JPH0550831B2 - - Google Patents
Info
- Publication number
- JPH0550831B2 JPH0550831B2 JP24853885A JP24853885A JPH0550831B2 JP H0550831 B2 JPH0550831 B2 JP H0550831B2 JP 24853885 A JP24853885 A JP 24853885A JP 24853885 A JP24853885 A JP 24853885A JP H0550831 B2 JPH0550831 B2 JP H0550831B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- molybdenum disilicide
- mullite
- support base
- mullite beads
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 62
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 24
- 229910052863 mullite Inorganic materials 0.000 claims description 23
- 239000011324 bead Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 9
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 25
- 229910021343 molybdenum disilicide Inorganic materials 0.000 description 25
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24853885A JPS62108486A (ja) | 1985-11-05 | 1985-11-05 | 発熱体の支持方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24853885A JPS62108486A (ja) | 1985-11-05 | 1985-11-05 | 発熱体の支持方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62108486A JPS62108486A (ja) | 1987-05-19 |
| JPH0550831B2 true JPH0550831B2 (enExample) | 1993-07-30 |
Family
ID=17179671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24853885A Granted JPS62108486A (ja) | 1985-11-05 | 1985-11-05 | 発熱体の支持方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62108486A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574018U (ja) * | 1991-02-20 | 1993-10-08 | フオスター電機株式会社 | 音響用ディジタル信号処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5324920A (en) * | 1990-10-18 | 1994-06-28 | Tokyo Electron Sagami Limited | Heat treatment apparatus |
-
1985
- 1985-11-05 JP JP24853885A patent/JPS62108486A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0574018U (ja) * | 1991-02-20 | 1993-10-08 | フオスター電機株式会社 | 音響用ディジタル信号処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62108486A (ja) | 1987-05-19 |
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