JPH0542144B2 - - Google Patents
Info
- Publication number
- JPH0542144B2 JPH0542144B2 JP61206154A JP20615486A JPH0542144B2 JP H0542144 B2 JPH0542144 B2 JP H0542144B2 JP 61206154 A JP61206154 A JP 61206154A JP 20615486 A JP20615486 A JP 20615486A JP H0542144 B2 JPH0542144 B2 JP H0542144B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- voltage side
- side electrode
- electrodes
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 239000010949 copper Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000003989 dielectric material Substances 0.000 claims description 10
- 230000000694 effects Effects 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、一対の電極間で無声放電を行ない
放電空間のレーザ媒質を励起してレーザ光を出力
する無声放電式ガスレーザ装置（以下、単にガス
レーザ装置と称す）、特に電極の改良に関するも
のである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a silent discharge gas laser device (hereinafter simply referred to as "silent discharge gas laser device") that generates a silent discharge between a pair of electrodes to excite a laser medium in a discharge space to output laser light. (referred to as a gas laser device), and particularly relates to improvements in electrodes.
第２図は、レーザ媒質のガス流方向、放電方
向、およびレーザ光軸方向が互いに直交する三軸
直交型の従来の無声放電式ガスレーザ装置を示す
もので、図中、１は所定の放電空間２を有して対
向する一対の電極で、両端閉塞の金属管３の表面
に誘電体４を被覆して形成され、かつその両端近
傍位置には、金属管３内に純水を流して電極１を
冷却するための金属製の冷却水入口管５および冷
却水出口管６がそれぞれ設けられている。７は上
記各冷却水入口管５を介して両電極１間に交流高
電圧を印加する交流電源である。
Fig. 2 shows a conventional silent discharge type gas laser device of a three-axis orthogonal type in which the gas flow direction of the laser medium, the discharge direction, and the laser optical axis direction are orthogonal to each other. A pair of electrodes 2 facing each other are formed by coating the surface of a metal tube 3 with both ends closed with a dielectric material 4, and electrodes are formed near both ends by flowing pure water into the metal tube 3. A cooling water inlet pipe 5 and a cooling water outlet pipe 6 made of metal are respectively provided for cooling the cooling water. Reference numeral 7 denotes an AC power source that applies an AC high voltage between both electrodes 1 through each of the cooling water inlet pipes 5.
従来のガスレーザ装置は上記のように構成され
交流電源７により両電極１間に交流高電圧を印加
すると、両電極間１で無声放電が行なわれ、放電
空間２のレーザ媒質が励起されレーザ光が出力さ
れる。 A conventional gas laser device is constructed as described above, and when a high AC voltage is applied between the two electrodes 1 by the AC power supply 7, a silent discharge occurs between the two electrodes 1, the laser medium in the discharge space 2 is excited, and the laser beam is emitted. Output.
上記のような従来のガスレーザ装置では、両電
極１の表面に被覆された誘電体４として硼珪酸バ
リウムガラスを用いているが、その耐放電性が必
ずしも充分ではないという問題があつた。これは
従来交流電源７を用いているため、交流高電圧に
よつて誘電体４に電子が衝突し、還元反応を起こ
すためと考えられる。
In the conventional gas laser device as described above, barium borosilicate glass is used as the dielectric material 4 coated on the surfaces of both electrodes 1, but there is a problem in that its discharge resistance is not necessarily sufficient. This is thought to be because, since the AC power source 7 is conventionally used, electrons collide with the dielectric 4 due to the AC high voltage, causing a reduction reaction.
この発明は、かかる問題点を解決するためにな
されたもので、電極の放電劣化を大幅に抑制して
信頼性を向上させることができるガスレーザ装置
を得ることを目的とする。 The present invention was made in order to solve such problems, and an object of the present invention is to obtain a gas laser device that can significantly suppress discharge deterioration of electrodes and improve reliability.
この発明に係るガスレーザ装置は、対向する一
対の電極のうちの一方を高電圧側電極とするとと
もに、他方を低電圧側電極とし、かつ上記高電圧
側電極を、少なくとも放電面が銅製をなす銅金属
電極で形成するとともに、上記低電圧側電極を少
なくとも放電面に誘電体が配された誘電体電極で
形成するようにしたものである。
In the gas laser device according to the present invention, one of the pair of opposing electrodes is used as a high voltage side electrode, and the other is used as a low voltage side electrode, and the high voltage side electrode is made of copper having at least a discharge surface made of copper. The low voltage electrode is formed of a metal electrode, and the low voltage side electrode is formed of a dielectric electrode having a dielectric material disposed on at least the discharge surface.
