JPH0552674B2 - - Google Patents

Info

Publication number
JPH0552674B2
JPH0552674B2 JP58106354A JP10635483A JPH0552674B2 JP H0552674 B2 JPH0552674 B2 JP H0552674B2 JP 58106354 A JP58106354 A JP 58106354A JP 10635483 A JP10635483 A JP 10635483A JP H0552674 B2 JPH0552674 B2 JP H0552674B2
Authority
JP
Japan
Prior art keywords
conductive film
semiconductor
tin oxide
fluorine
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58106354A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59231878A (ja
Inventor
Shunpei Yamazaki
Kenji Ito
Satsuki Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58106354A priority Critical patent/JPS59231878A/ja
Publication of JPS59231878A publication Critical patent/JPS59231878A/ja
Publication of JPH0552674B2 publication Critical patent/JPH0552674B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
JP58106354A 1983-06-13 1983-06-13 半導体装置作製方法 Granted JPS59231878A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58106354A JPS59231878A (ja) 1983-06-13 1983-06-13 半導体装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58106354A JPS59231878A (ja) 1983-06-13 1983-06-13 半導体装置作製方法

Publications (2)

Publication Number Publication Date
JPS59231878A JPS59231878A (ja) 1984-12-26
JPH0552674B2 true JPH0552674B2 (enrdf_load_stackoverflow) 1993-08-06

Family

ID=14431430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58106354A Granted JPS59231878A (ja) 1983-06-13 1983-06-13 半導体装置作製方法

Country Status (1)

Country Link
JP (1) JPS59231878A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4459086B2 (ja) 2005-02-28 2010-04-28 三洋電機株式会社 積層型光起電力装置およびその製造方法

Also Published As

Publication number Publication date
JPS59231878A (ja) 1984-12-26

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