JPH0538676A - Method and device for dressing cutter of slicing device - Google Patents

Abstract

PURPOSE:To make dressing in good performance while the consumption of a dressing stone is greatly reduced. CONSTITUTION:Using a cutting edge 11, a unitary dressing cycle consisting of cutting-in, gear shifting, and draining-out is repeated in the same position of a dressing stone ST in the axial direction, and the revolving speed of a blade 10 and the amount of cutting edge displacement are increased or decreased in steps. Only when the repetitive number has attained the same position set number, indexing of the stone ST is conducted, and the blade revolving speed is returned to the initial speed, and dressing is performed with a new position of the stone ST.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention dresses a cutting blade in a slicing device for cutting a work such as a semiconductor ingot by a cutting blade provided on the inner circumference of a rotating blade to cut a thin piece such as a semiconductor wafer. The present invention relates to a method and an apparatus.

[0002]

2. Description of the Related Art Conventionally, as a slicing device as described above, a blade having a circular cutting edge is provided on the inner circumference, one end of the work is exposed to the inside of the slicing device, and the blade is rotated with respect to the work. It is known that a blade is cut out from the work by moving the blade relatively in the radial direction. In such an apparatus, as the sharpness of the cutting edge becomes dull by repeating slicing, warpage occurs in the thin piece due to poor slicing, and there is a disadvantage that the thin piece is damaged by falling to the blade side. It is known (Japanese Patent Application Laid-Open No. 1-184103). Therefore, it is necessary to dress the cutting edge at an appropriate timing in order to keep the cutting edge in good condition and maintain the production of excellent products.

FIG. 7 shows a sectional shape of a general cutting edge 11. The cutting edge 11 is attached to the inner peripheral edge of the doughnut-shaped blade 10, and the inner peripheral cutting surface 11a.
And has both inner and outer cut surfaces 11b and 11c. Here, the thin sliced pieces are warped because the inner cut surface 1
It is considered that there is a difference in sharpness between 1b and the outer cut surface 11c. Therefore, in order to regulate the warp of the thin piece, not only the dress of the inner peripheral cut surface 11a but also the inner side depending on the direction of the warp. Cut surface 11b or outer cut surface 11
It is necessary to focus on either one of c.

Therefore, conventionally, the cutting edge 11 is dressed by slicing a dressing stone ST as shown in FIG. 8 with the cutting edge 11. As a specific procedure, first, while rotating the blade 10 at a preset speed, by relatively moving the stone ST in the direction of the arrow D1 with respect to the blade 10,
The stone ST is cut to a position before the stone ST is completely cut, and thereby the inner peripheral cutting surface 11a of the cutting blade 11 is dressed. This operation causes stone ST
The groove 13 will be formed in the groove. Next, blade 1
By increasing or decreasing the rotational speed of 0 to increase or decrease the centrifugal force acting on the blade 10, the bending amount of the blade 10 is changed, and the cutting edge 11 is slightly moved in the axial direction of the blade 10 (direction of arrow D2). Can only be displaced. As a result, a desired cut surface of the cut surfaces 11b and 11c on both sides can be pressed against the inner peripheral surface of the groove 13, and in this state, the stone ST is relatively moved in a direction away from the stone ST (direction of arrow D3). The cut surface will be dressed.

However, the amount by which the cut surface can be dressed by such one reciprocating operation (unit dressing operation) is very small.
Therefore, conventionally, after the dressing operation is completed once, the rotational speed of the blade 10 is returned to the original value and the stone ST
The desired dressing amount is obtained by repeating the operation of indexing by a preset unit pitch (arrow D4 direction) and performing the dressing operation again at a position different from the above.

[0006]

According to the above method, if it is necessary to perform the unit dressing operation M times, for example, in order to obtain a desired dressing amount, the stone ST is performed M times.
Have to figure out. In other words, the more dresses you need, the more you need to index Stone ST,
Stone ST consumption is large. When the stone ST is consumed at such a fast pace as described above, it is necessary to frequently replace the stone ST by that amount, and a series of slicing work must be interrupted each time such replacement work is performed. There is an inconvenience that the work efficiency is lowered and the cost is increased.

Although the dressing amount can be increased by increasing the amount of changing the blade rotation speed in one unit dressing operation, the cutting edge 11 in the groove 13 per such unit dressing operation. There is a limit to the amount that can be displaced, and if the required dress amount is large, the number of unit dress operations must be increased.

In view of the above circumstances, the present invention provides a method and apparatus for dressing a cutting edge in a slicing device capable of dressing a cutting edge as well as a conventional one while drastically reducing stone consumption. The purpose is to provide.

[0009]

DISCLOSURE OF THE INVENTION The present invention is a slicing apparatus having a circular cutting edge on the inner circumference and a blade that is driven to rotate during work slicing, and a dressing stone is provided inside the blade. No, by notching the stone to the position before the stone is completely cut by moving the stone in the radial direction relative to the blade while rotating the blade at a preset speed, and the notch The blade rotation speed is increased by repeating the unit dressing operation consisting of a gear shifting operation for increasing / decreasing the blade rotation speed after the operation and an extracting operation for relatively moving the stone in the direction away from the blade after the gear shifting is completed at the same position in the stone a plurality of times. To increase or decrease (claim 1).

Further, according to the present invention, after repeating the unit dressing operation at the same position on the stone a predetermined number of times, the blade rotation speed is returned to the initial speed, and the unit dressing operation is repeated on the stone at a position different from the above position. (Claim 2).

The present invention also provides, as an apparatus for carrying out the above method, stone indexing means for performing an indexing operation for relatively moving the stone relative to the blade in the axial direction thereof, and the inside of the blade as described above. Face the stone, and a cutting operation to cut the stone to a position before completely cutting the stone by moving the blade at a preset speed while relatively moving the blade in the radial direction of the blade, Dressing operation control means for repeatedly executing a unit dressing operation consisting of a gear shifting operation for increasing or decreasing the blade rotation speed by a certain amount after the cutting operation and an extracting operation for relatively moving the stone in the direction of separating from the blade after the gear shifting is completed, The number of times the unit dressing operation is repeated is counted, and the number of times is set in advance. When the number of times the same position is set is reached, the blade rotation speed is returned to the initial speed, and the same position reciprocating number counting means for performing the stone indexing operation and the number of times the unit dressing operation is repeated are counted, and the total is calculated. And a total reciprocating number counting means for stopping the dressing operation when the number of times reaches the desired number of dresses (claim 3).

[0012]

According to the method of claim 1, each time the unit dressing operation including the cutting operation, the speed changing operation, and the extracting operation is repeated at the same position in the stone axis direction,
The blade rotation speed changes step by step by a certain amount, the displacement of the cutting edge also changes stepwise at the same position, and the inner cutting surface or the outer cutting surface of the cutting edge is dressed by a predetermined amount as in the conventional case. .. Moreover, since this unit dressing operation is repeated at the same position, the stone consumption is greatly reduced as compared with the conventional method, that is, the method of calculating the stone each time the dressing operation is performed.

In this method of the present invention, there is a limit to the amount by which the cutting edge is displaced in proportion to the amount of increase or decrease in the blade rotation speed, and therefore the number of times the unit dressing operation is performed at the same position is limited. When the required total number of dresses exceeds the number of dresses that can be executed at the same position, the blade rotation speed is set to the initial speed when the dressing operation is performed a predetermined number of times at the same position as in the method according to claim 2. And the stone is indexed, and the unit dressing operation is repeated at a new position on the stone.