この発明においては、対向する一対の電極のう
ちの一方を高電圧側電極とするとともに、他方を
低電圧側電極とし、かつ高電圧側電極を銅金属電
極、低電圧側電極を誘電体電極としているので、
電子の流れは、誘電体電極から電子の衝突によつ
ても著しい変化がない銅金属電極の方向となる。
また、誘電体についても、酸化性の条件となるた
め放電劣化が著しく抑制される。
In this invention, one of the pair of opposing electrodes is used as a high-voltage side electrode, and the other is used as a low-voltage side electrode, and the high-voltage side electrode is a copper metal electrode and the low-voltage side electrode is a dielectric electrode. Because there are
The flow of electrons is from the dielectric electrode to the copper metal electrode, which is not significantly changed by electron bombardment.
Further, since the dielectric is subject to oxidizing conditions, discharge deterioration is significantly suppressed.
第１図はこの発明の一実施例を示すもので、図
中、第２図と同一符号は同一又は相当部分を示
す。８は高電圧側電極で、両端閉塞の銅パイプか
らなる銅金属電極で形成されている。９は低電圧
側電極で、両端閉塞の金属管１０の表面を硼珪酸
バリウムガラスからなる誘電体１１で被覆した誘
電体電極で形成され、誘電体１１の膜厚は、上記
従来の誘電体４の膜厚に比較して２倍の厚さとな
つている。１２は上記両電極８，９の間に全波整
流高電圧を印加する全波整流電源である。
FIG. 1 shows an embodiment of the present invention, and in the figure, the same reference numerals as in FIG. 2 indicate the same or corresponding parts. Reference numeral 8 denotes a high voltage side electrode, which is formed of a copper metal electrode made of a copper pipe with both ends closed. Reference numeral 9 designates a low voltage side electrode, which is formed by a dielectric electrode in which the surface of a metal tube 10 with both ends closed is coated with a dielectric material 11 made of barium borosilicate glass, and the film thickness of the dielectric material 11 is equal to that of the conventional dielectric material 4 described above. It is twice as thick as the film thickness of . Reference numeral 12 denotes a full-wave rectified power source that applies a full-wave rectified high voltage between the electrodes 8 and 9.
上記のように構成されたガスレーザ装置におい
ては、全波整流電源１２により両電極８，９間に
全波整流高電圧が印加され、これにより両電極
８，９間で無声放電が行なわれ、放電空間２のレ
ーザ媒質が励起されてレーザ光が出力される。 In the gas laser device configured as described above, a full-wave rectified high voltage is applied between the electrodes 8 and 9 by the full-wave rectified power supply 12, and a silent discharge is thereby generated between the electrodes 8 and 9. The laser medium in space 2 is excited and laser light is output.
ところでこの実施例の場合、全波整流高電圧が
両電極８，９間に印加されるため、電子は常に誘
電体電極から銅金属電極の方向に流れる。ここで
銅金属は、電子が衝突しても著しい変化はなく、
また誘電体１１は、酸化性の条件、即ち、電子が
飛び出して、結果的に−イオンの状態となるため
放電劣化が大幅に抑制される。しかも誘電体１１
は、従来の電極１の誘電体４に比較して２倍の膜
厚となつているので、寿命を大幅に延ばすことが
可能となる。このため、信頼性の高いガスレーザ
装置が得られる。 In this embodiment, since a full-wave rectified high voltage is applied between both electrodes 8 and 9, electrons always flow from the dielectric electrode to the copper metal electrode. Here, copper metal does not change significantly even when electrons collide with it,
Further, the dielectric 11 is subject to oxidizing conditions, that is, electrons are ejected, resulting in a negative ion state, so that discharge deterioration is greatly suppressed. Moreover, the dielectric material 11
Since the dielectric material 4 of the conventional electrode 1 is twice as thick as the dielectric material 4 of the conventional electrode 1, the life span can be significantly extended. Therefore, a highly reliable gas laser device can be obtained.
なお上記実施例では、高電圧側電極８を銅パイ
プで形成するものを示したが、ニツケルパイプあ
るいはモリブデンパイプの表面に銅材を処理した
もの等、放電面が銅製であれば同様に用いること
ができ、同様の効果が期待できる。 In the above embodiment, the high-voltage side electrode 8 is formed of a copper pipe, but it can be similarly used as long as the discharge surface is made of copper, such as a nickel pipe or a molybdenum pipe whose surface is treated with a copper material. can be done, and similar effects can be expected.
また上記実施例では、両電極８，９に高電圧を
印加する電源として、全波整流電源１２を用いる
場合を示したが、半波整流電源あるいは直流電源
を用いるようにしてもよい。 Furthermore, in the embodiment described above, a full-wave rectified power source 12 is used as the power source for applying high voltage to both electrodes 8 and 9, but a half-wave rectified power source or a DC power source may be used.
また上記実施例では誘電体１１の膜厚を、従来
の２倍にするものを示したが、従来のものと同一
膜厚であつても所期の効果は期待できる。 Further, in the above embodiment, the thickness of the dielectric 11 is twice that of the conventional one, but the desired effect can be expected even if the thickness is the same as that of the conventional one.
この発明は以上説明したとおり、対向する一対
の電極のうちの一方を高電圧側電極とするととも
に、他方を低電圧側電極とし、かつ高電圧側電極
を銅金属電極、低電圧側電極を誘電体電極として
いるので、電極の放電劣化を大幅に抑制して信頼
性の向上を図ることができる等の効果がある。
As explained above, in this invention, one of a pair of opposing electrodes is used as a high-voltage side electrode, and the other is used as a low-voltage side electrode, and the high-voltage side electrode is a copper metal electrode and the low-voltage side electrode is a dielectric electrode. Since the electrode is a body electrode, there are effects such as being able to significantly suppress discharge deterioration of the electrode and improve reliability.
第１図はこの発明の一実施例を示すガスレーザ
装置の要部断面図、第２図は従来のガスレーザ装
置を示す第１図相当図である。
２……放電空間、８……高電圧側電極、９……
低電圧側電極、１０……金属管、１１……誘電
体、１２……全波整流電源、なお各図中、同一符
号は同一又は相当部分を示すものとする。
FIG. 1 is a sectional view of a main part of a gas laser device showing an embodiment of the present invention, and FIG. 2 is a view corresponding to FIG. 1 showing a conventional gas laser device. 2...Discharge space, 8...High voltage side electrode, 9...
Low voltage side electrode, 10...Metal tube, 11...Dielectric, 12...Full-wave rectified power source. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
直流高電圧を印加して無声放電を行ない、放電空
間のレーザ媒質を励起してレーザ光を出力する無
声放電式ガスレーザ装置において、 前記一対の電極のうちの一方を高電圧側電極、
他方を低電圧側電極とし、かつ、前記高電圧側電
極は、少なくとも放電面が銅製をなす銅金属電極
で形成し、低電圧側電極は、少なくとも放電面に
厚い膜厚の誘電体を有する誘電体電極で形成した
ことを特徴とする無声放電式ガスレーザ装置。[Claims] 1. A silent discharge gas laser that applies a high DC voltage obtained by rectifying alternating current between a pair of opposing electrodes to generate silent discharge, excites a laser medium in a discharge space, and outputs laser light. In the device, one of the pair of electrodes is a high voltage side electrode,
The other electrode is a low voltage side electrode, and the high voltage side electrode is formed of a copper metal electrode having at least a discharge surface made of copper, and the low voltage side electrode is formed of a dielectric having a thick dielectric material on at least the discharge surface. A silent discharge gas laser device characterized by being formed with a body electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20615486A JPS6362284A (en) | 1986-09-02 | 1986-09-02 | Silent discharge type gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20615486A JPS6362284A (en) | 1986-09-02 | 1986-09-02 | Silent discharge type gas laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6362284A JPS6362284A (en) | 1988-03-18 |
| JPH0542144B2 true JPH0542144B2 (en) | 1993-06-25 |
Family
ID=16518691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20615486A Granted JPS6362284A (en) | 1986-09-02 | 1986-09-02 | Silent discharge type gas laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6362284A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07309328A (en) * | 1994-05-17 | 1995-11-28 | Masao Kusano | Housing box |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56131986A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Gas laser device |
| JPS56134789A (en) * | 1980-03-25 | 1981-10-21 | Mitsubishi Electric Corp | Lateral exciting type laser oscillator |
-
1986
- 1986-09-02 JP JP20615486A patent/JPS6362284A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56131986A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Gas laser device |
| JPS56134789A (en) * | 1980-03-25 | 1981-10-21 | Mitsubishi Electric Corp | Lateral exciting type laser oscillator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07309328A (en) * | 1994-05-17 | 1995-11-28 | Masao Kusano | Housing box |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6362284A (en) | 1988-03-18 |
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