JPH0542812B2 - - Google Patents
Info
- Publication number
- JPH0542812B2 JPH0542812B2 JP1111858A JP11185889A JPH0542812B2 JP H0542812 B2 JPH0542812 B2 JP H0542812B2 JP 1111858 A JP1111858 A JP 1111858A JP 11185889 A JP11185889 A JP 11185889A JP H0542812 B2 JPH0542812 B2 JP H0542812B2
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- side end
- furnace
- discharge side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 claims description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 9
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は半導体製造用拡散炉の炉芯管に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a furnace core tube for a diffusion furnace for semiconductor manufacturing.
［従来の技術］
拡散炉はシリコンウエハー等を炉芯管内に挿入
してＢ等の不純物を拡散させたり、酸化処理を施
したりするものである。これらの不純物が炉芯管
の内面に付着する。また、不要な不純物も次第に
炉芯管の内面に堆積するようになる。そのため、
時々、炉を休止して炉芯管の内面を洗浄しなけれ
ばならない。[Prior Art] A diffusion furnace is a device in which a silicon wafer or the like is inserted into a furnace core tube to diffuse impurities such as B or to perform oxidation treatment. These impurities adhere to the inner surface of the furnace core tube. In addition, unnecessary impurities also gradually accumulate on the inner surface of the furnace core tube. Therefore,
From time to time, the furnace must be shut down and the inner surface of the furnace core tube must be cleaned.
［発明が解決しようとする課題］
従来の炉芯管にあつては、洗浄のとき、炉芯管
を抜き取り、これを塩酸等の浴槽の中で洗浄を行
う。そのため、洗浄が繁雑であり、また炉体を損
傷させる等の欠点があつた。[Problems to be Solved by the Invention] When cleaning a conventional furnace core tube, the furnace core tube is taken out and cleaned in a bath of hydrochloric acid or the like. Therefore, there were drawbacks such as complicated cleaning and damage to the furnace body.
本発明の目的はかかる洗浄を高温ガス処理によ
つて行い得る炉芯管を提供することである。 An object of the present invention is to provide a furnace core tube that can be cleaned by high temperature gas treatment.
［課題を解決するための手段］
この目的を達成するために、本発明は内径も外
径も全長にわたつてほぼ同一の円筒状をした本体
と、その本体の両端に形成された排出側端部及び
導入側端部を有する拡散炉用炉芯管において、炉
芯管の本体、排出側端部及び導入側端部が炭化ケ
イ素質材料よりなり、前記排出側端部は、内面が
前記本体の内径と同一の内径を有する円筒面であ
り、外面が1/5〜1/10のテーパー面であり、しか
も、ガス排出孔を有するキヤツプ状の石英ガラス
製蓋体の内周面が前記排出側端部のテーパー面に
合致するテーパー面を有し、前記蓋体のテーパー
面と前記排出側端部のテーパー面とが嵌合される
ことを特徴とする拡散炉用炉芯管を要旨としてい
る。[Means for Solving the Problems] In order to achieve this object, the present invention includes a cylindrical body whose inner diameter and outer diameter are substantially the same over the entire length, and discharge side ends formed at both ends of the body. In a furnace core tube for a diffusion furnace, the main body, the discharge side end, and the introduction side end are made of a silicon carbide material, and the inner surface of the discharge side end is similar to the main body. The inner peripheral surface of the cap-shaped quartz glass lid body has a cylindrical surface with the same inner diameter as the inner diameter of the gas discharge hole, and the outer surface has a tapered surface of 1/5 to 1/10. The gist is a furnace core tube for a diffusion furnace, which has a tapered surface that matches the tapered surface of the side end, and the tapered surface of the lid body and the tapered surface of the discharge side end are fitted together. There is.
［実施例］
以下に、図面を参照して本発明の実施例を説明
する。[Examples] Examples of the present invention will be described below with reference to the drawings.
第１図において、１は炭化ケイ素質焼結体から
なる炉芯管で、表面に緻密な炭化ケイ素膜が被覆
されている。炉芯管１の本体は内径も外径も全長
にわたつてほぼ同一の円筒状になつている。 In FIG. 1, reference numeral 1 denotes a furnace core tube made of a silicon carbide sintered body, the surface of which is coated with a dense silicon carbide film. The main body of the furnace core tube 1 has a cylindrical shape with substantially the same inner and outer diameters over its entire length.
この炉芯管１のガス導入側端部はラツパ状に形
成されており、球面接触部３で石英ガラス製のガ
ス導入管２と球面接触している。 The end of the gas introduction side of the furnace core tube 1 is formed in a round shape, and is in spherical contact with the gas introduction tube 2 made of quartz glass at a spherical contact portion 3.
