JPH0556814B2 - - Google Patents

Info

Publication number
JPH0556814B2
JPH0556814B2 JP61139851A JP13985186A JPH0556814B2 JP H0556814 B2 JPH0556814 B2 JP H0556814B2 JP 61139851 A JP61139851 A JP 61139851A JP 13985186 A JP13985186 A JP 13985186A JP H0556814 B2 JPH0556814 B2 JP H0556814B2
Authority
JP
Japan
Prior art keywords
vibrating beam
vibrating
diaphragm
vibration
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61139851A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62297738A (ja
Inventor
Kyoichi Ikeda
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP13985186A priority Critical patent/JPS62297738A/ja
Publication of JPS62297738A publication Critical patent/JPS62297738A/ja
Publication of JPH0556814B2 publication Critical patent/JPH0556814B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP13985186A 1986-06-16 1986-06-16 振動式圧力センサ Granted JPS62297738A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13985186A JPS62297738A (ja) 1986-06-16 1986-06-16 振動式圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13985186A JPS62297738A (ja) 1986-06-16 1986-06-16 振動式圧力センサ

Publications (2)

Publication Number Publication Date
JPS62297738A JPS62297738A (ja) 1987-12-24
JPH0556814B2 true JPH0556814B2 (enrdf_load_stackoverflow) 1993-08-20

Family

ID=15255008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13985186A Granted JPS62297738A (ja) 1986-06-16 1986-06-16 振動式圧力センサ

Country Status (1)

Country Link
JP (1) JPS62297738A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5383677A (en) * 1976-12-29 1978-07-24 Rikagaku Kenkyusho Measurement of grain size distribution
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer

Also Published As

Publication number Publication date
JPS62297738A (ja) 1987-12-24

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