JPH0542811B2 - - Google Patents

Info

Publication number
JPH0542811B2
JPH0542811B2 JP58082753A JP8275383A JPH0542811B2 JP H0542811 B2 JPH0542811 B2 JP H0542811B2 JP 58082753 A JP58082753 A JP 58082753A JP 8275383 A JP8275383 A JP 8275383A JP H0542811 B2 JPH0542811 B2 JP H0542811B2
Authority
JP
Japan
Prior art keywords
gas
valve
mass flow
flow rate
flow controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58082753A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59208285A (ja
Inventor
Tamotsu Sasaki
Makoto Chimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP58082753A priority Critical patent/JPS59208285A/ja
Publication of JPS59208285A publication Critical patent/JPS59208285A/ja
Publication of JPH0542811B2 publication Critical patent/JPH0542811B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N1/00—Regulating fuel supply
    • F23N1/002—Regulating fuel supply using electronic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23N—REGULATING OR CONTROLLING COMBUSTION
    • F23N2235/00—Valves, nozzles or pumps
    • F23N2235/12—Fuel valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Magnetically Actuated Valves (AREA)
JP58082753A 1983-05-13 1983-05-13 ガス流量制御装置 Granted JPS59208285A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58082753A JPS59208285A (ja) 1983-05-13 1983-05-13 ガス流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58082753A JPS59208285A (ja) 1983-05-13 1983-05-13 ガス流量制御装置

Publications (2)

Publication Number Publication Date
JPS59208285A JPS59208285A (ja) 1984-11-26
JPH0542811B2 true JPH0542811B2 (enExample) 1993-06-29

Family

ID=13783194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58082753A Granted JPS59208285A (ja) 1983-05-13 1983-05-13 ガス流量制御装置

Country Status (1)

Country Link
JP (1) JPS59208285A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6010229B2 (ja) * 1976-08-20 1985-03-15 松下電器産業株式会社 流体制御装置

Also Published As

Publication number Publication date
JPS59208285A (ja) 1984-11-26

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