炉芯管１の排出側端部の外周に1/5〜1/10のテ
ーパー面５を設ける。蓋体４はこれに合致する1/
５〜1/10のテーパー面６を有する。蓋体４のテー
パー面６を排出側端部のテーパー面５に密着させ
ることによつて炉芯管１の密封状態が得られる。 A tapered surface 5 of 1/5 to 1/10 is provided on the outer periphery of the discharge side end of the furnace core tube 1. The lid body 4 matches this 1/
It has a tapered surface 6 of 5 to 1/10. By bringing the tapered surface 6 of the lid 4 into close contact with the tapered surface 5 at the discharge side end, a sealed state of the furnace core tube 1 can be obtained.
蓋体４にはガス排出孔７が設けられている。 The lid body 4 is provided with a gas exhaust hole 7.
また、蓋体４は石英ガラス製であつて、テーパ
ー面６を設けることによつて炉芯管１を密封する
ものである。 Further, the lid body 4 is made of quartz glass and is provided with a tapered surface 6 to seal the furnace core tube 1.
炉芯管１の本体と導入側端部は全長にわたつて
ほぼ同一の厚みになつている。排出側端部の最外
端の厚みは本体の厚みの半分以下（好ましくは図
示例のように約３分の１）にする。 The main body and the inlet end of the furnace core tube 1 have approximately the same thickness over the entire length. The thickness of the outermost end of the discharge side end is less than half the thickness of the main body (preferably about one-third as in the illustrated example).
かかる構造の炉芯管を使用すると、拡散炉処理
等によつて内壁面が汚染された場合、ガス導入管
２から塩酸または塩素等のハロゲンガスを導入
し、炉内を1100℃以上例えば1300℃に加熱するこ
とによつて、汚染物質は極めて容易にガス排出孔
から排除することができる。炉体を1100℃以上に
加熱するのは、低温では洗浄効果が低く、洗浄に
長い時間を要するからである。 When using a furnace core tube with such a structure, if the inner wall surface becomes contaminated due to diffusion furnace treatment, etc., a halogen gas such as hydrochloric acid or chlorine is introduced from the gas introduction tube 2 and the temperature inside the furnace is increased to 1100°C or above, for example 1300°C. Contaminants can be very easily removed from the gas outlet by heating to . The reason why the furnace body is heated to 1100°C or higher is because cleaning is less effective at low temperatures and cleaning takes a long time.
また、蓋体４は、高温ガスと接触するため、熱
膨張等を考慮し、高温においても腐蝕性ガスの密
封状態を維持するためにテーパー面６のテーパー
角度を1/5〜1/10とすることが必要である。この
ようなテーパー面同志で接触することによつて炉
芯管の密封が可能となる。 In addition, since the lid body 4 comes into contact with high-temperature gas, the taper angle of the tapered surface 6 is set to 1/5 to 1/10 in order to maintain a sealed state against corrosive gas even at high temperatures, considering thermal expansion, etc. It is necessary to. By bringing such tapered surfaces into contact with each other, it is possible to seal the furnace core tube.
なお、ガス導入側は比較的低温であるため相対
的には熱膨張を考慮することがないから、従来の
球面接触でも、また、その他の方法でもよい。 Note that since the temperature on the gas introduction side is relatively low, there is no need to consider thermal expansion, so conventional spherical contact or other methods may be used.
また、炉芯管の材質としては、炭化ケイ素に炭
化ケイ素を被覆したもののみでなく炭化ケイ素に
金属シリコンを含浸させたものや、あるいは窒化
ケイ素を被覆したもの等でも可能である。 Furthermore, the material of the furnace core tube may be not only silicon carbide coated with silicon carbide, but also silicon carbide impregnated with metallic silicon, or silicon carbide coated with silicon nitride.
［発明の効果］
本発明によれば、拡散炉処理等によつて炉芯管
の内壁面が汚染された場合、ガス導入管等から塩
酸または塩素等のハロゲンガスを導入し、炉内を
1100℃以上例えば1300℃に加熱することによつ
て、汚染物質を極めて容易にガス排出孔から排除
することができる。このようなガス処理を行うに
際し、炉芯管の排出側端部と蓋体とをテーパー面
同志で嵌合させて炉芯管を密封状態にし、この蓋
体のガス排出孔から洗浄ガスを排出する一方、炉
芯管の他端から洗浄ガスを導入し、炉芯管内を加
熱する。その時、炉芯管の炭化ケイ素質材料の熱
膨張係数が蓋体の石英ガラスの熱膨張係数よりも
大きいため、加熱時に熱膨張の差によつて密封状
態が非常に良好になる。特に1/5〜1/10のテーパ
ー面を採用しているので、そのようなガス処理状
態で抜群の密封状態を確保できる。[Effects of the Invention] According to the present invention, when the inner wall surface of the furnace core tube is contaminated due to diffusion furnace treatment etc., halogen gas such as hydrochloric acid or chlorine is introduced from the gas introduction pipe etc. to clean the inside of the furnace.
By heating above 1100°C, for example 1300°C, contaminants can be very easily removed from the gas outlet. When performing such gas treatment, the discharge side end of the furnace core tube and the lid body are fitted with their tapered surfaces to seal the furnace core tube, and the cleaning gas is discharged from the gas exhaust hole of the lid body. Meanwhile, cleaning gas is introduced from the other end of the furnace core tube to heat the inside of the furnace core tube. At this time, since the thermal expansion coefficient of the silicon carbide material of the furnace core tube is larger than that of the quartz glass of the lid, the sealing condition is very good due to the difference in thermal expansion during heating. In particular, it uses a tapered surface of 1/5 to 1/10, so it can ensure an excellent seal under such gas processing conditions.
炉芯管の使用に際しては、室温状態で炉芯管の
排出側端部と蓋体とをテーパー面同志で少しずら
して緩やかに嵌合させておき、適度の仮密封状態
を形成して昇温し、昇温後に炉芯管あるいは蓋体
を移動させ、テーパー面同志で密封状態を形成す
る。この際、1/10よりも小さいテーパー面である
と、例えば1/20のテーパー面であると、室温状態
で炉芯管の排出側端部と蓋体とをテーパー面同志
で少しずらして緩やかに嵌合させたとしても、加
熱状態では両者の熱膨張の差によつてクラツクが
生じがちである。逆に、1/5よりも大きいテーパ
ー面であると、例えば1/3のテーパー面であると、
室温状態で炉芯管の排出側端部と蓋体とをテーパ
ー面同志で少しずらして緩やかに嵌合させること
が困難であり、仮に炉芯管の排出側端部と蓋体と
を嵌合させたとしても上記のような加熱状態で密
封状態をうまく保持できない。このことにより、
炉芯管内の昇温制御に支障をきたす。 When using the furnace core tube, the discharge side end of the furnace core tube and the lid should be fitted loosely with the tapered surfaces slightly shifted from each other at room temperature to form an appropriate temporary sealing state and then raise the temperature. After the temperature has risen, the furnace core tube or lid is moved to form a sealed state with the tapered surfaces. At this time, if the tapered surface is smaller than 1/10, for example, 1/20, the discharge side end of the furnace core tube and the lid may be slightly shifted between the tapered surfaces at room temperature. Even if they are fitted, cracks tend to occur due to the difference in thermal expansion between the two when heated. On the other hand, if the tapered surface is larger than 1/5, for example, if it is 1/3 tapered,
It is difficult to fit the discharge side end of the furnace core tube and the lid body loosely by slightly shifting the tapered surfaces together at room temperature. Even if it were, it would not be possible to maintain the sealed state well under the heating conditions described above. Due to this,
This will interfere with temperature rise control in the furnace core tube.
前述のように、この発明においては、炉芯管及
び蓋体の材質とテーパーの数値とをうまく組み合
わせて加熱状態で炉芯管の良好かつ確実な密封を
得ることができる。 As described above, in the present invention, by appropriately combining the materials of the furnace core tube and lid and the numerical values of the taper, it is possible to obtain good and reliable sealing of the furnace core tube in a heated state.
本発明の炉芯管は、ハロゲンガスの洗浄効果が
著しく高い高温においても、何らガスリークが生
じることがない。また炉芯管内部を洗浄する時に
炉体を冷却したり炉芯管を抜き出したりすること
が不要となり、極めて容易に炉芯管内部を洗浄す
ることができる。 The furnace core tube of the present invention does not cause any gas leakage even at high temperatures where the halogen gas cleaning effect is extremely high. Further, when cleaning the inside of the furnace core tube, it is not necessary to cool the furnace body or take out the furnace core tube, and the inside of the furnace core tube can be cleaned extremely easily.
本発明においては、炉芯管の本体と排出側端部
が同一の内径を有する円筒面となつていて、排出
側端部の外面に前述のような特定のテーパー面が
形成してあるので、高温処理時に極めて良好に気
密状態を保持できるという顕著な効果が得られ
る。しかも、気密保持が良好であるだけでなく、
蓋体と炉芯管との熱膨張差による破損がより確実
に防止できる。とくに1100℃以上になると、この
破損防止効果はハロゲンガスの漏出を完全に防ぐ
ためには極めて重要である。 In the present invention, the main body and the discharge side end of the furnace core tube are cylindrical surfaces having the same inner diameter, and the specific tapered surface as described above is formed on the outer surface of the discharge side end. A remarkable effect is obtained in that an airtight state can be maintained extremely well during high-temperature processing. Moreover, it not only maintains good airtightness, but also
Damage due to the difference in thermal expansion between the lid and the furnace core tube can be more reliably prevented. Particularly at temperatures above 1100°C, this damage prevention effect is extremely important to completely prevent halogen gas from leaking.
さらに、本発明によれば、蓋体が炉芯管の排出
側端部にかぶせられる形で排出側端部に嵌合され
るので、排出されるガスが両テーパー面の間に侵
入して液化して留まることが防止できる。とくに
ガスの液化したものがテーパー面のところに留ま
ることを効果的に防止できる。 Further, according to the present invention, since the lid body is fitted to the discharge side end of the furnace core tube in a manner that it is covered with the discharge side end, the discharged gas enters between both tapered surfaces and is liquefied. This prevents the product from remaining in place. In particular, it is possible to effectively prevent liquefied gas from remaining on the tapered surface.
第１図は、この発明の好適な一つの実施例によ
る拡散炉用炉芯管を示す概略断面図である。
１……炉芯管、２……ガス導入管、３……球面
接触部、４……蓋体、５……炉芯管の排出側端部
のテーパー面、６……蓋体のテーパー、７……ガ
ス排出孔。
FIG. 1 is a schematic sectional view showing a furnace core tube for a diffusion furnace according to a preferred embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Furnace core tube, 2...Gas introduction tube, 3...Spherical contact portion, 4...Lid body, 5...Tapered surface of the discharge side end of the furnace core tube, 6...Taper of the lid body, 7...Gas exhaust hole.
Claims (1)
状をした本体と、その本体の両端に形成された排
出側端部及び導入側端部を有する拡散炉用の炉芯
管において、炉芯管の本体、排出側端部及び導入
側端部が炭化ケイ素質材料よりなり、前記排出側
端部は、内面が前記本体の内径と同一の内径を有
する円筒面であり、外面が1/5〜1/10のテーパー
面であり、しかも、ガス排出孔を有するキヤツプ
状の石英ガラス製蓋体の内周面が前記排出側端部
のテーパー面に合致するテーパー面を有し、前記
蓋体のテーパー面と前記排出側端部のテーパー面
とが嵌合されることを特徴とする拡散炉用炉芯
管。1. In a furnace core tube for a diffusion furnace, the furnace core tube has a cylindrical body whose inner diameter and outer diameter are almost the same over the entire length, and a discharge side end and an inlet side end formed at both ends of the body. The main body, the discharge side end, and the introduction side end of the tube are made of silicon carbide material, and the discharge side end has a cylindrical surface whose inner surface has the same inner diameter as the inner diameter of the main body, and whose outer surface has a diameter of 1/5. The cap-shaped quartz glass lid has a tapered surface of ~1/10 and has a gas discharge hole. A furnace core tube for a diffusion furnace, characterized in that a tapered surface of the and a tapered surface of the discharge side end are fitted together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185889A JPH0249421A (en) | 1989-04-28 | 1989-04-28 | Structure of furnace core tube for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11185889A JPH0249421A (en) | 1989-04-28 | 1989-04-28 | Structure of furnace core tube for diffusion furnace |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10458978A Division JPS5530869A (en) | 1978-08-28 | 1978-08-28 | Furnace core tube for use in diffusion furnace and method of washing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0249421A JPH0249421A (en) | 1990-02-19 |
| JPH0542812B2 true JPH0542812B2 (en) | 1993-06-29 |
Family
ID=14571924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11185889A Granted JPH0249421A (en) | 1989-04-28 | 1989-04-28 | Structure of furnace core tube for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249421A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100703169B1 (en) * | 2004-08-26 | 2007-04-05 | 여환동 | Heat insulation and waterproof working structure and method of building |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185374A (en) * | 1974-12-06 | 1976-07-26 | Norton Co | |
| JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
-
1989
- 1989-04-28 JP JP11185889A patent/JPH0249421A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185374A (en) * | 1974-12-06 | 1976-07-26 | Norton Co | |
| JPS5222477A (en) * | 1975-08-13 | 1977-02-19 | Toshiba Ceramics Co Ltd | Sic-si type equalizing tube for manufacturing gas impermeable semi conductors |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249421A (en) | 1990-02-19 |
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