JPH0557589A - Polishing method - Google Patents

Polishing method

Info

Publication number
JPH0557589A
JPH0557589A JP23741791A JP23741791A JPH0557589A JP H0557589 A JPH0557589 A JP H0557589A JP 23741791 A JP23741791 A JP 23741791A JP 23741791 A JP23741791 A JP 23741791A JP H0557589 A JPH0557589 A JP H0557589A
Authority
JP
Japan
Prior art keywords
polishing
holder
workpiece
polishing tool
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP23741791A
Other languages
Japanese (ja)
Inventor
Hisayuki Takei
久幸 武井
Toshiya Akita
俊哉 秋田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP23741791A priority Critical patent/JPH0557589A/en
Publication of JPH0557589A publication Critical patent/JPH0557589A/en
Withdrawn legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To improve the polishing accuracy by holding a sphere polishing tool, adding those of rocking, turning and vertical motion to a top face of a workpiece holding free of rotation as jetting out a fluid from the upside of a sphere, and making it so as to polish the workpiece along the ridgeline, in polishing for optical glass or the like. CONSTITUTION:A workpiece 9, whose top is of convexedly spherical form, is held on a disklike lense holder 6, and a sphere polishing tool 2 is set up on the top face with a tool holder 3. Then, this holder 3 is moved up and down, rotated and rocked in succession while a polishing solution containing cerium oxide or the like is fed out of a fluid feed hole 4, thus the workpiece is polished.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光学硝子などの研磨方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for polishing optical glass or the like.

【0002】[0002]

【従来の技術】従来の上記した硝子レンズの研磨方法を
記載した文献として、例えば特開昭62ー193761
号公報がある。この公報に記載されている研磨方法は、
被加工物を回転させながら球状の研磨工具の中心軸から
離れた周速の速い部分を被加工物に押付けて研磨し、か
つ被加工物、または研磨工具の少なく共一方に周期0.
1〜1秒振幅1m/m 以内の範囲の揺動を与える。これに
よって研磨工具の回転中心が、デットポイントになって
研磨されずに残ったり、被加工物の回転中心が突出して
残ったりすることがなく凹面形状の被加工物でも容易に
研磨加工できる、という研磨方法である。
2. Description of the Related Art As a document describing a conventional method for polishing a glass lens as described above, for example, JP-A-62-193761.
There is a gazette. The polishing method described in this publication is
While rotating the work piece, a portion of the spherical polishing tool having a high peripheral speed away from the central axis is pressed against the work piece to be polished, and the cycle of 0.
1 to 1 second Amplitude swings within 1 m / m . As a result, the center of rotation of the polishing tool becomes a dead point and remains unpolished, and the center of rotation of the workpiece does not protrude and remain, so that even a workpiece having a concave surface can be easily polished. It is a polishing method.

【0003】[0003]

【発明が解決しようとする課題】しかし上記公報に記載
の研磨方法においては、被加工物上の研磨工具3は、回
転中心がθ角で固定された位置にて回転研磨されるため
研磨工具3は常に一定の円周面の位置の回転となり、そ
のため球面部に偏摩耗が起る。即ちこの偏摩耗状の球面
部で加工すると加工条件が変化して、レンズ加工面が所
望の面制度を確保することができないという問題があっ
た。
However, in the polishing method described in the above publication, the polishing tool 3 on the workpiece is rotationally polished at a position where the center of rotation is fixed at the θ angle, and thus the polishing tool 3 is used. Is always rotated at a constant circumferential surface position, which causes uneven wear on the spherical surface. That is, there is a problem in that when processing is performed with this unevenly worn spherical portion, the processing conditions change, and the lens processing surface cannot secure a desired surface accuracy.

【0004】本発明は、上記した問題点に鑑みてなされ
たもので、球面部に偏摩耗を生じさせることなく、常に
真球の研磨工具により研磨加工することで、高精度の加
工物が高品質に製造できる研磨方法を提供することを目
的とするものである。
The present invention has been made in view of the above-mentioned problems, and a high-precision workpiece can be highly processed by always polishing with a spherical polishing tool without causing uneven wear on the spherical surface. An object of the present invention is to provide a polishing method that can be manufactured with high quality.

【0005】[0005]

【課題を解決するための手段】本発明の概念を図面に基
いて説明する。図1は、本発明の概念を示す研磨装置の
一部を断面にて示す要部の正面図である。回転軸8を中
心に矢印の示す方向に回転するよう構成された円板球状
の保持具6上に保持装着された円形状の被加工物1の加
工面7上に、上記回転軸8とは、別体に設けられた駆動
手段により回転するように構成された回転軸(図示され
ず)と連設された円柱形状のホルダー3が配設されてい
る。このホルダー3の上記保持具6と対応する下端面に
は、所望の凹形状の半球面5が形成され、その半球面5
の中心には、図示されていないが、別に設けられた流体
供給手段と接続構成された流体供給孔4が穿設されてい
る。上記半球面5内には、所望の球面体に形成された球
面体研磨工具2が配設されている。即ち、回転する被加
工物1の上面7上に対応配設したホルダー3の半球面5
内に挿入配設した球面体研磨工具2を流体の供給にて半
球面5と離間(無接着)させると共に回転揺動駆動させ
ながら自由曲面に研磨するように構成されている。
The concept of the present invention will be described with reference to the drawings. FIG. 1 is a front view of a main part showing a cross section of a part of a polishing apparatus showing the concept of the present invention. The rotating shaft 8 is formed on the processing surface 7 of the circular workpiece 1 held and mounted on the disk-shaped holder 6 configured to rotate about the rotating shaft 8 in the direction indicated by the arrow. A cylindrical holder 3 is provided which is connected to a rotary shaft (not shown) which is configured to rotate by a driving means provided separately. A desired concave hemispherical surface 5 is formed on the lower end surface of the holder 3 corresponding to the holder 6, and the hemispherical surface 5 is formed.
Although not shown, a fluid supply hole 4 connected to a separately provided fluid supply means is formed at the center of the. Inside the hemispherical surface 5, a spherical body polishing tool 2 formed into a desired spherical body is arranged. That is, the hemispherical surface 5 of the holder 3 correspondingly arranged on the upper surface 7 of the rotating workpiece 1.
The spherical body polishing tool 2 inserted and disposed inside is separated from the hemispherical surface 5 by fluid supply (non-adhesive), and is rotatively oscillated to perform polishing to a free curved surface.

【0006】[0006]

【作用】上記構成による研磨方法は、回転する被加工物
1の上面7上に、真球体の球面体研磨工具2を流体供給
により浮上構成させ回転と揺動にて研磨することによ
り、常に安定した研磨ができ良好な高面精度の加工面が
得られる。
In the polishing method having the above-mentioned structure, the spherical polishing tool 2 having a true spherical shape is floated on the upper surface 7 of the rotating workpiece 1 by supplying the fluid, and polishing is performed by rotation and rocking, so that the polishing is always stable. It is possible to perform polishing and obtain a processed surface with good surface accuracy.

【0007】なお、球面体研磨工具2が、研磨剤(砥粒
含有の工具)のときは、研磨の刃先により被加工物1の
加工面7の研磨がされる。また、研磨工具2が非研磨剤
のときは、研磨液(酸化セリウムなど)を研磨工具2と
被加工物1の加工面7へ介在させて研磨される。ホルダ
ー3は、加工面形状(曲率)に沿って、上下動するよう
に制御されるので、真球の研磨工具の転動性を一定と
し、揺動滞留時間を制御しつつ加工することができるの
で良好な加工面が得られる。
When the spherical body polishing tool 2 is an abrasive (a tool containing abrasive grains), the processing surface 7 of the workpiece 1 is polished by the polishing blade. When the polishing tool 2 is a non-polishing agent, a polishing liquid (cerium oxide or the like) is interposed between the polishing tool 2 and the processed surface 7 of the workpiece 1 for polishing. Since the holder 3 is controlled so as to move up and down along the shape (curvature) of the processing surface, it is possible to perform processing while keeping the rolling property of the polishing tool of a true sphere constant and controlling the swing residence time. Therefore, a good processed surface can be obtained.

【0008】[0008]

【実施例1】本発明の実施例を図面に基いて説明する。
図2は、本発明の研磨方法の実施例1の要部を示し、そ
の一部を断面にて示す正面図である。なお図中において
上記した図1と同一部材および同一構成については、同
一符号を付し、その説明は省略する。
Embodiment 1 An embodiment of the present invention will be described with reference to the drawings.
FIG. 2 is a front view showing a main part of a polishing method according to the first embodiment of the present invention and showing a part of the cross section. In the figure, the same members and configurations as those in FIG. 1 described above are designated by the same reference numerals, and the description thereof will be omitted.

【0009】回転軸8を下面の中心に設けて回転するよ
う構成された円板形状のレンズ保持具6の上面には、そ
の上面が凸球面形状の被加工物9が保持されている。上
記被加工物9の上面には、図示されていないが、駆動機
構と連動構成されて回転軸にその一端を装着された円柱
形状の上下回転、揺動するホルダー3が配設されてい
る。このホルダー3の下端面には、所望の寸法の半球形
状の凹部5が形成されて、その凹部の中心には図示され
ていないが、外部に設けられた流体例えば酸化セリウム
などの研磨材を含有した研磨液を流通する流体供給孔4
(5kg/cm2 以下)が穿設されている。
A workpiece 9 having a convex spherical surface on its upper surface is held on the upper surface of a disk-shaped lens holder 6 configured to rotate by providing a rotary shaft 8 at the center of its lower surface. Although not shown, on the upper surface of the workpiece 9, there is disposed a columnar holder 3 which is configured to interlock with a drive mechanism and whose one end is attached to a rotary shaft and which vertically rotates and swings. A hemispherical concave portion 5 having a desired size is formed on the lower end surface of the holder 3, and a fluid provided outside, for example, an abrasive such as cerium oxide is contained in the center of the concave portion although not shown. Fluid supply hole 4 for passing the polishing liquid
(5 kg / cm 2 or less) is drilled.

【0010】上記ホルダー3の下端面に形成された凹部
5内には、上記した被加工物9を研磨する球形状の研磨
工具2が配設されている。即ち上記した酸化セリウムな
どを含有した流体供給孔4より噴射することによって流
体を球面凹部5と球面体の研磨工具2との間に無接触の
状態で介在させるように構成されている。
In the recess 5 formed on the lower end surface of the holder 3, a spherical polishing tool 2 for polishing the workpiece 9 is arranged. That is, by injecting from the fluid supply hole 4 containing cerium oxide or the like, the fluid is interposed between the spherical concave portion 5 and the polishing tool 2 of the spherical body in a non-contact state.