Specifically, in the apparatus according to the third aspect, the unit dressing frequency (that is, the number of reciprocating stones with respect to the blade) executed by the control of the dressing operation controlling means is the same position reciprocating frequency counting means and total reciprocating frequency counting means. The blade rotation speed is restored and the stone is indexed every time the number of times counted by the same position reciprocating number counting means reaches the number of times set at the same position. Then, the dressing operation is stopped when the number of times counted by the total number of times counting means reaches the number of dressing according to the required dressing amount, whereby the cutting edge is dressed by a desired amount.

[0015]

An embodiment of the present invention will be described with reference to the drawings.

The slicing device shown in FIGS. 2 and 3 comprises a base 1, on which a guide rail 2 is installed, along which a slide table 3 is slidably supported. ing.

A headstock 4 is installed on the base 1 at a position facing the slide table 3. A main bearing 4a is provided above the headstock 4, and the main shaft 6 is rotatably supported by the main bearing 4a.
A spindle drive motor 8 is attached to the spindle 6 via a belt transmission mechanism.
The output shafts of are connected. A tension disk 9 is fixed to the tip of the spindle 6, and the tension disk 9
Is rotatably driven by a rotation drive means 5 including the main shaft 6, the belt transmission mechanism 7, and the main shaft drive motor 8.

A blade 10 made of a donut-shaped thin plate is mounted on the peripheral edge of the tension disk 9, and a cutting edge 11 made of diamond particles or the like is fixed to the inner peripheral edge of the blade 10. The rotation speed N of the tension disk 9 changes during rotation, so that the blade 10 and the cutting edge 11 move in the axial direction of the main shaft 6 (that is, the rotation axis direction of the blade 10) in accordance with the rotation speed N. It is designed to be displaced. That is, when the tension disk 9 rotates, a centrifugal force proportional to the rotation speed N acts on the peripheral edge portion of the tension disk 9, so that the rotation speed N causes the tension disk 9 to move to the blade 10.
The magnitude and direction of the displacement in the direction of the rotation axis given to the are determined.

A holding member 15 and index feeding means 18 are provided on the slide table 3, and the holding member 15 is provided.
Is a work 30 made of a silicon semiconductor ingot or the like.
Is held. The indexing feed means 18 has a ball screw 16 and a holding member drive motor 17 that rotationally drives the ball screw 16. The indexing feed means 18 causes the holding member 15 to slide in the axial direction of the spindle 6. When driven, the one end of the work 30 moves from the surface 10a side (work holding side) of the blade 10 to the blade 1
It is possible to project a minute amount to the back surface 10b side through the 0 center hole.

A dressing device 19 for dressing the cutting blade 11 is provided on the slide table 3. The dressing device 19 holds a dressing stone ST, and the tip end of the stone ST is arranged at a position facing the inside of the blade 10. The specific structure thereof will be described in detail later.

On the base 1 is provided a cutting feed means 14 having a ball screw 12 and a cutting feed motor 13 for rotating the ball screw 12, and the cutting feed means 14 causes the slide table to move. The whole 3 is slidably driven along the guide rail 2 in a direction orthogonal to the main shaft 6. By sliding this slide table 3 from the front side to the back side in FIG.
0 or a stone ST to be described later is configured to move relative to the blade 10 in the radial direction (direction of arrow A in FIG. 3) (that is, cut and feed). Therefore, when the blade 10 is rotated and the cutting feed is performed with one end of the work 30 facing the inside of the blade 10, one end of the work 30 is sliced by the cutting blade 11 and the wafer (thin piece) is cut. Is cut out. Further, the cutting edge 11 is dressed by exposing the stone ST instead of the blade 10.

A slice base 31 made of carbon or the like is fixed to an outer peripheral portion of the work 30 on the downstream side in the cutting feed direction, that is, a portion of the work 30 that is finally cut by the cutting blade 11. By fixing the slice base 31, it is possible to prevent the cutting resistance acting on the blade 10 from being suddenly released at the end of the cutting of the work 30 and to prevent the final cut portion of the work 30 from being chipped.

A deflection amount detecting sensor 24 for detecting the amount of deflection is provided near the blade 10. The blade deflection amount detection sensor 24 is disposed on the locus C at a position facing the back surface 10b of the blade 10, and more specifically, is close to one end surface of the work 30 when the work 30 is cut. The blade 10 is disposed at a position near the central portion P ₃ of the workpiece cutting portion of the blade 10.

This slicing device has a drive control unit 40 as shown in FIG.

In the figure, the reference displacement storage device 41 is
By the drive of the cutting feed motor 13, the work 30 moves to a position immediately before the start of cutting (a position slightly left of the position shown by the two-dot chain line on the left side in FIG. 3; The amount of deflection of the blade 10 detected by the blade deflection amount detection sensor 24 is stored as the reference amount of deflection Sa. The displacement comparator 42 takes in the current deflection amount Sb detected by the blade deflection amount detection sensor 24 every predetermined sampling period Δt in addition to the reference deflection amount Sa, and subtracts the former value from the latter value from the reference state. The bending amount S is calculated and output. The calculated deflection amount S is input to the rotation speed calculation device 48, the cutting feed speed calculation device 51, and the dress timing determination device 61.

When receiving a drive command signal from a cutting feed motor control device 52, which will be described later, the rotation speed calculation device 48 detects the current rotation speed N of the tension disk 9 and the displacement comparator 4.
Based on the deflection amount S detected in 2, the deflection amount S is set to 0.
The target rotational speed Na of the tension disk 9 required for the calculation is calculated, and a signal corresponding to this calculated value is output to the spindle drive motor control device 49. The spindle drive motor control device (constituting dressing operation control means) 49, when receiving a signal from the rotation speed calculation device 48, sets the target rotation speed Na to
Otherwise, the drive control of the spindle drive motor 8 is performed so that the rotational speed N of the tension disk 9 is adjusted with the basic rotational speed N ₀ set and stored as a target, and in the state where the dressing mode as described later is entered. The drive control of the cutting feed motor 13 is performed so that the rotation speed required for the dress can be obtained.

The cutting feed speed calculation device 51 receives the drive command signal from the cutting feed motor control device 52, and the target cutting feed speed Va required for reducing the deflection amount S detected by the displacement comparator 42. Is calculated and a signal corresponding to the calculation result is output to the cutting feed motor control device 52.

The cutting feed motor control device (which constitutes the dressing operation control means) 52 has the target cutting feed speed Va when the signal is received from the speed calculation device 51, and otherwise the basic cutting feed speed V ₀ . The cutting feed motor 13 is controlled so that Specifically, the cutting feed position (position in the cutting feed direction) of the work 30 is detected based on the pulse signal detected from the cutting feed motor 13, and it is determined that the detected cutting feed position is within the predetermined range L. When it is determined that the operation command signal is out of the range L, a stop command signal is output to the rotation speed calculation device 48, the cutting feed speed calculation device 51, and the dress timing determination device 61, respectively.

Further, the cutting feed motor control device 52
Controls the cutting feed motor 13 so as to perform a feed operation required for the dress when the dress mode described later is entered.

The dress timing determination device 61 determines, when it receives the drive command signal, whether or not it is time to dress based on the value S. When the dress timing is determined, dress control is performed. A command signal is output to the device 62, the working mode of the device is switched to the dressing mode at a predetermined time, and the dressing operation is started. The dressing control device (dressing operation control means) 62 controls the dressing device 19 to perform a necessary dressing operation at the time of receiving the command signal, that is, at the time of entering the dressing mode.

FIG. 5 shows the configuration of the dressing device 19.

