JPH0553120B2 - - Google Patents
Info
- Publication number
- JPH0553120B2 JPH0553120B2 JP59238469A JP23846984A JPH0553120B2 JP H0553120 B2 JPH0553120 B2 JP H0553120B2 JP 59238469 A JP59238469 A JP 59238469A JP 23846984 A JP23846984 A JP 23846984A JP H0553120 B2 JPH0553120 B2 JP H0553120B2
- Authority
- JP
- Japan
- Prior art keywords
- flat plate
- ultrasonic
- vibrator
- ultrasonic probe
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Description
【発明の詳細な説明】
［発明の技術分野］
本発明は複数の超音波振動子を備えた超音波プ
ローブに関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an ultrasonic probe equipped with a plurality of ultrasonic transducers.
［発明の技術的背景とその問題点］
従来の超音波プローブは第３図に示すように、
直方体状のバツキング材３上に信号用電極７ａを
介してブロツク状の超音波振動子１を固定し、接
地電極７ｂを介して第１整合層４及び第２整合層
５を配設し、信号用電極７ａに一部が接触するフ
レキシブル電極板２を形成し、接地電極７ｂに導
電性接着剤６を介してアース板８に接続してな
る。バツキング材３は振動子背面に放射される超
音波を吸収する目的で配置されている。[Technical background of the invention and its problems] As shown in Fig. 3, the conventional ultrasonic probe
A block-shaped ultrasonic transducer 1 is fixed on a rectangular parallelepiped backing material 3 via a signal electrode 7a, a first matching layer 4 and a second matching layer 5 are provided via a ground electrode 7b, and a signal A flexible electrode plate 2 is formed, a part of which is in contact with the electrode 7a, and the ground electrode 7b is connected to the ground plate 8 via a conductive adhesive 6. The backing material 3 is arranged for the purpose of absorbing ultrasonic waves radiated to the back surface of the vibrator.
しかし、バツキング材と振動子との間には接着
剤しか介入していないため、振動子背面に超音波
が放射されるのを完全に防止することはできず、
このため、感度の低下及び狭帯域化を招いてい
た。 However, since there is only adhesive between the backing material and the vibrator, it is not possible to completely prevent ultrasonic waves from being emitted to the back of the vibrator.
This has led to a decrease in sensitivity and a narrowing of the band.
そこで、第４図に示すように、振動子１とバツ
キング材３との間の平板９を介在させ、平板９上
にリード線１１を配置して電極と接続して外部に
引出しを行う構造にし、このように平板９を介在
させることによつて振動子背面に放射される超音
波を反射せて高感度化、広帯域化を図つているも
のが提案されている。尚、接地電極７ｂは接地用
リード線１０に接続している。 Therefore, as shown in Fig. 4, a flat plate 9 is interposed between the vibrator 1 and the backing material 3, and a lead wire 11 is arranged on the flat plate 9 and connected to an electrode to be drawn out. It has been proposed that ultrasonic waves emitted from the back surface of the transducer are reflected by intervening the flat plate 9 in this way, thereby achieving higher sensitivity and wider bandwidth. Note that the ground electrode 7b is connected to a ground lead wire 10.
しかしながら、このような構造であると、平板
９上に形成される引出し用電極と振動子電極との
位置決めが困難であること、振動子と電極との接
触面積が小さく断線し易いこと、電極にリード線
を接続するための手間がかかる等の問題があつ
た。 However, with such a structure, it is difficult to position the extraction electrodes formed on the flat plate 9 and the vibrator electrodes, the contact area between the vibrator and the electrodes is small and wires are easily broken, and the electrodes are easily disconnected. There were problems such as the need for time and effort to connect the lead wires.
［発明の目的］
本発明は、前記問題点に鑑みてなされた物であ
り、製造が容易であり、信頼性の高い、高感度又
は広帯域の超音波プローブを提供することを目的
としている。[Object of the Invention] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a highly sensitive or broadband ultrasonic probe that is easy to manufacture and highly reliable.
［発明の概要］
前記目的を達成するために本発明は、複数のブ
ロツク状超音波振動子が平板を介して直方体状の
バツキング材上に固定されてなる超音波プローブ
において、前記平板は少なくとも振動子との接触
面が可撓性を有する導電性材料から成り、前記振
動子の電極に接続されると共に、先端がバツキン
グ材壁面方向に延在形成されていることを特徴と
するものである。[Summary of the Invention] To achieve the above object, the present invention provides an ultrasonic probe in which a plurality of block-shaped ultrasonic transducers are fixed on a rectangular parallelepiped backing material via a flat plate, in which the flat plate at least absorbs vibration. The contact surface with the vibrator is made of a flexible conductive material, is connected to the electrode of the vibrator, and has a tip extending in the direction of the wall surface of the backing material.
［発明の実施例］
第１図に示すのは、本発明の超音波プローブの
構造である。超音波振動子とバツキング材の間に
は導電性のある平板１２があり、超音波振動子１
とは導電性の接着剤６で接着されている。この平
板１２の厚みは、高感度化又は広帯域化というそ
れぞれの目的によつて定められており例えば波長
の1/4となるようにされ、平板はフレキシブルな
構造となつており、この結果電極と一体的になつ
ている。これらはそれぞれ方形状の板状体として
積層されるものであるが、その後、ダイサーによ
つて、平板までカツテイングし、複数のアレイ状
（ブロツク状）の振動子群を形成する。このよう
に平板とフレキシブルな電極が一体となつている
ために製造しやすく、又、振動子と電極との接触
面積が大きいために信頼性もよい超音波プローブ
ができる。尚、平板１２の先端は外方に延在し、
延在部分に絶縁被覆１３が形成される。[Embodiments of the Invention] FIG. 1 shows the structure of an ultrasonic probe of the present invention. There is a conductive flat plate 12 between the ultrasonic vibrator and the backing material, and the ultrasonic vibrator 1
and are bonded to each other with a conductive adhesive 6. The thickness of this flat plate 12 is determined depending on the purpose of increasing sensitivity or widening the band, and is made to be, for example, 1/4 of the wavelength, and the flat plate has a flexible structure. It has become an integral part. These are laminated as rectangular plate-like bodies, and are then cut into flat plates using a dicer to form a plurality of array-like (block-like) vibrator groups. Since the flat plate and the flexible electrode are integrated in this way, the ultrasonic probe is easy to manufacture and has high reliability because the contact area between the transducer and the electrode is large. Note that the tip of the flat plate 12 extends outward,
An insulating coating 13 is formed on the extended portion.
第２図に示すのは、平板１２が基板１２ａとそ
の表面に形成されたフレキシブルな導電性の層１
２ｂから構成されてなるものであり、この導電性
層１２ｂの厚みは超音波の波長より十分小さい厚
みになつており、フレキシブルな電極と一体化さ
れたのと同等になつており、その先端が外部に延
在して絶縁被覆されているものであり、第１図の
実施例と同様な効果がある。 In FIG. 2, a flat plate 12 is a substrate 12a and a flexible conductive layer 1 formed on the surface thereof.
The thickness of this conductive layer 12b is sufficiently smaller than the wavelength of the ultrasonic wave, and is equivalent to being integrated with a flexible electrode. It extends to the outside and is coated with insulation, and has the same effect as the embodiment shown in FIG.
第５図に示すのは、第２図の本発明のプローブ
において、１２ａのバツキング材と超音波振動子
の間に介在する平板の基板の厚みを波長の1/4に
して、その音響インピーダンスを変化させた時の
第３図に示した従来プローブとの感度差をシミユ
レーシヨンによつて求めたものである。この時そ
の他の条件としては、１２ｂのフレキシブルな導
電性のある層としては、音響インピーダンス45
（×106Kg／m2ｓ）とし、その厚みは波長の3/100
とした。 FIG. 5 shows that in the probe of the present invention shown in FIG. 2, the thickness of the flat substrate interposed between the backing material 12a and the ultrasonic vibrator is set to 1/4 of the wavelength, and its acoustic impedance is The difference in sensitivity with respect to the conventional probe shown in FIG. 3 when the probe was changed was determined by simulation. Other conditions at this time include that the flexible conductive layer 12b has an acoustic impedance of 45
(×10 6 Kg/m 2 s), and its thickness is 3/100 of the wavelength.
And so.
よつてグラフよりわかるように従来より高感度
で信頼性の高いプローブを作るためには１２ａの
基板の音響インピーダンスとしては７（×106Kg／
m2ｓ）以下で厚みが波長の1/4のものを用い、又、
１２ｂの導電性のある層としては例えば銅のよう
なものを用いた平板を使用すればよい。 Therefore, as you can see from the graph, in order to make a probe with higher sensitivity and reliability than before, the acoustic impedance of the 12a substrate must be 7 (×10 6 Kg/
m 2 s) or less and the thickness is 1/4 of the wavelength, and
As the conductive layer 12b, a flat plate made of, for example, copper may be used.
又、背面のバツキング材と超音波振動子の間の
平板を何層かにして形成することも可能であり、
それによつて、より高感度又は広帯域の超音波プ
ローブを作ることができる。 It is also possible to form a flat plate between the backing material on the back and the ultrasonic vibrator in several layers.
Thereby, more sensitive or broadband ultrasound probes can be made.
［発明の効果］
以上詳述した本発明によれば、高感度、広帯域
化が図れ、振動子と電極との接触面積が大きく、
しかも電極引出しや位置決めに手間のかからない
超音波プローブを提供することができる。[Effects of the Invention] According to the present invention detailed above, high sensitivity and wide band can be achieved, and the contact area between the vibrator and the electrode is large.
Furthermore, it is possible to provide an ultrasonic probe that does not require time and effort for electrode extraction and positioning.
第１図は本発明の超音波プローブの断面図、第
２図は本発明の他の実施例たる超音波プローブの
断面図、第３図は従来の超音波プローブの断面
図、第４図は背面に平板のバツキング層を入れた
超音波プローブの従来例の断面図及び第５図は感
度差を示す特性図である。
１……超音波振動子、２……フレキシブルな電
極、３……バツキング材、４……第１整合層、５
……第２整合層、６……導電性接着剤、７……超
音波振動子の電極、８……アース板、９……バツ
キング材と、超音波振動子の間に介在する平板、
１０，１１……リード、１２……バツキング材
と、超音波振動子の間に介在する導電性のある平
板、１３……絶縁体。
FIG. 1 is a cross-sectional view of an ultrasonic probe according to the present invention, FIG. 2 is a cross-sectional view of an ultrasonic probe according to another embodiment of the present invention, FIG. 3 is a cross-sectional view of a conventional ultrasonic probe, and FIG. A sectional view of a conventional ultrasonic probe having a flat backing layer on the back surface and FIG. 5 are characteristic diagrams showing sensitivity differences. DESCRIPTION OF SYMBOLS 1... Ultrasonic vibrator, 2... Flexible electrode, 3... Backing material, 4... First matching layer, 5
... Second matching layer, 6 ... Conductive adhesive, 7 ... Electrode of ultrasonic vibrator, 8 ... Earth plate, 9 ... Flat plate interposed between backing material and ultrasonic vibrator,
10, 11...Lead, 12...A conductive flat plate interposed between the backing material and the ultrasonic vibrator, 13...Insulator.
Claims (1)
て直方体状のバツキング材上に固定されてなる超
音波プローブにおいて、前記平板は少なくとも振
動子との接触面が可撓性を有する導電性材料から
成り、前記振動子の電極に接続されると共に、先
端がバツキング材壁面方向に延在形成されている
ことを特徴とする超音波プローブ。 ２ 前記平板の厚みは波長の1/4の整数倍とされ
ていることを特徴とする特許請求の範囲第１項記
載の超音波プローブ。 ３ 前記平板は可撓性部材の平面に導電層を形成
したものであることを特徴とする特許請求の範囲
第１項又は第２項記載の超音波プローブ。[Scope of Claims] 1. An ultrasonic probe in which a plurality of block-shaped ultrasonic transducers are fixed on a rectangular parallelepiped backing material via a flat plate, wherein at least a surface in contact with the transducers of the flat plate is flexible. What is claimed is: 1. An ultrasonic probe, characterized in that the probe is made of a conductive material having a conductive material, is connected to an electrode of the vibrator, and has a tip extending in the direction of the wall surface of the backing material. 2. The ultrasonic probe according to claim 1, wherein the thickness of the flat plate is an integral multiple of 1/4 of the wavelength. 3. The ultrasonic probe according to claim 1 or 2, wherein the flat plate is a flexible member with a conductive layer formed on the flat surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23846984A JPS61118099A (en) | 1984-11-14 | 1984-11-14 | Ultrasonic wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23846984A JPS61118099A (en) | 1984-11-14 | 1984-11-14 | Ultrasonic wave probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61118099A JPS61118099A (en) | 1986-06-05 |
| JPH0553120B2 true JPH0553120B2 (en) | 1993-08-09 |
Family
ID=17030694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23846984A Granted JPS61118099A (en) | 1984-11-14 | 1984-11-14 | Ultrasonic wave probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61118099A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5591549B2 (en) * | 2010-01-28 | 2014-09-17 | 株式会社東芝 | Ultrasonic transducer, ultrasonic probe, and method of manufacturing ultrasonic transducer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59189834A (en) * | 1983-04-11 | 1984-10-27 | オリンパス光学工業株式会社 | Appay type ultrasonic probe |
-
1984
- 1984-11-14 JP JP23846984A patent/JPS61118099A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59189834A (en) * | 1983-04-11 | 1984-10-27 | オリンパス光学工業株式会社 | Appay type ultrasonic probe |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61118099A (en) | 1986-06-05 |
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