JPH0547380Y2 - - Google Patents
Info
- Publication number
- JPH0547380Y2 JPH0547380Y2 JP4213288U JP4213288U JPH0547380Y2 JP H0547380 Y2 JPH0547380 Y2 JP H0547380Y2 JP 4213288 U JP4213288 U JP 4213288U JP 4213288 U JP4213288 U JP 4213288U JP H0547380 Y2 JPH0547380 Y2 JP H0547380Y2
- Authority
- JP
- Japan
- Prior art keywords
- flow
- pressure
- vortex
- purge
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010926 purge Methods 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 19
- 239000007789 gas Substances 0.000 description 7
- 239000012530 fluid Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011549 displacement method Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4213288U JPH0547380Y2 (fr) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4213288U JPH0547380Y2 (fr) | 1988-03-30 | 1988-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01144821U JPH01144821U (fr) | 1989-10-04 |
| JPH0547380Y2 true JPH0547380Y2 (fr) | 1993-12-14 |
Family
ID=31268554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4213288U Expired - Lifetime JPH0547380Y2 (fr) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0547380Y2 (fr) |
-
1988
- 1988-03-30 JP JP4213288U patent/JPH0547380Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01144821U (fr) | 1989-10-04 |
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