JPH0538061Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a single crystal pulling apparatus for pulling and growing a single crystal of silicon, compound semiconductor, etc. by the Czyochralski method.

[Conventional technology]

Conventionally, as this type of single crystal pulling apparatus, the fourth
The one shown in the figure is known. In this figure, 1 is a furnace body, and a quartz crucible 2 is provided approximately in the center of the furnace body 1. The quartz crucible 2 is held by a graphite susceptor 3, and the lower end of the graphite susceptor 3 is attached to the upper end of the lower shaft 4 by a predetermined joining member. Further, a coupling mechanism 5 is provided at the lower end of the lower shaft 4.
A crucible rotation motor 6 and a crucible lifting motor 7 are connected through the quartz crucible 2, and these motors 6 and 7 rotate the quartz crucible 2 in a predetermined direction and move it up and down. A heater 9 for controlling the temperature of the silicon melt 8 in the quartz crucible 2 is installed around the graphite susceptor 3, and a heat insulating material 10 is installed between the heater 9 and the furnace body 1. is located. Furthermore, a cylindrical upper chamber 11 is detachably connected to the upper end of the furnace body 1 via a gate valve (not shown).
A lifting head 12 is provided at the upper end of the head 1 so as to be horizontally pivotable. A wire lifting mechanism 13 is provided in the lifting head 12, and a wire cable (upper shaft) 14 is connected from the wire lifting mechanism 13.
is suspended. This wire pulling mechanism 13
A lifting motor 15 is connected to the lifting head 12, and a head rotating motor 16 is connected to the lifting head 12. Further, a seed holder 1 for holding a seed crystal 17 is provided at the lower end of the wire cable 14.
8 is installed.

In the single crystal pulling apparatus configured as described above, when the seed crystal 17 is immersed in the silicon melt 8 and the head rotation motor 16 and the pulling motor 15 are driven, the wire cable 14 is rotated. As the seed crystal 17 rises, the silicon single crystal 19 grows. In this case, the lower shaft 4 is rotated by the crucible rotation motor 6 in the opposite direction to the wire cable 14, and as the silicon single crystal 19 grows, the liquid level of the silicon melt 8 in the quartz crucible 2 decreases. The lower shaft 4 is appropriately raised by the drive of the crucible lifting motor 7, and is operated to keep the liquid level constant.

By the way, in the case of the single crystal pulling apparatus as described above, it is used for monitoring the inside of the furnace body 1 or for the purpose of monitoring the single crystal 19.
viewing window 1a for sensor 20 for controlling the diameter of
is provided on the shoulder portion 1b of the furnace body 1. Conventionally, this viewing window 1a has been used in a round shape or a square shape as shown in FIG. 3.

[Problem that the invention attempts to solve]

However, the round-shaped viewing window a requires a large space for installation, and the rectangular viewing window 1a has a problem in that it is difficult to weld the corner 1c. be.

This invention was made in view of the above circumstances,
The purpose is to provide a single crystal pulling device that requires relatively little space for installation and is easy to weld.

[Means for solving problems]

In order to achieve the above object, the present invention has developed a single crystal pulling apparatus for pulling and growing a single crystal using the Czyochralski method. A through hole is formed, an oblong cylindrical member is fitted into this through hole, and the lower end of this cylindrical member is welded to the inner casing, and the outer circumferential middle part of the cylindrical member is attached to the outer casing. On the other hand, a box-shaped member having an oblong hole in the center is fitted into the cylindrical member, and the lower end of this box-shaped member is welded to the outer casing, and The upper ends of the shaped member and the cylindrical member are welded to each other, and further, a cooling channel is formed between the pair of casings, and a cooling channel is formed inside the box-shaped member, the outer casing, and the cylindrical member. A see-through plate is placed on the upper surface of the box-shaped member via a sealing member, and a see-through plate holder having an oblong hole in the center is pressed against the outer edge of the see-through plate. It is fixed.

[Effect]

In the single crystal pulling device of the present invention, an elliptical cylindrical member is fitted into an elliptical through hole formed in a pair of casings at the shoulders of the furnace body, and this cylindrical member is inserted into each of the casings. At the same time, an oval box-like member is fitted to the cylindrical member, and the box-like member, the outer casing, and the cylindrical member are welded to each other, and a sealing member is attached to the upper surface of the box-like member. By placing a see-through plate and pressing the see-through plate with a see-through plate holder, the installation space can be reduced, welding work can be made easier, and the oval shaped sight can be attached to the shoulder of the furnace body. Can be installed on.

〔Example〕

Hereinafter, one embodiment of the present invention will be described based on FIGS. 1 and 2.

Reference numeral 30 in the figure is a viewing window, and this viewing window 30 is provided on the shoulder portion 1b of the furnace body 1 as in the conventional case. The furnace body 1 has a double structure consisting of a pair of casings 1d and 1e.
A cooling water channel 31 is formed between e. An elliptical through hole 1f is formed in the shoulder portion 1b of the furnace body 1, and an elliptical cylindrical member 32 is fitted into this through hole 1f. Further, the lower end of the cylindrical member 32 is welded to the casing 1d, and the intermediate portion of the outer periphery of the cylindrical member 32 is welded to the casing 1e. A box-shaped member 33 having an oblong through hole 33a in the center is fitted into the cylindrical member 32, and the box-shaped member 33 is welded to the casing 1e and the cylindrical member 32. A cooling water channel 34 is constituted by the box-shaped member 33, the casing 1e, and the cylindrical member 32. Furthermore, a glass plate 35 is placed on the upper surface of the box-shaped member 33, and this glass plate 35
is pressed at its outer edge by a box-shaped glass holder 36 via a gasket 37 and fixed with screws. An oval hole 36a is formed in the center of the glass presser 36, and an O-ring 38 is fitted into the upper surface of the box-shaped member 33.

In the single crystal pulling apparatus configured as described above, the oblong viewing window 30 is located at the shoulder 1b of the furnace body 1.
Because it is installed in the window, it requires less installation space than a conventional round window. Also, this viewing window 30
When installing, first, install the through hole 1f of the furnace body 1.
The lower end of the cylindrical member 32 fitted into the casing 1d
After fixing by welding, the cylindrical member 32
Welding between the outer circumferential middle part of and the casing 1e,
Further, the lower end of the box-shaped member 33 and the casing 1e, and the upper inner edge of the box-shaped member 33 and the upper end of the cylindrical member 32 are welded, respectively. In this case, especially the cylindrical member 3
In the welding work of both the upper and lower ends of No. 2, since the welding locations are oval, the welding work can be easily performed.

[Effect of idea]

As explained above, the present invention is a single crystal pulling apparatus for pulling and growing single crystals using the Czyochralski method. A hole is formed, and an oblong cylindrical member is fitted into this through hole, and the lower end of this cylindrical member is welded to the inner casing, and the outer circumferential middle part of the cylindrical member is welded to the outer casing. On the other hand, a box-shaped member having an oblong through hole in the center is fitted into the cylindrical member, and a lower end of the box-shaped member is welded to the outer casing, and the box-shaped member and the upper ends of the cylindrical members are welded to each other, and further, a cooling waterway is formed between the pair of casings, and a cooling waterway is formed inside the box-shaped member, the outer casing, and the cylindrical member, A see-through plate is placed on the top surface of the box-shaped member via a sealing member, and a see-through plate holder having an oblong hole in the center is pressed and fixed to the outer edge of the see-through plate. Therefore, an elliptical cylindrical member is fitted into the elliptical through-holes formed in the pair of casings and welded together, and an elliptical box-like member is fitted into the cylindrical member. , this box-shaped member is welded to the outer casing and cylindrical member, and a see-through plate is placed on the top surface of the box-like member via a sealing member, and this see-through plate is held down by a see-through plate presser. This allows for a smaller installation space compared to conventional round-shaped viewing windows, and easier welding compared to conventional square-shaped viewing windows. It can be smoothly and reliably attached to the box-shaped member, and it is extremely advantageous in terms of strength since stress is not concentrated at the corner. Since a cooling water channel is formed inside the inside surrounded by the outer casing and the cylindrical member, the heat inside the furnace body is suppressed from being transmitted to the box-shaped member, so that the see-through plate can be seen through the box-shaped member. It can be held securely by the plate holder, and it is possible to prevent adverse effects such as deformation due to heat inside the furnace main body.

[Brief explanation of drawings]

Figures 1 and 2 show an embodiment of the present invention, where Figure 1 is a plan view, Figure 2 is a sectional view, Figure 3 is a plan view of a conventional viewing window, and Figure 4 is a plan view of the conventional viewing window. FIG. 1 is a schematic configuration diagram showing an example of a single crystal pulling apparatus. 1... Furnace body, 1b... Shoulder, 1d, 1e...
Casing, 1f...Through hole, 30...Viewing window, 3
1, 34...Cooling channel, 32...Cylinder member, 33...
...Box-shaped member, 33a... Through hole, 35... Glass plate (see-through plate), 36... Glass presser (see-through plate presser),
36a...hole, 38...O ring (sealing member).

Claims (1)

[Scope of utility model registration request] In a single crystal pulling device that pulls and grows a single crystal using the Czyochralski method, an oval through hole is formed in the shoulder of the furnace body, which has a double structure consisting of a pair of casings. A circular cylindrical member is fitted into the cylindrical member, and the lower end of the cylindrical member is welded to the inner casing, and the middle part of the outer periphery of the cylindrical member is welded to the outer casing. A box-shaped member having a circular through hole in the center is fitted, a lower end of the box-shaped member is welded to the outer casing, and upper ends of the box-shaped member and the cylindrical member are welded to each other, Furthermore, a cooling water channel is formed between the pair of casings, a cooling water channel is formed inside the box-shaped member, an outer casing, and a cylindrical member, and a sealing member is provided on the upper surface of the box-shaped member. A single crystal pulling method characterized in that a see-through plate is placed through the see-through plate, and a see-through plate holder having an oblong hole in the center is pressed and fixed to the outer edge of the see-through plate. Device.