【0011】上記構成による本実施例の研磨方法を説明
する。予め保持具6上に保持された被加工物9の加工面
に球面体研磨工具2を当接する。続いて酸化セリウムを
含有した流体を流体供給孔4を介して球面5より研磨工
具2に噴射させると共に保持具6とホルダー3とをそれ
ぞれに駆動すると保持具6は矢印の示す方向に、またホ
ルダー3も矢印(回転と揺動と上下)に示す方向にそれ
ぞれに作動する。上記においてホルダー3は、揺動を被
加工物9の曲率中心0を中心に揺動することで、球面体
研磨工具2の自在転動、かつ流体の圧力と球面体研磨工
具2の滞留制御と研磨剤の介在で研磨される。即ち球面
体研磨工具2のホルダー3は、被加工物1の周速の速い
部分ほど短く、周速の速い部分ほど長く滞留するように
揺動を制御されて研磨される。
The polishing method of this embodiment having the above structure will be described. The spherical body polishing tool 2 is brought into contact with the processed surface of the workpiece 9 held on the holder 6 in advance. Subsequently, a fluid containing cerium oxide is jetted from the spherical surface 5 to the polishing tool 2 through the fluid supply hole 4 and the holder 6 and the holder 3 are driven respectively, so that the holder 6 moves in the direction indicated by the arrow and again in the holder. 3 also operates in the directions indicated by the arrows (rotation, swing, up and down). In the above description, the holder 3 swings around the center of curvature 0 of the workpiece 9 so as to freely roll the spherical body polishing tool 2 and control the fluid pressure and the retention of the spherical body polishing tool 2. Polished with the aid of an abrasive. That is, the holder 3 of the spherical body polishing tool 2 is controlled and rocked such that the holder 3 of the workpiece 1 has a shorter peripheral portion at a faster peripheral speed and a longer peripheral portion at a faster peripheral speed, and is polished.

【0012】上記においてホルダー3の球面5と球面体
研磨工具2の間隙は、球面体研磨工具2の摩耗分をホル
ダー3側で降下させ一定にすることで加工条件の変動が
少なく良好な面精度が得られる。
In the above, the gap between the spherical surface 5 of the holder 3 and the spherical body polishing tool 2 is kept constant by lowering the wear amount of the spherical body polishing tool 2 on the holder 3 side so that there is little variation in processing conditions and good surface accuracy. Is obtained.

【0013】また、上記本実施例においては、球面体研
磨工具2の材質は特定していないが、良好な研磨面を得
るためには、テフロン・アクリル・ベークライトなどが
よい。また被加工物9である光学レンズの材質は、一般
的なクラウン・プリント系の他に石英・螢石などでも可
能である。
In the present embodiment, the material of the spherical body polishing tool 2 is not specified, but Teflon / acrylic / bakelite or the like is preferable in order to obtain a good polishing surface. The material of the optical lens that is the workpiece 9 may be quartz, fluorite, etc. in addition to the general crown-print system.

【0014】また、上記球面体研磨工具2がダイヤモン
ド・カーボンランダム・酸化セリウム等の研磨材砥粒を
含有した研磨工具である場合は、研磨液を水として研磨
加工することも可能である。
When the spherical body polishing tool 2 is a polishing tool containing abrasive grains such as diamond, carbon random, and cerium oxide, it is possible to perform polishing with water as a polishing liquid.

【0015】上記した本実施例によると、流体の噴射に
よる転動と、揺動による転動とが相互に作用し合うこと
により、球面体研磨工具の摩耗は真球形状に進むため偏
摩耗することがない。従って加工面への接触圧力が変化
することがないので良好な研磨面を有するレンズが得ら
れる。
According to the present embodiment described above, the rolling of the spherical body polishing tool progresses into a true spherical shape due to the interaction of the rolling caused by the jetting of the fluid and the rolling caused by the rocking interaction, which causes uneven wear. Never. Therefore, the contact pressure on the processed surface does not change, so that a lens having a good polished surface can be obtained.

【0016】[0016]

【実施例2】図3は、本発明の研磨方法の実施例2の要
部を示し、その一部を断面にて示す正面図である。なお
上記実施例1と同様に、図中において図1および図2と
同一部材同一構成については、同一符号を付し、その説
明は省略する。
[Embodiment 2] FIG. 3 is a front view showing a main portion of a second embodiment of the polishing method of the present invention and showing a part thereof in cross section. Note that, as in the first embodiment, the same members as those in FIGS. 1 and 2 are designated by the same reference numerals in the drawings, and the description thereof will be omitted.

