JPH0553063B2 - - Google Patents
Info
- Publication number
- JPH0553063B2 JPH0553063B2 JP11927386A JP11927386A JPH0553063B2 JP H0553063 B2 JPH0553063 B2 JP H0553063B2 JP 11927386 A JP11927386 A JP 11927386A JP 11927386 A JP11927386 A JP 11927386A JP H0553063 B2 JPH0553063 B2 JP H0553063B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- substrate
- holding
- holding container
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011347 resin Substances 0.000 claims description 31
- 229920005989 resin Polymers 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 26
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 13
- 229920002530 polyetherether ketone Polymers 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 description 10
- 239000000843 powder Substances 0.000 description 10
- 239000004734 Polyphenylene sulfide Substances 0.000 description 9
- 229920000069 polyphenylene sulfide Polymers 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 229920013632 Ryton Polymers 0.000 description 1
- 239000004736 Ryton® Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Landscapes
- Containers Having Bodies Formed In One Piece (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61119273A JPS62276849A (ja) | 1986-05-26 | 1986-05-26 | 保持容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61119273A JPS62276849A (ja) | 1986-05-26 | 1986-05-26 | 保持容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62276849A JPS62276849A (ja) | 1987-12-01 |
| JPH0553063B2 true JPH0553063B2 (ko) | 1993-08-09 |
Family
ID=14757283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61119273A Granted JPS62276849A (ja) | 1986-05-26 | 1986-05-26 | 保持容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62276849A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5455201A (en) * | 1987-10-27 | 1995-10-03 | Mitsui Toatsu Chemicals, Inc. | Method of manufacturing planar display using a polyether ether ketone holding container |
| US5593916A (en) * | 1988-08-12 | 1997-01-14 | Mitsui Toatsu Chemicals, Incorporated | Processing of glass substrates using holding container and holding container |
| JP2552625B2 (ja) * | 1993-11-09 | 1996-11-13 | 淀川化成株式会社 | ガラス基板搬送用ボックス |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60147121A (ja) * | 1984-01-12 | 1985-08-03 | Mitsui Toatsu Chem Inc | ウエハ処理用容器 |
-
1986
- 1986-05-26 JP JP61119273A patent/JPS62276849A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60147121A (ja) * | 1984-01-12 | 1985-08-03 | Mitsui Toatsu Chem Inc | ウエハ処理用容器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62276849A (ja) | 1987-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |