JPH0536926U - Piezoelectric vibrator - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] To provide a piezoelectric vibrator having a fixing portion structure in which a sealing film for maintaining a degree of vacuum inside a container of the piezoelectric vibrator can be formed without interruption. [Structure] An inclined portion 9 is provided on one or both of an outer peripheral portion of a supporting member 2 supporting a piezoelectric material 5 and an outer peripheral portion or an inner peripheral portion of a lid 1. [Effect] By providing the structure having the inclined portion,
When the sealing film is formed, there is no shaded portion, and it is possible to form the sealing film that easily maintains the degree of vacuum inside the piezoelectric vibrator without interruption.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a structure of a piezoelectric vibrator necessary for housing a piezoelectric material in a vacuum or an atmosphere of an inert gas.

[0002]

[Prior Art]

 Conventionally, as a method of sealing a container for storing crystal, a method of press-fitting with a solder interposed in a gap between a support member for supporting and fixing the piezoelectric material and a lid, a method of resistance welding the support member and the lid, and There are methods such as cold pressure welding in which oxygen-free copper is interposed in the gap between the support member and the lid, and a method of joining the support member and the lid with a low melting point glass.

In recent years, when considering surface mounting by an automatic inserter, which is widely used, electronic parts are made lighter, thinner, shorter and easier, and easy to insert automatically. It is necessary to withstand the temperature of 260 ° C for 30 seconds. For this reason, the piezoelectric vibrator is required to be thinner, smaller, and have higher heat resistance, but the above method cannot satisfy the requirements described below.

The method of press-fitting the piezoelectric material by interposing solder in the gap between the supporting member for fixing and supporting the piezoelectric material and the lid can reduce the size, but the solder, which is a low-melting metal, separates the supporting member and the lid. Since it intervenes between them, there is a problem in terms of heat resistance.

On the other hand, in the method of resistance welding the support member and the lid, and the method of cold pressure welding with oxygen-free copper interposed in the gap between the support member and the lid, there is no problem in heat resistance, but there is no problem with the support member. The lid requires a flange for resistance welding and cold pressure welding, which is an obstacle to thinning and downsizing.

Further, in the method of joining the support member and the lid with the low melting point glass, the melting temperature of the low melting point glass is as high as around 450 ° C., so gas is released from the joining material of the piezoelectric material and the support member. It This released gas increases the gas pressure in the piezoelectric vibrator container. Further, the released gas causes deterioration of the electrode material formed on the piezoelectric material, which causes a problem that the characteristics of the piezoelectric vibrator are deteriorated.

Therefore, in order to achieve thinning, miniaturization, and high heat resistance of the piezoelectric vibrator, a structure of the piezoelectric vibrator as shown in FIG. 13 has been proposed. FIG. 13 is a sectional view showing a conventional piezoelectric vibrator.

As shown in FIG. 13, first, the lid 1 is inserted and fixed to the support member 2 that supports the piezoelectric material 5 using the bonding material 7, and is placed in the vacuum apparatus. At this time, even if the lid 1 is inserted into the support member 2, the low-melting metal such as solder is not formed on the support member 2 and the lid 1, so that the piezoelectric vibrator container 4 is not hermetically sealed.

Therefore, when the inside of the vacuum oscillator is evacuated, the gas inside the piezoelectric oscillator container 4 passes through the gap of the fixed portion 3 between the support member 2 and the lid 1, and the gas of the piezoelectric oscillator container 4 moves. Since it is exposed to the outside, the inside of the piezoelectric vibrator container 4 has a vacuum degree equivalent to that inside the vacuum device.

Thereafter, for example, nickel is formed as a thin film or a thick film sealing film 6 on the outer periphery of the support member 2 and the lid 1 by a vacuum deposition method.

The sealing film 6 blocks the passage of gas in the gap portion of the fixed portion 3 between the support member 2 and the lid 1, and enables the support member 2 and the lid 1 to be hermetically sealed. The vacuum inside the piezoelectric vibrator container 4 can be maintained.

[0012]

[Problems to be solved by the device]

 However, in the structure shown in FIG. 13, the side surface of the support member 2 forms a right angle with the side surface of the support member 2 and the end surface of the lid 1. Therefore, when the sealing film 6 is formed, a shadow portion is formed on the fixing portion 3 between the supporting member 2 and the lid 1, and the sealing film 6 should be formed on the fixing portion 3 with a sufficient film thickness. Is not possible, and the film thickness of the sealing film 6 becomes thin in the fixed portion 3. As a result, the sealing film 6 is easily broken in the fixing portion 3.

That is, it becomes impossible to form the sealing film 6 having a film thickness sufficient to maintain the vacuum inside the piezoelectric vibrator container 4.

Therefore, an object of the present invention is to solve the above problems and provide a piezoelectric vibrator having a sealing portion structure for easily forming a sealing film that maintains the degree of vacuum inside a piezoelectric vibrator container. There is something to do.

[0015]

[Means for Solving the Problems]

 In order to achieve the above object, in the structure of the piezoelectric vibrator of the present invention, the lid is inserted into the support member that supports the piezoelectric material, and the sealing film is formed on the outer periphery of the support member and the lid to form the piezoelectric vibrator. In the piezoelectric vibrator for sealing the container, an inclined portion is provided on one of the outer peripheral portion of the support member and the outer peripheral portion or the inner peripheral portion of the lid, or on both the support member and the lid.

[0016]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings. 1 (a) and 1 (b) show the structure of a cylindrical piezoelectric vibrator according to the present invention, FIG. 1 (a) is a sectional view, and FIG. 1 (b) is an enlarged view of the fixing portion 3 in FIG. 1 (a). FIG.

As shown in FIG. 1A, the piezoelectric vibrator container 4 is composed of a support member 2 for supporting the piezoelectric material 5 using a bonding material 7 and a lid 1. The outer peripheral portion of the end portion of the lid 1 has a shape having an inclined portion 9. The inclined portion 9 is formed by pressing or grinding when the lid 1 is manufactured. The angle of the inclined portion 9 may be about 45 °.

The piezoelectric vibrator container 4 in which the lid 1 is inserted and fixed to the support member 2 is placed in a vacuum device (not shown) to perform vacuuming, and then a single metal film, an alloy film, and a nitride film are formed. A sealing film 6 such as a film, an oxide film or a diamond-like carbon film is formed. The formation of the sealing film 6 blocks the gas passage of the fixed portion 3 between the support member 2 and the lid 1, thereby maintaining the vacuum state inside the piezoelectric vibrator container 4.

At this time, the outer peripheral portion of the end portion of the lid 1 has a structure having an inclined portion 9, and as in the conventional example shown in FIG. It is not a right angle, but is about 45 ° in the present invention. Therefore, the sealing film 6 can be formed with a uniform thickness without being interrupted by the fixing portion 3 between the supporting member 2 and the lid 1. Therefore, the degree of vacuum inside the piezoelectric vibrator container 4 can be maintained completely and for a long period of time.

In the piezoelectric vibrators shown in FIGS. 1A and 1B, the structure having the inclined portion 9 only on the outer peripheral portion of the lid 1 is shown. As shown in FIG. 1, even if the inclined portion 9 is provided on one of the outer peripheral portion of the supporting member 2 and the outer peripheral portion or the inner peripheral portion of the lid 1, or both the supporting member 2 and the lid 1, Similarly, the effect that the sealing film 6 can be formed in the fixed portion 3 with a uniform thickness can be obtained.

In FIG. 2, the inclined portion 9 is provided on both the lid 1 and the support member 2, and the fixing portion 3 is V-shaped so that the inclined surfaces of the inclined portion 9 face each other, and the sealing film 6 is formed. The structure to be provided is shown below.

FIG. 3 shows an embodiment in which the inclined portion 9 is provided on both the lid 1 and the support member 2 as in the embodiment shown in FIG. The inclined portion 9 is provided so that the inclined portion 9 is aligned and the side surface of the cylindrical piezoelectric vibrator container 4 has a flat shape.

FIG. 4 shows an embodiment in which the inclined portion 9 is provided on both the lid 1 and the support member 2 as in the embodiment shown in FIGS. Are matched. In the embodiment shown in FIG. 4, unlike the embodiment shown in FIG. 3, the outer diameter of the lid 1 is smaller than that of the support member 2.

FIG. 5 is an embodiment in which the inclined portion 9 is provided only on the support member 2. The end surface of the lid 1 is formed in a right angle shape, and the support member 2 that abuts against the end surface of the lid 1 has a right angle portion and an inclined portion 9. Set up.

FIG. 6 shows a structure of an embodiment in which the inclined portion 9 is provided only on the lid 1. The lid 1 is provided with a right-angled portion and an inclined portion 9, and the support member 2 that abuts against the right-angled portion of the lid 1 is provided with a right-angled portion that matches the right-angled portion of the lid 1.

Although FIG. 1A shows the case where the piezoelectric material 5 is a tuning-fork type crystal, the piezoelectric material 5 may be any other crystal piece such as an AT plate, or a piezoelectric material other than crystal. There is no problem.

In the piezoelectric vibrator shown in FIGS. 1 to 6, the supporting member 2 and the lid 1 are cylindrical, but as shown in the sectional view of FIG. The inclined portion 9 may be provided on the outer peripheral portion of the end portion of the lid 1. By providing the inclined portion 9 at the end of the lid 1 and forming the sealing film 6 to have a uniform thickness, and blocking the gas passage of the fixed portion 3 between the lid 1 and the support member 2, a flat type The vacuum state inside the container 8 is maintained.

