JPH0537288A - Surface acoustic wave device - Google Patents
Surface acoustic wave deviceInfo
- Publication number
- JPH0537288A JPH0537288A JP20884391A JP20884391A JPH0537288A JP H0537288 A JPH0537288 A JP H0537288A JP 20884391 A JP20884391 A JP 20884391A JP 20884391 A JP20884391 A JP 20884391A JP H0537288 A JPH0537288 A JP H0537288A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric substrate
- surface acoustic
- acoustic wave
- sheet
- external body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、フィルタ、レゾネー
タ、遅延線などとして用いられる弾性表面波装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave device used as a filter, a resonator, a delay line or the like.
【0002】[0002]
【従来の技術】図2、図3は、例えば表面波デバイスと
その応用、電子材料工業学会編、日刊工業新聞社発行の
第138頁に示された、従来の弾性表面波装置を示す構
成図である。図において、1はニオブ酸リチウム(Li
NbO3 )YZ基板などによる圧電基板である。2はこ
の圧電基板1上に配置されて、弾性表面波を励振する弾
性表面波励振用すだれ状電極である。3は圧電基板1上
に弾性表面波励振用すだれ状電極2に対向して配置さ
れ、弾性表面波励振用すだれ状電極2にて励振された弾
性表面波を受信する弾性表面波受信用すだれ状電極であ
る。2. Description of the Related Art FIGS. 2 and 3 are block diagrams showing a conventional surface acoustic wave device shown on page 138 of, for example, a surface wave device and its application, edited by Japan Society of Electronic Materials, published by Nikkan Kogyo Shimbun. Is. In the figure, 1 is lithium niobate (Li
A piezoelectric substrate such as a NbO 3 ) YZ substrate. Reference numeral 2 denotes a surface-wave-excited interdigital transducer that is arranged on the piezoelectric substrate 1 and excites a surface acoustic wave. 3 is arranged on the piezoelectric substrate 1 so as to face the IDT 2 for exciting the surface acoustic wave, and the IDT 3 receives the surface acoustic wave excited by the IDT 2 for exciting the surface acoustic wave. It is an electrode.
【0003】4は互いに平行に配列された短冊状の電極
指であり、5はこの電極指4を一端で櫛形に連結するパ
ッドである。前記弾性表面波励振用すだれ状電極2およ
び弾性表面波受信用すだれ状電極3はそれぞれ、このパ
ッド5によって櫛形に連結された2組の電極指4を交差
指形に配置することによって形成されている。Reference numeral 4 denotes strip-shaped electrode fingers arranged in parallel with each other, and reference numeral 5 denotes a pad for connecting the electrode fingers 4 at one end in a comb shape. Each of the interdigital transducer 2 for exciting surface acoustic waves and the interdigital transducer 3 for receiving surface acoustic waves is formed by arranging two sets of electrode fingers 4 connected in a comb shape by the pads 5 in an interdigitated shape. There is.
【0004】6a,6bは弾性表面波励振用すだれ状電
極2の各パッド5に接続されて、電気信号が入力される
入力端子であり、7a,7bは弾性表面波受信用すだれ
状電極3の各パッド5に接続されて電気信号が出力され
る出力端子である。Reference numerals 6a and 6b are input terminals to which electric signals are input by being connected to the pads 5 of the interdigital transducer 2 for exciting surface acoustic waves, and 7a and 7b are the interdigital electrodes 3 for receiving surface acoustic waves. The output terminal is connected to each pad 5 and outputs an electric signal.
【0005】次に動作について説明する。入力端子6
a,6b間に入力された電気信号は、圧電基板1上の弾
性表面波励振用すだれ状電極2の各パッド5に印加され
る。電気信号が印加された弾性表面波励振用すだれ状電
極2は、当該電気信号に応じて弾性表面波を励振して圧
電基板1上に送出する。Next, the operation will be described. Input terminal 6
The electric signal input between a and 6b is applied to each pad 5 of the interdigital transducer 2 for exciting surface acoustic waves on the piezoelectric substrate 1. The interdigital transducer 2 for surface acoustic wave excitation to which the electric signal is applied excites the surface acoustic wave in accordance with the electric signal and sends it to the piezoelectric substrate 1.
【0006】弾性表面波励振用すだれ状電極2より送出
された弾性表面波は、自由伝搬路の伝搬速度で圧電基板
1の上を伝搬し、弾性表面波受信用すだれ状電極3に到
達する。弾性表面波受信用すだれ状電極3は弾性表面波
を受け取ると、それを再度電気信号に変換して出力端子
7a,7bより出力する。The surface acoustic wave transmitted from the interdigital transducer 2 for exciting surface acoustic waves propagates on the piezoelectric substrate 1 at the propagation velocity of the free propagation path and reaches the interdigital electrode 3 for receiving surface acoustic waves. Upon receiving the surface acoustic wave, the interdigital transducer 3 for receiving the surface acoustic wave converts the surface acoustic wave into an electric signal and outputs the electric signal from the output terminals 7a and 7b.
【0007】8は前記圧電基板1、弾性表面波励振用す
だれ状電極2、弾性表面波受信用すだれ状電極3等で構
成されたいわゆる弾性表面波素子を収納するパッケージ
であり、9はパッケージ上の圧電基板1を固定するため
の接着剤である。Reference numeral 8 is a package for accommodating a so-called surface acoustic wave element composed of the piezoelectric substrate 1, the interdigital transducer 2 for exciting the surface acoustic wave, the interdigital transducer 3 for receiving the surface acoustic wave, and the like. This is an adhesive for fixing the piezoelectric substrate 1.
【0008】[0008]
【発明が解決しようとする課題】従来の弾性表面波装置
は以上のように構成されているので、温度変動時の圧電
基板とパッケージ間の熱膨張係数の違いによる機械的
歪、および機械的衝撃、振動がパッケージを介して直接
弾性表面波素子に伝わることによる圧電基板の割れが発
生し、性能劣化などの問題点があった。Since the conventional surface acoustic wave device is constructed as described above, mechanical strain and mechanical shock due to the difference in thermal expansion coefficient between the piezoelectric substrate and the package during temperature fluctuations. As a result, vibrations are transmitted directly to the surface acoustic wave element through the package, causing cracks in the piezoelectric substrate, which causes problems such as performance degradation.
【0009】この発明は上記のような問題点を解消する
ためになされたもので、圧電基板の割れを防止し、弾性
表面波装置の信頼性を向上させることを目的とする。The present invention has been made to solve the above problems, and it is an object of the present invention to prevent the piezoelectric substrate from cracking and improve the reliability of the surface acoustic wave device.
【0010】[0010]
【課題を解決するための手段】この発明に係る弾性表面
波装置は、圧電基板と外部体との熱膨張係数の差による
機械的歪及び外部体からの機械的衝撃や振動を吸収する
ために、圧電基板と外部体との間に設けられ圧電基板お
よび外部体に部分固定された弾力性のあるシートを備え
たものである。The surface acoustic wave device according to the present invention absorbs mechanical strain due to the difference in thermal expansion coefficient between the piezoelectric substrate and the external body and mechanical shock or vibration from the external body. The elastic sheet provided between the piezoelectric substrate and the external body is partially fixed to the piezoelectric substrate and the external body.
【0011】[0011]
【作用】この発明における弾性表面波装置は、外部体と
圧電基板の間に、弾力性のあるシートを備えているた
め、圧電基板と外部体との熱膨張係数の差による機械的
歪及び外部体からの機械的衝撃や振動を吸収することが
でき、高信頼性の弾性表面波装置が得られる。In the surface acoustic wave device according to the present invention, since the elastic sheet is provided between the external body and the piezoelectric substrate, the mechanical strain and the external force due to the difference in the thermal expansion coefficient between the piezoelectric substrate and the external body are generated. A highly reliable surface acoustic wave device capable of absorbing mechanical shock and vibration from the body can be obtained.
