JP2621844B2 - Dressing method and device for cutting blade in slicing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slicing apparatus for cutting a work such as a semiconductor ingot by a cutting blade provided on an inner periphery of a rotating blade and cutting a thin piece such as a semiconductor wafer. The present invention relates to a method and an apparatus.

[0002]

2. Description of the Related Art Conventionally, a slicing apparatus as described above is provided with a blade having a circular cutting blade on the inner periphery, with one end of the work facing the inside thereof, and rotating the blade to the work. There is known a configuration in which a thin section is cut from the work by relatively moving the blade in a radial direction of the blade. In such an apparatus, the slicing is repeated and the sharpness of the cutting edge becomes dull. As a result, slicing defects cause warpage of the flakes, which causes inconvenience such that the flakes are damaged by falling down to the blade side. This is known (Japanese Patent Application Laid-Open No. 1-184103). Therefore, in order to maintain the sharpness of the cutting edge and maintain the production of excellent products, it is necessary to dress the cutting edge at an appropriate timing.

FIG. 7 shows a cross-sectional shape of a general cutting blade 11. This cutting blade 11 is mounted on the inner peripheral edge of a donut-shaped blade 10 and has an inner peripheral cutting surface 11a.
And both inner and outer cut surfaces 11b and 11c. Here, the warpage of the sliced slice is caused by the inner cut surface 1.
It is considered that there is a difference in the sharpness between the outer cut surface 1b and the outer cut surface 11c. Therefore, in order to restrict the warpage of the flakes, not only the dress of the inner circumferential cut surface 11a but also the inner side according to the direction of the warp. Cutting surface 11b or outer cutting surface 11
It is necessary to dress either one of c.

Conventionally, the dressing stone ST as shown in FIG. 8 is sliced by the cutting blade 11 so that the cutting blade 11 is dressed. As a specific procedure, first, while rotating the blade 10 at a preset speed, the stone ST is relatively moved with respect to the blade 10 in the direction of the arrow D1.
The cutting of the stone ST is performed up to a position just before the stone ST is completely cut, thereby dressing the inner peripheral cutting surface 11 a of the cutting blade 11. By this operation, Stone ST
Is formed with a groove 13. Next, blade 1
By increasing or decreasing the rotation speed of 0 to increase or decrease the centrifugal force acting on the blade 10, the amount of deflection of the blade 10 is changed, and the cutting edge 11 is moved in a minute amount in the axial direction of the blade 10 (the direction of arrow D <b> 2). Can only be displaced. Thereby, a desired cut surface of the cut surfaces 11b and 11c on both sides can be pressed against the inner peripheral surface of the groove 13, and in this state, the stone ST is relatively moved in the direction of separating the stone ST from the blade 10 (the direction of arrow D3). The cut surface is dressed.

However, the amount of dressing of the cut surface by such one reciprocating operation (unit dressing operation) is very small.
Therefore, conventionally, after the one dressing operation is completed, the rotation speed of the blade 10 is returned to the original value, and the stone ST
Is performed by a preset unit pitch (in the direction of arrow D4), and a dress operation is performed again at a position different from the above, thereby obtaining a desired dress amount.

[0006]

According to the above method, if it is necessary to perform a unit dress operation, for example, M times in order to obtain a desired dress amount, the stone ST is required for the M times.
Must be determined. In other words, as the required dress amount increases, the number of times the stone ST is required to be indexed increases,
The consumption amount of the stone ST becomes large. When the stone ST is consumed at such a fast pace in this way, it is necessary to frequently replace the stone ST by that amount, and a series of slicing operations must be interrupted for each such exchange operation. There is a disadvantage that the working efficiency is reduced and the cost is increased.

The amount of dressing can be increased by increasing the amount by which the blade rotational speed is changed in one unit dressing operation. However, the cutting edge 11 in the groove 13 per unit dressing operation can be increased. There is a limit to the amount that can be displaced, and when the required dress amount is large, the number of unit dress operations must be increased.

In view of such circumstances, the present invention provides a method and an apparatus for dressing a cutting blade in a slicing apparatus which can perform good dressing of a cutting blade as before, while greatly reducing the consumption of stone. The purpose is to provide.

[0009]

According to the present invention, there is provided a slicing apparatus having a blade having a circular cutting edge on an inner periphery thereof and rotatably driven at the time of work slicing. A cutting operation of cutting the stone to a position just before cutting the stone completely by moving the stone relative to the blade in the radial direction while rotating the blade at a preset speed; and Stepping the blade rotation speed while repeating a unit dressing operation consisting of a shifting operation of increasing or decreasing the blade rotation speed after the operation and a pull-out operation of relatively moving the stone in a direction away from the blade after the completion of the shift, at the same position on the stone a plurality of times. (Claim 1).

Further, the present invention is characterized in that after repeating the unit dressing operation at the same position on the stone a predetermined number of times, the blade rotation speed is returned to the initial speed, and the unit dressing operation is repeated again on the stone at a position different from the above-mentioned position. (Claim 2).

According to the present invention, there is provided an apparatus for carrying out the above method, comprising: a stone indexing means for performing an indexing operation of moving the stone relative to the blade in an axial direction thereof; Face the stone, cutting operation to cut the same stone to a position before cutting the stone completely by moving the blade relative to the stone in the radial direction while rotating the blade at a preset speed, Dress operation control means for repeatedly executing a unit dress operation consisting of a shift operation of increasing or decreasing the blade rotation speed by a fixed amount after the cutting operation, and a pull-out operation of relatively moving the stone away from the blade after the shift is completed; The number of times the unit dress operation is repeated is counted, and the number is set in advance. The same position reciprocating number counting means for returning the blade rotation speed to the initial speed and performing the stone indexing operation each time the same position set number of times is reached, and counting the number of times the unit dress operation is repeated. A total reciprocating number counting means for stopping the dressing operation when the number of times reaches the number corresponding to the desired dress amount is provided (claim 3).

[0012]

According to the method of the first aspect, each time the unit dress operation including the cutting operation, the shifting operation, and the extracting operation is repeated at the same position in the stone axis direction,
The blade rotation speed changes step by step by a fixed amount, the displacement of the cutting blade also changes step by step at the same position, and the inner cutting surface or outer cutting surface of the cutting blade is dressed by a predetermined amount as in the conventional case. . In addition, since the unit dress operation is repeated at the same position, the consumption of the stone is greatly reduced as compared with the conventional method, that is, the method of finding the stone every time the dress operation is performed.

In the method of the present invention, there is a limit to the amount by which the cutting blade is displaced in proportion to the amount of increase or decrease in the blade rotation speed. Therefore, the number of times the unit dress operation is performed at the same position is limited. If the required total number of dresses exceeds the number of executable dresses at the same position, the rotational speed of the blade is set to the initial speed when the dressing operation is performed a predetermined number of times at the same position, as in the method according to claim 2. And the stone is indexed, and the unit dress operation is repeated at a new position on the stone.

Specifically, in the apparatus according to the third aspect, the unit dress number (ie, the number of reciprocations of the stone with respect to the blade) executed under the control of the dress operation control means is the same position reciprocating number counting means and the total reciprocating number counting means. Each time the number counted by the same-position reciprocating number counting means reaches the same number of times set at the same position, the blade rotation speed is restored and the stone is indexed. The dressing operation is stopped when the number of times counted by the total number counting means reaches the number of dresses corresponding to the required dress amount, whereby the cutting blade is dressed by a desired amount.

[0015]

An embodiment of the present invention will be described with reference to the drawings.

The slicing device shown in FIGS. 2 and 3 includes a base 1, on which a guide rail 2 is mounted, and along which the slide table 3 is slidably supported. ing.

A headstock 4 is installed on the base 1 at a position facing the slide table 3. A main bearing 4a is provided on an upper portion of the headstock 4, and the main shaft 6 is rotatably supported by the main bearing 4a.
A spindle drive motor 8 is connected to the spindle 6 via a belt transmission mechanism.
Output shafts are connected. A tension disk 9 is fixed to the tip of the main shaft 6.
Are rotationally driven by a rotation drive means 5 including the main shaft 6, the belt transmission mechanism 7, and the main shaft drive motor 8.

A blade 10 made of a donut-shaped thin plate is mounted on the periphery of the tension disk 9, and a cutting blade 11 made of diamond particles or the like is fixed to the inner periphery of the blade 10. When the rotation speed N changes during the rotation of the tension disk 9, the blade 10 and the cutting blade 11 move in the axial direction of the main shaft 6 (that is, in the rotation axis direction of the blade 10) in accordance with the rotation speed N. It is designed to be displaced. That is, when the tension disk 9 rotates, a centrifugal force proportional to the rotation speed N acts on the peripheral edge of the tension disk 9.
, The magnitude and direction of the displacement in the direction of the rotation axis to be given to are determined.

On the slide table 3, a holding member 15 and indexing and feeding means 18 are provided.
Has a work 30 made of a silicon semiconductor ingot or the like.
Is held. The indexing and feeding means 18 has a ball screw 16 and a holding member driving motor 17 for rotating the ball screw 16. The indexing and feeding means 18 allows the holding member 15 to slide in the axial direction of the main shaft 6. By being driven, one end of the work 30 is moved from the surface 10a side (work holding side) of the blade 10 to the blade 1 side.
It is possible to project a minute amount toward the back surface 10b through the center hole of zero.

A dressing device 19 for dressing the cutting blade 11 is provided on the slide table 3. The dressing device 19 holds a dressing stone ST, and the tip of the stone ST is arranged at a position facing the inside of the blade 10. The specific structure will be described later in detail.

On the base 1, there is provided cutting and feeding means 14 having a ball screw 12 and a cutting and feeding motor 13 for rotating the ball screw 12. 2 is slid along the guide rail 2 in a direction orthogonal to the main shaft 6, and the slide table 3 is slid from the front to the back in FIG.
0 or a stone ST to be described later is relatively moved (that is, cut and fed) with respect to the blade 10 in the radial direction (the direction of arrow A in FIG. 3). Therefore, by rotating the blade 10 and carrying out the cutting and feeding with the one end of the work 30 facing the inside of the blade 10, one end of the work 30 is sliced by the cutting blade 11, and the wafer (flake) is cut. Is cut out. In addition, dressing of the cutting blade 11 is performed by facing the stone ST instead of the blade 10.

A slice base 31 made of carbon or the like is fixed to an outer peripheral portion of the work 30 on the downstream side in the cutting and feeding direction, that is, a portion that is finally cut by the cutting blade 11 in the work 30. Due to the fixation of the slice base 31, the cutting resistance acting on the blade 10 at the end of the cutting of the work 30 is suddenly released, thereby preventing the last cut portion of the work 30 from being chipped.

In the vicinity of the blade 10, a bending amount detecting sensor 24 for detecting the bending amount is provided. The blade deflection amount detection sensor 24 is disposed on the trajectory C and at a position facing the back surface 10b of the blade 10. More specifically, when the workpiece 30 is cut, a position in which is disposed at a position in the vicinity of the central portion P ₃ of a workpiece cleavage site of the blade 10.

This slicing device includes a drive control unit 40 as shown in FIG.

In the figure, the reference displacement storage device 41
By driving the cutting feed motor 13, the work 30 is moved to a position immediately before the start of cutting (a position slightly leftward from the position shown by the two-dot chain line on the left side in FIG. 3; hereinafter, referred to as the immediately preceding position) (hereinafter referred to as a reference position). In this case, the deflection amount of the blade 10 detected by the blade deflection amount detection sensor 24 is stored as a reference deflection amount Sa. The displacement comparator 42 captures the current deflection amount Sb detected by the blade deflection amount detection sensor 24 every predetermined sampling period Δt in addition to the reference deflection amount Sa, and subtracts the former from the latter from the reference state. It is calculated and output as the amount of deflection S. The calculated amount of deflection S is input to the rotation speed calculation device 48, the cutting feed speed calculation device 51, and the dress timing determination device 61.

When a drive command signal is received from a cutting feed motor control device 52, which will be described later, the rotation speed calculation device 48 determines the current rotation speed N of the tension disk 9 and the displacement comparator 4
Based on the amount of deflection S detected in step 2,
Then, a target rotation speed Na of the tension disk 9 required for the calculation is calculated, and a signal corresponding to the calculated value is output to the spindle drive motor control device 49. The spindle drive motor control device (constituting dress operation control means) 49 receives the target rotation speed Na when receiving a signal from the rotation speed calculation device 48,
Otherwise, the drive control of the spindle drive motor 8 is performed so as to adjust the rotation speed N of the tension disk 9 with the basic rotation speed N ₀ set and stored in advance as a target. The drive control of the cutting feed motor 13 is performed so that the number of rotations required for the dress is obtained.

