JPH0555832B2 - - Google Patents
Info
- Publication number
- JPH0555832B2 JPH0555832B2 JP58172938A JP17293883A JPH0555832B2 JP H0555832 B2 JPH0555832 B2 JP H0555832B2 JP 58172938 A JP58172938 A JP 58172938A JP 17293883 A JP17293883 A JP 17293883A JP H0555832 B2 JPH0555832 B2 JP H0555832B2
- Authority
- JP
- Japan
- Prior art keywords
- scintillator
- ions
- film
- electrons
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 41
- 239000012528 membrane Substances 0.000 claims description 8
- 238000004458 analytical method Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001493 electron microscopy Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000004157 plasmatron Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58172938A JPS6066174A (ja) | 1983-09-21 | 1983-09-21 | 試料分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58172938A JPS6066174A (ja) | 1983-09-21 | 1983-09-21 | 試料分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6066174A JPS6066174A (ja) | 1985-04-16 |
| JPH0555832B2 true JPH0555832B2 (ko) | 1993-08-18 |
Family
ID=15951129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58172938A Granted JPS6066174A (ja) | 1983-09-21 | 1983-09-21 | 試料分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6066174A (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123987A (en) * | 1978-03-20 | 1979-09-26 | Toshiba Corp | Radiation detector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101458U (ja) * | 1981-12-29 | 1983-07-09 | 株式会社島津製作所 | 質量分析装置 |
-
1983
- 1983-09-21 JP JP58172938A patent/JPS6066174A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123987A (en) * | 1978-03-20 | 1979-09-26 | Toshiba Corp | Radiation detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6066174A (ja) | 1985-04-16 |
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