JPH0544619B2 - - Google Patents

Info

Publication number
JPH0544619B2
JPH0544619B2 JP58014819A JP1481983A JPH0544619B2 JP H0544619 B2 JPH0544619 B2 JP H0544619B2 JP 58014819 A JP58014819 A JP 58014819A JP 1481983 A JP1481983 A JP 1481983A JP H0544619 B2 JPH0544619 B2 JP H0544619B2
Authority
JP
Japan
Prior art keywords
vacuum
amplitude
elastic body
medium
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58014819A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59141026A (ja
Inventor
Takenobu Tanaka
Wataru Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1481983A priority Critical patent/JPS59141026A/ja
Publication of JPS59141026A publication Critical patent/JPS59141026A/ja
Publication of JPH0544619B2 publication Critical patent/JPH0544619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
    • G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP1481983A 1983-01-31 1983-01-31 真空計 Granted JPS59141026A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1481983A JPS59141026A (ja) 1983-01-31 1983-01-31 真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1481983A JPS59141026A (ja) 1983-01-31 1983-01-31 真空計

Publications (2)

Publication Number Publication Date
JPS59141026A JPS59141026A (ja) 1984-08-13
JPH0544619B2 true JPH0544619B2 (ko) 1993-07-06

Family

ID=11871646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1481983A Granted JPS59141026A (ja) 1983-01-31 1983-01-31 真空計

Country Status (1)

Country Link
JP (1) JPS59141026A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2518814B2 (ja) * 1985-04-08 1996-07-31 株式会社日立製作所 真空計
JP5375252B2 (ja) * 2008-11-28 2013-12-25 富士電機株式会社 真空計
JP5387468B2 (ja) * 2010-03-19 2014-01-15 富士電機株式会社 真空計
JP5387467B2 (ja) * 2010-03-19 2014-01-15 富士電機株式会社 真空計

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039392A (ko) * 1973-08-14 1975-04-11
JPS539875B2 (ko) * 1973-12-12 1978-04-08
JPS554559A (en) * 1978-06-27 1980-01-14 Meisei Electric Co Ltd Pressure sensor using crystal vibrator
JPS55164325A (en) * 1979-06-11 1980-12-22 Toho Denshi Kk Fluid pressure electric converting unit

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655627Y2 (ko) * 1976-07-09 1981-12-25

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039392A (ko) * 1973-08-14 1975-04-11
JPS539875B2 (ko) * 1973-12-12 1978-04-08
JPS554559A (en) * 1978-06-27 1980-01-14 Meisei Electric Co Ltd Pressure sensor using crystal vibrator
JPS55164325A (en) * 1979-06-11 1980-12-22 Toho Denshi Kk Fluid pressure electric converting unit

Also Published As

Publication number Publication date
JPS59141026A (ja) 1984-08-13

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