The cutting feed speed calculating device 51 receives a drive command signal from the cutting feed motor control device 52 and sets a target cutting feed speed Va necessary for reducing the amount of deflection S detected by the displacement comparator 42. Is calculated, and a signal corresponding to the calculation result is output to the cutting feed motor control device 52.

The cutting feed motor controller (constituting the dress operation control means) 52, so that the above target cutting feed speed Va when the received signal from the speed calculation device 51, otherwise the basic cutting feed speed V ₀ The cutting feed motor 13 is controlled in such a manner. Specifically, the cutting feed position (position in the cutting feed direction) of the work 30 is detected based on a pulse signal detected from the cutting feed motor 13 and it is determined that the detected cutting feed position is within the predetermined range L. In this case, the operation command signal is output to the rotation speed calculation device 48, the cutting feed speed calculation device 51, and the dress timing determination device 61, respectively.

The cutting feed motor control device 52
Controls the cutting feed motor 13 so as to perform a feed operation necessary for the dress when entering a dress mode described later.

The dress timing determination device 61 determines whether or not it is time to dress based on the value S when receiving the drive command signal. A command signal is output to the device 62, and at a predetermined time, the operation mode of the device is switched to the dress mode, and a dress operation is started. The dress control device (dress operation control means) 62 controls the dress device 19 to perform an operation necessary for dressing when the command signal is received, that is, when the dress mode is entered.

FIG. 5 shows the configuration of the dressing device 19.

The dressing apparatus 19 includes a stone indexing cylinder 80 and a stone advance / retreat cylinder 81. The cylinder body of the stone indexing cylinder 80 is connected to a rod 85 of the stone advance / retreat cylinder 81. By extending the stone indexing cylinder 80, the entire stone indexing cylinder 80 advances to the dress position, that is, a position where the end of the stone ST faces the inside of the blade 10, and the stone indexing cylinder 81 retracts, thereby causing the stone indexing cylinder 80 to retract. The whole 80 is retracted to a retracted position, that is, a position where it escapes backward (to the right in FIG. 2) from the blade 10. The rod 82 of the stone indexing cylinder 80 is urged toward the piston head by a compression spring 83, and a chuck 84 for gripping the end of the stone ST is provided at the tip of the rod 82. The stones ST are indexed one pitch at a time by expanding the steps 80 in a stepwise manner (see the arrow D4 in FIG. 8).

On the piston head side of the stone indexing cylinder 80, a flow control valve 86 with a check valve, a two-position directional control valve 88, a pressure reducing valve 89, a filter 90, an on-off valve 91
Is connected to the pneumatic pump 92, and the stone indexing cylinder 80 contracts in the state where no drive signal is input to the solenoid 88a of the direction switching valve 88, and the stone indexing cylinder 80
Is driven to extend.

The rod side of the stone advance / retreat cylinder 81 is connected to a common three-position direction switching valve 93 via a flow control valve 87a with a check valve, and the head side is connected via a flow control valve 87b with a check valve. A position direction switching valve 93 is connected to the pneumatic pump 92 via the pressure reducing valve 89, the filter 90, and the opening / closing valve 91, and a drive signal is input to a solenoid 93a of the stone advance / retreat cylinder 81 to thereby drive the stone advance / retreat cylinder. When the drive signal 81 is extended and the drive signal is input to the solenoid 93b, the stone advance / retreat cylinder 81 is contracted, and the stone advance / retreat cylinder 81 is fixed in a state where the drive signal is not input to both the solenoids 93a and 93b.

When the device mode is switched to the dress mode at an appropriate timing during the slicing process of the work 30 by the blade 10, the drive control unit 40 extends the stone advance / retreat cylinder 81 to move the stone ST into the blade. In addition, the dressing device 19, the cutting feed motor 13, and the spindle drive motor 9 perform a unit dressing operation including the following three operations.

(A) Cutting Operation A direction in which the blade 10 approaches the stone ST while rotating the tension disk 9 and the blade 10 at a predetermined rotational speed N (initial rotational speed N _{0 in the} first operation) (in the direction of arrow D1 in FIG. 8). ), And cuts the stone ST to a position just before the stone ST is completely cut, whereby the inner peripheral cutting surface 1 of the cutting blade 11 as shown in FIG.
Perform dress 1a. At this time, the stone ST has a groove 13
Is formed.