The dressing device 19 includes a stone indexing cylinder 80 and a stone advancing / retreating cylinder 81. The cylinder body of the stone indexing cylinder 80 is connected to a rod 85 of the stone advancing / retreating cylinder 81. By extending, the entire stone indexing cylinder 80 advances to the dressing position, that is, the position where the end of the stone ST faces the inside of the blade 10, and the stone advancing / retreating cylinder 81 retracts, whereby the stone indexing cylinder 81 is retracted. The whole 80 is retracted to a retracted position, that is, a position where it escapes backward (to the right in FIG. 2) from the blade 10. The rod 82 of the stone indexing cylinder 80 is urged toward the piston head side by the compression spring 83, and the tip of the rod 82 is provided with the chuck 84 for gripping the end portion of the stone ST. By gradually expanding 80, the stone ST is indexed by one pitch (see the arrow D4 in FIG. 8).

On the piston head side of the stone indexing cylinder 80, a flow rate adjusting valve 86 with a check valve, a 2-position direction switching valve 88, a pressure reducing valve 89, a filter 90, and an opening / closing valve 91.
The stone indexing cylinder 80 is connected to the air pressure pump 92 via the solenoid valve 88a of the directional control valve 88, and the stone indexing cylinder 80 contracts when a drive signal is not input to the solenoid 88a.
Is driven for extension.

The rod side of the stone advancing / retreating cylinder 81 is connected to a common 3-position directional control valve 93 via a check valve-equipped flow rate control valve 87a, and the head side is connected to a common 3-position directional control valve 93. The position / direction switching valve 93 is connected to the pneumatic pump 92 via the pressure reducing valve 89, the filter 90, and the opening / closing valve 91 described above, and a drive signal is input to the solenoid 93a of the stone advancing / retreating cylinder 81 to cause the stone advancing / retreating cylinder. 81 is expanded and driven, and the drive signal is input to the solenoid 93b, whereby the stone advancing / retreating cylinder 81 is contracted and driven, and the stone advancing / retreating cylinder 81 is fixed in a state in which no drive signal is input to both solenoids 93a and 93b.

Then, when the machine mode is switched to the dressing mode at an appropriate timing during the slicing process of the work 30 by the blade 10, the drive control section 40 extends the stone advancing / retreating cylinder 81 to blade the stone ST. The dressing device 19, the cutting feed motor 13, and the spindle drive motor 9 are arranged to face the inside of the unit 10 and to perform a unit dressing operation including the following three operations.

(A) Cutting operation The direction in which the blade 10 approaches the stone ST while rotating the tension disk 9 and the blade 10 at a predetermined rotational speed N (initial rotational speed N _{0 in the} first operation) (direction of arrow D1 in FIG. 8). ), The stone ST is cut to a position before the stone ST is completely cut, and as a result, the inner peripheral cutting surface 1 of the cutting edge 11 as shown in FIG.
Dress 1a. At this time, the groove 13 is on the stone ST
Will be formed.

(B) Gear shifting operation The rotational speed N of the blade 10 is increased or decreased by a predetermined amount ΔN to increase or decrease the centrifugal force acting on the blade 10.
As a result, the bending amount of the blade 10 changes and the cutting edge 11
Is displaced by a small amount in the axial direction of the blade 10 (direction of arrow D2 in FIG. 8), so that the cut surface 1 on both sides shown in FIG.
A desired cut surface of 1b and 11c is pressed against the inner peripheral surface of the groove 13.

(C) Extraction operation The cutting surface 11b (or 11c) is dressed by moving the stone ST relative to the blade 10 rotating at the above-mentioned rotational speed in the direction (arrow D3 direction) away from the blade ST.

Further, this apparatus is provided with a dressing number control unit 70 as shown in FIG. 1, and this dressing number control unit 70 performs repetitive control of the dressing operation executed by the drive control unit 40. It is supposed to be done.

In FIG. 1, the round trip number calculating device 72 is
When the dressing mode is entered, a signal relating to the removal amount of the stone ST required for dressing the cutting edge 11 is fetched, and the number of times the unit dressing operation has to be performed in order to obtain this required removal amount, that is, the stone ST for the blade 10. The required total number of round trips MA is calculated. For example, when the required removal amount is 30 μm and the removal amount per unit dressing operation is 5 μm, the required total number of round trips MA = 6 is calculated and output.

The user may input a desired numerical value into the reciprocating number calculating device 72 through an operating portion or the like provided at a proper position of the slicing device, or the blade bending amount detecting sensor 42 may detect the desired numerical value. The drive control unit 40 may calculate the required dressing amount based on the amount of bending and automatically input the required dressing amount to the reciprocating number calculating device 72.

The total reciprocating number counting means 74 counts the number of times the unit dressing operation is executed by the drive control section 40, and stops the dressing operation when this number reaches the required total reciprocating number MA. is there. In other words, the unit dressing operation is repeatedly continued under the control of the drive control unit 40 unless the stop command signal is output from the total reciprocating number counting means 74.

The same-position reciprocating number counting means 76 counts the number of times the unit dressing operation is executed, and each time the number reaches the preset number of same-position setting times m ₀ , the drive controller 40 controls the blade 10 to move. The drive speed N is returned to the initial speed N _0, and the drive control unit 40 is operated.
The stone indexing cylinder 80 is extended by one pitch to index the stone ST. In other words, unless the command signal is output from the same position reciprocating number counting means 76 to the drive control unit 40, the blade 1
The dressing operation is repeated at the same position of the stone ST while the rotational speed N of 0 is increased or decreased by a predetermined amount ΔN for each operation.

Here, the same position setting frequency m ₀ is set with reference to a limit value at which the blade rotational speed N can be increased or decreased from the initial rotational speed N ₀ . That is, the initial rotation speed N ₀
When the unit dressing operation is repeated from then on, the number of rotations is increased or decreased by ΔN by that number of times, and the cutting edge 11 is gradually displaced in the blade axial direction due to the increase or decrease of the centrifugal force acting on the blade 10. However, a limit number of times such that the cutting edge 11 is not displaced in proportion to this increase or decrease of the rotation speed N is set as the same position setting count m ₀ .

Next, the control operation performed by the drive control section 40 and the dress number control section 70 when the dress mode is entered will be described with reference to the flowchart of FIG.

First, in performing the dressing operation, dressing conditions, specifically, a cutting surface (inner cutting surface 1) for which dressing is required.
1b or outer cut surface 11c) and required dress amount are set (step # 1). Based on this condition, the spindle drive motor control device 49 determines whether to speed up or decelerate during the shift operation, and the reciprocation number calculation device 72 calculates the necessary total reciprocation number MA corresponding to the required removal amount. ..

In this control example, the dress end time is not directly judged from the required total round trip number MA, but first, from the required total round trip number MA, the required stone indexing number M ₀ and the final indexing position are determined. Required number of round trips for m _e (<
m ₀ ) is calculated, and the end time is determined by counting these times. That is, if the number of times the unit dressing operation can be repeated at the same position without indexing the stone ST (that is, the number of times of setting the same position) is m ₀ , this number of times of setting the same position m ₀ is multiplied by the number of times of stone indexing, Since the total number of round trips is calculated by adding the number of round trips at the final indexing position to the total number of round trips, the required total number of round trips MA is expressed by the following formula MA = m ₀ M ₀ + m _e. M
The required number of round trips m _e at ₀ and the final indexing position can be calculated.

Next, the stone advancing / retreating cylinder 81 is extended to advance the stone ST to the dressing position for positioning (step # 2), and at the same time, the variable M for counting the number of times of stone indexing and the number of reciprocations at the same position are set. The variable m for counting is reset to 0 (step #
3, # 4).