【0017】図3に示すように、本実施例と上記実施例
1との相違点は、被加工物である加工レンズの形状が異
なるのみで他の構成は、全く同一である。即ち、保持具
6の上面には、凹面形状の被加工物10が一体的に装着
されており、その上面には球面体研磨工具2がホルダー
3の凹形状球面5内に配設されている。またホルダー3
の上記球面中心5には流体供給孔4が穿設されて球面体
研磨工具2を噴射するよう構成されている。このように
構成された研磨装置は、保持具6の回転とホルダー3の
回転と揺動と上下動と流体噴射とにより研磨加工され
る。
As shown in FIG. 3, the difference between this embodiment and the above-mentioned first embodiment is that the shape of the processed lens, which is the workpiece, is different, and the other structures are exactly the same. That is, the workpiece 10 having a concave shape is integrally mounted on the upper surface of the holder 6, and the spherical body polishing tool 2 is disposed inside the concave spherical surface 5 of the holder 3 on the upper surface. .. Also holder 3
A fluid supply hole 4 is bored in the spherical center 5 of the above to spray the spherical body polishing tool 2. The polishing apparatus configured in this manner performs polishing by rotating the holder 6, rotating the holder 3, swinging, moving up and down, and ejecting fluid.

【0018】[0018]

【実施例3】図4は、本発明の研磨方法の実施例3の要
部を示し、その一部を断面にて示す正面図である。なお
上記実施例2と同様に、図中において図1、図2、図3
と同一部材同一構成については、同一符号を付し、その
説明は省略する。
[Embodiment 3] FIG. 4 is a front view showing a main portion of a third embodiment of the polishing method of the present invention, a part of which is shown in cross section. It should be noted that, as in the case of the above-described second embodiment, in FIGS.
The same members and the same configurations as those are denoted by the same reference numerals, and the description thereof will be omitted.

【0019】図4に示すように、本実施例と上記実施例
1との相違点は、実施例1においては、ホルダー3の流
体供給孔4より酸化セリウムを含有した流体を球面体研
磨工具2に噴射したが、本実施例は、図示されていない
がエアー供給手段により5kg/cm2以下のエアーを球面体
研磨工具2に噴射すると共に、その加工側面即ち球面体
研磨工具2と被加工物9との当接側面に研磨材供給パイ
プ11を配設してその先端より酸化セリウムなどの研磨
材を含有する研磨液を供給して研磨加工するように構成
した点が異なっている。その他の構成と作用は、実施例
1と同一であるので省略する。
As shown in FIG. 4, the difference between this embodiment and the first embodiment is that in the first embodiment, the fluid containing the cerium oxide is fed from the fluid supply hole 4 of the holder 3 to the spherical body polishing tool 2 In the present embodiment, although not shown, air of 5 kg / cm 2 or less is jetted to the spherical body polishing tool 2 by an air supply means, and the machining side surface thereof, that is, the spherical body polishing tool 2 and the workpiece. 9 is different from that of FIG. 9 in that an abrasive material supply pipe 11 is provided and a polishing liquid containing an abrasive material such as cerium oxide is supplied from the tip thereof to perform polishing. The other configurations and operations are the same as those in the first embodiment, and therefore will be omitted.

【0020】上記本実施例においては、球面体研磨工具
2の材質を特定しなかったが、酸化セリウムなどの砥粒
を含有した研磨工具でもよいことは勿論である。この場
合に供給する研磨液は水でよい。また上記各実施例にお
いては、非加工物を光学レンズで示したが、光学レンズ
に限らず金属研磨加工にも用いることができることは勿
論である。
In the above embodiment, the material of the spherical body polishing tool 2 was not specified, but it goes without saying that a polishing tool containing abrasive grains such as cerium oxide may be used. The polishing liquid supplied in this case may be water. Further, in each of the above embodiments, the non-processed object is shown as an optical lens, but it is needless to say that it can be used not only for the optical lens but also for metal polishing.

【0021】[0021]

【発明の効果】上記構成と方法とによる本発明によれ
ば、流体の噴射による転動と揺動による転動とが相互に
作用し合うことにより、球面体研磨工具の摩耗は真球形
状に進むので偏摩耗が生ずることがない。また球面体研
磨工具が加工面への接触圧力が変化することがないので
高精度で高品質の研磨面を得ることができるなどの効果
を奏する。
According to the present invention having the above-described structure and method, the rolling of the spherical body polishing tool has a true spherical shape due to the interaction of the rolling caused by the jet of fluid and the rolling caused by the rocking. As it advances, uneven wear does not occur. Further, since the contact pressure of the spherical body polishing tool with respect to the processing surface does not change, it is possible to obtain a highly accurate and high quality polishing surface.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の研磨方法の概念を示しその一部を断面
にて示す正面図である。
FIG. 1 is a front view showing the concept of a polishing method of the present invention and showing a part thereof in cross section.

【図2】本発明の研磨方法の実施例1の要部を示し、そ
の一部を断面にて示す正面図である。
FIG. 2 is a front view showing a main part of a polishing method according to a first embodiment of the present invention, a part of which is shown in cross section.

【図3】本発明の研磨方法の実施例2の要部を示し、そ
の一部を断面にて示す正面図である。
FIG. 3 is a front view showing a main part of a polishing method according to a second embodiment of the present invention, a part of which is shown in cross section.

【図4】本発明の研磨方法の実施例3の要部を示し、そ
の一部を断面にて示す正面図である。
FIG. 4 is a front view showing a main part of a polishing method according to a third embodiment of the present invention, a part of which is shown in cross section.

【符号の説明】[Explanation of symbols]

1,9,10 被加工物 2 球面体研磨工具 3 ホルダー 4 流体供給孔 5 球面 6 保持具 7 加工面 8 回転軸 11 研磨液供給パイプ 1, 9 and 10 Work piece 2 Spherical body polishing tool 3 Holder 4 Fluid supply hole 5 Spherical surface 6 Holder 7 Processing surface 8 Rotating shaft 11 Polishing liquid supply pipe

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 回転自在に保持した被加工物の上面に、
球面体研磨工具を保持するホルダーの球面上方より流体
を噴射して保持すると共に、揺動と回転と上下作動とに
より被加工物の稜線に沿って研磨することを特徴とする
研磨方法。
1. An upper surface of a workpiece rotatably held,
A polishing method characterized in that a fluid is jetted and held from above a spherical surface of a holder for holding a spherical body polishing tool, and polishing is performed along a ridge line of a workpiece by swinging, rotating and vertically moving.
【請求項2】 回転自在に保持した被加工物の上面に、
球面体研磨工具を保持するホルダーの球面上方より流体
を噴射して保持すると共に、揺動と回転と上下移動とに
より被加工物の稜線に沿って研磨し、その側方より研磨
液を供給して研磨することを特徴とする研磨方法。
2. An upper surface of a workpiece rotatably held,
Fluid is jetted and held from above the spherical surface of the holder that holds the spherical body polishing tool, and is ground along the ridge line of the work piece by rocking, rotating, and vertically moving, and the polishing liquid is supplied from the side. A polishing method, which comprises polishing by polishing.
JP23741791A 1991-08-23 1991-08-23 Polishing method Withdrawn JPH0557589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23741791A JPH0557589A (en) 1991-08-23 1991-08-23 Polishing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23741791A JPH0557589A (en) 1991-08-23 1991-08-23 Polishing method

Publications (1)

Publication Number Publication Date
JPH0557589A true JPH0557589A (en) 1993-03-09

Family

ID=17015054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23741791A Withdrawn JPH0557589A (en) 1991-08-23 1991-08-23 Polishing method

Country Status (1)

Country Link
JP (1) JPH0557589A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113478395A (en) * 2021-06-02 2021-10-08 浙江工业大学 Replaceable high-speed strong-constraint abrasive particle jet polishing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113478395A (en) * 2021-06-02 2021-10-08 浙江工业大学 Replaceable high-speed strong-constraint abrasive particle jet polishing device

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A300 Withdrawal of application because of no request for examination

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Effective date: 19981112