(B) Speed change operation The speed N of the blade 10 is increased or decreased by a predetermined amount ΔN to increase or decrease the centrifugal force acting on the blade 10.
As a result, the amount of deflection of the blade 10 changes, and the cutting edge 11
Is displaced in the axial direction of the blade 10 (in the direction of arrow D2 in FIG. 8) by a small amount, so that both cut surfaces 1 shown in FIG.
A desired cut surface of 1 b and 11 c is pressed against the inner peripheral surface of the groove 13.

(C) Extraction Operation Dressing of the cut surface 11b (or 11c) is performed by relatively moving the stone ST away from the blade 10 rotating at the above-described rotation speed in the direction (direction of arrow D3).

Further, this apparatus is provided with a dress number control unit 70 as shown in FIG. 1, and the dress number control unit 70 controls the repetition of the dress operation executed by the drive control unit 40. Is being done.

Referring to FIG. 1, the reciprocating frequency calculating device 72 comprises:
When the dressing mode is entered, a signal relating to the removal amount of the stone ST required for the dressing of the cutting blade 11 is fetched, and the number of times the unit dress operation must be performed to obtain the required removal amount, that is, the stone ST for the blade 10 To calculate the required total number of round trips MA. For example, when the required removal amount is 30 μm and the removal amount per one unit dress operation is 5 μm, the required total number of round trips MA = 6 is calculated and output.

A user may input a desired numerical value to the reciprocating frequency calculating device 72 through an operation unit or the like provided at an appropriate position in the slicing device. The required dress amount may be calculated by the drive control unit 40 based on the bent amount, and may be automatically input to the reciprocating number calculating device 72.

The total reciprocating number counting means 74 counts the number of times the unit dress operation is executed by the drive control unit 40, and stops the dressing operation when the number reaches the necessary total reciprocating number MA. is there. In other words, unless a stop command signal is output from the total reciprocating number counting means 74, the unit dress operation is repeatedly continued under the control of the drive control unit 40.

The same-position reciprocating-number counting means 76 counts the number of times the unit dress operation is executed, and every time the number reaches the preset same-position set number m ₀ , the drive control unit 40 controls the blade 10. The drive speed N is returned to the initial speed N _0, and the drive control unit 40
Then, the stone indexing cylinder 80 is driven to extend one pitch to index the stone ST. In other words, unless the same position reciprocating number counting means 76 outputs a command signal to the drive control section 40, the blade 1
The dressing operation is repeated at the same position of the stone ST while the rotation speed N of 0 is increased or decreased by a predetermined amount ΔN for each operation.

Here, the number m ₀ of setting the same position is set based on a limit value at which the blade rotation speed N can be increased or decreased from the initial rotation speed N ₀ . That is, the initial rotational speed N ₀
When the unit dressing operation is repeated from, the number of rotations is increased or decreased by ΔN by the number of times, and the cutting edge 11 is displaced stepwise in the blade axial direction by the increase or decrease of the centrifugal force acting on the blade 10. However, the limit number of times that the cutting edge 11 is not displaced in proportion to the increase or decrease of the rotation speed N is set as the same position setting number m ₀ .

Next, control operations performed by the drive control unit 40 and the dress number control unit 70 when entering the dress mode will be described with reference to the flowchart of FIG.

First, in performing the dressing operation, the dress conditions, specifically, the cut surface (the inner cut surface 1) where the dress is required.
1b or the outer cut surface 11c), and the required dress amount is set (step # 1). Based on this condition, the main shaft drive motor control device 49 determines whether to increase the speed or to reduce the speed during the speed change operation, and the reciprocating frequency calculating device 72 calculates the required total reciprocating frequency MA corresponding to the required removal amount. .

In this control example, the end time of the dress is not directly determined from the required total number of round trips MA. First, the necessary stone indexing number M ₀ and the final indexing position are calculated from the required total number of round trips MA. Required reciprocating times _me (<
m ₀ ) is calculated, and the end time is determined by counting these times. That is, assuming that the number of times that the unit dress operation can be repeated at the same position without determining the stone ST (that is, the same position setting number) is m ₀ , the same position setting number m ₀ is multiplied by the stone indexing number. since plus the number of round-trips in the final indexing position is total number of round trips, the required total number of reciprocations MA is expressed by the following equation _{MA = m 0 M 0 + m} e, thus requiring Stone indexing times from the formula M
₀ and can be calculated required reciprocating frequency m _e at the final index position.

Next, the stone ST is advanced to the dress position by extending the stone advance / retreat cylinder 81 and positioned (step # 2), and a variable M for counting the number of times of stone indexing and the number of reciprocations for the same position are set. Reset the variable m for counting to 0 (step #
3, # 4).

Then, the blade 10 is rotated at the initial rotation speed N ₀ (step # 5), and the unit dress operation is started in this state (step # 6). That is, the rotating blade 10 is moved in a direction to approach the stone ST (stone S
T forward movement) to cut the stone ST, thereby dressing the inner peripheral cut surface 11a of the cutting blade 11, and then increase or decrease the rotation speed N of the blade 10 by a predetermined amount ΔN (spindle speed change). By displacing the blade 11 in the axial direction of the blade 10, the cutting surface 11b (or 11c)
Is pressed against the inner peripheral surface of the groove 13 formed by the above-mentioned cutting operation, and in this state, the stone ST is relatively moved in the direction away from the blade 10 (stone backward movement), so that the dress of the cut surface 11b (or 11c) is made. I do.

Next, 1 is set to the variable m for counting the number of reciprocating movements at the same position.
Adding (step # 7), if the count variable m does not reach the same position set number m ₀ repeat units dress operate in the same position without indexed Stone 10 (Step # 6). In the second single dress operation, the blade rotation speed (N ₀ + ΔN) in the cut operation is started, the operation extracted by the blade rotation speed (N ₀ + 2ΔN) is performed. That is, each time one dressing operation is completed, the blade rotation speed increases and decreases by ΔN stepwise, and the cutting blade 11 is displaced from the initial position by an amount corresponding to this.

The unit dressing operation at the same position is repeated, and when the count variable m reaches m ₀ (YES in step # 8), the stone indexing cylinder 80 is extended, and the stone ST is shifted by one pitch. After indexing (step # 9), 1 is added to the indexing count variable M (step # 10). If the count variable M is less than the previously calculated required index number M ₀ (NO in step # 11), the same-position reciprocating number count variable m is reset to 0 (step # 4), and the blade returns the rotational speed N to the initial rotational speed N ₀ (step # 5), repeated again dress operate at different position (step # 6) the above position.

[0052] repeating unit address operation and stones indexing as described above, after the indexing count variable M has reached the required indexing number M ₀ (YES at step # 11), after its indexing, as described above at the same position repeatedly units dress operation (step # 4 to # 7), when the same position roundtrips count variable m has reached the required reciprocating frequency m _e at the end position (YES in step # 12), i.e. required Number of round trips m
_{When the} unit dress operation is repeated by _e , the dress operation is stopped, the stone advance / retreat cylinder 81 is contracted, and the stone ST is retracted to the original evacuation position (step # 1).
3). Thus, the entire dressing process ends.

According to the dressing method and apparatus described above,
Instead of indexing the stone ST each time one unit dress operation is completed as in the related art, the unit dress operation is repeated at the same position, and the blade rotation speed N and the displacement amount of the cutting blade 11 are stepwisely changed. When the unit dress operation is repeated by the same position setting number m ₀ at which the increase / decrease becomes a limit, the stone ST is indexed for the first time, the blade rotation speed N is returned to the initial rotation speed N ₀ , and the dress operation is performed again. Since it is performed, the consumption amount of the stone ST can be reduced to about (1 / m ₀ ) as compared with the conventional method. For this reason,
While reducing costs due to consumption of Stone ST,
Since the number of replacements of the stone ST, that is, the number of times the work is interrupted during a series of slicing steps, can be reduced, the work efficiency can be increased, and thereby the cost can be reduced.

The present invention is not limited to the above embodiment, but may take the following forms as an example.

(1) In the above embodiment, the apparatus provided with the reciprocating frequency calculating device for calculating the required total reciprocating frequency based on the given required dress amount is shown. If this is input to the device, the reciprocating frequency calculating device is not necessarily required.

(2) In the above embodiment, the blade 10 is fixed and the stone ST is moved in the radial direction of the blade 10. However, the stone ST is fixed and the stone ST is fixed in the radial direction of the blade 10. Alternatively, the blade 10 may be moved. Also, regarding the indexing of the stone ST, the stone ST is fixed and the blade 10 is fixed.
May be sequentially moved in the axial direction.

(3) The method of the present invention is not limited to the case where the dress operation is performed by the automatic control as shown in the above-described embodiment. As described above, the consumption of the stone ST can be reduced.

[0058]

As described above, according to the present invention, the unit dressing operation is repeated at the same position to gradually increase or decrease the blade rotation speed and the cutting blade displacement amount, and when the number of repetitions reaches the set number of times at the same position. Since only the stone is indexed, the blade rotation speed is returned to the initial speed, and the dressing operation is restarted at a new position, the consumption of the stone can be greatly reduced as compared with the related art. Therefore, in addition to the cost reduction due to the consumption of the stone itself, the number of interruptions of the series of slicing processes can be reduced by reducing the number of times of replacing the stone, and the cost can be reduced by increasing the efficiency. .

[Brief description of the drawings]

FIG. 1 is a block diagram showing a functional configuration of a dress number control unit provided in a slicing device according to an embodiment of the present invention.

FIG. 2 is a front view of the slicing device.

FIG. 3 is a sectional view taken along line III-III of FIG. 2;

FIG. 4 is a block diagram showing a functional configuration of a drive control unit provided in the slicing device.

FIG. 5 is a configuration diagram of a dressing device provided in the slicing device.

FIG. 6 is a flowchart showing a dress control operation performed in the slicing device.

FIG. 7 is a sectional view showing a general example of a cutting blade mounted on a blade.

FIG. 8 is an explanatory view showing a dressing operation of the cutting blade.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Blade 11 Cutting blade 19 Dressing device 30 Work 40 Drive control unit 49 Spindle drive motor control device (constituting dress operation control means) 52 Cutting feed motor control device (constituting dress operation control unit) 62 Dress operation control device (dress operation Constituting control means) 70 dress number control unit 72 reciprocating number calculating device 74 total reciprocating number counting means 76 same-position reciprocating number counting means ST Stone for dress

Claims (3)

(57) [Claims] 1. A slicing apparatus having a blade having a circular cutting edge on an inner periphery thereof and rotatably driven at the time of work slicing, wherein a dressing stone faces the inside of the blade, and the blade is set in advance. A cutting operation of cutting the stone to a position just before the stone is completely cut by moving the stone relative to the blade in the radial direction while rotating at a given speed, and increasing or decreasing the blade rotation speed after the cutting operation. It is characterized in that the blade rotation speed is increased or decreased stepwise while repeating a unit dress operation consisting of a shift operation and a pull-out operation of relatively moving the blade in a direction away from the stone after the shift is completed at the same position in the stone a plurality of times. Dressing method for cutting blades in a slicing machine. 2. The dressing method for a cutting blade in a slicing device according to claim 1, wherein the unit dressing operation is repeated a predetermined number of times at the same position on the stone, and then the blade rotation speed is returned to the initial speed, and the position of the stone on the stone is changed. Is a method for dressing a cutting blade in a slicing device, wherein the unit dressing operation is repeated again at a different position. 3. A slicing apparatus having a blade having a circular cutting edge on an inner periphery thereof and rotatably driven at the time of work slicing, an indexing operation of relatively moving said stone with respect to said blade in the axial direction. Stone indexing means for performing the above, the stone is faced inside the blade, and the stone is moved relative to the blade in the radial direction while rotating the blade at a preset speed, thereby causing the stone to move. A cutting operation to cut the same stone to the position just before complete cutting,
Dress operation control means for repeatedly executing a unit dress operation consisting of a shift operation of increasing or decreasing the blade rotation speed by a fixed amount after the cutting operation, and a pull-out operation of relatively moving the stone away from the blade after the shift is completed; Count the number of times the unit dress operation is repeated, and return the blade rotation speed to the initial speed and perform the stone indexing operation each time the number of times reaches the preset number of times set at the same position. Means for counting the number of times the unit dress operation is repeated, and a total reciprocating number counting means for stopping the dress operation when the total number reaches the number corresponding to the desired dress amount. Dressing device for cutting blades in a slicing machine.