CA1295436C - Holding container - Google Patents
Holding containerInfo
- Publication number
- CA1295436C CA1295436C CA000551150A CA551150A CA1295436C CA 1295436 C CA1295436 C CA 1295436C CA 000551150 A CA000551150 A CA 000551150A CA 551150 A CA551150 A CA 551150A CA 1295436 C CA1295436 C CA 1295436C
- Authority
- CA
- Canada
- Prior art keywords
- holding container
- resin
- holding
- substrates
- ether ketone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
ABSTRACT
A holding container made of a polyether ether ketone resin is described. The container is suitable for use in holding one or more substrates upon fabrication of the corresponding number of thin-film semiconductor substrates which are useful in driving a planar display.
A holding container made of a polyether ether ketone resin is described. The container is suitable for use in holding one or more substrates upon fabrication of the corresponding number of thin-film semiconductor substrates which are useful in driving a planar display.
Description
SPECIFICATION
"HOLDING CONTAINER"
This invention relates to a holding container useful in chemical treatments, processing, washing, transportation, storage and the like upon fabrication of one or more thin-layer semiconductor substrates, which are suitable for driving a planar display, by forming a thin-film semiconductor on each of the substrates.
The term "planar display" as used herein means those adapted to display an image by using a liquid crystal, plasma display tubes, light emitting diodes, electroluminescence or the like. Planar displays are used as thin television sets and various displays.
A glass plate, ceramic plate, porcelain-enameled steel plate or the like is used as a substrate. In order to form a semiconductor in the form of a thin film on the substrate so as to fabricate a thin-film semiconductor substraee suitable for use in driving a planar display, a variety of treatments and processing such as various chemical treatments, masking, etching ; and washing are carried out. As materials of substrate-holding containers employed in such treat-ments and processing, glass fiber containing poly-~' - 1 -?~
,:
phenylene sulfide resins (hereinafter abbreviated as "GF-containing PPS resins" and fluorine plastics such as perfluoroalkoxy-substituted polytetrafluoroethylene resin (hereinafter abbreviated as "PFA resin") have heretofore been used.
Liquid-crystal displays, one type of planar displays, are generally composed of two glass subst-rates, each of which is equipped with a transparent electrode attached thereon, and a liquid crystal layer having a thickness of several micrometers and inter-posed between the glass substrates. In order to form the transparent electrode on each of the glass substrate, treatments such as washing, masking and etching are conducted. The above-mentioned holding containers have also been used as glass substrate holding containers in such treatments.
A holding container made of a GF-containing PPS
resin is however accompanied by drawbacks that the glass fibers in the resin are dissolved by an etching treatment, the resin and glass fi~er are caused to separate as fine powder from the surface ~f the holding container and the fine powder deposits on the surface of the substrate to result in contamination of the substrate surface. On the other hand, a holding container made of a fluorine plastic is accompanied by drawbacks that it is prone to a deformation due to its ~,:
, . .
.
~2~'~43~
low stiffness, thereby involving a potential problem of accidental drop of substrates in the course of their treatments and processing, and it cannot be used in any step involving heating due to its softening and deformation at elevated temperatures.
An object of this invention is to provide a holding container for a thin-film semiconductor substrate adapted to drive a planar display, which holding container gives off no fine powder compared with conventional holding containers, has excellent heat resistance and can contribute to the improvement of productivity in the fabrication of such thin-film semiconductor substrates.
In one aspect of this invention, there is thus lS provided a holding container adapted to hold a thin-film semiconductor substrate suitable for use in driving a planar display. The container is made of a polyether ether ketone resin.
The polyether ether ketone resin useful in the practice of this invention is a crystalline thermo-plastic aromatic resin having a recurring unit represented by the following formula ~
[ - O ~ O ~ CO ~ ] (I) ~ .... ... .
.
In the present invention, it is preferable to use polyether ether ketone resins having a melt flow index in a range of 1 - 5 g/10 min as measured at 360C and under a load of 2.16 Kg in accordance with ASTM D1238.
Other resins, fillers and/or fibrous reinforcing materials may also be incorporated in such small amounts so long as the object of the present invention is not impaired. The above-described polyether ether ketone resin may be molded or otherwise formed into holding containers of various shapes by a molding or forming technique known commonly in the art, such as injection molding, extrusion forming or transfer molding technique.
The polyether ether ketone resin exhibits characteristics excellent in heat resistance, mechani-cal properties and chemical resistance even when not reinforced with glass fibers. Therefore, a holding container molded or otherwise formed of this resin has good dimensional accuracy and a light weight. It is free from deformations even at elevated temperatures, is free of the problem of accidental drop of substrates and contributes to the improvement of production yield.
By the term "holding container" as used herein is meant a container which is employed for processing, . ~
~543~
washing, transporting and otherwise handling one or more substrates made of glass or the like upon fabrica-tion of the corresponding number of thin-film semi-conductor substrates suitable for use in driving a planar display, for example, a liquid-crystal display.
Although no particular limitation is imposed on the construction or shape of the holding container, it is equipped basically with a pair of panels disposed in an opposing relation and defining a plurality of grooves or slots for holding plural substrates spacedly and a plurality of bars extending between the panels.
The present invention will hereinafter be described more specifically by the following Examples.
Example l:
As a polyether ether ketone resin, "PEEX 450G"
(trade name; product of Imperial Chemical Industries, Ltd., England; melt flow index: 3.1 g - 5 g/lO min) was molded by an injection molding machine at a cylinder temperature of 390C, mold temperature of 170C and injection pressure of l,000 Kg/cm2 to provide two grooved panels of 175 x 220 (mm) wide. Those panels were combined with four round bars obtained by extrusion forming of the polyether ether ketone resin and having a diameter of 10 mm, thereby constructing a holding container.
' ~,.. . . .
~2~ 36 Upon fabrication of glass substrates for plasma displays, the holding container constructed as described above and made of the polyether ether ketone resin did not give off fine powder and was employed satisfactorily without deformations even in a 200C
drying step.
Example 2:
As a PEEX resin, "PEEX 450G" (trade ~ark;
product of Imperial Chemical Industries, Ltd., England;
melt flow index: 3.1 g/10 min) was molded by an inject-ion molding machine at a cylinder temperature of 390C, mold temperature of 170C and injection pressure of 1,000 Kg/cm2 to provide two grooved panels of 175 x 220 (mm) wide. Those panels were combined with four round bars obtained by extrusion forming of the PEEX
resin and having a diameter of lS mm, thereby const-ructing a holding container.
Upon fabrication of glass substrates for liquid-crystal displays, the holding container obtained as described above and made of the PEEX resin did not give off fine powder and was employed satisfactorily without deformations even in a 200C drying step.
Comparative Example 1:
As a GF-containing PPS resin, "Ryton R-4" (trade mark; product of Phillips Petroleum Company) was molded by an injection molding machine at a cylinder tempera-'`J~7'~
:`
~$~36 ture of 330C, mold temperature of 140C and injectionpressure of 1,000 Kg/cm2 to provide two groovèd panels of 175 x 220 (mm) wide. Those panels were combined with four round bars obtained by extrusion forming of the GF-containing PPS resin and having a diameter of 15 mm, thereby constructing a holding container.
Upon fabrication of glass substrates for plasma displays, the holding container obtained as described above and made of the GF-containing PPS resin was dissolved in the surface thereof in an etching step so that fine powder was caused to occur.
Comparative Example 2:
Upon fabrication of glass substrates for plasma displays, a commercial holding container manufactured by Fluoroware Corporation and made of a PFA resin was deformed in a 200C drying step and the glass substrates fell down in a solution-removing step making use of a spin drier.
Comparative Example 3:
Upon fabrication of glass substrates for liquid-crystal displays, the holding container obtained in Comparative Example 1 and made of the GF-containing PPS
resin was dissolved in the surface thereof in an ~- etching step so that fine powder was caused to occur.
Comparative Example 4:
Upon fabrication of glass substrates for liquid-:, crystal displays, a commercial holding container manufactured by Fluoroware Corporation and made of a PFA resin was deformed in a 200C drying step and the glass substrates fell down in a solution-removing step S making use of a spin drier.
Holding containers of this invention, which is made of a polyether ether ketone resin, give off no fine powder compared with conventional holding containers made of a GF-containing PPS resin or fluorine plastic and are excellent in heat resistance.
Accordingly, they contribute to the improvement of the productivity of ;the fabrication of substrates for planar displays.
: - 8 -
"HOLDING CONTAINER"
This invention relates to a holding container useful in chemical treatments, processing, washing, transportation, storage and the like upon fabrication of one or more thin-layer semiconductor substrates, which are suitable for driving a planar display, by forming a thin-film semiconductor on each of the substrates.
The term "planar display" as used herein means those adapted to display an image by using a liquid crystal, plasma display tubes, light emitting diodes, electroluminescence or the like. Planar displays are used as thin television sets and various displays.
A glass plate, ceramic plate, porcelain-enameled steel plate or the like is used as a substrate. In order to form a semiconductor in the form of a thin film on the substrate so as to fabricate a thin-film semiconductor substraee suitable for use in driving a planar display, a variety of treatments and processing such as various chemical treatments, masking, etching ; and washing are carried out. As materials of substrate-holding containers employed in such treat-ments and processing, glass fiber containing poly-~' - 1 -?~
,:
phenylene sulfide resins (hereinafter abbreviated as "GF-containing PPS resins" and fluorine plastics such as perfluoroalkoxy-substituted polytetrafluoroethylene resin (hereinafter abbreviated as "PFA resin") have heretofore been used.
Liquid-crystal displays, one type of planar displays, are generally composed of two glass subst-rates, each of which is equipped with a transparent electrode attached thereon, and a liquid crystal layer having a thickness of several micrometers and inter-posed between the glass substrates. In order to form the transparent electrode on each of the glass substrate, treatments such as washing, masking and etching are conducted. The above-mentioned holding containers have also been used as glass substrate holding containers in such treatments.
A holding container made of a GF-containing PPS
resin is however accompanied by drawbacks that the glass fibers in the resin are dissolved by an etching treatment, the resin and glass fi~er are caused to separate as fine powder from the surface ~f the holding container and the fine powder deposits on the surface of the substrate to result in contamination of the substrate surface. On the other hand, a holding container made of a fluorine plastic is accompanied by drawbacks that it is prone to a deformation due to its ~,:
, . .
.
~2~'~43~
low stiffness, thereby involving a potential problem of accidental drop of substrates in the course of their treatments and processing, and it cannot be used in any step involving heating due to its softening and deformation at elevated temperatures.
An object of this invention is to provide a holding container for a thin-film semiconductor substrate adapted to drive a planar display, which holding container gives off no fine powder compared with conventional holding containers, has excellent heat resistance and can contribute to the improvement of productivity in the fabrication of such thin-film semiconductor substrates.
In one aspect of this invention, there is thus lS provided a holding container adapted to hold a thin-film semiconductor substrate suitable for use in driving a planar display. The container is made of a polyether ether ketone resin.
The polyether ether ketone resin useful in the practice of this invention is a crystalline thermo-plastic aromatic resin having a recurring unit represented by the following formula ~
[ - O ~ O ~ CO ~ ] (I) ~ .... ... .
.
In the present invention, it is preferable to use polyether ether ketone resins having a melt flow index in a range of 1 - 5 g/10 min as measured at 360C and under a load of 2.16 Kg in accordance with ASTM D1238.
Other resins, fillers and/or fibrous reinforcing materials may also be incorporated in such small amounts so long as the object of the present invention is not impaired. The above-described polyether ether ketone resin may be molded or otherwise formed into holding containers of various shapes by a molding or forming technique known commonly in the art, such as injection molding, extrusion forming or transfer molding technique.
The polyether ether ketone resin exhibits characteristics excellent in heat resistance, mechani-cal properties and chemical resistance even when not reinforced with glass fibers. Therefore, a holding container molded or otherwise formed of this resin has good dimensional accuracy and a light weight. It is free from deformations even at elevated temperatures, is free of the problem of accidental drop of substrates and contributes to the improvement of production yield.
By the term "holding container" as used herein is meant a container which is employed for processing, . ~
~543~
washing, transporting and otherwise handling one or more substrates made of glass or the like upon fabrica-tion of the corresponding number of thin-film semi-conductor substrates suitable for use in driving a planar display, for example, a liquid-crystal display.
Although no particular limitation is imposed on the construction or shape of the holding container, it is equipped basically with a pair of panels disposed in an opposing relation and defining a plurality of grooves or slots for holding plural substrates spacedly and a plurality of bars extending between the panels.
The present invention will hereinafter be described more specifically by the following Examples.
Example l:
As a polyether ether ketone resin, "PEEX 450G"
(trade name; product of Imperial Chemical Industries, Ltd., England; melt flow index: 3.1 g - 5 g/lO min) was molded by an injection molding machine at a cylinder temperature of 390C, mold temperature of 170C and injection pressure of l,000 Kg/cm2 to provide two grooved panels of 175 x 220 (mm) wide. Those panels were combined with four round bars obtained by extrusion forming of the polyether ether ketone resin and having a diameter of 10 mm, thereby constructing a holding container.
' ~,.. . . .
~2~ 36 Upon fabrication of glass substrates for plasma displays, the holding container constructed as described above and made of the polyether ether ketone resin did not give off fine powder and was employed satisfactorily without deformations even in a 200C
drying step.
Example 2:
As a PEEX resin, "PEEX 450G" (trade ~ark;
product of Imperial Chemical Industries, Ltd., England;
melt flow index: 3.1 g/10 min) was molded by an inject-ion molding machine at a cylinder temperature of 390C, mold temperature of 170C and injection pressure of 1,000 Kg/cm2 to provide two grooved panels of 175 x 220 (mm) wide. Those panels were combined with four round bars obtained by extrusion forming of the PEEX
resin and having a diameter of lS mm, thereby const-ructing a holding container.
Upon fabrication of glass substrates for liquid-crystal displays, the holding container obtained as described above and made of the PEEX resin did not give off fine powder and was employed satisfactorily without deformations even in a 200C drying step.