The structure shown in FIG. 7 shows the embodiment in which the inclined portion 9 is provided on the outer peripheral portion of the end portion of the lid 1. However, as shown in the sectional views of FIGS. It may be provided on either the outer peripheral portion of the support member 2 or the outer peripheral portion or the inner peripheral portion of the lid 1, or on both the support member 2 and the lid 1.

When the electrode 10 is formed on the support member 2, an insulating film is used as the sealing film 6 in order to prevent a short circuit of the electrode 10.

In FIG. 8, the inclined portion 9 is provided on both the lid 1 and the support member 2, and the fixing portion 3 is V-shaped so that the inclined surfaces of the inclined portion 9 face each other, and the sealing film 6 is formed. An example of the structure in which the

FIG. 9 shows an embodiment in which the inclined portion 9 is provided on both the lid 1 and the supporting member 2 as in the embodiment shown in FIG. 8, but the inclined surfaces of the inclined portion 9 are oriented in both directions. An embodiment will be shown in which the inclined portion 9 is provided so that the upper surface of the flat container 8 has a flat shape so that the inclined portion 9 is aligned.

FIG. 10 is an embodiment in which the inclined portion 9 is provided on both the lid 1 and the support member 2 as in the embodiment shown in FIG. 7 and FIG. Are designed to fit together. Unlike the structure shown in FIG. 9, the embodiment shown in FIG. 10 shows a structure in which the upper surface of the lid 1 is lower than the upper surface of the support member 2.

FIG. 11 shows a structure in which the inclined portion 9 is provided only on the support member 2, and the end surface of the lid 1 is formed in a right angle shape. Set up.

FIG. 12 shows a structure in which the inclined portion 9 is provided only on the lid 1. The lid 1 is provided with a right-angled portion and an inclined portion 9, and the support member that abuts against the right-angled portion of the lid 1 is provided with a right-angled portion that matches the right-angled portion of the lid 1.

Note that the sealing film may be formed by using a thermal spraying method in the sealing in an inert gas atmosphere instead of the sealing in vacuum.

[0036]

[Effect of the device]

 As is clear from the above description, according to the present invention, the piezoelectric vibrator container is formed by inserting the lid into the support member that supports the piezoelectric material and forming the sealing film on the outer periphery of the support member and the lid. In the piezoelectric vibrator to be sealed, by providing an inclined portion on one of the outer peripheral portion of the support member and the outer peripheral portion or the inner peripheral portion of the lid, or on both the support member and the lid, the sealing film is formed. Since there is no shaded portion, it is possible to form the sealing film on the fixed portion with a uniform thickness.

As a result, according to the piezoelectric vibrator structure of the present invention, it becomes possible to easily form the sealing film that maintains the airness inside the piezoelectric vibrator container, and the inside of the piezoelectric vibrator container can be easily formed. Airtightness can be maintained completely and for a long time.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a piezoelectric vibrator in which a piezoelectric vibrator container according to the present invention has a cylindrical shape.

FIG. 2 is a cross-sectional view showing another embodiment of the piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

FIG. 3 is a sectional view showing a piezoelectric vibrator of another embodiment in which the shape of the piezoelectric vibrator container according to the present invention is cylindrical.

FIG. 4 is a cross-sectional view showing another embodiment of a piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

FIG. 5 is a sectional view showing another embodiment of the piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

FIG. 6 is a cross-sectional view showing another embodiment of the piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

FIG. 7 is a cross-sectional view showing a piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a flat shape.

FIG. 8 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention in which the piezoelectric vibrator container has a flat shape.

FIG. 9 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention, in which the piezoelectric vibrator container has a flat shape.

FIG. 10 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention, in which the piezoelectric vibrator container has a flat shape.

FIG. 11 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention in which the piezoelectric vibrator container has a flat shape.

FIG. 12 is a cross-sectional view showing another embodiment of a piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a flat shape.

FIG. 13 is a cross-sectional view showing a piezoelectric vibrator in a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Lid 2 Support member 4 Piezoelectric vibrator container 5 Piezoelectric material 6 Sealing film 8 Flat type container 9 Inclined part

Claims (1)

[Scope of utility model registration request] 1. A piezoelectric vibrator in which a lid is inserted into a support member that supports a piezoelectric material, and a sealing film is formed on an outer peripheral portion of the support member and the lid to seal a piezoelectric vibrator container. A piezoelectric vibrator, wherein an inclined portion is provided on one of the outer peripheral portion and the outer peripheral portion or the inner peripheral portion of the lid, or on both the support member and the lid.