Then, the blade 10 is rotated at the initial rotation speed N ₀ (step # 5), and in this state, the unit dressing operation is started (step # 6). That is, the rotating blade 10 is moved toward the stone ST (stone S
(T forward) to cut the stone ST, dress the inner peripheral cutting surface 11a of the cutting blade 11 by this, and then increase or decrease the rotational speed N of the blade 10 by a predetermined amount ΔN (spindle speed change) By displacing the blade 11 in the axial direction of the blade 10, the cutting surface 11b (or 11c)
Is pressed against the inner peripheral surface of the groove 13 formed by the cutting operation, and in this state, the stone ST is relatively moved in the direction of separating from the blade 10 (stone return movement), thereby dressing the cut surface 11b (or 11c). I do.

Next, 1 is set to the same position reciprocation count variable m.
Is added (step # 7), and if the count variable m does not reach the same position setting count m ₀ , the stone 10 is not calculated and the unit dressing operation is repeated at the same position (step # 6). In the second single dress operation, the blade rotation speed (N ₀ + ΔN) in the cut operation is started, the operation extracted by the blade rotation speed (N ₀ + 2ΔN) is performed. That is, each time one dressing operation is completed, the blade rotation speed is increased / decreased by ΔN, and the cutting edge 11 is also displaced from the initial position by an amount corresponding to this.

The unit dressing operation at the same position is repeated, and when the count variable m reaches m ₀ (YES in step # 8), the stone indexing cylinder 80 is extended and the stone ST is moved by one pitch. After indexing (step # 9), 1 is added to the index count variable M (step # 10). When the count variable M is less than the required number of indexing times M ₀ calculated previously (NO in step # 11), the same-position reciprocating frequency count variable m is reset to 0 (step # 4), and the blade is also moved. The rotation speed N is returned to the initial rotation speed N ₀ (step # 5), and the dressing operation (step # 6) is repeated at a position different from the above position.

After the unit dressing operation and the stone indexing as described above are repeated and the indexing count variable M reaches the required indexing number M ₀ (YES in step # 11), after the indexing, the same as above. At the same position, the unit dressing operation is repeated (steps # 4 to # 7), and when the same position reciprocation count variable m reaches the required reciprocation m _e at the final position (YES in step # 12), that is, the necessity. Number of round trips m
_{When the} unit dressing operation is repeated by _e , the dressing operation is stopped and the stone advancing / retreating cylinder 81 is contracted to retract the stone ST to the original retracted position (step # 1.
3). This completes the entire dressing process.

According to the dressing method and apparatus described above,
The stone ST is not indexed each time one unit dressing operation is completed as in the conventional case, but the unit dressing operation is repeated at the same position to gradually change the blade rotation speed N and the amount of displacement of the cutting edge 11. The stone ST is indexed for the first time when the unit dressing operation is repeated by the same position setting number m ₀ at which the increase / decrease is the limit and the blade rotational speed N is returned to the initial rotational speed N ₀ and the dressing operation is performed again. Since it is performed, the consumption amount of the stone ST can be reduced to about (1 / m ₀ ) as compared with the conventional method. For this reason,
While reducing the cost of stone ST consumption,
Since it is possible to reduce the number of times the stones ST are replaced, that is, the number of times that the work is interrupted during a series of slicing steps, the work efficiency is increased, which also contributes to cost reduction.

The present invention is not limited to the above embodiment, and the following modes can be adopted as an example.

(1) In the above embodiment, the one provided with the round trip number computing device for computing the required total round trip number based on the given required dress amount, but after computing the required total round trip number in advance, If this is input to the device, the above-mentioned round-trip frequency calculating device is not necessarily required.

(2) In the above embodiment, the blade 10 is fixed, and the stone ST is moved in the radial direction of the blade 10. However, the stone ST is fixed and the stone 10 is moved in the radial direction. Alternatively, the blade 10 may be moved. Also, for indexing the stone ST, the stone ST is fixed and the blade 10
May be sequentially moved in the axial direction.

(3) In the method of the present invention, not only the case where the dressing operation is performed by the automatic control as shown in the above embodiment, but also when the unit dressing operation is performed while the user counts the number of times once, Similar to the above, it is possible to reduce the consumption of stone ST.

[0058]

As described above, according to the present invention, the unit dressing operation is repeated at the same position to gradually increase or decrease the blade rotation speed and the cutting edge displacement amount, and when the number of repetitions reaches the same position set number of times. Only the stone is indexed, the blade rotation speed is returned to the initial speed, and the dressing operation is restarted at a new position. Therefore, the stone consumption can be significantly reduced compared to the conventional case. Therefore, in addition to the cost reduction due to the consumption of the stone itself, the number of times the stone is exchanged can be reduced to reduce the number of times the series of slicing processes is interrupted, and the efficiency can be increased to reduce the cost. ..

[Brief description of drawings]

FIG. 1 is a block diagram showing a functional configuration of a dressing number control unit provided in a slicing device according to an embodiment of the present invention.

FIG. 2 is a front view of the slicing device.

3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a block diagram showing a functional configuration of a drive control unit provided in the slicing device.

FIG. 5 is a configuration diagram of a dressing device provided in the slicing device.

FIG. 6 is a flowchart showing a dressing control operation executed in the slicing device.

FIG. 7 is a cross-sectional view showing a general example of a cutting blade attached to a blade.

FIG. 8 is an explanatory diagram showing a dressing operation of the cutting edge.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 blade 11 cutting edge 19 dressing device 30 work 40 drive control unit 49 spindle drive motor control device (constituting dressing operation control means) 52 cutting feed motor control device (constituting dressing operation control means) 62 dressing operation control device (dressing operation) Control means) 70 Dressing number control unit 72 Reciprocating number computing device 74 Total reciprocating number counting unit 76 Same position reciprocating number counting unit ST Dress stone

Front Page Continuation (72) Inventor Yukio Yamazaki 5-338 Ujinahigashi, Minami-ku, Hiroshima City Toyo Eitec Co., Ltd.

Claims (3)

[Claims] 1. A slicing device having a blade having a circular cutting edge on the inner circumference and being driven to rotate during work slicing, a dressing stone is faced inside the blade, and the blade is preset. By rotating the stone relative to the blade in the radial direction while rotating at the same speed, the cutting operation to cut the stone to the position before complete cutting of the stone, and the blade rotation speed is increased or decreased after this cutting operation. The blade rotating speed is gradually increased or decreased while repeating a unit dressing operation consisting of a gear shifting operation and an extracting operation of relatively moving the blade in a direction away from the stone after the gear shifting is completed at the same position in the stone. Dressing method of cutting edge in slicing device. 2. The method of dressing a cutting edge in a slicing apparatus according to claim 1, wherein after repeating the unit dressing operation a predetermined number of times at the same position on the stone, the blade rotation speed is returned to the initial speed, and the position at the stone A dressing method for a cutting edge in a slicing device, wherein the unit dressing operation is repeated again at a different position. 3. A slicing apparatus having a blade having a circular cutting edge on its inner circumference and being driven to rotate during work slicing, and an indexing operation for moving the stone relative to the blade in the axial direction thereof. Stone indexing means for performing, facing the stone inside the blade, while rotating the blade at a preset speed, the stone by relatively moving the stone relative to the blade in the radial direction. A cutting operation that cuts the stone to the position before complete cutting,
Dressing operation control means for repeatedly executing a unit dressing operation consisting of a gear shifting operation for increasing or decreasing the blade rotation speed by a certain amount after the cutting operation and an extracting operation for relatively moving the stone in the direction of separating from the blade after the gear shifting is completed, Counts the number of times the unit dressing operation is repeated, and every time the number of times reaches the preset number of times for the same position, the blade rotation speed is returned to the initial speed and the stone position indexing operation is performed. Means for counting the number of times the unit dressing operation is repeated, and stopping the dressing operation when the total number of times reaches the number of times corresponding to the desired dressing amount. Dressing device for cutting edge in slicing device.