JPH0548610B2 - - Google Patents

Info

Publication number
JPH0548610B2
JPH0548610B2 JP5721885A JP5721885A JPH0548610B2 JP H0548610 B2 JPH0548610 B2 JP H0548610B2 JP 5721885 A JP5721885 A JP 5721885A JP 5721885 A JP5721885 A JP 5721885A JP H0548610 B2 JPH0548610 B2 JP H0548610B2
Authority
JP
Japan
Prior art keywords
exposure
light
reduction projection
mask
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5721885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61216324A (ja
Inventor
Hiromi Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60057218A priority Critical patent/JPS61216324A/ja
Publication of JPS61216324A publication Critical patent/JPS61216324A/ja
Publication of JPH0548610B2 publication Critical patent/JPH0548610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60057218A 1985-03-20 1985-03-20 縮小投影式露光装置 Granted JPS61216324A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60057218A JPS61216324A (ja) 1985-03-20 1985-03-20 縮小投影式露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60057218A JPS61216324A (ja) 1985-03-20 1985-03-20 縮小投影式露光装置

Publications (2)

Publication Number Publication Date
JPS61216324A JPS61216324A (ja) 1986-09-26
JPH0548610B2 true JPH0548610B2 (US06653308-20031125-C00199.png) 1993-07-22

Family

ID=13049387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60057218A Granted JPS61216324A (ja) 1985-03-20 1985-03-20 縮小投影式露光装置

Country Status (1)

Country Link
JP (1) JPS61216324A (US06653308-20031125-C00199.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2649543B2 (ja) * 1988-06-03 1997-09-03 キヤノン株式会社 露光装置
US6734445B2 (en) 2001-04-23 2004-05-11 Intel Corporation Mechanized retractable pellicles and methods of use

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068066A (US06653308-20031125-C00199.png) * 1973-10-17 1975-06-07
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS59149024A (ja) * 1983-02-16 1984-08-25 Hitachi Ltd 露光装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068066A (US06653308-20031125-C00199.png) * 1973-10-17 1975-06-07
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS59149024A (ja) * 1983-02-16 1984-08-25 Hitachi Ltd 露光装置

Also Published As

Publication number Publication date
JPS61216324A (ja) 1986-09-26

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