JPH0547048A - Production of stamper for production of substrate for optical recording medium - Google Patents

Abstract

PURPOSE:To improve the transferability of rugged patterns by fixing an original plate which consists of a thermoplastic material and is formed with plural pieces of the rugged patterns to a roller surface and transferring the rugged patterns to a resin sheet, thereby continuously forming resin stampers with preformats. CONSTITUTION:The rugged patterns 2 of the original plate 1 are transferred to an extruded resin mold by using the forming roll 3 mounted with the original plate 1 while an extruded resin sheet 11 is formed by melting the resin, by which the resin stampers with the preformats are continuously formed. Metals, such as Ni, metallic compds., high-polymer materials, etc., are used as the material of the original plate 1. The rugged patterns 2 are obtd. by applying a resist on a flat material and exposing and developing the patterns, then forming the film of Ni by sputtering, then by depositing the Ni up to a prescribed thickness by electrocasting. The forming roll 3 is formed of metals, such as iron, metallic alloys, metal compds., etc. The fixing of the original plate 1 to the forming roll 3 is executed by a method which can fix the original plate without ruggedness by using an adhesive, etc.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium, and more particularly to a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium for optically recording / reproducing information.

[0002]

2. Description of the Related Art Conventionally, a magnetic tape is used for recording various information,
Magnetic materials such as magnetic disks and various semiconductor memories have been mainly used. Such a magnetic memory and a semiconductor memory have an advantage that information can be easily written and read, but on the other hand, there are problems that the contents of information are easily tampered with and high-density recording cannot be performed. there were. In order to solve such a problem, an optical information recording method using an optical recording medium has been proposed as a means for efficiently handling a wide variety of information, and an optical information recording carrier, a recording / reproducing method, a recording / reproducing apparatus for that purpose, and the like. Is proposed.

In such an optical recording medium as an information recording carrier, generally, a laser beam is used to volatilize a part of the optical recording layer on the optical recording medium or to change the reflectance.
Alternatively, deformation is caused to record or reproduce information by the difference in optical reflectance or transmittance. In this case, the optical recording layer does not need to be developed after writing information, and can be directly read after writing, that is, so-called DRAW (direct read after write).
te) medium, capable of high-density recording, and additionally writable, are effective as a medium for recording and storing information.

FIG. 7 shows a conventional optical recording medium (optical disc,
7 is a schematic cross-sectional view of an optical card, an optical tape, etc., and FIG.
7A shows a card-shaped optical recording medium, and FIG. 7B shows a disk-shaped optical recording medium. In FIG. 7, 31 is a transparent substrate, 32 is a track groove portion, 33 is an optical recording layer, 34 is a spacer, 35 is an adhesive layer, and 36 is a protective substrate. In FIG. 7, recording / reproducing of information is performed by optically writing and reading through the transparent substrate 31 and the track groove portion 32. At this time, it is configured such that the fine unevenness of the track groove portion 32 can be used to perform tracking by the phase difference of the laser light.

As a method of manufacturing a stamper, generally, as shown in FIGS. 8 and 9, a resist 42 is placed on a substrate 41 such as glass which is polished with good flatness (see FIG. 8A). After being applied to a predetermined thickness (see FIG. 8B), the pattern is exposed using the exposure optical system 43 (see FIG. 8C), and then developed to form a concave-convex pattern 44 at a predetermined depth. Then, a master is produced (see FIG. 8D). A conductive film 45 is formed on the surface of the master on which the concavo-convex pattern 44 is formed, and the conductive process is performed (see FIG. 9E). Then, the conductive film 45 is electroformed to a predetermined thickness and electroformed. A film 46 is formed (see FIG. 9F), and the back surface is polished to remove the electroformed film 46 from the resist 42 to obtain a metal stamper (FIG. 9G).
reference). In addition, there is also used a method in which a master is prepared by making a replica with a UV-curable resin from a master on which an uneven pattern is formed in advance, without using a resist and exposure, and then manufacturing a stamper.

In general video discs, audio discs, etc., polyvinyl chloride (P
VC), polycarbonate resin (PC) or polymethylmethacryl resin (PMMA) is used to transfer the concave and convex pattern using a stamper on which the concave and convex pattern corresponding to the above-mentioned track and information is recorded to form a groove portion. is doing.

In addition, a method of transferring information or a preformat pattern to a resin sheet by heating and pressing with a molding roll (Japanese Patent Laid-Open No. 56-86721), preformatting of a molding roll using an ultraviolet / electron beam curing resin A method for transferring a pattern onto a resin sheet (Japanese Patent Laid-Open No. 56-84).
921, JP-A-56-84922, JP-A-56-87203, JP-A-56-106829, JP-A-56-126132, and JP-A-67-
50304 and WO88 / 03311) are also used.

However, unlike the conventional methods such as the video disc and the audio disc as described above,
Optical recording media such as optical discs, optical cards, and optical tapes require much finer pattern and surface precision than conventional methods in order to record and reproduce at a much higher density than audio discs. To be done. Therefore, a resin substrate molding apparatus is also required to have good pattern accuracy and surface accuracy.

