisms and transported, and the pair of plates is moved by pressing the button of the pair of plate-like member moving mechanisms using, for example, the transport rod 25a. The substrate supporting member 70 may be removed from the transport jig 80 by separating the shaped members from side to side. If such a mechanism is adopted, when removing the substrate support member 70 from the transport jig 80, there is no need to carry the transport jig 80 back and forth.

上述した実施形態では、印刷装置20は収納部60を備えるものとしたが、印刷装置20が収納部60を備えなくてもよい。また、印刷装置20は、第1,第2基板固定部30,40を有するデュアルレーンの印刷装置としたが、これに限られない。例えば、印刷装置20は、基板固定部を1つ有するシングルレーンの印刷装置としてもよい。 In the embodiment described above, the printing device 20 is provided with the storage section 60, but the printing device 20 does not need to be provided with the storage section 60. Further, although the printing device 20 is a dual lane printing device having the first and second substrate fixing parts 30 and 40, the present invention is not limited to this. For example, the printing device 20 may be a single-lane printing device having one substrate fixing section.

上述した実施形態では、基板支持部材70は、負圧により基板Sを下面側から支持しつつ吸着固定する部材としたが、基板を固定する部材であればよい。例えば、基板支持部材は、基板支持部材は上面に立設された複数の突起部(バックアップピン)を備えており、基板支持部材がこの突起部により基板Sを下方から支持及び固定してもよい。 In the embodiment described above, the substrate support member 70 is a member that supports the substrate S from the lower surface side using negative pressure and fixes it by suction, but it may be any member that fixes the substrate. For example, the substrate support member may include a plurality of protrusions (backup pins) erected on the upper surface, and the substrate support member may support and fix the substrate S from below using the protrusions. .

本発明は、部品を基板に実装する実装装置や実装装置に関する印刷装置など、基板に対して対基板作業を行う対基板作業装置に利用可能である。 INDUSTRIAL APPLICABILITY The present invention can be used in a board-to-board work device that performs board-to-board work on a board, such as a mounting device that mounts components on a board and a printing device related to the mounting device.

10 実装システム、11,12 パターン孔、20 印刷装置、21 制御部、22 印刷処理部、23 印刷ヘッド、24 ヘッド移動部、25 スキージ、25a 搬送ロッド、26 マスク作業部、27 マスク固定部、28 位置調整部、29 搬送レール、30 第1基板固定部、30a 本体、30b サイドフレーム、31 基板搬送コンベア、32 基板ガイド、33 基板ガイド移動部、35 支持台昇降部、36 固定部昇降部、37 支持台、38 Y軸押圧部、39 Z軸クランプ部、39a 支持板、40 第2基板固定部、40a 本体、40b サイドフレーム、41 基板搬送コンベア、42 基板ガイド、43 基板ガイド移動部、45 支持台昇降部、46 固定部昇降部、47 支持台、48 Y軸押圧部、49 Z軸クランプ部、49a 支持板、50 処理部、51 キャリッジ、52 処理部移動部、53 X軸スライダ、54 Y軸スライダ、55 位置情報取得部、56 基板ストッパー、58 支持レール、60 収納部、61 搬送コンベア、62 コンベア昇降部、70 基板支持部材、70a 本体部、71,72 突起部、73 吸引孔、74 被クランプ部、75 識別部、76 バーコード、80 搬送治具、81~84 第1~第4突起保持部、85 枠体、86 バーコード、90 管理PC、M,M2 スクリーンマスク、S 基板。 10 mounting system, 11, 12 pattern hole, 20 printing device, 21 control unit, 22 print processing unit, 23 print head, 24 head moving unit, 25 squeegee, 25a transport rod, 26 mask working unit, 27 mask fixing unit, 28 Position adjustment part, 29 Transport rail, 30 First board fixing part, 30a Main body, 30b Side frame, 31 Board transport conveyor, 32 Board guide, 33 Board guide moving part, 35 Support platform elevating part, 36 Fixed part elevating part, 37 Support stand, 38 Y-axis pressing section, 39 Z-axis clamp section, 39a support plate, 40 second substrate fixing section, 40a main body, 40b side frame, 41 substrate conveyor, 42 substrate guide, 43 substrate guide moving section, 45 support Platform lifting section, 46 Fixed section lifting section, 47 Support stand, 48 Y-axis pressing section, 49 Z-axis clamp section, 49a Support plate, 50 Processing section, 51 Carriage, 52 Processing section moving section, 53 X-axis slider, 54 Y Axis slider, 55 Position information acquisition section, 56 Substrate stopper, 58 Support rail, 60 Storage section, 61 Transfer conveyor, 62 Conveyor lifting section, 70 Substrate support member, 70a Main body section, 71, 72 Projection section, 73 Suction hole, 74 Clamped part, 75 identification part, 76 barcode, 80 transport jig, 81 to 84 first to fourth protrusion holding part, 85 frame, 86 barcode, 90 management PC, M, M2 screen mask, S board.

Claims (2)

基板支持部材上に固定された基板に対してスクリーンマスクを用いて粘性流体の印刷処理を行う印刷装置であって、
前記基板を第一方向に搬送する基板搬送部と、
前記スクリーンマスク上の前記粘性流体を前記スクリーンマスクに形成されたパターン孔に押し込むスキージを、前記第一方向と直交する方向である第二方向に移動する移動部と、
前記基板支持部材を取り付け可能な搬送治具を収納する収納部と、
前記搬送治具を用いて前記基板支持部材を搬送する支持部材搬送部と、
前記基板支持部材を配置可能な支持台を有し、前記印刷処理を行う際に該配置された基板支持部材により前記基板を固定する基板固定部と、
前記支持台を昇降させることで、該支持台に配置された基板支持部材により固定された前記基板を昇降させて、前記基板を前記スクリーンマスクに接触、離間させる支持部材昇降部と、
前記支持部材搬送部を制御して搬入対象の前記基板支持部材が取り付けられた前記搬送治具を前記収納部から前記第二方向に移動させ、前記支持台の上方まで搬送し、前記支持部材昇降部を制御して該支持台を上昇させることにより、搬入対象の前記基板支持部材を前記搬送治具から該支持台上に配置し、前記搬送治具を搬出する支持部材搬入処理を行う制御部と、
を備えた印刷装置。
A printing device that performs printing processing of a viscous fluid on a substrate fixed on a substrate support member using a screen mask,
a substrate transport unit that transports the substrate in a first direction;
a moving unit that moves a squeegee that pushes the viscous fluid on the screen mask into pattern holes formed in the screen mask in a second direction that is perpendicular to the first direction;
a storage section that stores a transport jig to which the substrate support member can be attached;
a support member transport unit that transports the substrate support member using the transport jig ;
a substrate fixing unit having a support base on which the substrate support member can be placed, and fixing the substrate by the placed substrate support member when performing the printing process;
a support member elevating unit that lifts and lowers the substrate fixed by a substrate support member disposed on the support stand by raising and lowering the support stand, and brings the substrate into contact with and away from the screen mask;
The support member transport unit is controlled to move the transport jig to which the substrate support member to be loaded is attached from the storage unit in the second direction, transport it to above the support table, and raise and lower the support member. a control unit that performs a support member loading process of arranging the substrate support member to be loaded from the transport jig onto the support base by controlling the control unit and raising the support base, and carrying out the transport jig; and,
Printing device with.
記制御部は、前記支持部材搬送部を制御して前記搬送治具を前記支持台の上方まで搬送し、前記支持部材昇降部を制御して搬出対象の前記基板支持部材が配置された前記支持台を上昇させて、搬出対象の前記基板支持部材を前記搬送治具に取り付けることにより搬出対象の前記基板支持部材を搬出する支持部材搬出処理を実行する、
請求項1に記載の印刷装置。
The control unit controls the support member transport unit to transport the transport jig to above the support table , and controls the support member elevating unit to place the substrate support member to be carried out. carrying out a support member carrying out process of carrying out the substrate supporting member to be carried out by raising the support base and attaching the substrate supporting member to be carried out to the transport jig;
The printing device according to claim 1 .
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000114797A (en) 1998-10-08 2000-04-21 Sanyo Electric Co Ltd Work backup device
JP2008166583A (en) 2006-12-28 2008-07-17 Yamaha Motor Co Ltd Backup pin recovering method, backup pin supplying method, operation jig, substrate supporting device, surface mount device, cream solder printing device, and substrate inspection device
JP4199793B2 (en) 2006-09-13 2008-12-17 エルピーダメモリ株式会社 Semiconductor device
JP7186362B2 (en) 2018-03-28 2022-12-09 石原産業株式会社 Titanium oxide particles and method for producing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000114797A (en) 1998-10-08 2000-04-21 Sanyo Electric Co Ltd Work backup device
JP4199793B2 (en) 2006-09-13 2008-12-17 エルピーダメモリ株式会社 Semiconductor device
JP2008166583A (en) 2006-12-28 2008-07-17 Yamaha Motor Co Ltd Backup pin recovering method, backup pin supplying method, operation jig, substrate supporting device, surface mount device, cream solder printing device, and substrate inspection device
JP7186362B2 (en) 2018-03-28 2022-12-09 石原産業株式会社 Titanium oxide particles and method for producing the same

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