JP7113989B2 - Working device for board - Google Patents

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JP7113989B2
JP7113989B2 JP2022007414A JP2022007414A JP7113989B2 JP 7113989 B2 JP7113989 B2 JP 7113989B2 JP 2022007414 A JP2022007414 A JP 2022007414A JP 2022007414 A JP2022007414 A JP 2022007414A JP 7113989 B2 JP7113989 B2 JP 7113989B2
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substrate
support member
transport
board
jig
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立雄 蛭川
泰範 亀谷
毅 近藤
光昭 加藤
剛 水越
敦志 鳥居
淳 飯阪
一弘 楠
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Description

本発明は、印刷装置及び対基板作業装置に関する。 The present invention relates to a printing apparatus and a work apparatus for substrates.

従来、基板に対してスクリーンマスクを用いて粘性流体の印刷処理を行う印刷装置において、スクリーンマスクの自動交換を行うものが知られている。例えば、特許文献１には、下方に突出したロッドと、ロッドを移動させることによりスクリーンマスクを摺動させて本体フレームへの出し入れを行う摺動子と、を備えた印刷装置が記載されている。 2. Description of the Related Art Conventionally, in a printing apparatus for printing a substrate with a viscous fluid using a screen mask, there is known one in which the screen mask is automatically replaced. For example, Patent Literature 1 describes a printing apparatus provided with a downward projecting rod and a slider that slides a screen mask by moving the rod to slide the screen mask in and out of the body frame. .

特開平０４－１０７１４６号公報JP-A-04-107146

ところで、印刷などの基板に対する作業を行う対基板作業装置では、作業時に基板を支持する基板支持部材を用いる場合がある。そして、作業対象の基板の種類に適した支持部材を用いるようにする場合、基板支持部材の交換が必要になる。しかし、特許文献１の印刷装置では、基板支持部材の交換については考慮されていなかった。 By the way, in a substrate-to-board working device that performs an operation such as printing on a substrate, there is a case where a substrate support member for supporting the substrate is used during the operation. When using a support member suitable for the type of substrate to be worked on, it is necessary to replace the substrate support member. However, in the printing apparatus of Patent Document 1, replacement of the substrate support member is not taken into consideration.

本発明はこのような課題を解決するためになされたものであり、基板支持部材の自動交換を行うことを主目的とする。 SUMMARY OF THE INVENTION The present invention has been made to solve such problems, and its main object is to automatically replace a substrate supporting member.

本発明は、上述した主目的を達成するために以下の手段を採った。 The present invention employs the following means in order to achieve the above main object.

本発明の印刷装置は、
基板支持部材上に固定された基板に対してスクリーンマスクを用いて粘性流体の印刷処理を行う印刷装置であって、
前記スクリーンマスク及び前記基板支持部材を搬出入する支持部材搬送部と、
前記支持部材搬送部を制御して搬出対象のスクリーンマスクを搬出するマスク搬出処理及び搬入対象の前記スクリーンマスクを搬入するマスク搬入処理を含むマスク交換処理を実行可能であり、前記支持部材搬送部を制御して搬出対象の前記基板支持部材を搬出する支持部材搬出処理及び搬入対象の前記基板支持部材を搬入する支持部材搬入処理とを含む支持部材交換処理を実行可能である交換制御部と、
を備えたものである。 The printing device of the present invention is
A printing apparatus for printing a viscous fluid using a screen mask on a substrate fixed on a substrate support member,
a support member transport unit for loading and unloading the screen mask and the substrate support member;
A mask exchange process including a mask carrying-out process of carrying out a screen mask to be carried out and a mask carrying-in process of carrying in the screen mask to be carried in by controlling the supporting member carrying part, wherein the supporting member carrying part is a replacement control unit capable of executing a supporting member replacement process including a supporting member carrying-out process of controlling and carrying out the substrate supporting member to be carried out and a supporting member carrying-in process of carrying in the substrate supporting member to be carried in;
is provided.

この印刷装置は、スクリーンマスク及び基板支持部材を搬出入する支持部材搬送部を備えている。そして、この印刷装置では、この支持部材搬送部を用いて、基板支持部材の搬出及び搬入を含む支持部材交換処理を実行可能である。したがって、この印刷装置は、基板支持部材の自動交換を行うことができる。また、この印刷装置は、この支持部材搬送部を用いて、スクリーンマスクの搬出及び搬入を行うマスク交換処理を行うこともできる。すなわち、同じ支持部材搬送部を用いて基板支持部材の自動交換とスクリーンマスクの自動交換とを共に行うことができる。したがって、例えば印刷装置がスクリーンマスク交換用の搬送部と基板支持部材交換用の搬送部とを別々に備える場合と比較して、装置構成をコンパクトにすることができる。 This printing apparatus includes a support member transport section for loading and unloading the screen mask and the substrate support member. In this printing apparatus, the supporting member transfer section can be used to perform supporting member replacement processing including unloading and loading of the substrate supporting member. Therefore, this printing apparatus can automatically replace the substrate support member. In addition, this printing apparatus can also perform a mask exchange process for carrying out and carrying in a screen mask using this support member conveying section. In other words, automatic exchange of the substrate support member and automatic exchange of the screen mask can both be performed using the same support member transfer unit. Therefore, for example, compared with the case where the printing apparatus separately includes a transfer section for screen mask replacement and a transfer section for substrate support member replacement, the apparatus configuration can be made compact.

本発明の対基板作業装置は、
基板支持部材上に固定された基板に対して対基板作業を行う対基板作業装置であって、
前記基板支持部材を搬出入する支持部材搬送部と、
前記基板支持部材を配置可能であり、前記対基板作業を行う際に該配置された基板支持部材により前記基板を固定する基板固定部と、
前記基板固定部に配置された前記基板支持部材を移動させて該基板支持部材の水平方向の位置決めを行う位置決め部と、
前記支持部材搬送部を制御して搬出対象の前記基板支持部材を搬出する支持部材搬出処理と、前記支持部材搬送部を制御して搬入対象の前記基板支持部材を前記基板固定部まで搬送し、前記位置決め部を制御して該搬送された基板支持部材の位置決めを行う支持部材搬入処理と、を含む支持部材交換処理を行う交換制御部と、
を備えたものである。 The board-to-board working device of the present invention includes:
A board-to-board work device for performing board-to-board work on a board fixed on a board support member,
a support member transport unit for loading and unloading the substrate support member;
a substrate fixing part capable of arranging the substrate support member, and fixing the substrate by the arranged substrate support member when performing the work with the substrate;
a positioning unit that moves the substrate supporting member arranged on the substrate fixing unit and positions the substrate supporting member in the horizontal direction;
a supporting member carrying-out process for carrying out the substrate supporting member to be carried out by controlling the supporting member carrying part; and carrying the substrate supporting member to be carried in by controlling the supporting member carrying part to the substrate fixing part; an exchange control unit for performing a support member exchange process including a support member loading process for controlling the positioning unit to position the conveyed substrate support member;
is provided.

この対基板作業装置では、基板支持部材を搬出入する支持部材搬送部を用いて、基板支持部材の搬出及び搬入を含む支持部材交換処理を実行可能である。したがって、この対基板作業装置は、基板支持部材の自動交換を行うことができる。また、この対基板作業装置は、支持部材搬入処理において、位置決め部を用いて搬送された基板支持部材の位置決めを行う。そのため、支持部材搬入処理で搬入された基板支持部材の基板固定部内での位置ずれを抑制できる。なお、本発明の対基板作業装置において、本発明の印刷装置の種々の態様を採用してもよいし、本発明の印刷装置が備える種々の構成を追加してもよい。 In this substrate-supporting working apparatus, a supporting member exchange process including loading and unloading of the substrate supporting member can be performed using the supporting member transfer section for loading and unloading the substrate supporting member. Therefore, this substrate working apparatus can automatically replace the substrate support member. In addition, in the supporting member carrying-in process, the substrate supporting member is positioned using the positioning section. Therefore, it is possible to suppress positional deviation of the substrate supporting member carried in in the supporting member carrying-in process within the substrate fixing portion. It should be noted that various aspects of the printing apparatus of the present invention may be employed in the substrate handling apparatus of the present invention, and various configurations provided in the printing apparatus of the present invention may be added.

実装システム１０の構成の概略の一例を示す構成図。1 is a configuration diagram showing an example of a schematic configuration of a mounting system 10; FIG. 印刷装置２０の印刷処理等を実行する構成の説明図。FIG. 2 is an explanatory diagram of a configuration for executing print processing and the like of the printing apparatus 20; 印刷装置２０の印刷処理等を実行する構成の斜視図。FIG. 2 is a perspective view of a configuration for executing print processing and the like of the printing apparatus 20; 印刷装置２０の電気的な接続関係を示すブロック図。FIG. 2 is a block diagram showing the electrical connection relationship of the printing device 20; 基板支持部材７０及び搬送治具８０の斜視図。4 is a perspective view of a substrate support member 70 and a transport jig 80; FIG. 印刷処理ルーチンの一例を示すフローチャート。4 is a flowchart showing an example of a print processing routine; スクリーンマスクＭ及び基板支持部材７０の交換処理の様子を示す説明図。FIG. 4 is an explanatory diagram showing how the screen mask M and the substrate supporting member 70 are replaced; スクリーンマスクＭ及び基板支持部材７０の交換処理の様子を示す説明図。FIG. 4 is an explanatory diagram showing how the screen mask M and the substrate supporting member 70 are replaced; スクリーンマスクＭ及び基板支持部材７０の交換処理の様子を示す説明図。FIG. 4 is an explanatory diagram showing how the screen mask M and the substrate supporting member 70 are replaced; 基板Ｓの搬送、吸着、及び印刷処理の説明図。4A and 4B are explanatory diagrams of transport, adsorption, and printing processing of the substrate S; FIG. 支持部材搬入処理と支持部材搬出処理とを並行して行う様子を示す説明図。FIG. 11 is an explanatory diagram showing a state in which a supporting member carrying-in process and a supporting member carrying-out process are performed in parallel;

次に、本発明の実施の形態を図面を用いて説明する。図１は、本発明の一実施形態である実装システム１０の構成の概略の一例を示す構成図である。図２は、印刷装置２０の印刷処理，マスク交換処理，及び支持部材交換処理を実行する構成であるマスク作業部２６、第１基板固定部３０、第２基板固定部４０，処理部５０及び収納部６０の説明図である。図３は、印刷装置２０の印刷処理等を実行する構成であるマスク作業部２６、第１基板固定部３０、第２基板固定部４０及び処理部５０の斜視図である。図４は、印刷装置２０の電気的な接続関係を示すブロック図である。図５は、基板支持部材７０及び搬送治具８０の斜視図である。実装システム１０は、粘性流体としてのはんだペーストを基板Ｓ上に印刷処理する印刷装置２０と、電子部品を基板Ｓ上に実装する複数の図示しない実装装置と、印刷装置２０や実装装置での処理に関する情報を管理する管理コンピュータ（ＰＣ）９０とを備えている。粘性流体としては、はんだペーストのほか、例えば導電性ペースト、接着剤などが挙げられる。印刷装置２０は、搬送された基板Ｓを固定する基板固定部を２つ有するデュアルレーンの印刷装置に構成されている。また、印刷装置２０は、印刷対象を異なる種類の基板Ｓに変更する段取り替えを行う際に、印刷処理に用いるスクリーンマスクＭの自動交換や、基板Ｓを支持固定する基板支持部材７０の搬送治具８０を用いた自動交換が可能な装置として構成されている。本実施形態において、左右方向（Ｘ軸）、前後方向（Ｙ軸）及び上下方向（Ｚ軸）は、図１～３に示した通りとする。 Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing an example of a schematic configuration of a mounting system 10 that is an embodiment of the present invention. FIG. 2 shows a mask working unit 26, a first substrate fixing unit 30, a second substrate fixing unit 40, a processing unit 50, and a storage unit 26, which are configured to execute printing processing, mask replacement processing, and support member replacement processing of the printer 20. 6 is an explanatory diagram of a unit 60; FIG. FIG. 3 is a perspective view of the mask working section 26, the first substrate fixing section 30, the second substrate fixing section 40, and the processing section 50, which are configured to execute printing processing and the like of the printer 20. FIG. FIG. 4 is a block diagram showing the electrical connections of the printing device 20. As shown in FIG. FIG. 5 is a perspective view of the substrate support member 70 and the transfer jig 80. As shown in FIG. The mounting system 10 includes a printing device 20 for printing a solder paste as a viscous fluid on a substrate S, a plurality of mounting devices (not shown) for mounting electronic components on the substrate S, and processing in the printing device 20 and the mounting device. and a management computer (PC) 90 that manages information related to. Examples of the viscous fluid include solder paste, conductive paste, adhesives, and the like. The printing device 20 is configured as a dual-lane printing device having two substrate fixing units for fixing the conveyed substrate S. As shown in FIG. In addition, the printing apparatus 20 automatically replaces the screen mask M used in the printing process and transports and fixes the substrate supporting member 70 for supporting and fixing the substrate S when performing a setup change to change the substrate S to be printed to a different type. It is configured as a device capable of automatic replacement using the tool 80 . In this embodiment, the left-right direction (X-axis), front-back direction (Y-axis), and up-down direction (Z-axis) are as shown in FIGS.

