JPH0548573B2 - - Google Patents
Info
- Publication number
- JPH0548573B2 JPH0548573B2 JP60130902A JP13090285A JPH0548573B2 JP H0548573 B2 JPH0548573 B2 JP H0548573B2 JP 60130902 A JP60130902 A JP 60130902A JP 13090285 A JP13090285 A JP 13090285A JP H0548573 B2 JPH0548573 B2 JP H0548573B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- reference line
- length
- display
- sample image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60130902A JPS61290641A (ja) | 1985-06-18 | 1985-06-18 | 試料像のスケール目盛表示装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60130902A JPS61290641A (ja) | 1985-06-18 | 1985-06-18 | 試料像のスケール目盛表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61290641A JPS61290641A (ja) | 1986-12-20 |
| JPH0548573B2 true JPH0548573B2 (enrdf_load_html_response) | 1993-07-21 |
Family
ID=15045392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60130902A Granted JPS61290641A (ja) | 1985-06-18 | 1985-06-18 | 試料像のスケール目盛表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61290641A (enrdf_load_html_response) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6476913B1 (en) | 1998-11-30 | 2002-11-05 | Hitachi, Ltd. | Inspection method, apparatus and system for circuit pattern |
| JP2001357812A (ja) * | 2000-06-12 | 2001-12-26 | Jeol Ltd | 試料観察画像表示装置 |
| CN106643508A (zh) * | 2017-02-28 | 2017-05-10 | 成都中科创达软件有限公司 | 一种用于规则三维对象体积测量的方法和系统 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543587B2 (enrdf_load_html_response) * | 1974-12-06 | 1980-11-07 | ||
| JPS5347262A (en) * | 1976-10-09 | 1978-04-27 | Akashi Seisakusho Kk | Device for indicating scale of scanning electron microscope |
| JPS5851664B2 (ja) * | 1979-03-28 | 1983-11-17 | 株式会社日立製作所 | 試料像表示装置 |
| JPS6086907U (ja) * | 1983-11-18 | 1985-06-14 | 日本電子株式会社 | 電子線像表示装置 |
-
1985
- 1985-06-18 JP JP60130902A patent/JPS61290641A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61290641A (ja) | 1986-12-20 |
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