JPH0543109Y2 - - Google Patents

Info

Publication number
JPH0543109Y2
JPH0543109Y2 JP1987030658U JP3065887U JPH0543109Y2 JP H0543109 Y2 JPH0543109 Y2 JP H0543109Y2 JP 1987030658 U JP1987030658 U JP 1987030658U JP 3065887 U JP3065887 U JP 3065887U JP H0543109 Y2 JPH0543109 Y2 JP H0543109Y2
Authority
JP
Japan
Prior art keywords
substrate
raw material
material solution
slide plate
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987030658U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63140072U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987030658U priority Critical patent/JPH0543109Y2/ja
Publication of JPS63140072U publication Critical patent/JPS63140072U/ja
Application granted granted Critical
Publication of JPH0543109Y2 publication Critical patent/JPH0543109Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1987030658U 1987-03-03 1987-03-03 Expired - Lifetime JPH0543109Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987030658U JPH0543109Y2 (de) 1987-03-03 1987-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987030658U JPH0543109Y2 (de) 1987-03-03 1987-03-03

Publications (2)

Publication Number Publication Date
JPS63140072U JPS63140072U (de) 1988-09-14
JPH0543109Y2 true JPH0543109Y2 (de) 1993-10-29

Family

ID=30835673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987030658U Expired - Lifetime JPH0543109Y2 (de) 1987-03-03 1987-03-03

Country Status (1)

Country Link
JP (1) JPH0543109Y2 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329428A (en) * 1976-08-30 1978-03-18 Mitsubishi Electric Corp Solenoid controlled system
JPS5391921A (en) * 1977-01-24 1978-08-12 Kogyo Gijutsuin Process for making highly oriented graphite material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329428A (en) * 1976-08-30 1978-03-18 Mitsubishi Electric Corp Solenoid controlled system
JPS5391921A (en) * 1977-01-24 1978-08-12 Kogyo Gijutsuin Process for making highly oriented graphite material

Also Published As

Publication number Publication date
JPS63140072U (de) 1988-09-14

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