【0012】[0012]
【実施例】実施例1.以下、この発明の一実施例を図に
ついて説明する。図1において、1は圧電基板、5はパ
ッド、6aは入力端子、7aは出力端子であり、図2、
図3に同一符号を付した従来のものと同一、あるいは相
当部分であるため詳細な説明は省力する。EXAMPLES Example 1. An embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, 1 is a piezoelectric substrate, 5 is a pad, 6a is an input terminal, and 7a is an output terminal.
Detailed description is omitted because it is the same as or equivalent to the conventional one denoted by the same reference numeral in FIG.
【0013】10は例えば銅箔のような厚さの薄い導体
シート(弾力性のあるシート)、9は従来例と同じく圧
電基板1と導体シート10間を固定するための接着剤、
11は導体シート10とパッケージ8間を固定するため
の接着剤であり、この時、接着剤9,11共に導電シー
ト10に歪を吸収するための遊びとしての余裕を持たせ
るために、全面ではなく部分的な接着を行う。10 is a thin conductor sheet (elastic sheet) such as copper foil, 9 is an adhesive for fixing the piezoelectric substrate 1 and the conductor sheet 10 as in the conventional example,
Reference numeral 11 is an adhesive for fixing the conductor sheet 10 and the package 8 together. At this time, both the adhesives 9 and 11 are provided on the entire surface in order to allow the conductive sheet 10 a play for absorbing the strain. No partial bonding.
【0014】次に動作について説明する。電気的な動作
は従来例と同一であるため詳細な説明は省略する。圧電
基板1とパッケージ8との間に導体シート10があるた
め、温度変動時の圧電基板1とパッケージ8の熱膨張係
数の違いによる機械的歪は、この導体シート10に吸収
され、又、外部体からの機械的衝撃や振動も吸収され
る。従って弾性表面波装置の信頼性を向上する効果があ
る。Next, the operation will be described. Since the electrical operation is the same as the conventional example, detailed description will be omitted. Since the conductor sheet 10 is provided between the piezoelectric substrate 1 and the package 8, mechanical strain due to a difference in thermal expansion coefficient between the piezoelectric substrate 1 and the package 8 during temperature fluctuation is absorbed by the conductor sheet 10 and externally. Mechanical shocks and vibrations from the body are also absorbed. Therefore, there is an effect of improving the reliability of the surface acoustic wave device.
【0015】実施例2.なお、上記実施例では圧電基板
1とパッケージ8との間に厚さの薄い導体シートを設け
たものを示したが、圧電基板1とパッケージ8との間に
例えばフィルム状の絶縁シートを設けてもよく、上記実
施例と同様の効果を奏する。Example 2. Although the thin conductor sheet is provided between the piezoelectric substrate 1 and the package 8 in the above embodiment, a film-like insulating sheet is provided between the piezoelectric substrate 1 and the package 8. The same effect as that of the above embodiment can be obtained.
【0016】[0016]
【発明の効果】以上のように、この発明によれば圧電基
板と外部体との間に設けられ圧電基板および外部体に部
分固定された弾力性のあるシートを設けたので、温度変
動による機械的歪や外部体の機械的衝撃や振動を吸収す
ることができ、高信頼性の弾性表面波装置が得られる効
果がある。As described above, according to the present invention, the elastic sheet provided between the piezoelectric substrate and the external body and partially fixed to the piezoelectric substrate and the external body is provided. It is possible to absorb mechanical strain and mechanical shock and vibration of an external body, and to obtain a highly reliable surface acoustic wave device.
【図面の簡単な説明】[Brief description of drawings]
【図1】この発明の一実施例による弾性表面波装置を示
す断面側面図である。FIG. 1 is a sectional side view showing a surface acoustic wave device according to an embodiment of the present invention.
【図2】従来の弾性表面波装置を示す断面側面図であ
る。FIG. 2 is a cross-sectional side view showing a conventional surface acoustic wave device.
【図3】従来の弾性表面波装置を示す斜視図である。FIG. 3 is a perspective view showing a conventional surface acoustic wave device.
1 圧電基板 2 弾性表面波励振用すだれ状電極 3 弾性表面波受信用すだれ状電極 8 パッケージ(外部体) 10 導電シート又は絶縁シート(弾力性のあるシー
ト)1 piezoelectric substrate 2 interdigital transducer for surface acoustic wave excitation 3 interdigital transducer for surface acoustic wave reception 8 package (outer body) 10 conductive sheet or insulating sheet (elastic sheet)
Claims (1)
て、弾性表面波を励振する弾性表面波励振すだれ状電極
と、前記圧電基板上に前記弾性表面波励振用すだれ状電
極に対向して配置され、前記弾性表面波励振用すだれ状
電極にて励振された弾性表面波を受信する弾性表面波受
信用すだれ状電極と、前記圧電基板と外部体との間に設
けられ、前記圧電基板に部分固定され、かつ、前記外部
体に部分固定された弾力性のあるシートとを備えた弾性
表面波装置。Claim: What is claimed is: 1. A piezoelectric substrate, a surface acoustic wave excitation interdigital electrode that is disposed on the piezoelectric substrate and excites a surface acoustic wave, and the surface acoustic wave excitation is provided on the piezoelectric substrate. Between the piezoelectric substrate and the external body, between the piezoelectric substrate and the external body, the interdigital transducer is disposed so as to face the interdigital transducer, and receives the surface acoustic wave excited by the interdigital electrode for exciting the surface acoustic wave. A surface acoustic wave device provided with an elastic sheet that is provided, is partially fixed to the piezoelectric substrate, and is partially fixed to the external body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20884391A JPH0537288A (en) | 1991-07-26 | 1991-07-26 | Surface acoustic wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20884391A JPH0537288A (en) | 1991-07-26 | 1991-07-26 | Surface acoustic wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0537288A true JPH0537288A (en) | 1993-02-12 |
Family
ID=16563025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20884391A Pending JPH0537288A (en) | 1991-07-26 | 1991-07-26 | Surface acoustic wave device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0537288A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6236521B1 (en) | 1998-02-09 | 2001-05-22 | Canon Kabushiki Kaisha | Objective lens and image pickup device using the same |
US7041958B2 (en) | 2003-02-05 | 2006-05-09 | Canon Kabushiki Kaisha | Lens system and image-taking apparatus having the same |
US7940478B2 (en) | 2008-04-11 | 2011-05-10 | Nikon Corporation | Imaging lens, optical apparatus and method for forming image using this imaging lens |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691517A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Elastic surface wave device |
JPH0387462A (en) * | 1989-08-30 | 1991-04-12 | Nippon Steel Chem Co Ltd | Soundproof floor material |
-
1991
- 1991-07-26 JP JP20884391A patent/JPH0537288A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691517A (en) * | 1979-12-26 | 1981-07-24 | Fujitsu Ltd | Elastic surface wave device |
JPH0387462A (en) * | 1989-08-30 | 1991-04-12 | Nippon Steel Chem Co Ltd | Soundproof floor material |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6236521B1 (en) | 1998-02-09 | 2001-05-22 | Canon Kabushiki Kaisha | Objective lens and image pickup device using the same |
US7041958B2 (en) | 2003-02-05 | 2006-05-09 | Canon Kabushiki Kaisha | Lens system and image-taking apparatus having the same |
US7161132B2 (en) | 2003-02-05 | 2007-01-09 | Canon Kabushiki Kaisha | Lens system and image-taking apparatus having the same |
US7940478B2 (en) | 2008-04-11 | 2011-05-10 | Nikon Corporation | Imaging lens, optical apparatus and method for forming image using this imaging lens |
US8027100B2 (en) | 2008-04-11 | 2011-09-27 | Nikon Corporation | Imaging lens, optical apparatus and method for forming image using this imaging lens |
US8385010B2 (en) | 2008-04-11 | 2013-02-26 | Nikon Corporation | Imaging lens, optical apparatus and method for forming image using this imaging lens |
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