JPH0542633B2 - - Google Patents

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Publication number
JPH0542633B2
JPH0542633B2 JP58030256A JP3025683A JPH0542633B2 JP H0542633 B2 JPH0542633 B2 JP H0542633B2 JP 58030256 A JP58030256 A JP 58030256A JP 3025683 A JP3025683 A JP 3025683A JP H0542633 B2 JPH0542633 B2 JP H0542633B2
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal display
conductive pattern
electrode terminal
flexible film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58030256A
Other languages
Japanese (ja)
Other versions
JPS59155769A (en
Inventor
Tadashi Myasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP58030256A priority Critical patent/JPS59155769A/en
Publication of JPS59155769A publication Critical patent/JPS59155769A/en
Publication of JPH0542633B2 publication Critical patent/JPH0542633B2/ja
Granted legal-status Critical Current

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  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Tests Of Electronic Circuits (AREA)

Description

【発明の詳細な説明】 本発明は電子デバイス例えば液晶表示体の検査
装置に関するもので、特に液晶表示体の保持部
分、および液晶表示体の電極端子と外部電気信号
の入力端子の接点部についての発明である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an inspection device for an electronic device such as a liquid crystal display, and in particular for a holding part of a liquid crystal display and a contact part between an electrode terminal of a liquid crystal display and an input terminal for an external electrical signal. It is an invention.

近年電子デイバイスの高密度化が進み、液晶表
示体もその例にもれない。それに伴い液晶表示体
などは、外部電気信号の入力端子は当初数字表示
の場合は数十本程度であつたが、表示体内容がグ
ラフイツク化する傾向になりその数も数百本とい
う多数になつて来ている。従つて電極端子の占有
する巾も半導体チツプにおけるパツトと同等程度
で100μ前後となつている。
In recent years, the density of electronic devices has increased, and liquid crystal displays are no exception. Along with this, liquid crystal displays and the like initially had only a few dozen input terminals for external electrical signals in the case of numeric displays, but as the contents of the display tended to become graphical, the number increased to several hundred. It's coming. Therefore, the width occupied by the electrode terminal is approximately 100 μm, which is about the same as that of a pad in a semiconductor chip.

従来、電気端子が数十本程度の場合の液晶表示
体の検査装置について第1図において説明すると
1は偏光板が、上下に貼りつけられた液晶表示体
で液晶表示体はその外形形状の溝部を持つ治具板
4にセツトされる。治具板4には液晶表示体を駆
動させる電気信号を入力するための電極端子に対
応する位置にプローブピン3Bが押し圧によつて
上下する、プローブ3が設置される。
A conventional inspection device for a liquid crystal display when the number of electrical terminals is approximately several dozen is explained with reference to FIG. It is set on a jig plate 4 having a A probe 3 is installed on the jig plate 4 at a position corresponding to an electrode terminal for inputting an electric signal for driving a liquid crystal display, and a probe pin 3B moves up and down under pressure.

プローブ3のソケツト3Aは直径2mm、プロー
ブピンは直径1.5mm前後である。液晶表示体は、
その表示部が見える面積をくり抜かれた枠板5に
より押しつけられ、電極端子とプローブピン3B
が接触し、外部電気信号が液晶表示体内に入力で
きるようになる。
The socket 3A of the probe 3 has a diameter of 2 mm, and the probe pin has a diameter of about 1.5 mm. The liquid crystal display is
The area where the display part can be seen is pressed by the hollowed-out frame plate 5, and the electrode terminal and probe pin 3B
contacts, allowing external electrical signals to be input into the liquid crystal display.

このような直径2mmのプローブピンを使用して
の液晶表示体の検査は電極端子ピツチが5mm前後
が限度であつた。
Inspection of a liquid crystal display using such probe pins having a diameter of 2 mm is limited to an electrode terminal pitch of approximately 5 mm.

前述したように高密度化した液晶表示体の場合
電極端子数に対応したプローブ3の設置はプロー
ブピン1本の直径がその端子巾より大きいため面
積的にセツテイングできず、事実上高密度化した
液晶表示体ではプローブの利用により接触を得る
ことができないことが分つた。またマルチプレツ
クス駆動の液晶表示体は別として、特に薄膜トラ
ンジスタを高密度に集積されるアクテイブマトツ
クス方式の液晶表示体の場合、トランジスタ部分
のコンデンサ容量が配線の引き回し方により異な
るため検査特性としては前記液晶表示体と同一の
パターンで行い、インピーダンスを一致させるこ
とが有利と考えられた。
As mentioned above, in the case of a high-density liquid crystal display, the probes 3 corresponding to the number of electrode terminals cannot be set in terms of area because the diameter of each probe pin is larger than the terminal width, and this effectively increases the density. It has been found that it is not possible to obtain contact with a liquid crystal display by using a probe. Apart from multiplex-driven liquid crystal displays, especially in the case of active matrix type liquid crystal displays in which thin film transistors are integrated at high density, the capacitance of the transistor portion varies depending on how the wiring is routed, so the inspection characteristics are as follows. It was considered advantageous to use the same pattern as the liquid crystal display and match the impedance.

本発明はかかる欠点を除去するためになされた
ものである。本発明の一実施例を第2図、第3図
について説明すると、11は、高密度の液晶表示
体で、2枚のガラスセル中に液晶が充填され、一
方のガラス表面にこの液晶表示体を駆動させるた
めに必要な電気信号を入力させる電極端子18が
外周に多数配置されている。12は例えば銅箔な
どが固着された可撓性フイルムでその内端は電極
端子18に対応するように銅箔などをエツチング
して導電パターンが形成される。導電パターン1
3は弾性体15の形状になじむような凸部13が
成形される。その成形を容易にするために可撓性
フイルムは除去されている。15は弾性体でゴム
管などで治具板22には凹状の溝部16がつくら
れており弾性体15はこの溝内に設置される。こ
の弾性体15上に凸状の導電パターン13が設置
され、その凸部頂点と前述した電極端子18とが
接触することになる。可撓性フイルム上の導電パ
ターンの内端は電極端子と対応するため細かなピ
ツチ例えば0.2mmピツチとなつているが外端は、
外部電気信号入力端子14となるために、粗らい
ピツチ例えば2.5mmピツチ間隔となつている可撓
性フイルムは22に接着剤などで固着する。23
は液晶表示体11を保持、固定するための保持部
を示す。これは電気的絶縁材料で作られている。
またこれは図には示されていないがX方向19、
Y方向およびθ回転方向21に移動可能な機構と
連結されている。液晶表示体には製作時より合わ
せマーク17がパターニングされておりまた治具
板22上にもそれに対応する合わせマーク18が
対角上に作成されている。落射照明付の顕微鏡で
液晶表示体および、治具板上の合せマーク17,
18を拡大し一致するようにX,Y,θ方向に保
持部を移動し、一致後保持具は上下方向24に移
動する機構を具備するために電極端子18と導電
パターン13が接触するように下げる。このよう
にすると液晶表示体の全ての電極端子が導電パタ
ーンと接触することとなり外部の電気信号により
液晶表示体を駆動することが可能となる。
The present invention has been made to eliminate such drawbacks. An embodiment of the present invention will be described with reference to FIGS. 2 and 3. Reference numeral 11 denotes a high-density liquid crystal display, in which two glass cells are filled with liquid crystal, and the liquid crystal display is placed on the surface of one glass. A large number of electrode terminals 18 are arranged around the outer periphery through which electrical signals necessary for driving are inputted. Reference numeral 12 denotes a flexible film to which, for example, copper foil or the like is fixed, and a conductive pattern is formed on the inner end of the flexible film by etching the copper foil or the like so as to correspond to the electrode terminals 18 . Conductive pattern 1
3 is formed with a convex portion 13 that conforms to the shape of the elastic body 15. The flexible film has been removed to facilitate its molding. Reference numeral 15 denotes an elastic body such as a rubber tube, and a concave groove 16 is formed in the jig plate 22, and the elastic body 15 is installed in this groove. A convex conductive pattern 13 is placed on the elastic body 15, and the apex of the convex portion comes into contact with the aforementioned electrode terminal 18. The inner end of the conductive pattern on the flexible film corresponds to the electrode terminal, so it has a fine pitch of, for example, 0.2 mm, but the outer end is
In order to serve as external electrical signal input terminals 14, a flexible film having a rough pitch, for example, 2.5 mm, is fixed to 22 with adhesive or the like. 23
indicates a holding portion for holding and fixing the liquid crystal display 11. It is made of electrically insulating material.
Although this is not shown in the figure, the X direction 19,
It is connected to a mechanism movable in the Y direction and the θ rotation direction 21. Alignment marks 17 are patterned on the liquid crystal display from the time of manufacture, and corresponding alignment marks 18 are formed diagonally on the jig plate 22. Using a microscope with epi-illumination, check the liquid crystal display and the alignment mark 17 on the jig plate.
The holder is moved in the X, Y, and θ directions so as to enlarge and match 18, and after matching, the holder is provided with a mechanism to move in the vertical direction 24 so that the electrode terminal 18 and the conductive pattern 13 are in contact with each other. Lower it. In this way, all the electrode terminals of the liquid crystal display come into contact with the conductive pattern, making it possible to drive the liquid crystal display with an external electric signal.

以上の如く本実施例によれば、高密度化した液
晶表示体の電極端子に外部の駆動電気信号を入力
することができ、液晶表示体の性能検査を可能に
することができ、かつ液晶表示体の組みこまれる
機器と同一のパターン形状をもつ回路上のインピ
ーダンスを一致でき表示性能が組みこまれた機器
と等価であるため検査評価を容易にすることがで
きた。本発明の詳細な説明には、電子デイバイス
として液晶表示体で説明したが、他の外周部に電
極端子の配置されるデイバイス、例えば、エレク
トロクロミツクデイスプレイ、エレクトロルミネ
ツセンスパネル、P.D.P.などの平面なパネルデイ
スプレイの性能検査機にも本発明は適用可能であ
る。
As described above, according to this embodiment, it is possible to input an external driving electric signal to the electrode terminals of a high-density liquid crystal display, and it is possible to inspect the performance of the liquid crystal display. The impedance on the circuit, which has the same pattern shape as the device built into the body, can be matched, and the display performance is equivalent to that of the device built into the body, making inspection and evaluation easy. In the detailed explanation of the present invention, a liquid crystal display is described as an electronic device, but other flat devices such as an electrochromic display, an electroluminescent panel, a PDP, etc. in which electrode terminals are arranged on the outer periphery are also included. The present invention is also applicable to a performance inspection machine for a panel display.

上述の如く、本発明によれば、特に電極端子と
相対向するように導電パターンが形成された可撓
性フイルムを用いたので、電極端子の高密度化
に、充分対応できるものである。また、電極端子
と導電パターンとは面接触状態となるので、より
確実で安定した電気的接続が得られる。
As described above, according to the present invention, since a flexible film in which a conductive pattern is formed to face the electrode terminals is used, it is possible to sufficiently cope with an increase in the density of the electrode terminals. Further, since the electrode terminal and the conductive pattern are in surface contact, a more reliable and stable electrical connection can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のプローブによつて接触を得て、
液晶表示体の検査を行う検査機の液晶表示体の保
持部分の概略図を示す。第2図は、本発明におけ
る接触の方法を示す第1図に対応した概略図で、
第3図は、その構成を示した概略図である。 1……液晶表示体、2……偏光板、3……プロ
ーブ、3A……ソケツト、3B……プローブピ
ン、4……治具板、5……枠板、11……液晶表
示体、12……可撓性フイルム、13……内端の
導電パターン、14……外端の導電パターン、1
5……弾性体、16……溝部、17……合わせマ
ーク、18……電極端子、22……治具部、23
……保持部、25……合わせマーク。
FIG. 1 shows contact obtained by a conventional probe;
The schematic diagram of the holding part of the liquid crystal display of the inspection machine which inspects a liquid crystal display is shown. FIG. 2 is a schematic diagram corresponding to FIG. 1 showing the method of contact in the present invention,
FIG. 3 is a schematic diagram showing its configuration. DESCRIPTION OF SYMBOLS 1...Liquid crystal display, 2...Polarizing plate, 3...Probe, 3A...Socket, 3B...Probe pin, 4...Jig plate, 5...Frame plate, 11...Liquid crystal display, 12 ... Flexible film, 13 ... Conductive pattern at inner end, 14 ... Conductive pattern at outer end, 1
5...Elastic body, 16...Groove portion, 17...Alignment mark, 18...Electrode terminal, 22...Jig part, 23
...Retaining part, 25... Alignment mark.

Claims (1)

【特許請求の範囲】[Claims] 1 外周の少なくとも1辺端部に複数の電極端子
が配設された平板形パネルと、表面に導電パター
ンが形成され且つ前記電極端子と相対向する導電
パターン部のフイルム基材が切除されてなる可撓
性フイルムと、前記電極端子と相対向する前記導
電パターンの下側に配設された弾性体と、該弾性
材と前記可撓性フイルムとが配置された治具部材
と、前記平板形パネルを保持し且つ前記電極端子
と前記導電パターンとを押圧して接触させる保持
手段とを少なくとも具備したことを特徴とする電
子デイバイスの検査装置。
1 A flat panel with a plurality of electrode terminals arranged on at least one edge of the outer periphery, a conductive pattern formed on the surface, and a film base material of the conductive pattern portion facing the electrode terminal is cut away. a flexible film, an elastic body disposed below the conductive pattern facing the electrode terminal, a jig member on which the elastic material and the flexible film are disposed, and a jig member having the flat plate shape. An inspection apparatus for an electronic device, comprising at least a holding means for holding a panel and pressing the electrode terminal and the conductive pattern into contact with each other.
JP58030256A 1983-02-25 1983-02-25 Inspecting apparatus for electronic device Granted JPS59155769A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58030256A JPS59155769A (en) 1983-02-25 1983-02-25 Inspecting apparatus for electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58030256A JPS59155769A (en) 1983-02-25 1983-02-25 Inspecting apparatus for electronic device

Publications (2)

Publication Number Publication Date
JPS59155769A JPS59155769A (en) 1984-09-04
JPH0542633B2 true JPH0542633B2 (en) 1993-06-29

Family

ID=12298622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58030256A Granted JPS59155769A (en) 1983-02-25 1983-02-25 Inspecting apparatus for electronic device

Country Status (1)

Country Link
JP (1) JPS59155769A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233774A (en) * 1986-04-03 1987-10-14 Matsushita Electric Ind Co Ltd Inspecting method for circuit board
JPS62233775A (en) * 1986-04-03 1987-10-14 Matsushita Electric Ind Co Ltd Inspecting method for circuit board
JP2517243B2 (en) * 1986-09-11 1996-07-24 東京エレクトロン株式会社 Probe device
JPH0810234B2 (en) * 1987-02-24 1996-01-31 東京エレクトロン株式会社 Inspection equipment
JPH0785196B2 (en) * 1987-09-14 1995-09-13 東京エレクトロン株式会社 Probe device
JPH0719823B2 (en) * 1988-03-28 1995-03-06 東京エレクトロン株式会社 Liquid crystal display probe device
JPH0264473A (en) * 1988-08-31 1990-03-05 Matsushita Electric Ind Co Ltd Liquid crystal display panel detector
DE9314259U1 (en) * 1992-09-29 1994-02-10 Tektronix Inc Probe adapter for electronic components

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367878A (en) * 1976-11-29 1978-06-16 Fujitsu Ltd Device for inspecting electrode

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56112680U (en) * 1980-01-29 1981-08-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5367878A (en) * 1976-11-29 1978-06-16 Fujitsu Ltd Device for inspecting electrode

Also Published As

Publication number Publication date
JPS59155769A (en) 1984-09-04

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