JPH054857A - Production of ceramics base - Google Patents

Production of ceramics base

Info

Publication number
JPH054857A
JPH054857A JP3152832A JP15283291A JPH054857A JP H054857 A JPH054857 A JP H054857A JP 3152832 A JP3152832 A JP 3152832A JP 15283291 A JP15283291 A JP 15283291A JP H054857 A JPH054857 A JP H054857A
Authority
JP
Japan
Prior art keywords
powder
liquid
ceramic powder
ceramic
methyl cellulose
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3152832A
Other languages
Japanese (ja)
Inventor
Akihiro Muranaka
晃浩 村中
Yutaka Yamaguchi
裕 山口
Yasutaka Miyata
靖孝 宮田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP3152832A priority Critical patent/JPH054857A/en
Publication of JPH054857A publication Critical patent/JPH054857A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To prevent aggregation of ceramics powder and to produce a ceramics base having surface smoothness. CONSTITUTION:Ceramics powder is put in a liquid and provided with ultrasonic vibration to dissociate aggregation of ceramics powder. Methyl cellulose is added to the liquid, dissolved and heated to gelatinize the methyl cellulose. Then the liquid is kneaded to prepare body, which is molded and burnt to produce a ceramics base. Even if fine particles of ceramics powder having <=1mum particle size is used, aggregation of ceramics powder is dissociated by ultrasonic vibration and reaggregation of ceramics powder can be prevented by coating the surface of the ceramic powder with methyl cellulose gel.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、プリント配線板などに
加工して使用されるセラミック基板の製造方法に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a ceramic substrate which is processed into a printed wiring board or the like.

【0002】[0002]

【従来の技術】プリント配線板の基板や各種電子素子の
搭載基板などとしてセラミック基板が提供されている。
このセラミック基板は電気的特性や耐熱特性などにおい
て優れた性能を有するために、広く使用されつつある。
そしてこのようなセラミック基板は、アルミナ等のセラ
ミック粉体と焼結助剤とを混合すると共に、さらに有機
バインダーとしてのメチルセルロース及び水などを混合
し、これをロールミルなどで混練して杯土を作成し、次
にこの杯土を真空成形機等で押し出してシート状に成形
し、これを乾燥した後に焼成することによって製造され
ている。そしてセラミック基板をプリント配線板等の回
路基板として使用する場合、最近のファインパターンに
よる回路形成や高密度実装に対応するために組織が緻密
で且つ表面が高度に平滑であることが要求されており、
この結果セラミック粉体として粒径が1μm以下の微粒
子が使用されるようになっている。
2. Description of the Related Art Ceramic substrates are provided as substrates for printed wiring boards and substrates for mounting various electronic elements.
This ceramic substrate is being widely used because it has excellent performance in electrical characteristics and heat resistance.
In such a ceramic substrate, ceramic powder such as alumina is mixed with a sintering aid, and methyl cellulose and water as an organic binder are further mixed, and the mixture is kneaded with a roll mill or the like to form a cup clay. Then, the clay is extruded by a vacuum forming machine or the like to form a sheet, which is dried and then baked. When a ceramic substrate is used as a circuit board such as a printed wiring board, it is required that the structure is dense and the surface is highly smooth in order to cope with recent fine pattern circuit formation and high-density mounting. ,
As a result, fine particles having a particle size of 1 μm or less are used as the ceramic powder.

【0003】[0003]

【発明が解決しようとする課題】しかしこのように微粒
子のセラミック粉体を使用した場合、粒子が凝集してセ
ラミック粉体の見掛け上の粒径が大きくなり、セラミッ
ク基板の表面にフィッシャーズアイと呼ばれる直径10
0μm程度の大きさのセラミック凝集物が残り、基板表
面に凹凸が生じて回路基板として使用することができな
くなるという問題があった。
However, when the fine ceramic powder is used as described above, the particles agglomerate to increase the apparent particle size of the ceramic powder, which is called Fisher's eye on the surface of the ceramic substrate. Diameter 10
There was a problem that ceramic aggregates having a size of about 0 μm remained, and the substrate surface became uneven, so that it could not be used as a circuit board.

【0004】本発明は上記の点に鑑みてなされたもので
あり、セラミック粉体の凝集を防止して表面平滑なセラ
ミック基板を得ることができるセラミック基板の製造方
法を提供することを目的とするものである。
The present invention has been made in view of the above points, and an object of the present invention is to provide a method of manufacturing a ceramic substrate which can prevent the agglomeration of ceramic powder and obtain a ceramic substrate having a smooth surface. It is a thing.

【0005】[0005]

【課題を解決するための手段】本発明に係るセラミック
基板の製造方法は、セラミック粉体を液体に投入して超
音波振動を与えることによってセラミック粉体の凝集を
解離し、次にこの液体にメチルセルロースを投入して溶
解した後に加熱してメチルセルロースをゲル化させ、次
いでこれを混練して杯土を作成し、この杯土を成形して
焼成することを特徴とするものである。
According to the method for manufacturing a ceramic substrate of the present invention, the agglomeration of the ceramic powder is dissociated by introducing the ceramic powder into a liquid and applying ultrasonic vibration to the liquid. The method is characterized in that methylcellulose is charged and dissolved, and then heated to gelate the methylcellulose, which is then kneaded to form a cup clay, and the cup clay is molded and fired.

【0006】以下、本発明を詳細に説明する。セラミッ
ク粉体としては、アルミナ、フェライト、ジルコニアな
どの粉体を用いることができるものであり、本発明では
粒径が1μm以下の微粒子に調製されたものを用いる。
またセラミック粉体と共に焼結助剤としてタルクや、マ
グネシア、カルシア、シリカ等の粉体を用いる。
The present invention will be described in detail below. As the ceramic powder, powder of alumina, ferrite, zirconia or the like can be used, and in the present invention, fine powder having a particle size of 1 μm or less is used.
Further, powders of talc, magnesia, calcia, silica and the like are used as a sintering aid together with the ceramic powder.

【0007】そして先ず、セラミック粉体と焼結助剤と
を濃度が10〜20重量%程度になるように液体に投入
して混合する。この液体としては水が好ましい。セラミ
ック粉体と焼結助剤との配合比率は重量比で90:10
〜99:1の範囲に設定するのが好ましい。次にこの液
体に超音波を当てて超音波振動を与え、セラミック粉体
の微粒子の凝集を解離して各微粒子をバラバラにするも
のである。このときの超音波としては40〜100kH
zの周波数のものが好ましく、超音波振動を与える時間
は最低1時間以上が必要である。
First, the ceramic powder and the sintering aid are added to a liquid so as to have a concentration of about 10 to 20% by weight and mixed. Water is preferred as this liquid. The mixing ratio of the ceramic powder and the sintering aid is 90:10 by weight.
It is preferable to set in the range of ˜99: 1. Next, ultrasonic waves are applied to this liquid to apply ultrasonic vibrations to dissociate the agglomeration of the fine particles of the ceramic powder and separate the fine particles. The ultrasonic wave at this time is 40 to 100 kH
The z frequency is preferable, and the time for applying ultrasonic vibration must be at least 1 hour or more.

【0008】このように超音波振動を与えてセラミック
粉体の凝集を解離してほぐした後、このセラミック粉体
と焼結助剤を混合した液に有機バインダーとして使用す
るメチルセルロースの粉末を添加する。メチルセルロー
スの添加は超音波を液に当てながらおこなうものであ
り、メチルセルロースはその濃度が1〜2重量%になる
ように添加して溶解させるものである。次に、メチルセ
ルロースをこのように溶解した液を加熱して80℃以上
の温度にまで上昇させる。メチルセルロース溶液は80
℃以上の温度でゲル化するものであり、このようにゲル
化させた後も加熱を継続して液が粘土状になるまで煮込
む。このようにメチルセルロースをゲル化させることに
よって、セラミック粉体の微粒子はメチルセルロースの
ゲルで表面がコーテングされることになり、セラミック
粉体の微粒子が再凝集することを防ぐことができるもの
である。
After the ultrasonic vibration is applied in this way to dissociate and loosen the agglomeration of the ceramic powder, methylcellulose powder used as an organic binder is added to the liquid obtained by mixing the ceramic powder and the sintering aid. . Methyl cellulose is added while applying ultrasonic waves to the liquid, and methyl cellulose is added and dissolved so that its concentration becomes 1 to 2% by weight. Next, the liquid in which methyl cellulose is thus dissolved is heated to raise the temperature to 80 ° C. or higher. Methylcellulose solution is 80
It gels at a temperature of ℃ or more, and after the gelation in this way, heating is continued and the liquid is boiled until it becomes clay-like. By gelling methyl cellulose in this way, the fine particles of the ceramic powder are coated on the surface with the methyl cellulose gel, and it is possible to prevent the fine particles of the ceramic powder from re-aggregating.

【0009】次に、このようにして得られた粘土状物を
三本ロール等の混練機で混練し、また必要に応じてグリ
セリンなどの成形助剤を加えながら混練をおこない、杯
土を作成する。このとき、水を噴霧器等で噴霧して供給
することによって、含水率が15〜25重量%になるよ
うに水分調整しながら混練をおこなうのがよい。そして
この杯土を真空押出成形機などで所定の厚みに押し出し
成形し、乾燥して所定の寸法に打ち抜いた後に、焼成を
おこなうことによってセラミック基板を得ることができ
る。焼成条件は特に限定されるものではないが、昇温速
度を100〜200℃/hに設定し、1550〜165
0℃程度の温度で1〜4時間焼成をおこなうよにするの
がよい。
Next, the clay-like material thus obtained is kneaded with a kneader such as a three-roll mill, and kneading is performed while adding a molding aid such as glycerin, if necessary, to prepare a clay. To do. At this time, it is preferable to carry out kneading while adjusting the water content so that the water content is 15 to 25 wt% by spraying water with a sprayer or the like. A ceramic substrate can be obtained by subjecting this clay to extrusion molding to a predetermined thickness with a vacuum extrusion molding machine or the like, drying, punching to a predetermined size, and then firing. The firing conditions are not particularly limited, but the temperature rising rate is set to 100 to 200 ° C./h and 1550 to 165.
It is preferable to perform firing at a temperature of about 0 ° C. for 1 to 4 hours.

【0010】[0010]

【作用】セラミック粉体を液体に投入して超音波振動を
与えることによってセラミック粉体の凝集を解離するよ
うにしているために、粒径が1μm以下の微粒子のセラ
ミック粉体を用いても粒子の凝集なくセラミック基板を
製造することができる。また、この液体にメチルセルロ
ースを投入して溶解した後に加熱してメチルセルロース
をゲル化させるようにしているために、セラミック粉体
の表面をメチルセルロースのゲルでコーテングして、セ
ラミック粉体の粒子が再凝集することを防ぐことができ
る。
Operation: Since the agglomeration of the ceramic powder is dissociated by introducing the ceramic powder into a liquid and applying ultrasonic vibration, even if a fine ceramic powder having a particle size of 1 μm or less is used, It is possible to manufacture a ceramic substrate without agglomeration of. In addition, since methyl cellulose is put into this liquid and dissolved and then heated to gel the methyl cellulose, the surface of the ceramic powder is coated with methyl cellulose gel, and the particles of the ceramic powder are re-aggregated. Can be prevented.

【0011】[0011]

【実施例】次に、本発明を実施例によって具体的に説明
する。実施例 粒径0.4μmのアルミナ粉体と焼結助剤としての
タルク粉体とを96:4の重量比で混合し、これを水に
濃度が10重量%になるように投入した。 次に、こ
の液中に超音波発振子を入れて60kHzの超音波振動
を24時間与えた。 次に、超音波の発振を継続しな
がらメチルセルロース粉末をこの液に濃度が2重量%に
なるように添加し、さらに振動ミルで1時間混合した。
このように混合をおこなった後に、混合液を振動ミ
ルから取り出して90℃の温度に加熱し、混合液中のメ
チルセルロースをゲル化させた。 メチルセルロース
をゲル化させると共に煮詰めることによって粘土状にな
った混合液を三本ロールミルで混練しつつ成形助剤のグ
リセンリンを3重量%加えると共にさらに混練して、杯
土を作成した。 このようにして作成した杯土を真空
押出成形機で押し出し成形して厚み0.8mmのシート
を作成し、このシートを1600℃で2時間焼成するこ
とによって、セラミック基板を得た。
EXAMPLES Next, the present invention will be specifically described by way of examples. Example Alumina powder having a particle size of 0.4 μm and talc powder as a sintering aid were mixed at a weight ratio of 96: 4, and this was added to water so that the concentration became 10% by weight. Next, an ultrasonic oscillator was put in this liquid, and ultrasonic vibration of 60 kHz was applied for 24 hours. Next, while continuing the oscillation of ultrasonic waves, methylcellulose powder was added to this solution at a concentration of 2% by weight, and further mixed for 1 hour with a vibration mill.
After mixing in this way, the mixed solution was taken out from the vibration mill and heated to a temperature of 90 ° C. to gel the methyl cellulose in the mixed solution. A clay-like mixed solution obtained by gelling and boiling down methylcellulose was kneaded with a three-roll mill, and 3% by weight of glycerin as a molding aid was added and further kneaded to prepare a clay. The thus-prepared clay was extruded by a vacuum extruder to form a sheet having a thickness of 0.8 mm, and the sheet was fired at 1600 ° C. for 2 hours to obtain a ceramic substrate.

【0012】比較例 粒径0.4μmのアルミナ粉体とタルク粉体とを9
6:4の重量比で混合し、これを水に濃度が10重量%
になるまで添加した。 これを約1時間ボールミルで
湿式混合してアルミナ粉体とタルク粉体を分散させた。
次に、この混合液にメチルセルロースを濃度が2重
量%になるように添加し、ボールミルで1時間混合し
た。あとは実施例の〜と同様にしてセラミック基板
を得た。
Comparative Example 9 Alumina powder having a particle size of 0.4 μm and talc powder were mixed with each other.
Mix in a weight ratio of 6: 4 and mix this with water to a concentration of 10% by weight.
Was added until. This was wet mixed with a ball mill for about 1 hour to disperse the alumina powder and the talc powder.
Next, methylcellulose was added to this mixed solution so that the concentration would be 2% by weight, and mixed by a ball mill for 1 hour. After that, a ceramic substrate was obtained in the same manner as in Examples 1 to 3.

【0013】上記のようにして実施例及び比較例で得た
セラミック基板の表面を検査したところ、セラミック粉
体の凝集によるフィッシャーズアイが、比較例のもので
は2cm四方当たり20〜30個みられたが、実施例の
ものでは2cm四方当たり2〜3個に減少していた。ま
たセラミック基板の表面の最大粗さRmax は、比較例の
ものは2μmであったが、実施例のものは1μmであっ
た。このように実施例のセラミック基板にはセラミック
粉体の凝集が殆どみられず、表面の平滑度は非常に高い
ものであった。
When the surfaces of the ceramic substrates obtained in Examples and Comparative Examples as described above were inspected, 20 to 30 Fisher's eyes due to agglomeration of the ceramic powder were observed per 2 cm square in the Comparative Example. However, in the example, the number was reduced to 2 to 3 per 2 cm square. The maximum roughness R max of the surface of the ceramic substrate was 2 μm in the comparative example, but was 1 μm in the example. As described above, in the ceramic substrate of the example, the agglomeration of the ceramic powder was hardly seen, and the surface smoothness was very high.

【0014】[0014]

【発明の効果】上記のように本発明は、セラミック粉体
を液体に投入して超音波振動を与えることによってセラ
ミック粉体の凝集を解離し、次にこの液体にメチルセル
ロースを投入して溶解した後に加熱してメチルセルロー
スをゲル化させ、次いでこれを混練して杯土を作成する
ようにしたので、粒径が1μm以下の微粒子のセラミッ
ク粉体を用いても超音波振動でセラミック粉体の凝集を
解離して粒子の凝集を防ぐことができると共に、セラミ
ック粉体の表面をメチルセルロースのゲルでコーテング
させてセラミック粉体の粒子が再凝集することを防ぐこ
とができ、セラミック粉体の凝集のない表面平滑なセラ
ミック基板を得ることができるものである。
As described above, according to the present invention, the agglomeration of the ceramic powder is dissociated by introducing the ceramic powder into a liquid and applying ultrasonic vibration, and then methylcellulose is introduced into this liquid and dissolved. After that, the methyl cellulose was gelated by heating after that, and this was kneaded to prepare the clay, so that even if a fine ceramic powder with a particle size of 1 μm or less is used, the ceramic powder is agglomerated by ultrasonic vibration. Can be dissociated to prevent the agglomeration of particles, and the surface of the ceramic powder can be coated with a gel of methylcellulose to prevent the particles of the ceramic powder from agglomerating again. It is possible to obtain a ceramic substrate having a smooth surface.

Claims (1)

【特許請求の範囲】 【請求項1】 セラミック粉体を液体に投入して超音波
振動を与えることによってセラミック粉体の凝集を解離
し、次にこの液体にメチルセルロースを投入して溶解し
た後に加熱してメチルセルロースをゲル化させ、次いで
これを混練して杯土を作成し、この杯土を成形して焼成
することを特徴とするセラミック基板の製造方法。
Claim: What is claimed is: 1. A ceramic powder is charged into a liquid and ultrasonic vibration is applied to dissociate the agglomeration of the ceramic powder, and then methylcellulose is charged into the liquid and dissolved, and then heated. And gelling the methylcellulose, kneading the mixture to form a clay, and molding and baking the clay to produce a ceramic substrate.
JP3152832A 1991-06-25 1991-06-25 Production of ceramics base Withdrawn JPH054857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3152832A JPH054857A (en) 1991-06-25 1991-06-25 Production of ceramics base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3152832A JPH054857A (en) 1991-06-25 1991-06-25 Production of ceramics base

Publications (1)

Publication Number Publication Date
JPH054857A true JPH054857A (en) 1993-01-14

Family

ID=15549111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3152832A Withdrawn JPH054857A (en) 1991-06-25 1991-06-25 Production of ceramics base

Country Status (1)

Country Link
JP (1) JPH054857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102833954A (en) * 2012-08-27 2012-12-19 中国科学院理化技术研究所 Pressure-sensitive adhesive printed circuit forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102833954A (en) * 2012-08-27 2012-12-19 中国科学院理化技术研究所 Pressure-sensitive adhesive printed circuit forming method

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A300 Withdrawal of application because of no request for examination

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Effective date: 19980903