JPH0548961B2 - - Google Patents
Info
- Publication number
- JPH0548961B2 JPH0548961B2 JP26416385A JP26416385A JPH0548961B2 JP H0548961 B2 JPH0548961 B2 JP H0548961B2 JP 26416385 A JP26416385 A JP 26416385A JP 26416385 A JP26416385 A JP 26416385A JP H0548961 B2 JPH0548961 B2 JP H0548961B2
- Authority
- JP
- Japan
- Prior art keywords
- saw
- delay line
- piezoelectric substrate
- heating resistor
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 105
- 239000000758 substrate Substances 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 26
- 230000010355 oscillation Effects 0.000 claims description 19
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26416385A JPS62123807A (ja) | 1985-11-25 | 1985-11-25 | Ｓａｗフオ−スセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26416385A JPS62123807A (ja) | 1985-11-25 | 1985-11-25 | Ｓａｗフオ−スセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62123807A JPS62123807A (ja) | 1987-06-05 |
| JPH0548961B2 true JPH0548961B2 (enrdf_load_stackoverflow) | 1993-07-23 |
Family
ID=17399331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26416385A Granted JPS62123807A (ja) | 1985-11-25 | 1985-11-25 | Ｓａｗフオ−スセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123807A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5104198B2 (ja) * | 2007-10-22 | 2012-12-19 | セイコーエプソン株式会社 | 弾性表面波デバイス |
-
1985
- 1985-11-25 JP JP26416385A patent/JPS62123807A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62123807A (ja) | 1987-06-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |