JPH0543079Y2 - - Google Patents

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Publication number
JPH0543079Y2
JPH0543079Y2 JP1986168197U JP16819786U JPH0543079Y2 JP H0543079 Y2 JPH0543079 Y2 JP H0543079Y2 JP 1986168197 U JP1986168197 U JP 1986168197U JP 16819786 U JP16819786 U JP 16819786U JP H0543079 Y2 JPH0543079 Y2 JP H0543079Y2
Authority
JP
Japan
Prior art keywords
container
carry
workpiece
adhesive
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986168197U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6373337U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986168197U priority Critical patent/JPH0543079Y2/ja
Priority to PH34571A priority patent/PH25206A/en
Priority to EP86117185A priority patent/EP0226949B1/en
Priority to DE8686117185T priority patent/DE3686314T2/de
Priority to US06/940,328 priority patent/US4718967A/en
Priority to KR1019860010635A priority patent/KR900004688B1/ko
Publication of JPS6373337U publication Critical patent/JPS6373337U/ja
Priority to SG1063/92A priority patent/SG106392G/en
Application granted granted Critical
Publication of JPH0543079Y2 publication Critical patent/JPH0543079Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Adhesives Or Adhesive Processes (AREA)
JP1986168197U 1985-12-12 1986-11-04 Expired - Lifetime JPH0543079Y2 (enExample)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP1986168197U JPH0543079Y2 (enExample) 1986-11-04 1986-11-04
PH34571A PH25206A (en) 1985-12-12 1986-12-09 Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate
DE8686117185T DE3686314T2 (de) 1985-12-12 1986-12-10 Vorrichtung zur bestimmung der haftkraefte eines klebstoffes zwischen einem halbleiter und seinem substrat.
EP86117185A EP0226949B1 (en) 1985-12-12 1986-12-10 Control apparatus for adhesive force of adhesive agent adhering between semiconductor wafer and substrate
US06/940,328 US4718967A (en) 1985-12-12 1986-12-11 Control apparatus for reducing adhesive force of adhesive agent adhering between semiconductor wafer and substrate
KR1019860010635A KR900004688B1 (ko) 1985-12-12 1986-12-12 반도체 웨이퍼와 박판을 접착하는 접착제의 접착력 제어장치
SG1063/92A SG106392G (en) 1985-12-12 1992-10-13 Control apparatus for adhesive force of adhesive agent adhering between semiconductor wafer and substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986168197U JPH0543079Y2 (enExample) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS6373337U JPS6373337U (enExample) 1988-05-16
JPH0543079Y2 true JPH0543079Y2 (enExample) 1993-10-29

Family

ID=31100851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986168197U Expired - Lifetime JPH0543079Y2 (enExample) 1985-12-12 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0543079Y2 (enExample)

Also Published As

Publication number Publication date
JPS6373337U (enExample) 1988-05-16

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