JPS63199168U - - Google Patents
Info
- Publication number
- JPS63199168U JPS63199168U JP8822787U JP8822787U JPS63199168U JP S63199168 U JPS63199168 U JP S63199168U JP 8822787 U JP8822787 U JP 8822787U JP 8822787 U JP8822787 U JP 8822787U JP S63199168 U JPS63199168 U JP S63199168U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- pulling
- viewing window
- shoulder
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 244000144985 peep Species 0.000 description 1
Description
第1図と第2図は本考案の一実施例を示すもの
で、第1図は平面図、第2図は断面図、第3図は
従来の覗窓部の平面図、第4図は単結晶引上装置
の一例を示す概略構成図である。
1……炉本体、1b……肩部、30……覗窓。
Figures 1 and 2 show an embodiment of the present invention, where Figure 1 is a plan view, Figure 2 is a sectional view, Figure 3 is a plan view of a conventional viewing window, and Figure 4 is a plan view of the conventional viewing window. FIG. 1 is a schematic configuration diagram showing an example of a single crystal pulling apparatus. 1...Furnace body, 1b...Shoulder, 30...Peep window.
Claims (1)
長させる単結晶引上装置において、炉本体肩部に
長円形状の覗窓を設けたことを特徴とする単結晶
引上装置。 A single crystal pulling apparatus for pulling and growing a single crystal by the Czyochralski method, characterized in that an oblong viewing window is provided in the shoulder of the furnace body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8822787U JPH0538061Y2 (en) | 1987-06-08 | 1987-06-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8822787U JPH0538061Y2 (en) | 1987-06-08 | 1987-06-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63199168U true JPS63199168U (en) | 1988-12-21 |
JPH0538061Y2 JPH0538061Y2 (en) | 1993-09-27 |
Family
ID=30946151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8822787U Expired - Lifetime JPH0538061Y2 (en) | 1987-06-08 | 1987-06-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0538061Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007146572A (en) * | 2005-11-30 | 2007-06-14 | Ykk Ap株式会社 | Window |
-
1987
- 1987-06-08 JP JP8822787U patent/JPH0538061Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007146572A (en) * | 2005-11-30 | 2007-06-14 | Ykk Ap株式会社 | Window |
Also Published As
Publication number | Publication date |
---|---|
JPH0538061Y2 (en) | 1993-09-27 |