JPH0556655B2 - - Google Patents

Info

Publication number
JPH0556655B2
JPH0556655B2 JP60103949A JP10394985A JPH0556655B2 JP H0556655 B2 JPH0556655 B2 JP H0556655B2 JP 60103949 A JP60103949 A JP 60103949A JP 10394985 A JP10394985 A JP 10394985A JP H0556655 B2 JPH0556655 B2 JP H0556655B2
Authority
JP
Japan
Prior art keywords
pellet
alignment
pellets
claw
leveling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60103949A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61263238A (ja
Inventor
Hisaya Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Original Assignee
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Seiki Co Ltd filed Critical Toshiba Seiki Co Ltd
Priority to JP10394985A priority Critical patent/JPS61263238A/ja
Publication of JPS61263238A publication Critical patent/JPS61263238A/ja
Publication of JPH0556655B2 publication Critical patent/JPH0556655B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP10394985A 1985-05-17 1985-05-17 ペレット斉整方法 Granted JPS61263238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10394985A JPS61263238A (ja) 1985-05-17 1985-05-17 ペレット斉整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10394985A JPS61263238A (ja) 1985-05-17 1985-05-17 ペレット斉整方法

Publications (2)

Publication Number Publication Date
JPS61263238A JPS61263238A (ja) 1986-11-21
JPH0556655B2 true JPH0556655B2 (enExample) 1993-08-20

Family

ID=14367671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10394985A Granted JPS61263238A (ja) 1985-05-17 1985-05-17 ペレット斉整方法

Country Status (1)

Country Link
JP (1) JPS61263238A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202544A (ja) * 1983-04-25 1983-11-25 Matsushita Electronics Corp 半導体ペレツトの位置決め装置

Also Published As

Publication number Publication date
JPS61263238A (ja) 1986-11-21

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