In particular, if the surface precision of the roll to be molded is poor or uneven, the extruded resin will not be in a sufficiently pressurized state during molding, so that a fine pattern cannot be transferred accurately or The thickness of the substrate becomes uneven due to unevenness, and optical characteristics such as transparency and birefringence deteriorate depending on the resin used. Since the accuracy of the uneven pattern is minute, in order to form a pattern with that accuracy,
It is necessary to use a photolithography-related device such as a laser cutting device or an EB drawing device.

On the other hand, in the method of directly forming the pattern on the roll, the surface of the roll can be processed with high precision, but it is difficult to draw or transfer the pattern on the surface of the cylindrical roll with high precision. However, if the roll surface is contaminated due to resin adhesion or seizure during molding, the roll is generally made of metal or a metal compound, and the roll must be washed each time, so the operability deteriorates significantly. There is also the problem of being lost.

As another method, in the method of preparing a single-wafer stamper and fixing it to a roll by adhesion or the like,
Since it is possible to create a stamper for each sheet, it is possible to produce a flat stamper with good pattern accuracy by using a photolithography-related device, but the obtained sheet-shaped stamper is an adhesive or When fixing to the roll surface using a mechanical fixing method, a normal single-wafer stamper forms one or a few patterns on one stamper, so only a small-sized stamper is manufactured. Therefore, it is necessary to fix a plurality of stampers to one roll, which causes a step at the end of the stamper to deteriorate the surface accuracy of the roll. Similarly, when the roll surface is soiled during molding, it needs to be replaced.However, the photolithography process does not provide good workability, so the stamper needs to be replaced frequently, or it must be disposable. There is a problem that it becomes expensive.

[0012]

SUMMARY OF THE INVENTION The present invention has been made for the purpose of solving the above-mentioned problems, and changes the optical characteristics such as reflectance and transmittance by irradiation with a light beam such as a laser beam, In an optical recording medium for recording / reproducing information, a step of fixing a master, which is made of a flexible material and has one or a plurality of concave and convex patterns formed on at least one surface thereof, to a roller surface, and a master for a resin sheet And a step of continuously forming a resin stamper with a preformat, and a step of cutting the resin stamper into a required size, if necessary. Further, it is a method of manufacturing a stamper, in which a metal stamper is manufactured by duplicating the obtained resin stamper through a series of steps such as a step of conducting conductivity and a step of performing electroforming. It is an object of the present invention to provide a method for inexpensively mass-producing a stamper having good transferability of an uneven pattern, which does not have a size restriction, by using this stamper manufacturing method.

[0013]

That is, the present invention is for an optical recording medium for recording / reproducing information by changing optical characteristics such as reflectance and transmittance by irradiation of a light beam such as a laser beam. In the method for manufacturing a stamper for manufacturing a substrate, the step of fixing a master, which is made of a flexible material and has one or more uneven patterns formed on at least one surface thereof, to the roller surface, A method of manufacturing a stamper for manufacturing a substrate for an optical recording medium, comprising: a step of transferring to a resin sheet to continuously form a resin stamper with a preformat; and a step of cutting the resin stamper if necessary.

The present invention also provides a stamper for manufacturing a substrate for an optical recording medium, which records / reproduces information by changing optical characteristics such as reflectance and transmittance by irradiating a light beam such as a laser beam. In the manufacturing method, a step of fixing a master, which is made of a flexible material and has one or a plurality of concave and convex patterns formed on at least one surface thereof, to the roller surface, and transferring the concave and convex pattern of the master to a resin sheet. A step of continuously forming a resin stamper with a preformat, a step of cutting the resin stamper if necessary, a step of conducting a conductive pattern on the uneven pattern surface of the resin stamper, based on the conductive resin stamper The process of forming a metal stamper by electroforming, and if necessary, the surface of the metal stamper on which the concavo-convex pattern is not formed is mirrored. A step of polishing an optical recording medium substrate for manufacturing a stamper manufacturing method characterized by comprising the step of cutting the metal stamper as needed.

The present invention will be described in detail below. In the present invention, the resin stamper manufacturing method includes the following three methods.

(1) While forming a resin sheet by melting and extruding a resin, at the same time, by using a roller to which the above-mentioned master is attached, the concavo-convex pattern of the master is transferred to the extruded molten resin, and a resin with a preformat is formed. The stamper is continuously formed.

(2) A radiation curable resin such as an ultraviolet curable resin or an electron beam curable resin is applied to both or one or both of the resin sheet and the master, and the radiation curable resin such as an ultraviolet curable resin or an electron beam curable resin is applied to the resin. The sheet and the roller to which the master is attached are closely sandwiched and adhered, and then radiation such as ultraviolet rays or electron beams is applied to cure the ultraviolet curable resin or the electron beam curable resin to make the resin sheet uneven on the master. The pattern is transferred to continuously form a resin stamper with preformat.

(3) Radiation of a thermoformable UV-curable resin or electron beam-curable resin by coating a thermoformable UV-curable resin or electron beam-curable resin on one or both of the resin sheet and the master. The cured resin is closely sandwiched between the resin sheet and the roller to which the master is attached, and then heated and pressed while being in contact to transfer the uneven pattern of the master to the resin liquid, and then ultraviolet rays or The resin liquid is cured by irradiating the electron beam as much as necessary, and the concavo-convex pattern of the master is transferred to the resin sheet to continuously form the resin stamper with preformat.

Next, the present invention will be described with reference to the drawings.
1 and 2 are schematic views showing a master used in a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention. FIG. 3 is a schematic view showing a forming roll having a master on its surface. 1 to 3, in a method of manufacturing a stamper for manufacturing a substrate for an optical recording medium according to the present invention, a master 1 made of a flexible material and having an uneven pattern 2 is fixed to a molding roll 3. A resin stamper is formed using this molding roll 3.

As a method for producing the resin stamper, an appropriate method can be selected from the three methods shown below. The obtained stamper can be cut and used as necessary. It is also possible to cut off the outer part and use it. Further, the obtained resin stamper may be subjected to electroconductivity treatment and then electroformed to produce a metal stamper.

Any material can be used as the material of the master 1 in the present invention as long as it is flexible and can form the concave / convex pattern 2. For example, glass, ceramics, metals such as nickel and chromium, metal compounds such as metal oxides, metal halides and metal chalcogenides, organic polymer materials such as polyimide resins and Teflon resins, inorganic polymer materials such as silicon resins, etc. Can be used.

The thickness of the master 1 can be used in an optimum range depending on the molding method of the resin stamper and the material of the master 1. Usually, it can be used in the range of 1 μm to 10 mm, but it is preferably in the range of 10 to 500 μm.

If necessary, a cured film of titanium nitride, silicon oxide, fluorocarbon, etc., a protective film, or a release layer can be formed on the surface of the master.

The method of forming the concavo-convex pattern 2 is generally a CD
(Compact disc) can be created by the manufacturing method used. Specifically, it is obtained by applying a resist to a flat material, exposing and developing the pattern, forming a film of nickel by sputtering, and electroforming to deposit nickel to a predetermined thickness. As another method, a pattern is formed on a flat material by a method such as photolithography, and the pattern is used as a resist, and the surface layer of the flat material is wet or dry etched to form a groove of the pattern to a required depth. Methods can also be used.

The forming roll 3 may be made of any material as long as it has high hardness and good thermal conductivity. For example, metals such as iron and chrome steel, metal alloys,
Metal compounds, glass, ceramics and the like can be used. The roll surface is processed by derusting, degreasing, removing water and polishing. The surface accuracy needs to be substantially the same as or better than the surface accuracy of the optical recording medium to be molded. The preferred surface accuracy is 1 S or less, and the more preferred surface accuracy is 0.1 S or less. If necessary, a hardened film of titanium nitride or the like, a protective layer of silicon or the like can be formed on the surface, or plating such as chrome plating can be applied.

As a method of fixing the master to the forming roll 3, any method can be used as long as it can be fixed on the surface of the roll without unevenness. For example, a method using an adhesive, a method of screwing both ends of the master to a roll, or a method of pressing the master on the roll with a rod-shaped or band-shaped jig can be used.

As the material of the forming roll 3, any material can be used as long as it has a strength required for forming, and examples thereof include metals, metal compounds, ceramics and glass. If necessary, master 1 on the roll surface
A cured film, a protective layer, and a release layer can be formed in the same manner as in. If necessary, a protective layer may be formed on the surface of the master 1 opposite to the concavo-convex pattern, and a backing material may be attached.

In the present invention, the obtained resin stamper or metal stamper can be used by cutting it into a required size, if necessary. The cutting is particularly effective when the outer peripheral edge, which is outside the uniform thickness of the resin stamper or the metal stamper, is cut off. The cutting method can be freely selected from known methods. For example, shirring,
Laser cutting, punching with a press, or the like can be used.

Further, a metal stamper can be produced by subjecting the obtained resin stamper to electroconductivity treatment and electroforming. Any method can be used as the conductive treatment as long as it is a commonly used method, but a method such as sputtering, electroless plating, or silver mirror can be used. As for electroforming, generally, in addition to nickel electroforming, electroforming of chromium, copper, etc., or alloys of these metals and other metals can also be electroformed.

Next, three methods of manufacturing the resin stamper will be described in order below. (1) FIG. 4 is an explanatory view showing an example of a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention. The first method of manufacturing a resin stamper shown in FIG. 4 is to form a sheet by melting and extruding a resin, and at the same time, an uneven pattern of the stamper is applied to the molten resin extruded by using the molding roller 3 to which the master 1 is attached. 2 is transferred to continuously form a preformatted resin stamper.

As the resin used for molding in this method, any resin can be used as long as it has thermoplasticity. For example, polycarbonate resin, polymethylmethacryl resin, vinyl chloride resin, polystyrene resin, polyethylene terephthalate resin and the like can be used.
The melting temperature of the resin can be freely selected depending on the resin used in the range of 50 to 500 ° C. The preferred range is 100-40
It is 0 ° C. The speed at which the resin sheet is extruded to form a resin sheet can also be freely selected within the range of 0.1 to 1000 m / min, but the preferred range is 2 to 50 m / min. The resin stamper to be molded may have any thickness, but a range of 0.01 to 50 mm is preferable. When transferring the concavo-convex pattern 2 with the molding roll 3, the pressing pressure with the molding roll 3 is desirably 0.1 Kg / cm ² or more, preferably 1 to 10 Kg / cm ² .

(2) FIG. 5 is an explanatory view showing another example of the method of manufacturing the stamper for manufacturing a substrate for an optical recording medium of the present invention. The second method of manufacturing the resin stamper shown in FIG. 5 is to apply a radiation curable resin such as an ultraviolet curable resin or an electron beam curable resin to both or one of the resin sheet 21 and the molding roll 27 to which the master 1 is attached. Then, a radiation curable resin such as an ultraviolet curable resin or an electron beam curable resin is sandwiched between the resin sheet 21 and the molding roll 27 to which the master 1 is attached without any gap, and is brought into close contact. Radiation such as ultraviolet rays or electron beams is applied to cure the ultraviolet curable resin or the electron beam curable resin to transfer the concavo-convex pattern of the master onto the resin sheet 21 to continuously form the resin stamper with preformat.

As the resin sheet 21 used, any material can be used as long as it has a good flatness. For example, resin materials such as polycarbonate, polymethylmethacryl, and polyethylene terephthalate, metal materials such as aluminum and copper, or metal compounds such as halides and chalcogenides thereof, thin glass, and ceramics can be freely used.

If necessary, a primer layer made of an anchor material may be provided in order to enhance the adhesion between the resin sheet 21 and the ultraviolet or electron beam curable resin.

The ultraviolet ray or electron beam curing resin can be freely selected from commonly used materials. A prepolymer, an oligomer, or a monomer having an unsaturated bond in the molecule can be used. For example, unsaturated polyesters, acrylates such as epoxy acrylate, urethane acrylate, and polyether acrylate, and one or more methacrylates such as epoxy methacrylate, urethane methacrylate, polyether methacrylate, and polyester methacrylate, which are unsaturated in the molecule. It is possible to use a mixture of a monomer having a bond or a functional compound, or a mixture of a sensitizer and the like if necessary.

The thickness range of the resin sheet is 10 μm.
m to 20 mm is preferable, and 0.1 to 1 mm is particularly preferable. In order to bring the molding roll 3 and the resin sheet 21 into close contact with each other, 0.1 Kg / cm ² or more between the two before the resin is cured,
It is preferable to apply a pressure in the range of 1 to 10 Kg / cm ² .

(3) FIG. 6 is an explanatory view showing another example of the manufacturing method of the stamper for manufacturing a substrate for an optical recording medium of the present invention. A third method of manufacturing the resin stamper shown in FIG. 6 is that a UV curable resin or an electron beam curable resin having thermoformability is applied to both or one of the resin sheet 21 and the molding roll 27 to which the master 1 is attached. A radiation curable resin such as an ultraviolet curable resin or an electron beam curable resin is tightly sandwiched between the resin sheet 21 and the molding roll 27 to which the master 1 is attached, and heated or / and kept in close contact.
And pressing to transfer the concavo-convex pattern 2 of the master 1 to the resin liquid, and then irradiating with radiation such as ultraviolet rays or electron beams to cure the ultraviolet curable resin or the electron beam curable resin to make the resin sheet 21 concavo-convex of the master. The pattern is transferred to continuously form a resin stamper with preformat.

As the resin sheet 21 to be used, any material can be used as long as it has a good flatness. For example, resin materials such as polycarbonate, polymethylmethacryl, and polyethylene terephthalate, metal materials such as aluminum and copper, or metal compounds such as halides and chalcogenides thereof, thin glass, and ceramics can be freely used. If necessary, a primer layer made of an anchor material may be provided in order to enhance the adhesion between the resin sheet 21 and the ultraviolet or electron beam curable resin.

The ultraviolet curable resin or electron beam curable resin is a resin which has thermoformability and is curable by ultraviolet ray or electron beam at the same time. Forming roll 2 that is solid at room temperature
When it is applied onto 7, the resin sheet 21 and the resin liquid are integrated and can be wound as a single sheet-shaped resin stamper. As such a material, there is a thermoforming substance having a radically polymerizable unsaturated group as described below.

(1) A polymer having a radically polymerizable unsaturated group in a polymer having a glass transition temperature of 0 to 250 ° C. More specifically, as a polymer, a radical-polymerizable unsaturated group is introduced by the methods (a) to (d) described below, in which the following compounds are polymerized or copolymerized.

Monomers having hydroxyl groups: N-methylacrylamide, 2-hydroxyethyl acrylate, 2
-Hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, 2-hydroxybutyl acrylate, 2-hydroxybutyl methacrylate, 2-hydroxyne, 3-
Phenoxybutyl acrylate, 3-phenoxybutyl methacrylate, etc.

Monomers having a carboxyl group: acrylic acid, methacrylic acid, acroyloxyethyl monosuccinate and the like.

Monomers having an epoxy group: glycidyl methacrylate and the like.

Monomer having an aziridinyl group: 2-
Aziridinyl ethyl methacrylate, allyl 2-aziridinyl europionate and the like.

Monomers having amino groups: acrylamide, methacrylamide, diacetone acrylamide, dimethylaminoethyl methacrylate, diethylaminoethyl methacrylate and the like.

Monomers having sulfone groups: 2-acrylamido-2-methylpropanesulfonic acid, etc.

Monomer having isocyanate group:
An addition product of a diisocyanate such as 2,4-toluene diisocyanate and 2-hydroxyethyl acrylate and a radical-polymerizable monomer having active hydrogen such as an addition product of 1 mol.

Further, in order to adjust the glass transition point of the above-mentioned copolymer and the physical properties of the cured film,
It is also possible to copolymerize the above compound with the following monomers copolymerizable with this compound. Examples of such a copolymerizable monomer include methyl methacrylate, methyl acrylate, ethyl acrylate, ethyl methacrylate, propyl acrylate, butyl methacrylate, butyl acrylate, isobutyl methacrylate, isobutyl acrylate, t-butyl methacrylate, t-butyl acrylate. , Isoamyl methacrylate, isoamyl acrylate, cyclohexyl acrylate, cyclohexyl methacrylate, N-methylol melamine acrylate, 2-ethylhexyl methacrylate, 2-ethylhexyl acrylate and the like.

Next, the polymer obtained as described above is reacted by the methods (a) to (d) described below to introduce a radical-polymerizable unsaturated group, and thereby thermoforming for use in the present invention. A mold substance can be obtained.

(A) In the case of a polymer or copolymer of a monomer having a hydroxyl group, a monomer having a carboxyl group such as acrylic acid or methacrylic acid is subjected to a condensation reaction.

(B) In the case of a polymer or copolymer of a monomer having a carboxyl group or a sulfone group, the above-mentioned monomer having a hydroxyl group is subjected to a condensation reaction.

(C) In the case of a polymer or copolymer of a monomer having an epoxy group, an isocyanate group, or an aziridinyl group, the above-mentioned monomer having a hydroxyl group or a monomer having a carboxyl group is added. React.

(D) In the case of a polymer or copolymer of a monomer having a hydroxyl group or a carboxyl group, a monomer having an epoxy group or a monomer having an aziridinyl group, or a diisocyanate compound and a hydroxyl group-containing acrylic acid Addition reaction is performed with 1 mol to 1 mol of the ester monomer. In order to carry out the above reaction, it is preferable to add a trace amount of a polymerization inhibitor such as hydroquinone and to carry out the reaction with dry air.

(2) Another material that can be used in the present invention as a thermoformable resin is a compound having a melting point of 0 to 250 ° C. and a radically polymerizable unsaturated group. Specific examples include stearyl acrylate, stearyl methacrylate, triacryl isocyanurate, cyclohexanediol diacrylate, cyclohexanediol dimethacrylate, spiroglycol dimethacrylate, and spiroglycol diacrylate. Such a radical-polymerizable unsaturated monomer improves the cross-linking density and heat resistance upon irradiation with ionizing radiation, and in addition to the above-mentioned monomers, ethylene glycol diacrylate and ethylene glycol diacrylate. Methacrylate, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, hexanediol diacrylate, hexanediol dimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, trimethylolpropane diacrylate, trimethylolpropane dimethacrylate, pentaerythritol tetraacrylate , Pentaerythritol tetramethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, dipe Data hexaacrylate,
Dipentaerythritol hexamethacrylate, ethylene glycol diglycidyl ether diacrylate, ethylene glycol diglycidyl ether dimethacrylate, polyethylene glycol diglycidyl ether diacrylate, polyethylene glycol diglycidyl ether dimethacrylate, propylene glycol diglycidyl ether diacrylate, polypropylene glycol diglycidyl Ether dimethacrylate, polypropylene glycol diglycidyl ether dimethacrylate, sorbitol tetradiglycidyl ether acrylate, sorbitol tetradiglycidyl ether methacrylate, and the like can be used, and the solid content of 100 parts by weight of the above-mentioned copolymer mixture is 0. Used in a proportion of 1 to 100 parts by weight Door is preferable.

Although the above-mentioned materials can be sufficiently cured by electron beams, when they are cured by ultraviolet rays,
As the sensitizer, benzoquinone, benzoin, benzoin ethers such as benzoin methyl ether, halogenated acetophenones, peeryls and the like which generate radicals by irradiation with ultraviolet rays can also be used.

The molding conditions of the ultraviolet curable resin or the electron beam curable resin are such that the heating temperature is preferably 50 to 300.
C., more preferably 100 to 200.degree. C. or higher.
Add pressure 0.1 Kg / cm ² or more is good, preferably 1 to 10 kg / cm ² or more is good.

A substrate for an optical recording medium can be manufactured using the resin stamper or the metal stamper manufactured by the method of the present invention. An optical recording layer can be obtained by cutting, inspecting, and packaging the substrate by providing an optical recording layer or a reflective layer, and optionally a protective layer on this substrate. As these methods or materials, those generally used for optical recording media can be freely selected and used.

The method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention can be used for manufacturing any substrate for an optical recording medium such as an optical disk, an optical card, an optical tape, an optical coin and the like.

[0059]

According to the method of manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention, information is recorded / reproduced by irradiating a light beam such as a laser beam to change optical characteristics such as reflectance and transmittance. In the optical recording medium, a step of fixing a master, which is made of a flexible material and has one or more uneven patterns formed on at least one surface thereof, to the roller surface, and transferring the uneven pattern of the master to a resin sheet. A method of manufacturing a stamper, which comprises a step of continuously forming a resin stamper with a preformat and a step of cutting the resin stamper into a required size as needed. Further, it is a method of manufacturing a stamper, in which a metal stamper is manufactured by duplicating the obtained resin stamper through a series of steps such as a step of conducting conductivity and a step of performing electroforming. By using this stamper manufacturing method, a resin stamper or a metal stamper in which a fine pattern is accurately formed, has no size restriction, and has a good transferability of a concave-convex pattern can be manufactured inexpensively in large quantities with high productivity. can do.

[0060]

EXAMPLES The present invention will be described in more detail below with reference to examples, but the present invention is not limited thereto.

Example 1 As shown in FIG. 1, a standard optical card format with a parallel groove having a pitch of 12 μm, a width of 2.8 μm and a depth of 3000 Å is 1.
2 pieces formed, thickness 5mm, size 300x320m
m photomask (HOYA), electroformed, thickness 200μ
A nickel stamper having a size of m and a size of 300 × 320 mm was obtained.

Next, as shown in FIG. 3, the surface was chrome-plated to a thickness of 1 μm, length 400 mm, roll diameter 3
The nickel stamper was screwed to an iron roll of 00 mmφ to obtain a molding roll.

Next, as shown in FIG. 4, the molding roll is extruded by a molding machine (Hitachi Zosen, SHT90-320DV).
G) attached to polycarbonate (Teijin Kasei, K-
1285), an extrusion speed of 4.0 m / min, a die temperature of 295 ° C., and a roller temperature of 160 ° C., 0.4 mm
Extruded with the thickness of. The molten resin was sandwiched between a molding roll and a pressure roll, and the concavo-convex pattern of the nickel stamper on the molding roll was transferred to the molten resin while cooling the molten resin to obtain a resin stamper.

When the obtained resin stamper was measured, the unevenness in the thickness was 50 μm at the maximum, which was sufficiently small. The pattern transfer was 98% in depth (Taylor Hobson, Talystep), and the pattern transfer rate was good. Transfer of line width and track pitch is 99-100%
And there was no difference in the line width and track pitch in the vertical and horizontal directions in the extrusion direction (Elionix, surface profiler). Further, no wrinkles were observed on the surface of the resin stamper.

The obtained resin stamper is 300 × 340
It was punched and cut into a size of mm with a press. Nickel 1000 Å by vacuum deposition on the entire uneven surface of the resin stamper
Was formed into a film having a thickness of 100 μm and subjected to a conductive treatment. Then, electroforming was performed to apply a nickel electroformed film to a thickness of 300 μm. The back surface of the electroformed film was mirror-polished. 200 x 301 mm
The size was cut using a press. The electroformed film and the resin stamper were peeled off to obtain a metal stamper. When the measurement was carried out in the same manner as the resin stamper, the pattern transfer was 97% in depth and the line width and track pitch was 99-100% with respect to the mask, and the pattern transfer rate was good. It was

Example 2 A sheet of polyester (Lumirror, Toray) resin having a thickness of 10 μm, a length of 100 m and a width of 300 mm was prepared by using an apparatus shown in FIG. 5 and an ultraviolet curable resin (Mitsubishi Rayon, MRA5).
00) in a thickness of 10 μm, while sandwiched so as to be in close contact with the same molding rolls as in Example 1, using a 5 KW ultraviolet lamp (USHIO INC.), 80 W / cm from the base film side, UV irradiation was performed under the condition of a distance of 10 cm to cure the UV curable resin liquid and transfer the pattern to obtain a resin stamper.

When measured in the same manner as in Example 1, the pattern transfer was 99% in depth, the line width and track pitch were 100%, and the pattern transfer rate was good. There was no difference in line width and track pitch between the vertical direction and the horizontal direction in the traveling direction. The maximum thickness variation of the ultraviolet curable resin was 3 μm, which was sufficiently small. No wrinkles on the surface of the base sheet due to the transfer of the pattern were observed.

The resin stamper obtained in the same manner as in Example 1 was cut. In the same manner as in Example 1, the resin stamper was subjected to electroconductivity treatment, electroforming and mirror polishing. It cut like Example 1. The electroformed film and the resin stamper were peeled off in the same manner as in Example 1 to obtain a metal stamper. When the measurement was performed by the same method as in Example 1, the pattern transfer was 97% in depth with respect to the mask, the line width and the track pitch were 99-100%, and the pattern transfer rate was good. there were.

Example 3 Instead of the ultraviolet steel or resin used in Example 2, an electron beam curing resin liquid (urethane acrylate [Nippon Gosei, XP70
[0B]: Oligoester acrylate [Toagosei Aronix M7300] = 30 parts by weight: 70 parts by weight), and the resin was cured in the same manner as in Example 2 by irradiating the curing conditions with an electron beam of 180 KeV and 10 Mrad. hand,
A resin stamper to which the same concavo-convex pattern was transferred as in Example 2 was produced.

When measured in the same manner as in Example 1, the pattern transfer was 99% in depth, the line width and track pitch were 100%, and the pattern transfer rate was good. There was no difference in line width and track pitch between the vertical direction and the horizontal direction in the traveling direction. The maximum thickness unevenness of the electron beam curable resin was 3 μm, which was sufficiently small. Example 2
Similarly to the above, no wrinkles on the surface of the base sheet due to the transfer of the pattern were observed.

The resin stamper obtained in the same manner as in Example 1 was cut. In the same manner as in Example 1, the resin stamper was subjected to electroconductivity treatment, electroforming and mirror polishing. It cut like Example 1. The electroformed film and the resin stamper were peeled off in the same manner as in Example 1 to obtain a metal stamper. When the measurement was performed by the same method as in Example 1, the pattern transfer was 97% in depth with respect to the mask, the line width and the track pitch were 99-100%, and the pattern transfer rate was good. there were.

Example 4 On the same polyester sheet as in Example 2, an acrylic anchor material was applied to a thickness of 2 μm to form a primer layer. A compound obtained by reacting an acrylic acid with an N-methylol acrylamide polymer was applied on the plasma layer to a thickness of 20 μm to form a resin liquid layer, and Example 1
Using the same molding roll as the above, using the apparatus shown in FIG. 6, the two were brought into close contact with each other so as not to enter bubbles, and pressure-contacted under the conditions of a temperature of 110 ° C. and a pressure of 1 Kg / cm ² , and ultraviolet rays were applied under the same conditions as in Example 2. The resin solution was cured by irradiating with, and the uneven pattern was transferred to obtain a resin stamper.

When measured in the same manner as in Example 1, the pattern transfer was 99% in depth, the line width and track pitch were 100%, and the pattern transfer rate was good. There was no difference in line width and track pitch between the vertical direction and the horizontal direction in the traveling direction. The maximum thickness variation of the resin was 3 μm, which was sufficiently small. As in Example 2, no wrinkles or the like on the surface of the base sheet due to the transfer of the pattern were observed.

The resin stamper obtained in the same manner as in Example 1 was cut. In the same manner as in Example 1, the resin stamper was subjected to electroconductivity treatment, electroforming and mirror polishing. It cut like Example 1. The electroformed film and the resin stamper were peeled off in the same manner as in Example 1 to obtain a metal stamper. When the measurement was performed by the same method as in Example 1, the pattern transfer was 97% in depth with respect to the mask, the line width and the track pitch were 99-100%, and the pattern transfer rate was good. there were.

Example 5 On the same polyester sheet as in Example 2, an acrylic anchor material was applied to a thickness of 2 μm to form a primer layer. On this primer layer, N-methylolmelamine acrylate obtained by reacting N-methylolmelamine and acrylic acid as a resin liquid layer instead of the resin used in Example 4 was applied to a thickness of 20 μm to form a resin liquid layer. As the above, using the same forming roll as in Example 1 and using the same apparatus as in Example 4 to bring them into close contact with each other so as not to contain bubbles, and press-contact under the conditions of a temperature of 110 ° C. and a pressure of 1 Kg / cm ² , Was irradiated under the same conditions as in Example 2 to cure the resin liquid and transfer the uneven pattern to obtain a resin stamper.

When measured in the same manner as in Example 1, the pattern transfer was 99% in depth, the line width and track pitch were 100%, and the pattern transfer rate was good. There was no difference in line width and track pitch between the vertical direction and the horizontal direction in the traveling direction. The maximum thickness variation of the resin was 3 μm, which was sufficiently small. As in Example 2, no wrinkles or the like on the surface of the base sheet due to the transfer of the pattern were observed.

The resin stamper obtained in the same manner as in Example 1 was cut. In the same manner as in Example 1, the resin stamper was subjected to electroconductivity treatment, electroforming and mirror polishing. It cut like Example 1. The electroformed film and the resin stamper were peeled off in the same manner as in Example 1 to obtain a metal stamper. When the measurement was performed by the same method as in Example 1, the pattern transfer was 97% in depth with respect to the mask, the line width and the track pitch were 99-100%, and the pattern transfer rate was good. there were.

[0078]

According to the present invention, a master is manufactured on the basis of a master, and a long resin stamper is manufactured by using a continuous manufacturing method, whereby a fine uneven pattern is accurately formed, Moreover, a resin stamper or a metal stamper having good flatness can be manufactured at low cost and with high productivity. Since a large number of stampers are manufactured from the master, the number of times the master is used can be reduced and the life of the master can be extended. This has the effect of making a large stamper even with a small master or master.

[Brief description of drawings]

FIG. 1 is a schematic view showing an example of a master used in a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention.

FIG. 2 is a schematic view showing another example of a master used in the method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention.

FIG. 3 is a schematic view showing a forming roll having a master on its surface.

FIG. 4 is an explanatory view showing an example of a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention.

FIG. 5 is an explanatory view showing another example of a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention.

FIG. 6 is an explanatory view showing another example of a method for manufacturing a stamper for manufacturing a substrate for an optical recording medium of the present invention.

FIG. 7 is a schematic sectional view of a conventional optical recording medium.
7A shows a card-shaped optical recording medium, and FIG. 7B shows a disk-shaped optical recording medium.

FIG. 8 is a schematic partial process drawing showing a first half of a conventional stamper manufacturing method.

FIG. 9 is a schematic partial process chart showing a latter half of the process chart of FIG. 8;

[Explanation of symbols]

 1 Master 2 Concavo-convex pattern 3 Forming roll 11 Resin sheet 12 T-die 13 Ruder 14 Hopper 15 Pressure roll 16 Take-up roll 17 Protective film unwind roll 21 Resin sheet 22 Unwind roll 23 Supply roll 25 Pressure roll 26 Radiation curable resin coating device 27 Forming roll 28 Radiation lamp 31 Transparent substrate 32 Track groove 33 Optical recording layer 34 Spacer 35 Adhesive layer 36 Protective substrate 41 Substrate 42 Resist 43 Exposure optical system 44 Concavo-convex pattern 45 Conductive film 46 Electroformed film

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Osamu Kaname, 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Hirofumi Kamitakahara, 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Tetsuya Sato 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (5)

[Claims] 1. By irradiating a light beam such as a laser beam, optical characteristics such as reflectance and transmittance are changed,
In a method of manufacturing a stamper for manufacturing a substrate for an optical recording medium for recording / reproducing information, a master made of a flexible material and having one or a plurality of concavo-convex patterns formed on at least one surface thereof is used as a roller surface. Fixed to
A step of transferring the concavo-convex pattern of the master onto a resin sheet to continuously form a resin stamper with a preformat,
A method of manufacturing a stamper for manufacturing a substrate for an optical recording medium, which comprises a step of cutting a resin stamper as required. 2. A resin stamper with a preformat is formed by melting and extruding a resin to form a resin sheet, and at the same time, transferring an uneven pattern of the original disc to the extruded molten resin using a roller to which the original disc is attached. The method for manufacturing a stamper for manufacturing a substrate for an optical recording medium according to claim 1, comprising a step of continuously forming. 3. A step of applying a radiation curable resin such as an ultraviolet curable resin or an electron beam curable resin to both or one of the resin sheet and the master disc, and a radiation curable resin of an ultraviolet curable resin or an electron beam curable resin to the resin sheet and the master disc. The process of sandwiching and tightly adhering between the rollers with
Claim that comprises a step of continuously forming a resin stamper with a preformat by irradiating radiation such as ultraviolet rays or electron beams to cure the ultraviolet curing resin or the electron beam curing resin to transfer the uneven pattern of the master onto the resin sheet Item 1
A method for manufacturing a stamper for manufacturing a substrate for an optical recording medium as described above. 4. A step of applying a thermosetting UV curable resin or electron beam curable resin to both or one of the resin sheet and the master, and a radiation curable resin of the UV curable resin or electron beam curable resin as a resin sheet. The step of sandwiching between the rollers to which the master is attached without any gaps, the step of transferring the uneven pattern of the master to the resin liquid by heating and pressurizing the rollers, and then irradiating with ultraviolet rays or electron rays. 2. The method of manufacturing a substrate for an optical recording medium according to claim 1, further comprising a step of curing an ultraviolet curable resin or an electron beam curable resin to transfer the concavo-convex pattern of the master onto a resin sheet to continuously form a resin stamper with a preformat. Manufacturing method for stamper. 5. By irradiating a light beam such as a laser beam, optical characteristics such as reflectance and transmittance are changed,
In a method of manufacturing a stamper for manufacturing a substrate for an optical recording medium for recording / reproducing information, a master made of a flexible material and having one or a plurality of concave / convex patterns formed on at least one surface thereof is used as a roller surface. Fixed to
A step of continuously forming a resin stamper with a preformat by transferring the concavo-convex pattern of the master onto a resin sheet,
If necessary, a step of cutting the resin stamper, a step of subjecting the uneven surface of the resin stamper to electroconductivity treatment, a step of electroforming on the basis of the electroconductivity treated resin stamper to form a metal stamper, necessary A method for manufacturing a stamper for manufacturing a substrate for an optical recording medium, which comprises a step of mirror-polishing a surface of the metal stamper on which the uneven pattern is not formed, and a step of cutting the metal stamper as necessary.