Comparative Example 1:
As a GF-containing PPS resin, "Ryton R-4" (trade mark; product of Phillips Petroleum Company) was molded by an injection molding machine at a cylinder tempera-'`J~7'~
:`
~$~36 ture of 330C, mold temperature of 140C and injectionpressure of 1,000 Kg/cm2 to provide two groovèd panels of 175 x 220 (mm) wide. Those panels were combined with four round bars obtained by extrusion forming of the GF-containing PPS resin and having a diameter of 15 mm, thereby constructing a holding container.
Upon fabrication of glass substrates for plasma displays, the holding container obtained as described above and made of the GF-containing PPS resin was dissolved in the surface thereof in an etching step so that fine powder was caused to occur.
Comparative Example 2:
Upon fabrication of glass substrates for plasma displays, a commercial holding container manufactured by Fluoroware Corporation and made of a PFA resin was deformed in a 200C drying step and the glass substrates fell down in a solution-removing step making use of a spin drier.
Comparative Example 3:
Upon fabrication of glass substrates for liquid-crystal displays, the holding container obtained in Comparative Example 1 and made of the GF-containing PPS
resin was dissolved in the surface thereof in an ~- etching step so that fine powder was caused to occur.
Comparative Example 4:
Upon fabrication of glass substrates for liquid-:, crystal displays, a commercial holding container manufactured by Fluoroware Corporation and made of a PFA resin was deformed in a 200C drying step and the glass substrates fell down in a solution-removing step S making use of a spin drier.
Holding containers of this invention, which is made of a polyether ether ketone resin, give off no fine powder compared with conventional holding containers made of a GF-containing PPS resin or fluorine plastic and are excellent in heat resistance.
Accordingly, they contribute to the improvement of the productivity of ;the fabrication of substrates for planar displays.
: - 8 -
Claims (3)
1. A holding container adapted to hold a thin-film semiconductor substrate suitable for use in driving a planar display, characterized in that said container is made of a polyether ether ketone resin.
2. The holding container as claimed in Claim 1, wherein the planar display is a liquid-crystal display.
3. The holding container as claimed in Claim 1, wherein the polyether ether ketone resin has a melt flow index of 1 - 5 g/10 min as measured at 360°C
under a load of 2.16 Kg.
under a load of 2.16 Kg.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000551150A CA1295436C (en) | 1987-11-05 | 1987-11-05 | Holding container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000551150A CA1295436C (en) | 1987-11-05 | 1987-11-05 | Holding container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1295436C true CA1295436C (en) | 1992-02-04 |
Family
ID=4136789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000551150A Expired - Fee Related CA1295436C (en) | 1987-11-05 | 1987-11-05 | Holding container |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA1295436C (en) |
-
1987
- 1987-11-05 CA CA000551150A patent/CA1295436C/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100395039B1 (en) | Polyether ketone resin composition and carrier for processing and processing semiconductor wafers | |
| CN100462739C (en) | Lens array sheet | |
| KR20040030507A (en) | Compositions produced by solvent exchange methods and uses thereof | |
| CN101267940B (en) | Clay thin-film board, clay thin-film board equipped with electrode and display device using them | |
| CN101423599A (en) | Wholly aromatic liquid-crystalline polyester | |
| TWI582132B (en) | Resin, optical material, and optical device | |
| US20230192592A1 (en) | Monomer and polymer, compensation film, optical film, and display device | |
| US5455201A (en) | Method of manufacturing planar display using a polyether ether ketone holding container | |
| CA1295436C (en) | Holding container | |
| US5593916A (en) | Processing of glass substrates using holding container and holding container | |
| US20210040279A1 (en) | Method of preparing polyimide film and display panel | |
| CN101578336A (en) | Optical films resin composition comprising polyarylate resin and amino resin having triazine structure, and optical films prepared by using the same | |
| KR20130097205A (en) | Laminated film, laminated film having electrode, and organic el element | |
| JPS62276849A (en) | Holding container | |
| US5928586A (en) | Melt extrusion processing method of thermoplastic resin | |
| KR920012162A (en) | Moldable polyester resins having high melt thermal stability and molded articles | |
| JPS62247328A (en) | Holding vessel | |
| US3300334A (en) | Coating process for glass fibers and product | |
| KR102310928B1 (en) | Antistatic film | |
| CN212920718U (en) | Not fragile film | |
| US10538666B2 (en) | Compound, polymer, film, and optical device | |
| KR102394654B1 (en) | Method of manufacturing modified liquid crystal polymer, liquid crystal polymer composition and method for changing melting point of liquid crystal polymer | |
| EP1153730B1 (en) | Production method for thermoplastic polymer sheet | |
| JPS61254636A (en) | Tray for holding electronic part | |
| EP0160159B1 (en) | Electrically conductive transparent substrate for a liquid crystal display panel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |