JPH0544548Y2 - - Google Patents
Info
- Publication number
- JPH0544548Y2 JPH0544548Y2 JP11125188U JP11125188U JPH0544548Y2 JP H0544548 Y2 JPH0544548 Y2 JP H0544548Y2 JP 11125188 U JP11125188 U JP 11125188U JP 11125188 U JP11125188 U JP 11125188U JP H0544548 Y2 JPH0544548 Y2 JP H0544548Y2
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- cycle
- refrigerator
- gas
- shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005057 refrigeration Methods 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 20
- 238000001704 evaporation Methods 0.000 description 10
- 230000005494 condensation Effects 0.000 description 9
- 238000009833 condensation Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 238000007711 solidification Methods 0.000 description 5
- 230000008023 solidification Effects 0.000 description 5
- 238000009835 boiling Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11125188U JPH0544548Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-26 | 1988-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11125188U JPH0544548Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-26 | 1988-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0235984U JPH0235984U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-08 |
| JPH0544548Y2 true JPH0544548Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-11 |
Family
ID=31349141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11125188U Expired - Lifetime JPH0544548Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-26 | 1988-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544548Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111542698B (zh) * | 2017-11-17 | 2022-03-11 | 爱德华兹真空泵有限责任公司 | 具有增强型正面阵列的低温泵 |
-
1988
- 1988-08-26 JP JP11125188U patent/JPH0544548Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0235984U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-03-08 |