JPH0548404B2 - - Google Patents
Info
- Publication number
- JPH0548404B2 JPH0548404B2 JP59188485A JP18848584A JPH0548404B2 JP H0548404 B2 JPH0548404 B2 JP H0548404B2 JP 59188485 A JP59188485 A JP 59188485A JP 18848584 A JP18848584 A JP 18848584A JP H0548404 B2 JPH0548404 B2 JP H0548404B2
- Authority
- JP
- Japan
- Prior art keywords
- pyroelectric
- along
- imaginary straight
- plate
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14669—Infrared imagers
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、画像処理装置などに適用するための
二次元焦電型イメージセンサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a two-dimensional pyroelectric image sensor for application to image processing devices and the like.
焦電型イメージセンサとしては、スリツトによ
つて所定方向に焦電素子を並列形成した焦電素子
群を支持基板に接続固定し、焦電素子からの出力
を電極により時系列信号として取出すものがある
（例えば、特開昭57−120830号公報）。
A pyroelectric image sensor has a group of pyroelectric elements formed in parallel in a predetermined direction using slits, which is connected and fixed to a support substrate, and the output from the pyroelectric elements is extracted as a time-series signal using electrodes. (For example, Japanese Patent Application Laid-Open No. 120830/1983).
しかしながら、上記センサは一次元の信号を取
出すものであり、二次元の信号を取出せるように
しようとすれば、支持基板の多数を、焦電素子の
並列方向と直交する方向に並置し、例えば、焦電
素子の並列方向をＸ方向に、そして、支持基板の
並置方向をＹ方向にといつたようにして信号を取
出さざるを得ない。 However, the above-mentioned sensor extracts a one-dimensional signal, and in order to be able to extract a two-dimensional signal, a large number of supporting substrates are arranged in parallel in a direction perpendicular to the parallel direction of the pyroelectric elements, for example. , it is necessary to take out signals such that the parallel direction of the pyroelectric elements is in the X direction, and the parallel direction of the supporting substrates is in the Y direction.
ところが、このような構成とした場合には、焦
電素子の並設ピツチがＸ方向とＹ方向とで異なつ
ていることになる結果、画像処理などの必要な動
作を行わせるためには種々の補正を加えなければ
ならず、実用上のさまざまな不都合が生じること
になつてしまう。 However, in such a configuration, the pitches at which the pyroelectric elements are arranged in parallel are different in the X direction and the Y direction, so various operations must be performed in order to perform necessary operations such as image processing. Corrections must be made, resulting in various practical problems.
〔発明が解決しようとする問題点〕
本発明は、上記の点に鑑み、単体としての二次
元焦電型イメージセンサを、解像度高くして提供
しようとするものである。[Problems to be Solved by the Invention] In view of the above-mentioned points, the present invention attempts to provide a two-dimensional pyroelectric image sensor as a single unit with high resolution.
本発明の二次元焦電型イメージセンサは、上記
問題点を解決するために、焦電体板の縦横方向に
沿つて互いに離間する所定位置ごとに形成されて
前記焦電体板を表裏面方向に沿つて貫通する空間
を有し、縦横方向のいずれか一方に沿いつつ所定
間隔を隔てて設定された第１仮想直線のそれぞれ
上において隣り合う前記空間で挟まれたすべて若
しくは所定の箇所を検出部として構成するととも
に、各第１仮想直線上に位置する前記検出部のそ
れぞれを構成すべく前記焦電体板の表面に形成さ
れた電極のすべてと、各第１仮想直線に沿つて延
出されたうえで前記焦電体板の表面側端部に形成
された第１の電極とを導通接続する一方、前記縦
横方向の他方に沿いつつ所定間隔を隔てて設定さ
れた第２仮想直線のそれぞれ上に位置する各検出
部を構成すべく前記焦電体板の裏面に形成された
電極のすべてと、各第２仮想直線に沿つて延出さ
れたうえで前記焦電体板の裏面側端部に形成され
た第２の電極とを導通接続していることを特徴と
するものである。
In order to solve the above-mentioned problems, the two-dimensional pyroelectric image sensor of the present invention is provided at predetermined positions spaced apart from each other along the vertical and horizontal directions of the pyroelectric plate, so that the pyroelectric image sensor Detecting all or a predetermined location sandwiched between adjacent spaces on each of first imaginary straight lines set at a predetermined interval along either the vertical or horizontal directions. and all of the electrodes formed on the surface of the pyroelectric plate to constitute each of the detection units located on each first imaginary straight line, and extending along each first imaginary straight line. is connected to the first electrode formed on the surface side end of the pyroelectric plate, while a second imaginary straight line set at a predetermined interval along the other of the vertical and horizontal directions is connected. All of the electrodes formed on the back surface of the pyroelectric plate to constitute each detection section located above, and the electrodes extending along each second imaginary straight line and on the back side of the pyroelectric plate It is characterized in that it is electrically connected to a second electrode formed at the end.
上記構成によれば、各第１仮想直線に沿つて延
出されることによつて焦電体板における縦横方向
の他方側に沿つて並んだ第１の電極それぞれがＹ
方向成分を表すことになり、また、各第２仮想直
線に沿つて延出されることによつて焦電体板にお
ける縦横方向の一方側に沿つて並んだ第２の電極
それぞれがＸ方向成分を表すことになる。そこ
で、空間を介して互いに分離した状態で配置され
た検出部それぞれからの信号に基づいてＸ方向及
びＹ方向、即ち、二次元方向での位置が検出され
ることになり、この検出結果が画像処理などに有
効利用されるのである。
According to the above configuration, each of the first electrodes arranged along the other side of the vertical and horizontal directions of the pyroelectric plate by extending along each of the first virtual straight lines is Y
Also, by extending along each second virtual straight line, each of the second electrodes lined up along one side of the vertical and horizontal directions of the pyroelectric plate represents the X-direction component. It will be expressed. Therefore, the position in the X direction and Y direction, that is, in the two-dimensional direction, is detected based on the signals from the detection units arranged separately from each other through space, and this detection result is used as the image It is effectively used for processing, etc.
次に、本発明の実施例を図面に基いて説明す
る。
Next, embodiments of the present invention will be described based on the drawings.
第１図は本発明に係る二次元焦電型イメージセ
ンサの第１実施例を示し、第１図のａは平面図、
第１図のｂは第１図ａのＸ−Ｘ線断面図である。 FIG. 1 shows a first embodiment of a two-dimensional pyroelectric image sensor according to the present invention, and a in FIG. 1 is a plan view;
FIG. 1b is a sectional view taken along the line X--X in FIG. 1a.
１は、例えば、チタン酸ジルコン酸鉛系磁器、
チタン酸鉛系磁器、LiTaO3、PVF2などを材料
として、通常公知の方法によつて得られる50μｍ
以下の厚みの焦電体板である。まず、この四角形
状とされた焦電体板１の縦横方向に沿つて互いに
離間する所定位置ごとには、この焦電体板１を表
裏面方向に沿つて貫通する矩形状の空間２…が所
定間隔を隔てながら形成されている。そして、こ
の焦電体板１の縦横方向のいずれか一方（図で
は、横方向）に沿いつつ所定間隔を隔てて設定さ
れた第１仮想直線L1のそれぞれ上において隣り
合う空間…で挟まれた箇所、例えば、空間２…
夫々の長辺部分２ａ…が隣り合う箇所の夫々は、
焦電体板１の表裏面それぞれに形成された電極
と、表面側の電極を覆う熱吸収膜とからなる検出
部３…として構成されている。また、このとき、
検出部３…のそれぞれは、焦電体板１の縦横方向
の他方（図では、縦方向）に沿つて所定間隔を隔
てながら設定され、かつ、第１仮想直線L1と直
交する第２仮想直線L2のそれぞれ上にも並置さ
れた状態となつている。なお、ここで、前記空間
２…は、CO2レーザ、YAGレーザなどによつて
カツトするとか、化学エツチングやプラズマエツ
チング、あるいは、化学エツチングとレーザエツ
チングとを併用してカツトするなど各種の手段が
採用可能である。また、検出部３の一部を構成す
る熱吸収膜としては、Ni−Cr、白金黒、カーボ
ン系塗料、金属黒材料など各種材料を用いて形成
できる。 1 is, for example, lead zirconate titanate porcelain,
50 μm obtained by a known method using lead titanate porcelain, LiTaO 3 , PVF 2 , etc.
The pyroelectric plate has the following thickness. First, at each predetermined position spaced apart from each other along the vertical and horizontal directions of the square-shaped pyroelectric plate 1, there is a rectangular space 2 that penetrates the pyroelectric plate 1 along the front and back directions. They are formed at predetermined intervals. The pyroelectric plate 1 is sandwiched between adjacent spaces on each of the first imaginary straight lines L 1 set at a predetermined interval along one of the vertical and horizontal directions (horizontal direction in the figure). For example, space 2...
Each of the locations where the respective long side portions 2a... are adjacent to each other are as follows.
The detecting section 3 is constituted by electrodes formed on each of the front and back surfaces of the pyroelectric plate 1, and a heat absorbing film covering the front electrode. Also, at this time,
Each of the detection units 3 is set at a predetermined interval along the other of the vertical and horizontal directions (vertical direction in the figure) of the pyroelectric plate 1, and a second virtual straight line L1 orthogonal to the first virtual straight line L1. They are also juxtaposed on each of the straight lines L2 . Here, the space 2... can be cut by various means, such as cutting with a CO 2 laser, YAG laser, etc., chemical etching, plasma etching, or a combination of chemical etching and laser etching. Adoptable. Further, the heat absorbing film constituting a part of the detection section 3 can be formed using various materials such as Ni-Cr, platinum black, carbon-based paint, and metal black material.
さらに、焦電体板１の縦方向に沿う表面側端部
には第１の電極４…が互いに所定間隔を隔てなが
ら形成されており、各電極４は第１仮想直線L1
のそれぞれに沿う平行状態で空間２…夫々の短辺
部分２ｂ…が隣り合う箇所を通りながら、図面上
では上側に位置する第１仮想直線L1上に配置さ
れた各検出部３を構成すべく焦電体板１の表面に
形成された電極のすべてと導通接続されている。
また、焦電体板１の横方向に沿う裏面側端部には
第２の電極５…が互いに所定間隔を隔てながら形
成されており、各電極５は第２仮想直線L2のそ
れぞれに沿う平行状態で空間２…夫々の長辺部分
２ａ…どうしが隣り合う箇所を通りながら第２仮
想直線L2上に並置された検出部３…のそれぞれ
を構成すべく焦電体板１の裏面に形成された電極
のすべてと導通接続されている。 Further, first electrodes 4 are formed at a predetermined interval from each other at the end of the surface side along the longitudinal direction of the pyroelectric plate 1, and each electrode 4 is connected to the first virtual straight line L1.
The space 2...each short side portion 2b... passes through adjacent locations in a parallel state along each of It is electrically connected to all the electrodes formed on the surface of the pyroelectric plate 1.
In addition, second electrodes 5 are formed at a predetermined distance from each other at the end of the back surface along the lateral direction of the pyroelectric plate 1, and each electrode 5 is arranged along each of the second imaginary straight lines L2 . In a parallel state, the space 2...each long side portion 2a...passes through the adjacent location and is placed on the back surface of the pyroelectric plate 1 to form each of the detection units 3... juxtaposed on the second imaginary straight line L2. It is electrically connected to all of the formed electrodes.
そこで、上記構成によれば、各第１仮想直線
L1に沿つて延出されることによつて焦電体板１
における縦方向に沿つて並んだ第１の電極４…そ
れぞれがＹ方向成分を表すことになり、また、各
第２仮想直線L2に沿つて延出されることによつ
て焦電体板１における横方向に沿つて並んだ第２
の電極５…それぞれがＸ方向成分を表すことにな
る。なお、ここで、前記第１および第２の電極４
…、５…夫々は、フオトリソグラフイー技術によ
つて形成されるものである。 Therefore, according to the above configuration, each first virtual straight line
Pyroelectric plate 1 by being extended along L 1
The first electrodes 4 arranged along the vertical direction in the pyroelectric plate 1 each represent a Y-direction component, and are extended along each second virtual straight line L 2 . The second one lined up along the horizontal direction
Each of the electrodes 5 represents an X-direction component. Note that here, the first and second electrodes 4
..., 5... are each formed by photolithography technology.
前記焦電体板１の裏面の周部所定箇所に、前記
検出部３…から離れて支持台６が設けられ、検出
部３…を熱的に良好に分離し、その感度を高める
ように構成されている。 A support stand 6 is provided at a predetermined location on the periphery of the back surface of the pyroelectric plate 1, apart from the detection section 3, and is configured to thermally isolate the detection section 3 well and increase its sensitivity. has been done.
なお、図示しないが、第１の電極４…ならびに
第２の電極５…夫々の端部には、後述するような
回路との導通を確保するためのリード線がボンデ
イングなどにより接続される。 Although not shown, lead wires are connected to the ends of each of the first electrodes 4 and the second electrodes 5 by bonding or the like to ensure conduction with a circuit as described later.
第２図は、本発明の第２実施例を示し、横方向
に所定間隔をへだてて形成された空間２…の長手
方向一端側どうしを更に別の空間７によつてつな
げ、かつ、切込みにより、焦電体板１と検出部３
の連結部の横断面積を小さくしており、焦電体板
１に対して片持支持状態で検出部３…が構成され
ている。第１仮想直線L1…夫々上に配置された
検出部３…の表面の電極のすべてが、図面上で左
側に位置する第１の電極４に接続され、また、第
２仮想直線L2…夫々に配置された検出部３…の
裏面の電極のすべてが、図面上で上側に位置する
第２の電極５に接続されている。 FIG. 2 shows a second embodiment of the present invention, in which spaces 2 formed at a predetermined distance in the lateral direction are connected to each other by another space 7 at one end in the longitudinal direction, and by a notch. , pyroelectric plate 1 and detection unit 3
The cross-sectional area of the connecting portion is made small, and the detecting portions 3 are configured in a cantilevered state with respect to the pyroelectric plate 1. All the electrodes on the surface of the detection unit 3 disposed on the first virtual straight line L 1 are connected to the first electrode 4 located on the left side in the drawing, and the second virtual straight line L 2 is connected to the first electrode 4 located on the left side in the drawing. All of the electrodes on the back surface of the detection units 3 arranged respectively are connected to the second electrode 5 located on the upper side in the drawing.
この第２実施例によれば、検出部３…夫々から
の熱拡散を良好に防止でき、解像度をより一層高
められる利点がある。 According to this second embodiment, there is an advantage that heat diffusion from each of the detection sections 3 can be effectively prevented, and resolution can be further improved.
第３図は本発明の第３実施例を示し、前記空間
２…夫々がアングル状で、検出部３…が縦方向で
両持ちでありながら、その連結部の横断面積の総
和を極力小にし、機械的強度を極力低下させずに
検出部３…からの熱拡散を良好に防止するように
構成されている。 FIG. 3 shows a third embodiment of the present invention, in which the spaces 2 are each shaped like an angle, and the detection parts 3 are supported on both sides in the vertical direction, but the total cross-sectional area of the connecting parts is minimized as much as possible. , is configured to satisfactorily prevent heat diffusion from the detection section 3 without reducing mechanical strength as much as possible.
第４図は、上記二次元焦電型イメージセンサの
適用例を模式的に示したものである。前記の第１
の電極４の各々が、インピーダンス交換用FET
のゲート電極Ｇに接続され、他方前記の第２の電
極５が、スイツチングFETを通して接地されて
いる。 FIG. 4 schematically shows an application example of the two-dimensional pyroelectric image sensor. The first
Each of the electrodes 4 is a FET for impedance replacement.
, and the second electrode 5 is grounded through the switching FET.
熱（赤外線）を感知した検出部３が焦電効果に
より電荷を発生し、Ｘ方向の走査に伴ない検出部
３夫々に対応するＹ方向の位置信号をそれぞれの
ソースＳから並列信号として取り出して画像処理
を行なうように回路が構成されている。 The detection unit 3 that senses heat (infrared rays) generates a charge due to the pyroelectric effect, and as the detection unit 3 scans in the X direction, position signals in the Y direction corresponding to each detection unit 3 are extracted as parallel signals from each source S. A circuit is configured to perform image processing.
図中格子模様の実線が第１および第２の電極
４，５を示し、その交点が検出部３を示す。 In the figure, solid lines in a lattice pattern indicate the first and second electrodes 4 and 5, and their intersections indicate the detection section 3.
駆動回路について詳述すればＹ方向の出力端子
８が、第１の電極４の夫々に対応させて、FET
のゲート電極Ｇに接線されていて、Ｘ方向の出力
端子９が第２の電極５の夫々に対応させてスイツ
チングFET（x1…xo）を介して接地されている。 To explain the drive circuit in detail, the Y-direction output terminal 8 corresponds to each of the first electrodes 4, and the FET
The output terminals 9 in the X direction are connected to the ground via switching FETs (x 1 . . . x o ) corresponding to the second electrodes 5, respectively.
第５図は駆動回路の他の例を示し、イメージセ
ンサを時系列に駆動させるものである。第１の電
極４が、スイツチSY1，SY2…SYoを介して接地さ
れ、第２の電極５がスイツチSX1…SXoを介して、
FETのゲート電極Ｇに接続されている。FETに
は、ドレイン電極Ｄから直流電圧が印加されてお
り、検出部３で発生した電荷により抵抗Rgに電
流が流れて電圧が発生する。電荷の読み出し方法
を第６図にもとづいて説明すると以下の様にな
る。スイツチSY1，SY2…SYoは、順次に一定期間
だけ閉となり、その期間中にSX1，SX2…SXoが順
次に閉となることにより、SYが閉となつている電
極４とSXが閉となつている電極５の交点におけ
る信号が、順次読み出されていく。FETのゲー
トに発生した電圧は、FETのソース・フオロワ
回路によりインピーダンス変換され、時系列に発
生した電圧Rsの両端の電圧変化として、直流バ
イアス電圧に重畳して交流信号がソース電極Ｓよ
り順次取出される。したがつて、この駆動回路に
よつて、シメージセンサ全域で熱（赤外線）を受
ければ出力信号が現われ、またイメージセンサの
一部で熱（赤外線）を受ければ、対応した出力信
号が現われる。もし、赤外線を放射する物体が静
止物体であれば、焦電体板１の表側、つまり、第
１の電極８…に対向する位置に温度変化を発生さ
せるためのチヨツパを設ける必要がある。この場
合、スイツチSY1…SYo，SX1…SXoを開閉する周
期、即ち、走査速度はチヨツパによるチヨツピン
グより数倍速く作動させることが好ましい。赤外
線を放射する物体が移動するものあるいは熱変化
するものであれば、対象物体の移動速度あるいは
熱変化速度よりも走査速度を数倍速くすることが
好ましい。 FIG. 5 shows another example of the drive circuit, which drives the image sensor in time series. The first electrode 4 is grounded via switches S Y1 , S Y2 ...S Yo , and the second electrode 5 is grounded via switches S X1 ...S Xo .
Connected to the gate electrode G of the FET. A DC voltage is applied to the FET from the drain electrode D, and a current flows through the resistor Rg due to the charge generated in the detection section 3, and a voltage is generated. The method of reading out charges will be explained below based on FIG. The switches S Y1 , S Y2 ...S Yo are sequentially closed for a certain period of time, and during that period, S X1 , S X2 ... S The signals at the intersections of the electrodes 5 where and S X are closed are sequentially read out. The voltage generated at the gate of the FET is impedance-converted by the source-follower circuit of the FET, and an AC signal is sequentially extracted from the source electrode S by superimposing it on the DC bias voltage as a voltage change across the voltage Rs generated in time series. be done. Therefore, with this drive circuit, if the entire image sensor receives heat (infrared rays), an output signal will appear, and if a part of the image sensor receives heat (infrared rays), a corresponding output signal will appear. If the object that emits infrared rays is a stationary object, it is necessary to provide a chopper to generate a temperature change on the front side of the pyroelectric plate 1, that is, at a position facing the first electrodes 8. In this case, it is preferable that the opening/closing cycle of the switches S Y1 . . . S Yo , S X1 . If the object that emits infrared rays is moving or changes thermally, it is preferable to make the scanning speed several times faster than the moving speed or thermal change speed of the target object.
第７図は本発明の二次元焦電型イメージセンサ
の適用例の変形例を模式的に示し、前記空間２…
で挾まれた箇所のうちの適当な数箇所（図面中黒
丸で示す）には熱吸収膜を形成せずに非感熱部１
１…を構成し、その非感熱部１１…から振動信号
のみを取出すように構成されている。そして、こ
の非感熱部１１…からの振動信号に基いてセンサ
全体の振動信号を演算処理し、検出部３…から取
出される信号中に雑音として混じつている振動信
号を補正し、感度および解像度をより一層高める
ことができるように構成されている。 FIG. 7 schematically shows a modification of the application example of the two-dimensional pyroelectric image sensor of the present invention, in which the space 2...
A non-heat-sensitive area 1 is formed without forming a heat-absorbing film on a number of suitable locations (indicated by black circles in the drawing) between the
1..., and is configured to extract only vibration signals from the non-heat sensitive parts 11.... Then, based on the vibration signals from the non-thermal parts 11..., the vibration signals of the entire sensor are processed, and the vibration signals mixed as noise in the signals extracted from the detection parts 3... are corrected, and the sensitivity and resolution are improved. It is designed to further enhance the
以上説明したように、本発明の二次元焦電型イ
メージセンサによれば、単体でありながら二次元
方向での位置を検出でき、画像の検知などをも良
好に行える新規な焦電型イメージセンサを提供で
きた。しかも、隣り合う検出部が、空間により互
いに熱的に分離されており、熱による相互干渉、
いわゆるクロストークを抑制できて解像度ならび
に感度のいずれをも高められるようになつた。
As explained above, the two-dimensional pyroelectric image sensor of the present invention is a novel pyroelectric image sensor that can detect a position in two-dimensional directions even though it is a single unit, and can also perform image detection well. We were able to provide Moreover, adjacent detection units are thermally separated from each other by a space, which prevents mutual interference due to heat.
It has become possible to suppress so-called crosstalk and increase both resolution and sensitivity.
第１図は本発明の第１実施例を示し、第１図ａ
は平面図、第１図ｂは第１図ａのＸ−Ｘ線断面
図、第２図は本発明の第２実施例の平面図、第３
図は本発明の第３実施例の平面図、第４図は本発
明を適用した画像処理装置を示し、駆動回路と共
に示した模式図である。第５図は駆動回路の他の
例を示す回路図、第６図は電荷の読み出し方法を
説明する図、第７図は変形例を示す模式図であ
る。
１……焦電体板、２……空間、３……検出部、
４……第１の電極、５……第２の電極、L1……
第１仮想直線、L2……第２仮想直線。
FIG. 1 shows a first embodiment of the present invention, and FIG.
is a plan view, FIG. 1b is a sectional view taken along the line X-X of FIG. 1a, FIG.
The figure is a plan view of a third embodiment of the present invention, and FIG. 4 is a schematic diagram showing an image processing apparatus to which the present invention is applied, together with a drive circuit. FIG. 5 is a circuit diagram showing another example of the drive circuit, FIG. 6 is a diagram explaining a charge reading method, and FIG. 7 is a schematic diagram showing a modification. 1... Pyroelectric plate, 2... Space, 3... Detection section,
4...first electrode, 5...second electrode, L1 ...
First virtual straight line, L 2 ... second virtual straight line.
Claims (1)
所定位置ごとに形成されて前記焦電体板を表裏面
方向に沿つて貫通する空間を有し、縦横方向のい
ずれか一方に沿いつつ所定間隔を隔てて設定され
た第１仮想直線のそれぞれ上において隣り合う前
記空間で挟まれたすべて若しくは所定の箇所を検
出部として構成するとともに、 各第１仮想直線上に位置する前記検出部のそれ
ぞれを構成すべく前記焦電体板の表面に形成され
た電極のすべてと、各第１仮想直線に沿つて延出
されたうえで前記焦電体板の表面側端部に形成さ
れた第１の電極とを導通接続する一方、 前記縦横方向の他方に沿いつつ所定間隔を隔て
て設定された第２仮想直線のそれぞれ上に位置す
る各検出部を構成すべく前記焦電体板の裏面に形
成された電極のすべてと、各第２仮想直線に沿つ
て延出されたうえで前記焦電体板の裏面側端部に
形成された第２の電極とを導通接続していること
を特徴とする二次元焦電型イメージセンサ。[Scope of Claims] 1. Spaces are formed at predetermined positions spaced apart from each other along the longitudinal and lateral directions of the pyroelectric plate and penetrate through the pyroelectric plate along the front and back directions, and All or a predetermined location sandwiched between the adjacent spaces on each of the first imaginary straight lines set along one of the first imaginary straight lines at a predetermined interval is configured as a detection unit, and the detection unit is located on each of the first imaginary straight lines. All of the electrodes formed on the surface of the pyroelectric plate to constitute each of the detection units, and the end portion on the front surface side of the pyroelectric plate extending along each first imaginary straight line. The focal point is electrically connected to the first electrode formed in the horizontal and vertical directions, while forming the respective detection sections located on the second imaginary straight lines set apart from each other at a predetermined interval along the other of the vertical and horizontal directions. Conductive connection between all of the electrodes formed on the back surface of the electric plate and a second electrode extending along each second imaginary straight line and formed on the back side end of the pyroelectric plate. A two-dimensional pyroelectric image sensor that is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18848584A JPS6166128A (en) | 1984-09-07 | 1984-09-07 | Two-dimensional pyroelectric type image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18848584A JPS6166128A (en) | 1984-09-07 | 1984-09-07 | Two-dimensional pyroelectric type image sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166128A JPS6166128A (en) | 1986-04-04 |
| JPH0548404B2 true JPH0548404B2 (en) | 1993-07-21 |
Family
ID=16224554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18848584A Granted JPS6166128A (en) | 1984-09-07 | 1984-09-07 | Two-dimensional pyroelectric type image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166128A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4876304B2 (en) * | 2000-09-08 | 2012-02-15 | パナソニック電工株式会社 | Pyroelectric infrared sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57120830A (en) * | 1981-01-20 | 1982-07-28 | Matsushita Electric Ind Co Ltd | Detecting element for pyroelectric type linear array infrared ray and its preparation |
-
1984
- 1984-09-07 JP JP18848584A patent/JPS6166128A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57120830A (en) * | 1981-01-20 | 1982-07-28 | Matsushita Electric Ind Co Ltd | Detecting element for pyroelectric type linear array infrared ray and its preparation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6166128A (en) | 1986-04-04 |
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| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |