JPH053736B2 - - Google Patents

Info

Publication number
JPH053736B2
JPH053736B2 JP61108903A JP10890386A JPH053736B2 JP H053736 B2 JPH053736 B2 JP H053736B2 JP 61108903 A JP61108903 A JP 61108903A JP 10890386 A JP10890386 A JP 10890386A JP H053736 B2 JPH053736 B2 JP H053736B2
Authority
JP
Japan
Prior art keywords
microwave
transmission window
plasma
window
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61108903A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62264623A (ja
Inventor
Shuzo Fujimura
Yasunari Motoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10890386A priority Critical patent/JPS62264623A/ja
Publication of JPS62264623A publication Critical patent/JPS62264623A/ja
Publication of JPH053736B2 publication Critical patent/JPH053736B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10890386A 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置 Granted JPS62264623A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10890386A JPS62264623A (ja) 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10890386A JPS62264623A (ja) 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS62264623A JPS62264623A (ja) 1987-11-17
JPH053736B2 true JPH053736B2 (enrdf_load_stackoverflow) 1993-01-18

Family

ID=14496552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10890386A Granted JPS62264623A (ja) 1986-05-13 1986-05-13 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS62264623A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006294422A (ja) * 2005-04-11 2006-10-26 Tokyo Electron Ltd プラズマ処理装置およびスロットアンテナおよびプラズマ処理方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0775198B2 (ja) * 1983-03-28 1995-08-09 富士通株式会社 マイクロ波処理装置
JPS6025234A (ja) * 1983-07-21 1985-02-08 Fujitsu Ltd マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPS62264623A (ja) 1987-11-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees