JPH0553055B2 - - Google Patents

Info

Publication number
JPH0553055B2
JPH0553055B2 JP60202546A JP20254685A JPH0553055B2 JP H0553055 B2 JPH0553055 B2 JP H0553055B2 JP 60202546 A JP60202546 A JP 60202546A JP 20254685 A JP20254685 A JP 20254685A JP H0553055 B2 JPH0553055 B2 JP H0553055B2
Authority
JP
Japan
Prior art keywords
plasma
electrode
substrate
reaction vessel
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60202546A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6263420A (ja
Inventor
Nobuo Mikoshiba
Kazuo Tsubochi
Kazuya Eki
Kazuo Sato
Nobumasa Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP20254685A priority Critical patent/JPS6263420A/ja
Publication of JPS6263420A publication Critical patent/JPS6263420A/ja
Publication of JPH0553055B2 publication Critical patent/JPH0553055B2/ja
Granted legal-status Critical Current

Links

JP20254685A 1985-09-14 1985-09-14 化学的気相法による反応装置及びプラズマ処理方法 Granted JPS6263420A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20254685A JPS6263420A (ja) 1985-09-14 1985-09-14 化学的気相法による反応装置及びプラズマ処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20254685A JPS6263420A (ja) 1985-09-14 1985-09-14 化学的気相法による反応装置及びプラズマ処理方法

Publications (2)

Publication Number Publication Date
JPS6263420A JPS6263420A (ja) 1987-03-20
JPH0553055B2 true JPH0553055B2 (enExample) 1993-08-09

Family

ID=16459291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20254685A Granted JPS6263420A (ja) 1985-09-14 1985-09-14 化学的気相法による反応装置及びプラズマ処理方法

Country Status (1)

Country Link
JP (1) JPS6263420A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176923A (ja) * 1982-04-09 1983-10-17 Jeol Ltd プラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPS6263420A (ja) 1987-03-20

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