JPH0548929B2 - - Google Patents

Info

Publication number
JPH0548929B2
JPH0548929B2 JP62213375A JP21337587A JPH0548929B2 JP H0548929 B2 JPH0548929 B2 JP H0548929B2 JP 62213375 A JP62213375 A JP 62213375A JP 21337587 A JP21337587 A JP 21337587A JP H0548929 B2 JPH0548929 B2 JP H0548929B2
Authority
JP
Japan
Prior art keywords
mask
wafer
detector
diffraction grating
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62213375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6455824A (en
Inventor
Ryoji Tanaka
Hidekazu Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62213375A priority Critical patent/JPS6455824A/ja
Priority to US07/145,355 priority patent/US4815854A/en
Publication of JPS6455824A publication Critical patent/JPS6455824A/ja
Publication of JPH0548929B2 publication Critical patent/JPH0548929B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP62213375A 1987-01-19 1987-08-26 Detecting method for displacement of positions of mask to wafer Granted JPS6455824A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62213375A JPS6455824A (en) 1987-08-26 1987-08-26 Detecting method for displacement of positions of mask to wafer
US07/145,355 US4815854A (en) 1987-01-19 1988-01-19 Method of alignment between mask and semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213375A JPS6455824A (en) 1987-08-26 1987-08-26 Detecting method for displacement of positions of mask to wafer

Publications (2)

Publication Number Publication Date
JPS6455824A JPS6455824A (en) 1989-03-02
JPH0548929B2 true JPH0548929B2 (enrdf_load_stackoverflow) 1993-07-22

Family

ID=16638148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213375A Granted JPS6455824A (en) 1987-01-19 1987-08-26 Detecting method for displacement of positions of mask to wafer

Country Status (1)

Country Link
JP (1) JPS6455824A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6187333A (ja) * 1984-10-04 1986-05-02 Fujitsu Ltd 半導体装置の製造方法
JPS6236508A (ja) * 1985-08-09 1987-02-17 Fujitsu Ltd マスクとウエハの位置合わせ方法

Also Published As

Publication number Publication date
JPS6455824A (en) 1989-03-02

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