印刷装置２０は、図１～４に示すように、スキージ２５を用いてスクリーンマスクＭ上のはんだをスクリーンマスクＭに形成されたパターン孔１１，１２に押し込むことによりそのパターン孔を介して下方の基板Ｓにはんだペーストを塗布（印刷）する装置である。印刷装置２０は、制御部２１と、印刷処理部２２と、マスク作業部２６と、第１基板固定部３０と、第２基板固定部４０と、処理部５０と、収納部６０とを備えている。また、印刷装置２０は、表示画面が表示され作業者による各種入力操作が可能な操作パネルと、ＬＡＮに接続された機器と通信を行う通信部とを備えている。 As shown in FIGS. 1 to 4, the printing apparatus 20 uses a squeegee 25 to press the solder on the screen mask M into the pattern holes 11 and 12 formed in the screen mask M, thereby pushing the solder downward through the pattern holes. This is a device that applies (prints) solder paste to the substrate S. FIG. The printing apparatus 20 includes a control section 21, a print processing section 22, a mask work section 26, a first substrate fixing section 30, a second substrate fixing section 40, a processing section 50, and a storage section 60. there is The printing apparatus 20 also includes an operation panel on which a display screen is displayed and which allows the operator to perform various input operations, and a communication unit that communicates with devices connected to the LAN.

制御部２１は、ＣＰＵを中心とするマイクロプロセッサとして構成されており、処理プログラムを記憶するＲＯＭ、作業領域として用いられるＲＡＭ、各種データを記憶するＨＤＤなどを備えている。 The control unit 21 is configured as a microprocessor centered on a CPU, and includes a ROM that stores processing programs, a RAM that is used as a work area, an HDD that stores various data, and the like.

印刷処理部２２は、印刷装置２０の上段に配設されており、スクリーンマスクＭを用いて粘性流体を基板Ｓ上に印刷処理するユニットである。印刷処理部２２は、図４に示すように、印刷ヘッド２３と、ヘッド移動部２４と、スキージ２５と、搬送ロッド２５ａとを備えている。印刷装置２０は、スクリーンマスクＭ上へはんだペーストを加圧供給する印刷ヘッド２３を備えている。ヘッド移動部２４は、印刷ヘッド２３を所定の印刷方向（前後方向）に移動するものであり、前後方向に形成されたガイドとガイドに沿って移動するスライダとスライダを駆動するモータとを備えている。ヘッド移動部２４には、印刷ヘッド２３を上下動させる機構も配設されている。スキージ２５は、上下動可能に印刷ヘッド２３に配設されている。このスキージ２５は、所定方向（図１のＸ方向）に長い板状の部材であり、パターン孔１１，１２よりも長い長さに形成されている。搬送ロッド２５ａは、図示しないモーターにより昇降可能に印刷ヘッド２３に配設されている。この搬送ロッド２５ａは、スキージ２５よりも下方に突出した状態でヘッド移動部２４により前後に移動することで、スクリーンマスクＭや搬送治具８０を前後に押して搬送する。 The print processing unit 22 is arranged in the upper stage of the printing device 20 and is a unit that prints the viscous fluid onto the substrate S using the screen mask M. As shown in FIG. As shown in FIG. 4, the print processing section 22 includes a print head 23, a head moving section 24, a squeegee 25, and a transport rod 25a. The printing device 20 has a printing head 23 for pressurizing solder paste onto the screen mask M. FIG. The head moving unit 24 moves the print head 23 in a predetermined printing direction (front-rear direction), and includes a guide formed in the front-rear direction, a slider that moves along the guide, and a motor that drives the slider. there is A mechanism for moving the print head 23 up and down is also arranged in the head moving section 24 . The squeegee 25 is arranged on the print head 23 so as to be vertically movable. The squeegee 25 is a plate-like member elongated in a predetermined direction (the X direction in FIG. 1) and is formed to have a length longer than that of the pattern holes 11 and 12 . The transport rod 25a is arranged on the print head 23 so as to be movable up and down by a motor (not shown). The conveying rod 25a protrudes downward from the squeegee 25 and is moved back and forth by the head moving unit 24, thereby pushing the screen mask M and the conveying jig 80 back and forth and conveying them.

マスク作業部２６は、印刷処理部２２と、第１基板固定部３０及び第２基板固定部４０との間に配設されており、スクリーンマスクＭを固定保持するユニットである。スクリーンマスクＭは、所望の配線パターンが形成された、例えば金属の薄板であり、枠体（マスク固定部２７）に所定のテンションで固定されている。スクリーンマスクＭには、印刷処理の第１，第２レーン（第１，第２基板固定部３０，４０）の基板Ｓにそれぞれ配線パターンを形成するパターン孔１１，１２が形成されている。スクリーンマスクＭの下面には位置認識用の識別部（例えばマーク）が形成されている。マスク作業部２６は、マスク固定部２７と、位置調整部２８（図４参照）と、搬送レール２９（図４参照）とを備えている。マスク固定部２７は、枠体にはめ込まれた状態のスクリーンマスクＭを位置決めして水平な姿勢で支持固定するものである。位置調整部２８は、第１基板固定部３０又は第２基板固定部４０に固定された基板Ｓに対して適正な位置にパターン孔１１，１２が配置されるようマスク固定部２７をＸＹ方向に位置調整するものである。搬送レール２９は、前後方向に伸びた左右１対のレールであり、搬送ロッド２５ａに押されたスクリーンマスクＭや搬送治具８０が前後方向に沿って移動するようにこれらをガイドする。 The mask working section 26 is arranged between the print processing section 22 and the first substrate fixing section 30 and the second substrate fixing section 40, and is a unit for fixing and holding the screen mask M. As shown in FIG. The screen mask M is, for example, a metal thin plate on which a desired wiring pattern is formed, and is fixed to a frame (mask fixing portion 27) with a predetermined tension. The screen mask M is formed with pattern holes 11 and 12 for forming wiring patterns on the substrates S of the first and second lanes (first and second substrate fixing portions 30 and 40) of the printing process, respectively. An identification portion (for example, a mark) for position recognition is formed on the lower surface of the screen mask M. As shown in FIG. The mask working section 26 includes a mask fixing section 27, a position adjusting section 28 (see FIG. 4), and a transport rail 29 (see FIG. 4). The mask fixing part 27 positions the screen mask M fitted in the frame and supports and fixes it in a horizontal posture. The position adjustment unit 28 moves the mask fixing unit 27 in the XY directions so that the pattern holes 11 and 12 are arranged at appropriate positions with respect to the substrate S fixed to the first substrate fixing unit 30 or the second substrate fixing unit 40. It is for position adjustment. The conveying rails 29 are a pair of left and right rails extending in the front-rear direction, and guide the screen mask M and the conveying jig 80 pushed by the conveying rods 25a so as to move along the front-rear direction.

第１基板固定部３０は、マスク作業部２６の下方に配設され、基板Ｓを搬入し、搬入した基板Ｓを位置決めして支持し、所定の配線パターンが形成されたスクリーンマスクＭに接触，離間させるユニットである。第１基板固定部３０は、印刷処理の第１レーンを構成する。第１基板固定部３０は、基板搬送コンベア３１と、基板ガイド３２と、基板ガイド移動部３３（図４参照）と、支持台昇降部３５と、固定部昇降部３６と、支持台３７と、Ｙ軸押圧部３８と、Ｚ軸クランプ部３９と、を備えている。基板搬送コンベア３１は、図２に示すように、１対のサイドフレーム３０ｂの各々に設けられたコンベヤベルトと、コンベヤベルトを周回駆動させるベルト周回装置とを備えている。なお、印刷装置２０は、図示は省略したが、基板搬送コンベア３１の基板搬送経路の上流側及び下流側（図１の左右側）にもそれぞれ搬入コンベアと搬出コンベアとが内設されている。基板ガイド３２は、１対のサイドフレーム３０ｂの各々の上面に設けられた板状部材である。基板ガイド移動部３３は、１対のサイドフレーム３０ｂを前後方向に移動させて互いに接近・離間させる機構である。これにより、基板ガイド３２も前後方向に移動し、基板Ｓの上面と基板ガイド３２の上面とが面一の状態で基板Ｓを挟み固定する。支持台昇降部３５は、第１基板固定部３０の本体３０ａに対して支持台３７を昇降する機構であり、支持台３７を上下方向に導きこれを支持する支柱と、支柱を上下動させる駆動モータとを備える。支持台３７は、基板支持部材７０を配置可能な部材である。基板支持部材７０は、基板Ｓに応じて交換される。 The first substrate fixing part 30 is arranged below the mask working part 26, carries in the substrate S, positions and supports the carried-in substrate S, and contacts the screen mask M on which a predetermined wiring pattern is formed. It is a unit to separate. The first substrate fixing part 30 constitutes the first lane of the printing process. The first substrate fixing unit 30 includes a substrate transport conveyor 31, a substrate guide 32, a substrate guide moving unit 33 (see FIG. 4), a support table elevating unit 35, a fixing unit elevating unit 36, a support table 37, A Y-axis pressing portion 38 and a Z-axis clamping portion 39 are provided. As shown in FIG. 2, the substrate transport conveyor 31 includes conveyor belts provided on each of the pair of side frames 30b and a belt circulating device that circulates the conveyor belts. Although not shown, the printing apparatus 20 is also provided with an input conveyor and an output conveyor on the upstream side and downstream side (left and right sides in FIG. 1) of the substrate transport path of the substrate transport conveyor 31, respectively. The board guide 32 is a plate-like member provided on the upper surface of each of the pair of side frames 30b. The board guide moving part 33 is a mechanism for moving the pair of side frames 30b in the front-rear direction to approach and separate from each other. As a result, the substrate guide 32 is also moved in the front-rear direction, and the substrate S is sandwiched and fixed in a state where the upper surface of the substrate S and the upper surface of the substrate guide 32 are flush with each other. The support table elevating unit 35 is a mechanism for elevating the support table 37 with respect to the main body 30a of the first substrate fixing unit 30. The support table 37 is vertically guided and supported by a column, and a drive for vertically moving the column is provided. a motor; The support table 37 is a member on which the substrate support member 70 can be arranged. The substrate support member 70 is replaced according to the substrate S. FIG.

基板支持部材７０は、支持台３７上に配置され、図示しない減圧装置に配管で接続されて、負圧により基板Ｓを下面側から支持しつつ吸着固定する部材である。基板支持部材７０は、図５に示すように、本体部７０ａと、本体部７０ａの左右から突出するように配設された円柱状の一対の突起部７１，７１と、突起部７１よりも前方に配設された一対の突起部７２，７２と、本体部７０ａの上面に開口する複数の吸引口７３と、傾斜した上面を有し本体部７０ａの後方に突出している被クランプ部７４と、を備えている。また、本体部７０ａの上面には、位置認識用の識別部７５（例えばマーク）と、基板支持部材７０の種別認識用のバーコード７６とが形成されている。 The substrate support member 70 is arranged on the support base 37 and is connected to a decompression device (not shown) through a pipe to support and fix the substrate S from the lower surface side by means of negative pressure. As shown in FIG. 5, the substrate support member 70 includes a main body portion 70a, a pair of columnar protrusions 71, 71 arranged to protrude from the left and right sides of the main body portion 70a, a pair of protrusions 72, 72 disposed on the upper surface of the body portion 70a, a plurality of suction ports 73 opening on the upper surface of the main body portion 70a, a clamped portion 74 having an inclined upper surface and protruding rearward from the main body portion 70a, It has An identification portion 75 (for example, a mark) for position recognition and a bar code 76 for type recognition of the substrate support member 70 are formed on the upper surface of the main body portion 70a.

固定部昇降部３６は、装置本体に対して第１基板固定部３０の全体を昇降する機構であり、第１基板固定部３０の本体を上下方向に導きこれを支持する支柱と、支柱を上下動させる駆動モータとを備える。Ｙ軸押圧部３８（図２参照）は、基板支持部材７０の位置決めに用いられる機構であり、支持台３７に配設されている。Ｙ軸押圧部３８は、前後方向に移動可能であり基板支持部材７０を後方に押圧して移動させるブロック状の本体と、本体を前後に移動させる図示しないシリンダーなどの駆動機構とを備えている。また、Ｙ軸押圧部３８は基板支持部材７０への負圧の供給機構も兼ねており、本体の後方には、図示しない減圧装置に配管で接続された吸引口が配設されている。Ｙ軸押圧部３８の本体が基板支持部材７０に押圧されることで、減圧装置から吸引口７３までの経路が接続され、負圧が吸引口７３に供給される。Ｚ軸クランプ部３９は、基板支持部材７０の固定に用いられる機構であり、後方のサイドフレーム３０ｂに配設されている。Ｚ軸クランプ部３９は、上下方向に移動可能なブロック状の本体と、本体を上下に移動させるシリンダーなどの駆動機構とを備えている。下方に移動したＺ軸クランプ部３９の本体は、支持台３７と共に基板支持部材７０の被クランプ部７４を挟持して基板支持部材７０を固定する。また、Ｚ軸クランプ部３９の前方には上下左右方向に沿った支持板３９ａが配設されている。基板ガイド移動部３３によりサイドフレーム３０ｂが前後に移動すると、Ｚ軸クランプ部３９及び支持板３９ａも前後に移動し、これにより基板支持部材７０の前後方向の固定位置が変更できるようになっている。 The fixing part elevating part 36 is a mechanism for elevating the entire first substrate fixing part 30 with respect to the apparatus main body. and a drive motor for moving. The Y-axis pressing portion 38 (see FIG. 2) is a mechanism used for positioning the substrate support member 70 and is arranged on the support base 37 . The Y-axis pressing portion 38 is movable in the front-rear direction and includes a block-shaped main body that pushes the substrate support member 70 backward to move it, and a driving mechanism such as a cylinder (not shown) that moves the main body back-and-forth. . The Y-axis pressing portion 38 also serves as a mechanism for supplying a negative pressure to the substrate support member 70, and a suction port connected to a decompression device (not shown) by a pipe is provided at the rear of the main body. When the body of the Y-axis pressing portion 38 is pressed against the substrate support member 70 , the path from the decompression device to the suction port 73 is connected, and negative pressure is supplied to the suction port 73 . The Z-axis clamp portion 39 is a mechanism used for fixing the substrate support member 70, and is arranged on the rear side frame 30b. The Z-axis clamping part 39 includes a block-shaped main body that can move up and down, and a drive mechanism such as a cylinder that moves the main body up and down. The body of the Z-axis clamp portion 39 that has moved downward clamps the clamped portion 74 of the substrate support member 70 together with the support table 37 to fix the substrate support member 70 . In front of the Z-axis clamping portion 39, a support plate 39a is arranged along the vertical and horizontal directions. When the side frame 30b is moved back and forth by the substrate guide moving portion 33, the Z-axis clamp portion 39 and the support plate 39a are also moved back and forth, so that the fixing position of the substrate support member 70 in the front and back direction can be changed. .

第２基板固定部４０は、第１基板固定部３０に併設され、第１基板固定部３０と同様に基板Ｓを搬送固定するユニットである。第２基板固定部４０は、印刷処理の第２レーンを構成する。この第２基板固定部４０は、本体４０ａ、サイドフレーム４０ｂを有し、基板搬送コンベア４１、基板ガイド４２、基板ガイド移動部４３、支持台昇降部４５、固定部昇降部４６、支持台４７、Ｙ軸押圧部４８及びＺ軸クランプ部４９を備えている。また、支持台４７には基板支持部材７０を配置可能である。この第２基板固定部４０は、基本構成が第１基板固定部３０と同様であるものとしてその説明を割愛する。印刷装置２０は、第１基板固定部３０と第２基板固定部４０との２つの基板搬送装置と、１つのマスク作業部２６とを備えた構成となっている。 The second substrate fixing section 40 is provided side by side with the first substrate fixing section 30 and is a unit that transfers and fixes the substrate S in the same manner as the first substrate fixing section 30 . The second substrate fixing section 40 constitutes a second lane for printing processing. The second board fixing section 40 has a main body 40a and side frames 40b, and includes a board conveying conveyor 41, a board guide 42, a board guide moving section 43, a support table elevating section 45, a fixing section elevating section 46, a support table 47, A Y-axis pressing portion 48 and a Z-axis clamping portion 49 are provided. Also, a substrate support member 70 can be arranged on the support table 47 . The second substrate fixing portion 40 has the same basic configuration as the first substrate fixing portion 30, and the description thereof is omitted. The printing apparatus 20 is configured to include two substrate transfer devices, a first substrate fixing section 30 and a second substrate fixing section 40, and one mask working section 26. As shown in FIG.

処理部５０は、基板Ｓ上に形成された位置認識用の識別部（例えばマークや切り欠き、凹凸、文字など）などを撮像する撮像処理を実行するユニットである。この処理部５０は、キャリッジ５１と、処理部移動部５２と、位置情報取得部５５と、を備えている。また、処理部５０は、基板搬送コンベア３１，４１により右方向に搬送された基板Ｓを左右方向の所定位置で停止させるための基板ストッパー５６を備えている。キャリッジ５１は、位置情報取得部５５と基板ストッパー５６とが配設されており、処理部移動部５２によってＸＹ方向に移動する。処理部移動部５２は、Ｘ軸スライダ５３とＹ軸スライダ５４とを備えている。Ｙ軸スライダ５４は、Ｘ軸方向を長手方向とする板状部材であり、装置のＹ軸方向（前後方向）に形成された支持レール５８に沿って移動モータにより移動する。Ｘ軸スライダ５３は、キャリッジ５１が配設されており、Ｙ軸スライダ５４上でＸ軸方向に形成されたガイドに沿って移動モータにより移動する。この処理部５０は、第１レーンである第１基板固定部３０の領域（第１領域ともいう）と、第２レーンである第２基板固定部４０の領域（第２領域ともいう）と、これらから外れた退避領域（図１～３参照）とのいずれかに移動する。位置情報取得部５５は、基板Ｓに形成された識別部と、スクリーンマスクＭの下面に形成された識別部と、基板支持部材７０の識別部７５とを撮像可能であり、撮像によりこれらの位置情報を取得するユニットである。位置情報取得部５５は、その下面側と、その上面側とが撮像領域である。基板ストッパー５６は、例えば棒状の部材であり、図示しないモーターにより昇降可能にキャリッジ５１に配設されている。この基板ストッパー５６は、第１，第２基板固定部３０，４０の上方で支持レール５８よりも下方に突出した状態となることにより、基板搬送コンベア３１，４１により基板支持部材７０の上方に搬送された基板Ｓに当接して、基板Ｓを停止させる。 The processing unit 50 is a unit that performs an imaging process of capturing an image of an identification unit (for example, a mark, a notch, unevenness, characters, etc.) formed on the substrate S for position recognition. The processing section 50 includes a carriage 51 , a processing section moving section 52 and a position information acquiring section 55 . The processing section 50 also includes a substrate stopper 56 for stopping the substrate S transported rightward by the substrate transport conveyors 31 and 41 at a predetermined position in the left-right direction. The carriage 51 is provided with a position information acquiring section 55 and a substrate stopper 56 and is moved in the XY directions by the processing section moving section 52 . The processing unit moving unit 52 has an X-axis slider 53 and a Y-axis slider 54 . The Y-axis slider 54 is a plate-like member whose longitudinal direction is the X-axis direction, and is moved by a moving motor along a support rail 58 formed in the Y-axis direction (front-rear direction) of the apparatus. The X-axis slider 53 is provided with the carriage 51 and is moved by a movement motor along a guide formed on the Y-axis slider 54 in the X-axis direction. The processing section 50 includes an area for the first substrate fixing section 30 (also referred to as the first area) as the first lane, an area for the second substrate fixing section 40 as the second lane (also referred to as the second area), Move to one of the retreat areas (see FIGS. 1 to 3) outside of these. The position information acquisition unit 55 can capture images of the identification portion formed on the substrate S, the identification portion formed on the lower surface of the screen mask M, and the identification portion 75 of the substrate support member 70, and the positions of these can be determined by imaging. A unit that acquires information. The position information acquisition unit 55 has an imaging area on its lower surface side and its upper surface side. The substrate stopper 56 is, for example, a rod-shaped member, and is arranged on the carriage 51 so as to be movable up and down by a motor (not shown). The substrate stopper 56 projects downward from the support rail 58 above the first and second substrate fixing portions 30 and 40 , so that the substrate transport conveyors 31 and 41 transport the substrate above the substrate support member 70 . The substrate S is brought into contact with the substrate S and stopped.

収納部６０は、印刷装置２０本体の後方に配設されており、スクリーンマスクＭや基板支持部材７０の自動交換の際に交換対象（搬入対象及び搬出対象）の部材を収納する機構である。収納部６０は、前方が開口した収納箱と、収容箱を昇降させるコンベア昇降部６２と、を備えている。収容箱内には、載置された物体を前後方向に搬送する一対の搬送コンベア６１が上下に複数段（本実施形態では４段）配設されている。４段の搬送コンベア６１のうち３つには、マスク作業部２６への搬入対象のスクリーンマスクＭと、第１，第２基板固定部３０，４０への搬入対象の基板支持部材７０が取り付けられた搬送治具８０と、第１，第２基板固定部３０，４０からの搬出対象の基板支持部材７０を取り付けるための搬送治具８０と、が予め作業者によって収納されている。また、残り１段の搬送コンベア６１は、マスク作業部２６からの搬出対象のスクリーンマスクＭを収納できるように空けられている。この収納部６０は、コンベア昇降部６２によっていずれかの搬送コンベア６１の上面が搬送レール２９の上面と同じ高さになるようにし、その状態で搬送コンベア６１を動作させることで、搬送コンベア６１上に載置された部材をマスク作業部２６内に搬入したり、マスク作業部２６から部材を搬出したりする。 The storage unit 60 is disposed at the rear of the main body of the printer 20, and is a mechanism for storing the members to be replaced (to be carried in and out) when the screen mask M and the substrate support member 70 are automatically replaced. The storage unit 60 includes a storage box with an open front, and a conveyor elevating unit 62 for raising and lowering the storage box. In the storage box, a pair of conveyors 61 for transporting the placed objects in the front-rear direction are arranged vertically in a plurality of stages (four stages in this embodiment). A screen mask M to be carried into the mask working section 26 and a substrate supporting member 70 to be carried into the first and second substrate fixing sections 30 and 40 are attached to three of the four conveyors 61. The transfer jig 80 and the transfer jig 80 for attaching the substrate support member 70 to be carried out from the first and second substrate fixing portions 30 and 40 are stored in advance by the operator. Further, the remaining one-stage conveyer 61 is vacant so as to accommodate the screen mask M to be carried out from the mask working section 26 . The storage unit 60 is arranged such that the upper surface of any of the transport conveyors 61 is level with the upper surface of the transport rails 29 by the conveyor lifting/lowering unit 62, and the transport conveyor 61 is operated in this state, whereby the upper surface of the transport conveyor 61 is moved. The member placed in the mask work section 26 is carried into the mask work section 26 and the member is carried out from the mask work section 26 .

搬送治具８０は、搬送コンベア６１や搬送ロッド２５ａを用いて基板支持部材７０を搬送可能にするための部材である。搬送治具８０は、図５に示すように、枠体８５の内側に第１～第４突起保持部８１～８４が後方から前方に向かってこの順で配設されている。第１～第４突起保持部８１～８４は、それぞれ左右方向に１対ずつ配設されており、枠体８５の下方に伸びる腕部の先端に配設されている。搬送治具８０は、図２に示すように、第１，第２突起保持部８１，８２により基板支持部材７０を１つ取り付け可能であり、第３，第４突起保持部８３，８４により基板支持部材７０を１つ取り付け可能である。第１～第４突起保持部８１～８４の上面には基板支持部材７０の突起部７１や突起部７２の外径よりもわずかに大きい凹部が形成されている。この凹部に突起部７１，７２が載置されることで、搬送治具８０は基板支持部材７０の前後方向の位置を固定しつつ搬送可能である。なお、基板支持部材７０は、支持する基板Ｓの種別に応じて複数種が存在するが、いずれも突起部７１，７２の外径は同じとした。また、第２突起保持部８２，第４突起保持部８４は前後方向の位置を調整することができ、これにより大きさ（突起部７１，突起部７２間の距離）の異なる複数種の基板支持部材７０を取り付け可能である。搬送治具８０は、スクリーンマスクＭのマスク固定部２７と左右方向の幅が略同一になっている。これにより、搬送治具８０はスクリーンマスクＭと同じ搬送レール２９に沿って搬送可能である。また、搬送治具８０とスクリーンマスクＭとで同じ収納部６０を用いることができるため、搬送治具８０とスクリーンマスクＭとの前後方向の長さが近い方が好ましい。なお、搬送治具８０には枠体８５や突出保持部の大きさなどが異なる複数種類が存在していてもよく、枠体８５の上面には搬送治具８０の種別認識用のバーコード８６が取り付けられている。 The transport jig 80 is a member that enables the substrate support member 70 to be transported using the transport conveyor 61 and the transport rods 25a. As shown in FIG. 5, the conveying jig 80 has first to fourth projection holding portions 81 to 84 arranged inside a frame 85 in this order from the rear to the front. The first to fourth projection holding portions 81 to 84 are arranged in pairs in the horizontal direction, respectively, and are arranged at the tips of arms extending downward of the frame 85 . As shown in FIG. 2, the transfer jig 80 can mount one substrate supporting member 70 by first and second projection holding portions 81 and 82, and the substrate by third and fourth projection holding portions 83 and 84. One support member 70 can be attached. A concave portion slightly larger than the outer diameter of the projections 71 and 72 of the substrate support member 70 is formed on the upper surfaces of the first to fourth projection holding portions 81 to 84 . By placing the protrusions 71 and 72 in the concave portions, the transport jig 80 can transport the substrate support member 70 while fixing the position in the front-rear direction. Although there are a plurality of types of the substrate support member 70 according to the type of the substrate S to be supported, the protrusions 71 and 72 have the same outer diameter. Further, the positions of the second projection holding portion 82 and the fourth projection holding portion 84 can be adjusted in the front-rear direction, thereby supporting a plurality of types of substrates having different sizes (distances between the projections 71 and 72). A member 70 can be attached. The conveying jig 80 has substantially the same width as the mask fixing portion 27 of the screen mask M in the horizontal direction. Thereby, the conveying jig 80 can be conveyed along the same conveying rails 29 as the screen mask M. Further, since the same storage unit 60 can be used for the conveying jig 80 and the screen mask M, it is preferable that the conveying jig 80 and the screen mask M are close in length in the front-rear direction. It should be noted that there may be a plurality of types of transport jigs 80 having different sizes of frames 85 and projecting holding portions. is installed.

次に、印刷装置２０がスクリーンマスクＭや基板支持部材７０の自動交換を実行しつつ基板Ｓに印刷処理を実行する処理について説明する。図６は、制御部２１のＣＰＵが実行する印刷処理ルーチンの一例を示すフローチャートである。図７～９は、スクリーンマスクＭ及び基板支持部材７０の交換処理の様子を示す説明図である。図１０は、基板Ｓの搬送、吸着、及び印刷処理の説明図である。 Next, a description will be given of a process in which the printing apparatus 20 performs printing on the substrate S while automatically exchanging the screen mask M and the substrate supporting member 70. FIG. FIG. 6 is a flow chart showing an example of a print processing routine executed by the CPU of the control section 21. As shown in FIG. 7 to 9 are explanatory diagrams showing how the screen mask M and the substrate supporting member 70 are replaced. 10A and 10B are explanatory diagrams of the transport, suction, and printing processes of the substrate S. FIG.

印刷処理ルーチンは、制御部２１のＨＤＤに記憶され、作業者が印刷装置２０に印刷処理を指示したあと実行される。印刷処理ルーチンを実行すると、制御部２１のＣＰＵは、まず、マスク作業部２６に存在するスクリーンマスクＭや第１，第２基板固定部３０，４０に存在する基板支持部材７０の交換処理、すなわち段取り替えが必要か否かを判定する（ステップＳ１００）。制御部２１は、例えば管理ＰＣ９０から取得した印刷処理に関する情報に基づいて、印刷処理に必要なスクリーンマスクＭや基板支持部材７０が前回と今回とで異なるか否かによって、段取り替えが必要か否かを判定する。なお、段取り替えが必要な場合、図２に示したように収納部６０には、搬入対象のスクリーンマスクＭと、搬入対象の基板支持部材７０が取り付けられた搬送治具８０と、搬出対象の基板支持部材７０を取り付けるための搬送治具８０と、が予め作業者によって収納されているものとする。なお、作業者は、必要に応じてバーコード７６やバーコード８６をバーコードリーダーで読み取って正しい部材が収納部６０に収納されているかの照合を行う。また、作業者は、搬出対象の基板支持部材７０を取り付けるための搬送治具８０については、予め第２突起保持部８２及び第４突起保持部８４の前後方向の位置を調整しておく。 The print processing routine is stored in the HDD of the control unit 21 and executed after the operator instructs the printing device 20 to perform print processing. When the print processing routine is executed, the CPU of the control unit 21 first performs replacement processing of the screen mask M existing in the mask working unit 26 and the substrate supporting members 70 existing in the first and second substrate fixing units 30 and 40, that is, It is determined whether or not a setup change is necessary (step S100). The control unit 21, for example, based on the information about the printing process acquired from the management PC 90, determines whether the setup change is necessary depending on whether the screen mask M and the substrate supporting member 70 required for the printing process are different from the previous time and this time. determine whether In addition, when a setup change is necessary, as shown in FIG. It is assumed that the transport jig 80 for attaching the substrate support member 70 is stored in advance by the operator. The operator reads the bar code 76 or the bar code 86 with a bar code reader to check whether the correct members are stored in the storage unit 60 as necessary. In addition, the worker adjusts the positions of the second projection holding portion 82 and the fourth projection holding portion 84 in the front-rear direction in advance with respect to the transfer jig 80 for attaching the substrate support member 70 to be unloaded.

ステップＳ１００で段取り替えが必要な場合には、制御部２１は、搬出対象のスクリーンマスクＭのマスク作業部２６から搬出するマスク搬出処理を行う（ステップＳ１１０）。制御部２１は、搬送ロッド２５ａを移動させて、図７（ａ）に示すようにマスク作業部２６に存在する搬出対象のスクリーンマスクＭを搬送レール２９に対して摺動させつつ後方に搬送する。また、コンベア昇降部６２及び搬送コンベア６１を制御して、空いている搬送コンベア６１に搬出対象のスクリーンマスクＭを載置する。なお、基板支持部材７０の交換処理を行うためにはマスク作業部２６内のスクリーンマスクＭを一度搬出する必要があるため、制御部２１は、スクリーンマスクＭが交換対象ではない場合でもスクリーンマスクＭの搬出処理を行う。 If a setup change is required in step S100, the control unit 21 carries out a mask carry-out process for carrying out the screen mask M to be carried out from the mask working unit 26 (step S110). The control unit 21 moves the transport rod 25a to slide the screen mask M to be carried out in the mask working unit 26 on the transport rails 29 as shown in FIG. . Further, by controlling the conveyor lifting section 62 and the transport conveyor 61 , the screen mask M to be carried out is placed on the empty transport conveyor 61 . Since it is necessary to once carry out the screen mask M in the mask working section 26 in order to carry out the replacement process of the substrate support member 70, the control section 21 controls the screen mask M even if the screen mask M is not to be replaced. Carry out processing for carrying out.

続いて、制御部２１は、搬出対象の基板支持部材７０を第１，第２基板固定部３０，４０から搬出する支持部材搬出処理を行う（ステップＳ１２０）。制御部２１は、まず、コンベア昇降部６２及び搬送コンベア６１を制御して空の搬送治具８０を搬送レール２９上に搬入し、さらに搬送ロッド２５ａを前方に移動させて第１，第２基板固定部３０，４０の上方まで搬送治具８０を搬送する（図７（ｂ））。このとき、制御部２１は、第１～第４突起保持部８１～８４が基板支持部材７０の突起部７１，７２の直上から前後方向（例えば後方）にずれて位置するようにする。続いて、制御部２１は、支持台３７，４７上の基板支持部材７０の固定を解除する。具体的には、制御部２１は、Ｙ軸押圧部３８，４８を前方に移動させ、Ｚ軸クランプ部３９，４９を上方に移動させると共に、基板ガイド移動部３３，４３により一対のサイドフレーム３０ｂ，４０ｂを前後に離間させる（図７（ｃ））。次に、制御部２１は、支持台昇降部３５，４５及び固定部昇降部３６，４６により支持台３７，４７上の基板支持部材７０をそれぞれ上昇させる（図８（ａ））。これにより、基板支持部材７０の突起部７１，７２が第１～第４突起保持部８１～８４よりも上方まで上昇する。続いて、制御部２１は、搬送ロッド２５ａにより搬送治具８０を前方に移動させて、支持台３７上の基板支持部材７０の突起部７１，７２の真下に第１，第２突起保持部８１，８２が位置し、支持台４７上の基板支持部材７０の突起部７１，７２の真下に第３，第４突起保持部８３，８４が位置するようにする（図８（ｂ））。そして、制御部２１は、支持台３７，４７を下降させる。これにより、２つの基板支持部材７０は突起部７１，７２が第１～第４突起保持部８１～８４上に保持されて、搬送治具８０に取り付けられた状態になる（図８（ｃ））。その後、制御部２１は、固定部昇降部３６，４６により第１，第２基板固定部３０，４０全体を下降させて、搬出対象の２つの基板支持部材７０が取り付けられた搬送治具８０を搬送ロッド２５ａにより後方に移動させる（図９）。そして、制御部２１は、基板支持部材７０が取り付けられた搬送治具８０をそのまま空いている搬送コンベア６１に載置する。以上のように、制御部２１は、搬送治具８０の前後の搬送と支持台３７，４７の昇降とを組み合わせて、基板支持部材７０の支持部材搬出処理を行う。 Subsequently, the control unit 21 performs a supporting member unloading process for unloading the substrate supporting member 70 to be unloaded from the first and second substrate fixing units 30 and 40 (step S120). The control unit 21 first controls the conveyor lifting unit 62 and the transport conveyor 61 to load the empty transport jig 80 onto the transport rail 29, and then moves the transport rod 25a forward to move the first and second substrates. The transport jig 80 is transported to above the fixed parts 30 and 40 (FIG. 7(b)). At this time, the control unit 21 positions the first to fourth protrusion holding portions 81 to 84 so as to be shifted in the front-rear direction (for example, rearward) from directly above the protrusions 71 and 72 of the substrate support member 70 . Subsequently, the control unit 21 releases the fixation of the substrate support member 70 on the support bases 37 and 47 . Specifically, the control section 21 moves the Y-axis pressing sections 38 and 48 forward, moves the Z-axis clamp sections 39 and 49 upward, and causes the substrate guide moving sections 33 and 43 to move the pair of side frames 30b. , 40b are moved forward and backward (FIG. 7(c)). Next, the control unit 21 raises the substrate support member 70 on the support bases 37, 47 by the support base elevating units 35, 45 and the fixing unit elevating units 36, 46 (FIG. 8A). As a result, the projections 71 and 72 of the substrate support member 70 rise above the first to fourth projection holding portions 81-84. Subsequently, the control unit 21 moves the transfer jig 80 forward by the transfer rod 25 a so that the first and second protrusion holding portions 81 are positioned directly below the protrusions 71 and 72 of the substrate support member 70 on the support table 37 . , 82 are positioned, and the third and fourth projection holding portions 83, 84 are positioned immediately below the projections 71, 72 of the substrate support member 70 on the support base 47 (FIG. 8B). Then, the controller 21 lowers the support bases 37 and 47 . As a result, the projections 71 and 72 of the two substrate support members 70 are held on the first to fourth projection holding portions 81 to 84, and are attached to the transfer jig 80 (FIG. 8(c)). ). After that, the control unit 21 lowers the entire first and second board fixing parts 30, 40 by the fixing part elevating parts 36, 46, and lifts the transfer jig 80 to which the two board support members 70 to be unloaded are attached. It is moved backward by the transport rod 25a (FIG. 9). Then, the control unit 21 places the transport jig 80 to which the substrate supporting member 70 is attached as it is on the empty transport conveyor 61 . As described above, the control unit 21 performs the support member unloading process for the substrate support member 70 by combining the forward and backward transport of the transport jig 80 and the lifting and lowering of the support bases 37 and 47 .

ステップＳ１２０の支持部材搬出処理のあと、制御部２１は、搬入対象の基板支持部材７０を第１，第２基板固定部３０，４０に搬入する支持部材搬入処理を行う（ステップＳ１３０）。この処理は、上述した支持部材搬出処理と逆の手順で行うことができる。すなわち、制御部２１は、まず、搬入対象の基板支持部材７０が２つ取り付けられた搬送治具８０を前方に搬送し（図９）、基板支持部材７０を支持台３７，４７の上方まで搬送し（図８（ｃ））、支持台３７，４７を上昇させて突起部７１，７２を第１～第４突起保持部８１～８４から浮き上がらせる（図８（ｂ））。続いて、制御部２１は、搬送治具８０を後方に移動させてから（図８（ａ））、支持台３７，４７を下降させる（図７（ｃ））。次に、制御部２１は、搬送治具８０を後方に移動させて搬出すると共に、支持台３７，４７上で基板支持部材７０を位置決めして固定する（図７（ｂ））。具体的には、まず、制御部２１は、基板ガイド移動部３３，４３により一対のサイドフレーム３０ｂ，４０ｂを前後に接近させて、支持板３９ａ，４９ａを所定位置まで移動させる。支持板３９ａ，４９ａを移動させる前後方向の位置は、印刷対象の基板Ｓの種類や基板支持部材７０の種類などに応じて予め定められており、例えば管理ＰＣ９０から取得する。続いて、制御部２１は、Ｙ軸押圧部３８，４８を後方に移動させて、支持台３７，４７上の基板支持部材７０をそれぞれ支持板３９ａ，４９ａに当接するまで後方に移動させる。このように、支持板３９ａ，４９ａとＹ軸押圧部３８，４８とを前後に移動させることで、搬送治具８０から取り外した基板支持部材７０の位置が前後にずれていたとしても、基板支持部材７０を適切な位置に位置決めすることができる。基板支持部材７０をそれぞれ支持板３９ａ，４９ａに当接させると、制御部２１は、Ｚ軸クランプ部３９，４９を下方に移動させて被クランプ部７４を押圧させ、支持台３７，４７上の基板支持部材７０の位置を固定する。以上のように、制御部２１は、搬送治具８０の前後の搬送と支持台３７，４７の昇降とを組み合わせて、基板支持部材７０の支持部材搬入処理を行う。また、制御部２１は、基板支持部材７０の前後方向の位置決めを行う。 After the supporting member unloading process in step S120, the control unit 21 performs a supporting member loading process for loading the substrate supporting member 70 to be loaded into the first and second substrate fixing units 30 and 40 (step S130). This process can be performed in the reverse order of the above-described support member unloading process. That is, the control unit 21 first transports the transport jig 80 to which two substrate support members 70 to be carried in are attached (FIG. 9), and transports the substrate support members 70 to above the supports 37 and 47. (FIG. 8(c)), the support bases 37, 47 are raised to lift the projections 71, 72 from the first to fourth projection holding portions 81 to 84 (FIG. 8(b)). Subsequently, the control unit 21 moves the conveying jig 80 rearward (FIG. 8(a)), and then lowers the supports 37 and 47 (FIG. 7(c)). Next, the control unit 21 moves the transport jig 80 backward to carry it out, and positions and fixes the substrate support member 70 on the support bases 37 and 47 (FIG. 7B). Specifically, first, the controller 21 brings the pair of side frames 30b, 40b closer to each other in the front-rear direction by means of the board guide moving parts 33, 43, and moves the support plates 39a, 49a to predetermined positions. The positions in the front-rear direction to which the support plates 39a and 49a are moved are predetermined according to the type of the substrate S to be printed, the type of the substrate support member 70, and the like, and are obtained from the management PC 90, for example. Subsequently, the control section 21 moves the Y-axis pressing sections 38 and 48 backward to move the substrate support members 70 on the support bases 37 and 47 backward until they come into contact with the support plates 39a and 49a, respectively. By moving the support plates 39a and 49a and the Y-axis pressing portions 38 and 48 back and forth in this way, even if the position of the board support member 70 removed from the transfer jig 80 is shifted back and forth, the board can be supported. Member 70 can be positioned at the appropriate location. When the substrate support members 70 are brought into contact with the support plates 39a and 49a, respectively, the control unit 21 moves the Z-axis clamping units 39 and 49 downward to press the clamped portion 74, so that the support bases 37 and 47 The position of the substrate support member 70 is fixed. As described above, the control unit 21 performs the supporting member carrying-in processing of the substrate supporting member 70 by combining the front and rear transportation of the transportation jig 80 and the lifting and lowering of the support bases 37 and 47 . The control unit 21 also positions the substrate support member 70 in the front-rear direction.

ステップＳ１３０の支持部材搬出処理のあと、制御部２１は、搬入対象のスクリーンマスクＭをマスク作業部２６に搬入するマスク搬入処理を行う（ステップＳ１４０）。制御部２１は、マスク搬出処理とは逆の手順でこの処理を行う。すなわち、制御部２１はまずコンベア昇降部６２及び搬送コンベア６１を制御して搬入対象のスクリーンマスクＭを搬送レール２９上まで搬送し、搬送ロッド２５ａによりスクリーンマスクＭを前方に移動させてマスク作業部２６に搬入する。なお、スクリーンマスクＭが交換対象でない場合には、マスク搬出処理で搬出したスクリーンマスクＭを搬入する。 After the supporting member unloading process of step S130, the control unit 21 performs a mask loading process of loading the screen mask M to be loaded into the mask working unit 26 (step S140). The control unit 21 performs this process in the reverse order of the mask carry-out process. That is, the control unit 21 first controls the conveyor lifting unit 62 and the transport conveyor 61 to transport the screen mask M to be carried in onto the transport rails 29, moves the screen mask M forward by the transport rod 25a, and moves the screen mask M forward to the mask working unit. Carry in to 26. If the screen mask M is not to be replaced, the screen mask M carried out in the mask carry-out process is carried in.

ステップＳ１１０～Ｓ１４０の処理を行ってスクリーンマスクＭ及び基板支持部材７０の交換処理が終了すると、制御部２１は、搬入した基板支持部材７０の左右方向の位置情報を取得し（ステップＳ１５０）、取得した位置情報に基づいて基板Ｓの停止位置の補正値を決定する（ステップＳ１６０）。制御部２１は、図１０（ａ）に示すようにキャリッジ５１を支持台３７の上方に移動させ、基板支持部材７０の上面の識別部７５を位置情報取得部５５に撮像させる。そして、制御部２１は、位置情報取得部５５から取得した画像における識別部７５の位置に基づいて、支持台３７上での基板支持部材７０の左右方向（基板Ｓの搬送方向）の位置ずれを求め、基板Ｓの搬送時の停止位置の補正値を導出してＲＡＭなどに記憶する。ここで、支持台３７上で基板支持部材７０が基板Ｓの搬送方向にずれていると、基板Ｓの停止位置によっては基板Ｓの吸着固定に不具合が生じる場合がある。制御部２１は、基板支持部材７０の位置が左右方向にずれていた場合には、その分だけ基板Ｓの停止位置も補正して、基板支持部材７０と基板Ｓとの位置関係が変わらないようにするのである。制御部２１は、支持台４７上の基板支持部材７０についても、同様に位置情報の取得及び補正値の導出を行う。 After performing the processing of steps S110 to S140 and completing the replacement processing of the screen mask M and the substrate support member 70, the control unit 21 acquires the horizontal position information of the substrate support member 70 that has been carried in (step S150). A correction value for the stop position of the substrate S is determined based on the obtained position information (step S160). The control unit 21 moves the carriage 51 above the support base 37 as shown in FIG. 10A, and causes the position information acquisition unit 55 to image the identification unit 75 on the upper surface of the substrate support member 70 . Then, based on the position of the identifying portion 75 in the image acquired from the position information acquiring portion 55, the control portion 21 corrects the positional deviation of the substrate supporting member 70 in the horizontal direction (transporting direction of the substrate S) on the support table 37. Then, a correction value for the stop position during transport of the substrate S is derived and stored in a RAM or the like. Here, if the substrate support member 70 is displaced on the support base 37 in the transport direction of the substrate S, there may be a problem in sucking and fixing the substrate S depending on the stop position of the substrate S. When the position of the substrate support member 70 is shifted in the left-right direction, the control unit 21 also corrects the stop position of the substrate S by that amount so that the positional relationship between the substrate support member 70 and the substrate S does not change. to be The control unit 21 similarly acquires the position information and derives the correction value for the substrate support member 70 on the support table 47 .

ステップＳ１６０の後、又はステップＳ１００で段取り替えが不要な場合には、制御部２１は、基板搬送コンベア３１を駆動して第１基板固定部３０（第１レーン）へ基板Ｓを搬送させ、基板Ｓを基板支持部材７０に吸着させる（ステップＳ１７０）。第１基板固定部３０へ基板Ｓを搬送させる際には、制御部２１は、キャリッジ５１を前後左右に移動させると共に基板ストッパー５６を下降させ、右方に搬送されてきた基板Ｓを基板支持部材７０上の所定の停止位置で停止させる（図１０（ｂ））。このとき、ステップＳ１６０で導出した補正値があるときには、補正値を加味した位置に基板ストッパー５６を移動させる。また、制御部２１は、支持台３７を上昇させて、停止した基板Ｓの下面に基板支持部材７０の上面を当接させ、減圧装置からの負圧により基板Ｓを吸着固定する。 After step S160 or when setup change is unnecessary in step S100, the control unit 21 drives the substrate transport conveyor 31 to transport the substrate S to the first substrate fixing unit 30 (first lane), and S is attracted to the substrate support member 70 (step S170). When transporting the substrate S to the first substrate fixing unit 30, the control unit 21 moves the carriage 51 forward, backward, left and right, lowers the substrate stopper 56, and moves the substrate S transported rightward to the substrate supporting member. Stop at a predetermined stop position on 70 (FIG. 10(b)). At this time, if there is a correction value derived in step S160, the substrate stopper 56 is moved to a position with the correction value added. Further, the control unit 21 raises the support table 37 to bring the upper surface of the substrate supporting member 70 into contact with the lower surface of the stopped substrate S, and the substrate S is fixed by suction by the negative pressure from the decompression device.

続いて、制御部２１は、位置情報取得部５５により基板Ｓ及びスクリーンマスクＭの識別部の撮像処理を行い（ステップＳ１８０）、得られた画像に基づいて基板ＳとスクリーンマスクＭのパターン孔１１とが適正な位置になるよう位置調整を行う（ステップＳ１９０）。そして、制御部２１は、第１基板固定部３０での印刷を開始する（ステップＳ２００、図１０（ｃ））。制御部２１は、第１基板固定部３０を上昇させて基板Ｓの上面とスクリーンマスクＭの下面に当接させる。そして、第１レーン側のスクリーンマスクＭ上に印刷ヘッド２３を移動し、印刷ヘッド２３からはんだペーストを加圧吐出させ、スキージ２５を前後に移動させてはんだペーストを基板Ｓ上に印刷する。 Subsequently, the control unit 21 performs imaging processing of the identifying portions of the substrate S and the screen mask M using the position information acquisition unit 55 (step S180), and based on the obtained images, the pattern holes 11 of the substrate S and the screen mask M are detected. Position adjustment is performed so that the position is appropriate (step S190). Then, the control unit 21 starts printing in the first substrate fixing unit 30 (step S200, FIG. 10(c)). The control unit 21 raises the first substrate fixing unit 30 to bring the upper surface of the substrate S and the lower surface of the screen mask M into contact with each other. Then, the print head 23 is moved above the screen mask M on the first lane side, the solder paste is discharged from the print head 23 under pressure, and the solder paste is printed on the substrate S by moving the squeegee 25 back and forth.

第１基板固定部３０での印刷処理の後、制御部２１は、生産処理が完了したか否かを、次に印刷すべき基板Ｓがあるか否かに基づいて判定する（ステップＳ２１０）。生産処理が完了していないときには、第２基板固定部４０を用いて基板Ｓの搬送やスクリーンマスクＭの位置調整、印刷処理などを行う（ステップＳ２２０～２５０）。この処理は、上述した第１基板固定部３０での処理（ステップＳ１７０～２００）と同様であるため、具体的な説明を省略する。ステップＳ２５０の後、制御部２１は、生産が完了したか否かを判定し（ステップＳ２６０）、完了していないときにはステップＳ１００移行の処理を実行する。すなわち、必要に応じて段取り替えを行いながら、第１，第２基板固定部３０，４０に固定した基板Ｓへの印刷処理を順次実行する。ステップＳ２１０又はＳ２６０で生産処理が完了したときには、制御部２１は本ルーチンを終了する。 After the printing process in the first board fixing part 30, the control part 21 determines whether or not the production process is completed based on whether or not there is a board S to be printed next (step S210). When the production processing is not completed, the second substrate fixing unit 40 is used to carry the substrate S, adjust the position of the screen mask M, print processing, etc. (steps S220 to S250). Since this process is the same as the process (steps S170 to S200) in the first substrate fixing unit 30 described above, a detailed description thereof will be omitted. After step S250, the control unit 21 determines whether or not the production has been completed (step S260), and if not completed, the process proceeds to step S100. That is, the printing process for the substrates S fixed to the first and second substrate fixing portions 30 and 40 is sequentially executed while changing the setup as necessary. When the production process is completed in step S210 or S260, the control section 21 terminates this routine.

ここで、本実施形態の構成要素と本発明の構成要素との対応関係を明らかにする。本実施形態の搬送ロッド２５ａが本発明の支持部材搬送部に相当し、制御部２１が交換制御部に相当する。また、第１，第２基板固定部３０，４０が基板固定部に相当し、Ｙ軸押圧部３８，４８，基板ガイド移動部３３，４３，及び支持板３９ａ，４９ａが位置決め部に相当し、基板搬送コンベア３１，４１が基板搬送部に相当し、位置情報取得部５５が位置情報取得部に相当し、制御部２１及び基板ストッパー５６が補正部に相当し、支持台３７，４７が支持台に相当し、支持台昇降部３５，４５及び固定部昇降部３６，４６が支持部材昇降部に相当し、搬送治具８０が搬送治具に相当する。 Here, correspondence relationships between the components of the present embodiment and the components of the present invention will be clarified. The transport rod 25a of this embodiment corresponds to the support member transport section of the present invention, and the control section 21 corresponds to the replacement control section. Also, the first and second substrate fixing portions 30 and 40 correspond to substrate fixing portions, the Y-axis pressing portions 38 and 48, the substrate guide moving portions 33 and 43, and the support plates 39a and 49a correspond to positioning portions. The substrate transfer conveyors 31 and 41 correspond to the substrate transfer section, the position information acquisition section 55 corresponds to the position information acquisition section, the control section 21 and the substrate stopper 56 correspond to the correction section, and the support bases 37 and 47 correspond to the support base. , the support table elevating units 35 and 45 and the fixed part elevating units 36 and 46 correspond to the support member elevating units, and the transport jig 80 corresponds to the transport jig.

以上詳述した実施形態の印刷装置２０は、スクリーンマスクＭ及び基板支持部材７０を搬出入する支持部材搬送部（搬送ロッド２５ａ）を備えている。そして、この印刷装置２０では、この搬送ロッド２５ａを用いて、基板支持部材７０の搬出及び搬入を含む支持部材交換処理（ステップＳ１２０，Ｓ１３０）を実行可能であり、基板支持部材７０の自動交換を行うことができる。また、この印刷装置２０は、搬送ロッド２５ａを用いて、スクリーンマスクＭの搬出及び搬入を行うマスク交換処理（ステップＳ１１０，Ｓ１４０）を行うこともできる。すなわち、同じ搬送ロッド２５ａを用いて基板支持部材７０の自動交換とスクリーンマスクＭの自動交換とを共に行うことができる。したがって、例えば印刷装置２０がスクリーンマスク交換用の搬送部と基板支持部材交換用の搬送部とを別々に備える場合と比較して、装置構成をコンパクトにすることができる。 The printing apparatus 20 of the embodiment described in detail above includes a support member transport section (transport rod 25a) for loading/unloading the screen mask M and the substrate support member 70 . In the printing apparatus 20, the transfer rod 25a can be used to execute the support member exchange process (steps S120 and S130) including carrying out and carrying in the substrate support member 70, and automatic exchange of the substrate support member 70 can be performed. It can be carried out. In addition, the printing apparatus 20 can perform a mask exchange process (steps S110 and S140) for carrying out and carrying in the screen mask M using the transport rod 25a. In other words, automatic exchange of the substrate support member 70 and automatic exchange of the screen mask M can both be performed using the same transport rod 25a. Therefore, compared with the case where the printing apparatus 20 is separately provided with a transfer section for exchanging the screen mask and a transfer section for exchanging the substrate support member, for example, the apparatus configuration can be made compact.

また、印刷装置２０は、基板支持部材７０を配置可能であり、印刷処理を行う際に配置された基板支持部材７０により基板Ｓを固定する第１，第２基板固定部３０，４０と、第１，第２基板固定部３０，４０に配置された基板支持部材７０を移動させて基板支持部材の水平方向の位置決めを行う位置決め部（Ｙ軸押圧部３８，４８，基板ガイド移動部３３，４３，及び支持板３９ａ，４９ａ）と、を備えている。そして、制御部２１は、支持部材搬入処理において、搬送ロッド２５ａを制御して搬入対象の基板支持部材７０を第１，第２基板固定部３０，４０まで搬送し、Ｙ軸押圧部３８，４８，基板ガイド移動部３３，４３，及び支持板３９ａ，４９ａを制御して搬送された基板支持部材７０の前後方向の位置決めを行う。したがって、支持部材搬入処理で搬入された基板支持部材７０の第１，第２基板固定部３０，４０内での前後方向の位置ずれを抑制できる。 Further, the printing apparatus 20 can be arranged with a substrate supporting member 70. First and second substrate fixing units 30 and 40 for fixing the substrate S by the arranged substrate supporting member 70 when performing printing processing, and a second 1. Positioning portions (Y-axis pressing portions 38, 48, substrate guide moving portions 33, 43 , and support plates 39a, 49a). Then, in the support member loading process, the control unit 21 controls the transport rod 25a to transport the substrate support member 70 to be loaded to the first and second substrate fixing units 30 and 40, and the Y-axis pressing units 38 and 48. , the substrate guide moving portions 33, 43, and the support plates 39a, 49a are controlled to position the transported substrate support member 70 in the front-rear direction. Therefore, it is possible to suppress positional deviation in the front-rear direction of the substrate support member 70 loaded in the support member loading process within the first and second substrate fixing portions 30 and 40 .

さらに、印刷装置２０は、第１，第２基板固定部３０，４０と、基板Ｓを所定の基板搬送方向（左右方向）に搬送する基板搬送コンベア３１，４１と、第１，第２基板固定部３０，４０に配置された基板支持部材７０の基板搬送方向の位置に関する位置情報を取得する位置情報取得部５５と、を備えている。そして、印刷装置２０は、取得された位置情報に基づいて、基板搬送コンベア３１，４１が基板Ｓを搬送する際の基板支持部材７０上の停止位置を補正する補正部（制御部２１及び基板ストッパー５６）を備えている。これにより、支持部材搬入処理で第１，第２基板固定部３０，４０に搬入された基板支持部材７０の位置が基板搬送方向にずれていた場合でも、位置情報に基づいて基板Ｓの停止位置を補正できる。したがって、基板支持部材７０による基板Ｓの固定に不具合が生じるのを抑制できる。 Further, the printing apparatus 20 includes first and second board fixing units 30 and 40, board transport conveyors 31 and 41 for transporting the board S in a predetermined board transport direction (horizontal direction), and first and second board fixing units. and a positional information acquisition unit 55 that acquires positional information about the positions of the substrate supporting members 70 arranged in the units 30 and 40 in the substrate transport direction. Then, based on the acquired position information, the printing apparatus 20 corrects the stop position on the substrate support member 70 when the substrate transport conveyors 31 and 41 transport the substrate S (the control unit 21 and the substrate stopper). 56). As a result, even if the positions of the substrate supporting members 70 carried into the first and second substrate fixing portions 30 and 40 in the supporting member carrying-in process are deviated in the substrate transfer direction, the stop position of the substrate S can be determined based on the position information. can be corrected. Therefore, it is possible to prevent problems in fixing the substrate S by the substrate support member 70 .

さらにまた、印刷装置２０は、基板支持部材７０を配置可能な支持台３７，４７を有し、印刷処理を行う際に配置された基板支持部材７０により基板Ｓを固定する第１，第２基板固定部３０，４０と、支持台３７，４７を昇降させることで支持台３７，４７に配置された基板支持部材７０を昇降させる支持台昇降部３５，４５及び固定部昇降部３６，４６と、を備えている。そして、搬送ロッド２５ａは、基板支持部材７０を取り付け可能な搬送治具８０を搬出入し、制御部２１は、支持部材搬出処理において、搬送ロッド２５ａ及び支持台昇降部３５，４５，固定部昇降部３６，４６を制御して、搬送治具８０を搬送して第１，第２基板固定部３０，４０の上方まで搬送し、支持台３７，３８に配置された搬出対象の基板支持部材７０を上昇させて搬送治具８０に取り付け、取り付け後の搬送治具８０を搬出する処理を行う。また、制御部２１は、支持部材搬入処理において、搬送ロッド２５ａ及び支持台昇降部３５，４５，固定部昇降部３６，４６を制御して、搬入対象の基板支持部材７０が取り付けられた搬送治具８０を第１，第２基板固定部３０，４０の上方まで搬送し、支持台３７，４７を上昇させて搬入対象の基板支持部材７０を搬送治具８０から取り外して支持台３７，４７上に配置し、取り外し後の搬送治具８０を搬出する処理を行う。こうすれば、例えば基板支持部材７０の形状や大きさが搬送ロッド２５ａによる搬送に適さない場合でも、搬送治具８０を用いて基板支持部材７０を搬送することで支持部材交換処理を行うことができる。本実施形態の印刷装置２０では、搬送ロッド２５ａがスクリーンマスクＭと基板支持部材７０とを共に搬送するが、スクリーンマスクＭよりも基板支持部材７０は左右方向の幅が小さいため、搬送レール２９上を摺動させて基板支持部材７０を直接搬送ロッド２５ａにより搬送することはできない。このようにスクリーンマスクＭと基板支持部材７０との形状や大きさが異なる場合に、搬送治具８０を用いる意義が高い。 Furthermore, the printing apparatus 20 has support bases 37 and 47 on which a substrate support member 70 can be arranged, and the first and second substrates for fixing the substrate S by the substrate support member 70 arranged when printing processing is performed. Fixing parts 30, 40, supporting table elevating parts 35, 45 and fixing part elevating parts 36, 46 for raising and lowering the substrate supporting members 70 arranged on the supporting tables 37, 47 by raising and lowering the supporting tables 37, 47, It has Then, the transport rod 25a carries in and out the transport jig 80 to which the substrate support member 70 can be attached. By controlling the parts 36 and 46, the transport jig 80 is transported to above the first and second substrate fixing parts 30 and 40, and the substrate support member 70 to be unloaded placed on the support bases 37 and 38 is transported. is lifted and attached to the conveying jig 80, and the attached conveying jig 80 is unloaded. In addition, in the support member loading process, the control unit 21 controls the transport rod 25a, the support table elevating units 35 and 45, and the fixing unit elevating units 36 and 46 to control the transport jig to which the substrate support member 70 to be loaded is attached. The jig 80 is conveyed above the first and second substrate fixing portions 30 and 40, the support bases 37 and 47 are lifted, and the substrate support member 70 to be carried in is removed from the transfer jig 80 and placed on the support bases 37 and 47. , and carry out the transport jig 80 after removal. In this way, even if the shape or size of the substrate support member 70 is not suitable for transportation by the transportation rod 25a, the substrate support member 70 can be transported using the transportation jig 80 to perform the support member replacement process. can. In the printing apparatus 20 of this embodiment, the transport rod 25a transports the screen mask M and the substrate support member 70 together. , the substrate support member 70 cannot be transported directly by the transport rod 25a. When the shape and size of the screen mask M and the substrate support member 70 are different in this way, the use of the transfer jig 80 is highly significant.

そしてまた、印刷装置２０は、基板固定部として第１基板固定部３０と第２基板固定部４０とを有しており、支持部材昇降部として支持台３７を昇降させる第１支持部材昇降部（支持台昇降部３５及び固定部昇降部３６）と、支持台４７を昇降させる第２支持部材昇降部（支持台昇降部４５及び固定部昇降部４６）と、を有している。また、搬送ロッド２５ａは、基板支持部材７０を複数取り付け可能な搬送治具８０を搬出入する。そして、制御部２１は、支持部材搬出処理において、搬送ロッド２５ａ及び支持台昇降部３５，４５，固定部昇降部３６，４６を制御して、搬送治具８０を搬入し、支持台３７，４７に配置された搬出対象の基板支持部材７０の各々を上昇させて搬送治具８０に取り付け、取り付け後の搬送治具８０を搬出する処理を行う。また、制御部２１は、支持部材搬入処理において、搬送ロッド２５ａ及び支持台昇降部３５，４５，固定部昇降部３６，４６を制御して、支持台３７，支持台４７にそれぞれ配置する搬入対象の基板支持部材７０が取り付けられた搬送治具８０を搬入し、支持台３７，４７を上昇させて搬入対象の基板支持部材７０の各々を搬送治具８０から取り外して支持台３７，４７上にそれぞれ配置し、取り外し後の搬送治具８０を搬出する処理を行う。これにより、制御部２１は、支持台３７に配置される基板支持部材７０の交換と支持台４７に配置される基板支持部材７０の交換とを並行して行う。こうすることで、１回の搬送治具８０の搬出入で支持台３７，４７に配置された搬出対象の基板支持部材７０を共に搬出でき、１回の搬送治具８０の搬出入で支持台３７，４７に配置する搬入対象の基板支持部材７０を共に搬入できるため、支持部材交換処理に要する時間を短縮できる。 Further, the printing apparatus 20 has a first substrate fixing portion 30 and a second substrate fixing portion 40 as substrate fixing portions, and a first support member lifting portion ( and a second support member elevating unit (support elevating unit 45 and fixing elevating unit 46) for elevating the support base 47. Further, the transport rod 25a carries in and out a transport jig 80 to which a plurality of substrate support members 70 can be attached. Then, in the support member carry-out process, the control unit 21 controls the transport rod 25a, the support table elevating units 35 and 45, and the fixing unit elevating units 36 and 46 to carry in the transport jig 80 and the support tables 37 and 47. Then, each substrate supporting member 70 to be unloaded is lifted and attached to the transport jig 80, and the attached transport jig 80 is unloaded. In addition, in the support member carrying-in process, the control unit 21 controls the transport rod 25a, the support base elevating units 35 and 45, and the fixing unit elevating units 36 and 46, and controls the carrying-in object to be placed on the support base 37 and the support base 47, respectively. are loaded, the support bases 37 and 47 are lifted, and each substrate support member 70 to be carried in is removed from the transfer jig 80 and placed on the support bases 37 and 47. A process of carrying out the conveying jig 80 after arranging and removing is performed. As a result, the control unit 21 exchanges the substrate supporting members 70 arranged on the support table 37 and the substrate supporting members 70 arranged on the support table 47 in parallel. By doing so, the substrate support members 70 to be carried out arranged on the support bases 37 and 47 can be carried out together by carrying in/out the carrying jig 80 once, and the supporting base can be carried out by carrying in/out the carrying jig 80 once. Since the substrate supporting members 70 to be carried in to be placed at 37 and 47 can be carried in together, the time required for the supporting member replacement process can be shortened.

なお、本発明は上述した実施形態に何ら限定されることはなく、本発明の技術的範囲に属する限り種々の態様で実施し得ることはいうまでもない。 It goes without saying that the present invention is not limited to the above-described embodiments, and can be implemented in various forms as long as they fall within the technical scope of the present invention.

例えば、上述した実施形態では、制御部２１は、２つの基板支持部材７０を取り付け可能な搬送治具８０を用いて、支持台３７に配置される基板支持部材７０の交換と支持台４７に配置される基板支持部材７０の交換とを並行して行ったが、これに限られない。例えば、支持台３７，４７上のいずれか一方の基板支持部材７０のみを交換してもよい。また、この場合、制御部２１は、支持部材搬入処理と支持部材搬出処理とを並行して行ってもよい。図１１は、支持部材搬入処理と支持部材搬出処理とを並行して行う様子を示す説明図である。ここでは、第２基板固定部４０の基板支持部材７０を交換する場合について説明する。制御部２１は、まず、搬入対象の基板支持部材７０が取り付けられた搬送治具８０を第２基板固定部４０の上方まで搬送する（図１１（ａ））。続いて、制御部２１は、支持台４７に配置された搬出対象の基板支持部材７０を上昇させて搬送治具８０に取り付ける（図１１（ｂ）。次に、制御部２１は、取り付け後の搬送治具８０をさらに前方に搬送して支持台４７の上方に搬入対象の基板支持部材７０を搬送し、支持台４７を上昇させて搬入対象の基板支持部材７０を搬送治具８０から取り外して支持台４７上に配置する（図１１（ｃ）。そして、制御部２１は、取り外し後の搬送治具８０（搬出対象の基板支持部材７０が取り付けられた搬送治具８０）を後方に搬出する。こうすれば、１回の搬送治具８０の搬出入で基板支持部材７０の搬出と搬入とを行うことができる。したがって、支持部材交換処理に要する時間を短縮できる。 For example, in the above-described embodiment, the control unit 21 uses the transfer jig 80 to which two substrate support members 70 can be attached to replace the substrate support member 70 arranged on the support table 37 and place it on the support table 47 . Although the replacement of the substrate support member 70 to be replaced is performed in parallel, the present invention is not limited to this. For example, only one of the substrate support members 70 on the support bases 37 and 47 may be replaced. Further, in this case, the control unit 21 may perform the supporting member loading process and the supporting member unloading process in parallel. FIG. 11 is an explanatory diagram showing how the supporting member loading process and the supporting member unloading process are performed in parallel. Here, a case of exchanging the substrate support member 70 of the second substrate fixing portion 40 will be described. First, the control unit 21 conveys the conveying jig 80 to which the substrate support member 70 to be carried in is attached to above the second substrate fixing unit 40 (FIG. 11(a)). Subsequently, the control unit 21 raises the substrate support member 70 to be unloaded placed on the support table 47 and attaches it to the transfer jig 80 (FIG. 11B). The transport jig 80 is further transported forward to transport the substrate support member 70 to be carried in above the support table 47 , and the support table 47 is raised to remove the substrate support member 70 to be carried in from the transport jig 80 . It is arranged on the support table 47 (FIG. 11(c). Then, the control unit 21 carries out the transport jig 80 after removal (the transport jig 80 to which the substrate support member 70 to be carried out is attached) to the rear. In this way, the substrate support member 70 can be carried out and carried in once by carrying in and out the transport jig 80. Therefore, the time required for the support member replacement process can be shortened.

上述した実施形態では、印刷装置２０は、搬送ロッド２５ａを用いてスクリーンマスクＭと基板支持部材７０とを共に搬出入可能であったが、これに限られない。基板支持部材７０の搬出入を行う支持部材搬送部を備えていれば、少なくとも基板支持部材交換処理を行うことはできる。また、この場合でも、第１，第２基板固定部３０，４０に配置された基板支持部材７０を移動させて基板支持部材の水平方向の位置決めを行うことで、基板支持部材７０の第１，第２基板固定部３０，４０内での前後方向の位置ずれを抑制する効果が得られる。なお、上述した実施形態では基板支持部材７０の交換を行う印刷装置２０として説明したが、基板支持部材交換処理を行うものであれば、印刷装置に限られない。本発明は、基板支持部材上に固定された基板に対して対基板作業を行う対基板作業装置について、適用可能である。印刷装置以外の対基板作業装置としては、例えば、基板上への部品の実装処理を行う実装装置が挙げられる。また、上述した実施形態では、印刷装置２０は、支持部材搬送部として搬送ロッド２５ａを備えていたが、基板支持部材７０の搬出入を行うことができれば、どのような支持部材搬送部を備えていてもよい。例えば、支持部材搬送部は、コンベヤベルトとコンベヤベルトを周回駆動させるベルト周回装置とを備えた支持部材搬送コンベアであってもよい。 In the above-described embodiment, the printing apparatus 20 can carry both the screen mask M and the substrate support member 70 in and out using the transport rod 25a, but the present invention is not limited to this. If a supporting member transfer unit for carrying in and out the substrate supporting member 70 is provided, at least the substrate supporting member replacement process can be performed. Also in this case, by moving the substrate supporting members 70 arranged on the first and second substrate fixing portions 30 and 40 to position the substrate supporting members in the horizontal direction, the first and second substrate supporting members 70 can be positioned. The effect of suppressing positional deviation in the front-rear direction within the second board fixing portions 30 and 40 is obtained. In the above-described embodiment, the printing apparatus 20 that replaces the substrate supporting member 70 has been described, but the present invention is not limited to the printing apparatus as long as it performs the substrate supporting member replacement process. INDUSTRIAL APPLICABILITY The present invention is applicable to a board-related working device that performs board-related work on a board fixed on a board support member. Examples of the board-to-board working device other than the printing device include a mounting device for mounting components on a board. Further, in the above-described embodiment, the printing apparatus 20 includes the transport rod 25a as the supporting member transporting section, but what kind of supporting member transporting section can be provided as long as the substrate supporting member 70 can be carried in and out? may For example, the support member transport section may be a support member transport conveyor that includes a conveyor belt and a belt rotation device that rotates the conveyor belt.

上述した実施形態では、搬送治具８０を用いて基板支持部材７０を搬送したが、例えば搬送レール２９と搬送ロッド２５ａとを用いて基板支持部材７０を搬送可能であれば、搬送治具８０を用いなくてもよい。 In the above-described embodiment, the substrate support member 70 is transported using the transport jig 80. However, if the substrate support member 70 can be transported using the transport rails 29 and the transport rods 25a, the transport jig 80 can be used. You don't have to use it.

上述した実施形態では、Ｙ軸押圧部３８，基板ガイド移動部３３，及び支持板３９ａを用いて基板支持部材７０の前後方向の位置決めを行うものとしたが、水平方向の位置決めを行うものであればこれに限られない。例えば、前後方向の位置決めに加えて又は代えて、左右方向の位置決めもおこなってもよい。 In the above-described embodiment, the Y-axis pressing portion 38, the substrate guide moving portion 33, and the support plate 39a are used to position the substrate support member 70 in the front-rear direction. However, it is not limited to this. For example, in addition to or instead of positioning in the front-rear direction, positioning in the left-right direction may also be performed.

上述した実施形態では、基板支持部材７０の突起部７１，７２は円柱状としたが、搬送治具８０への取り付け及び取り外しができればこれに限られない。例えば、突起部は四角柱形状としてもよいし、板状としてもよいし、２本の円柱を隣接させた１つの部材としてもよい。また、突起部の数も、左右に２本ずつとしたが、これに限らず左右の各々に１本や３本以上の突起部があってもよい。 In the above-described embodiment, the protrusions 71 and 72 of the substrate support member 70 are cylindrical, but are not limited to this as long as they can be attached to and removed from the transfer jig 80 . For example, the protruding portion may be in the shape of a quadrangular pillar, may be in the shape of a plate, or may be one member in which two cylinders are adjacent to each other. Moreover, although the number of protrusions is two on each side, the number of protrusions is not limited to this, and one protrusion or three or more protrusions may be provided on each of the left and right sides.

上述した実施形態では、第１～第４突起保持部８１～８４は凹部により突起部７１，７２を保持したが、搬送治具８０への取り付け及び取り外しができればこれに限られない。例えば、搬送治具８０が枠体８５の内側に突出する一対の板状部材を備えているものとし、この板状部材の上面に突起部７１，７２を載置することで搬送治具８０への基板支持部材７０の取り付けを行ってもよい。また、搬送治具８０から基板支持部材７０を取り外す際には、基板支持部材７０の上昇と搬送治具８０の搬送とを組み合わせたが、これに限られない。例えば、搬送治具８０が、下方に押下可能なボタンと、ボタンの上下に伴って軸回転し上下方向の運動を左右方向の運動に変換するレバーと、レバーの回転に伴って左右方向に移動する板状部材と、を備えた板状部材移動機構を備えていてもよい。この場合、前後一対の板状部材移動機構の板状部材に基板支持部材７０を載置して搬送し、例えば搬送ロッド２５ａなどで一対の板状部材移動機構のボタンを押下して一対の板状部材を左右に離間させ、これにより搬送治具８０から基板支持部材７０を取り外してもよい。このような機構を採用すれば、搬送治具８０から基板支持部材７０を取り外す際に搬送治具８０を前後に搬送する動作は必要ない。 In the above-described embodiment, the first to fourth projection holding portions 81 to 84 hold the projections 71 and 72 by recesses, but the present invention is not limited to this as long as they can be attached to and detached from the conveying jig 80 . For example, it is assumed that the transport jig 80 has a pair of plate-like members projecting inside the frame 85, and the projections 71 and 72 are placed on the upper surfaces of the plate-like members, whereby the transport jig 80 You may attach the board|substrate support member 70 of this. Further, when removing the substrate supporting member 70 from the transporting jig 80, the lifting of the substrate supporting member 70 and the transporting of the transporting jig 80 are combined, but the present invention is not limited to this. For example, the conveying jig 80 includes a button that can be pushed downward, a lever that pivots along with the up and down movement of the button and converts the vertical movement into a horizontal movement, and a horizontal movement along with the rotation of the lever. and a plate-like member moving mechanism. In this case, the substrate supporting member 70 is placed on the plate-like members of the pair of front and rear plate-like member moving mechanisms and conveyed. The substrate support member 70 may be removed from the transport jig 80 by separating the support members left and right. By adopting such a mechanism, it is not necessary to transport the transport jig 80 back and forth when removing the substrate support member 70 from the transport jig 80 .

上述した実施形態では、印刷装置２０は収納部６０を備えるものとしたが、印刷装置２０が収納部６０を備えなくてもよい。また、印刷装置２０は、第１，第２基板固定部３０，４０を有するデュアルレーンの印刷装置としたが、これに限られない。例えば、印刷装置２０は、基板固定部を１つ有するシングルレーンの印刷装置としてもよい。 In the embodiment described above, the printing device 20 is provided with the storage unit 60 , but the printing device 20 does not have to be provided with the storage unit 60 . Further, although the printing device 20 is a dual-lane printing device having the first and second substrate fixing portions 30 and 40, it is not limited to this. For example, the printing device 20 may be a single-lane printing device having one board fixing portion.

上述した実施形態では、基板支持部材７０は、負圧により基板Ｓを下面側から支持しつつ吸着固定する部材としたが、基板を固定する部材であればよい。例えば、基板支持部材は、基板支持部材は上面に立設された複数の突起部（バックアップピン）を備えており、基板支持部材がこの突起部により基板Ｓを下方から支持及び固定してもよい。 In the above-described embodiment, the substrate support member 70 is a member that adsorbs and fixes the substrate S while supporting it from the lower surface side by means of negative pressure, but any member that fixes the substrate may be used. For example, the substrate support member may have a plurality of protrusions (backup pins) erected on the upper surface thereof, and the substrate support member may support and fix the substrate S from below with these protrusions. .

本発明は、部品を基板に実装する実装装置や実装装置に関する印刷装置など、基板に対して対基板作業を行う対基板作業装置に利用可能である。 INDUSTRIAL APPLICABILITY The present invention can be used in a board-to-board working device that performs board-to-board work on a board, such as a mounting device that mounts components on a board and a printing device that is associated with the mounting device.

１０ 実装システム、１１，１２ パターン孔、２０ 印刷装置、２１ 制御部、２２ 印刷処理部、２３ 印刷ヘッド、２４ ヘッド移動部、２５ スキージ、２５ａ 搬送ロッド、２６ マスク作業部、２７ マスク固定部、２８ 位置調整部、２９ 搬送レール、３０ 第１基板固定部、３０ａ 本体、３０ｂ サイドフレーム、３１ 基板搬送コンベア、３２ 基板ガイド、３３ 基板ガイド移動部、３５ 支持台昇降部、３６ 固定部昇降部、３７ 支持台、３８ Ｙ軸押圧部、３９ Ｚ軸クランプ部、３９ａ 支持板、４０ 第２基板固定部、４０ａ 本体、４０ｂ サイドフレーム、４１ 基板搬送コンベア、４２ 基板ガイド、４３ 基板ガイド移動部、４５ 支持台昇降部、４６ 固定部昇降部、４７ 支持台、４８ Ｙ軸押圧部、４９ Ｚ軸クランプ部、４９ａ 支持板、５０ 処理部、５１ キャリッジ、５２ 処理部移動部、５３ Ｘ軸スライダ、５４ Ｙ軸スライダ、５５ 位置情報取得部、５６ 基板ストッパー、５８ 支持レール、６０ 収納部、６１ 搬送コンベア、６２ コンベア昇降部、７０ 基板支持部材、７０ａ 本体部、７１，７２ 突起部、７３ 吸引孔、７４ 被クランプ部、７５ 識別部、７６ バーコード、８０ 搬送治具、８１～８４ 第１～第４突起保持部、８５ 枠体、８６ バーコード、９０ 管理ＰＣ、Ｍ，Ｍ２ スクリーンマスク、Ｓ 基板。 10 Mounting System 11, 12 Pattern Hole 20 Printer 21 Control Unit 22 Print Processing Unit 23 Print Head 24 Head Moving Unit 25 Squeegee 25a Transport Rod 26 Mask Working Unit 27 Mask Fixing Unit 28 Position adjusting part 29 Conveying rail 30 First board fixing part 30a Main body 30b Side frame 31 Board transport conveyor 32 Board guide 33 Board guide moving part 35 Support table elevating part 36 Fixed part elevating part 37 Support table 38 Y-axis pressing part 39 Z-axis clamp part 39a Support plate 40 Second board fixing part 40a Main body 40b Side frame 41 Board transport conveyor 42 Board guide 43 Board guide moving part 45 Support Table lifter 46 Fixed part lifter 47 Support stand 48 Y-axis pressing part 49 Z-axis clamp part 49a Support plate 50 Processing part 51 Carriage 52 Processing part moving part 53 X-axis slider 54 Y Axis Slider 55 Position Information Acquisition Unit 56 Substrate Stopper 58 Support Rail 60 Storage Unit 61 Transport Conveyor 62 Conveyor Elevating Unit 70 Substrate Support Member 70a Main Body 71, 72 Projection 73 Suction Hole 74 Part to be clamped 75 Identification part 76 Barcode 80 Transfer jig 81 to 84 First to fourth projection holding parts 85 Frame body 86 Barcode 90 Management PC M, M2 Screen mask S Substrate.

Claims (4)

基板支持部材上に固定された基板に対して対基板作業を行う対基板作業装置であって、
前記基板を所定の基板搬送方向に搬送する基板搬送部と、
前記基板支持部材を取り付け可能な搬送治具を用いて前記基板支持部材を搬送する支持部材搬送部と、
前記基板支持部材を配置可能な支持台を有し、前記対基板作業を行う際に該配置された基板支持部材により前記基板を固定する基板固定部と、
前記支持台を昇降させることで該支持台に配置された基板支持部材を昇降させる支持部材昇降部と、
前記支持部材搬送部を制御して搬入対象の前記基板支持部材が取り付けられた前記搬送治具を前記支持台の上方まで前記基板搬送方向と直交する方向に延びた第１経路を通過して搬送し、前記支持部材昇降部を制御して該支持台を上昇させることにより、搬入対象の前記基板支持部材を前記搬送治具から該支持台上に配置し、前記搬送治具を、前記第１経路を逆向きに通過して搬出する支持部材搬入処理を行う制御部と、
を備えた対基板作業装置。 A board-to-board work device for performing board-to-board work on a board fixed on a board support member,
a substrate transport unit that transports the substrate in a predetermined substrate transport direction;
a support member transport unit that transports the substrate support member using a transport jig to which the substrate support member can be attached ;
a substrate fixing part having a support base on which the substrate supporting member can be arranged, and fixing the substrate by the arranged substrate supporting member when performing the work with the substrate;
a support member elevating unit that lifts and lowers a substrate support member arranged on the support base by elevating the support base;
By controlling the supporting member transporting unit, the transporting jig to which the substrate supporting member to be carried in is attached is transported to above the support base through a first path extending in a direction orthogonal to the substrate transporting direction. Then, by controlling the support member elevating section to raise the support base, the substrate support member to be carried in is arranged from the transfer jig onto the support base, and the transfer jig is moved to the first position. a control unit that performs a supporting member carrying -in process for passing through the path in the opposite direction to carry out ;
A board-to-board work device with 前記制御部は、前記支持部材搬送部を制御して前記搬送治具を前記支持台の上方まで搬送し、前記支持部材昇降部を制御して搬出対象の前記基板支持部材が配置された前記支持台を上昇させて、搬出対象の前記基板支持部材を前記搬送治具に取り付けることにより搬出対象の前記基板支持部材を搬出する支持部材搬出処理を実行する、
請求項１に記載の対基板作業装置。 The control unit controls the support member transport unit to transport the transport jig to above the support table , and controls the support member elevating unit to arrange the substrate support member to be carried out. carrying out a supporting member carry -out process of carrying out the substrate supporting member to be carried out by lifting the support table thus carried out and attaching the substrate supporting member to be carried out to the transport jig ;
The work device for substrate according to claim 1. 請求項１又は２に記載の対基板作業装置であって、 The board-to-board working device according to claim 1 or 2,
前記搬送治具が前記基板支持部材を搬送する際に前記搬送治具をガイドする搬送レールを備えた対基板作業装置。 A substrate-to-board working apparatus comprising a transport rail that guides the transport jig when the transport jig transports the board support member. 前記基板支持部材は、前記搬送治具の下端から突出した状態で前記搬送治具に取り付けられる、 The substrate support member is attached to the transport jig in a state of protruding from the lower end of the transport jig.
請求項１～３のいずれか１項に記載の対基板作業装置。 A working device for a substrate according to any one of claims 1 to 3.
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JP2023150720A JP2023168369A (en) 2022-01-20 2023-09-19 Pair substrate working device

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
KR101530224B1 (en) * 2008-02-18 2015-06-19 글락소 그룹 리미티드 Actuation counter

Citations (3)

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JP2000114797A (en) 1998-10-08 2000-04-21 Sanyo Electric Co Ltd Work backup device
JP2008166583A (en) 2006-12-28 2008-07-17 Yamaha Motor Co Ltd Backup pin recovering method, backup pin supplying method, operation jig, substrate supporting device, surface mount device, cream solder printing device, and substrate inspection device
US20140190361A1 (en) 2011-06-21 2014-07-10 Yamaha Hatsudoki Kabushiki Kaisha Screen printing apparatus

Patent Citations (3)

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JP2000114797A (en) 1998-10-08 2000-04-21 Sanyo Electric Co Ltd Work backup device
JP2008166583A (en) 2006-12-28 2008-07-17 Yamaha Motor Co Ltd Backup pin recovering method, backup pin supplying method, operation jig, substrate supporting device, surface mount device, cream solder printing device, and substrate inspection device
US20140190361A1 (en) 2011-06-21 2014-07-10 Yamaha Hatsudoki Kabushiki Kaisha Screen printing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101530224B1 (en) * 2008-02-18 2015-06-19 글락소 그룹 리미티드 Actuation counter

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