JPH0536926U - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

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Publication number
JPH0536926U
JPH0536926U JP9299791U JP9299791U JPH0536926U JP H0536926 U JPH0536926 U JP H0536926U JP 9299791 U JP9299791 U JP 9299791U JP 9299791 U JP9299791 U JP 9299791U JP H0536926 U JPH0536926 U JP H0536926U
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JP
Japan
Prior art keywords
lid
piezoelectric vibrator
support member
sealing film
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9299791U
Other languages
Japanese (ja)
Inventor
一男 村田
茂 木崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP9299791U priority Critical patent/JPH0536926U/en
Publication of JPH0536926U publication Critical patent/JPH0536926U/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

(57)【要約】 【目的】 圧電振動子の容器内部の真空度を保つための
封止膜が、途切れることがないように形成することがで
きる固定部構造を有する圧電振動子を提供する。 【構成】 圧電材料5を支持する支持部材2の外周部
と、蓋1の外周部または内周部との、一方、あるいは両
方に傾斜部9を設ける。 【効果】 傾斜部を有する構造を設けることによって、
封止膜の形成時に陰となる部分がなくなり、圧電振動子
内部の真空度を容易に保つ封止膜を、途切れることなく
形成することが可能となる。
(57) [Abstract] [PROBLEMS] To provide a piezoelectric vibrator having a fixing portion structure in which a sealing film for maintaining a degree of vacuum inside a container of the piezoelectric vibrator can be formed without interruption. [Structure] An inclined portion 9 is provided on one or both of an outer peripheral portion of a supporting member 2 supporting a piezoelectric material 5 and an outer peripheral portion or an inner peripheral portion of a lid 1. [Effect] By providing the structure having the inclined portion,
When the sealing film is formed, there is no shaded portion, and it is possible to form the sealing film that easily maintains the degree of vacuum inside the piezoelectric vibrator without interruption.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial application]

本考案は、圧電材料を真空もしくは不活性ガスの雰囲気に収納するために必要 な圧電振動子の構成に関するものである。 The present invention relates to a structure of a piezoelectric vibrator necessary for housing a piezoelectric material in a vacuum or an atmosphere of an inert gas.

【0002】[0002]

【従来の技術】[Prior Art]

従来、水晶を収納する容器の封止方法には、圧電材料を支持固定する支持部材 と蓋との隙間部にハンダを介在させて圧入する方法や、支持部材と蓋とを抵抗溶 接する方法や、支持部材と蓋との隙間部に無酸素銅を介在させ冷間圧接する方法 や、支持部材と蓋とを低融点ガラスにて接合する方法などがある。 Conventionally, as a method of sealing a container for storing crystal, a method of press-fitting with a solder interposed in a gap between a support member for supporting and fixing the piezoelectric material and a lid, a method of resistance welding the support member and the lid, and There are methods such as cold pressure welding in which oxygen-free copper is interposed in the gap between the support member and the lid, and a method of joining the support member and the lid with a low melting point glass.

【0003】 近年、多く用いられる自動挿入機による表面実装を考える場合、電子部品には 電子機器の軽薄短小化と自動挿入の容易性、ならびにリフロー炉を通すために、 たとえばリフロー時のハンダが溶融する温度である260℃に30秒間の時間耐 える必要がある。このことから、圧電振動子には薄型化、小型化、高耐熱化が要 求されているが、上述の方法では、以下に記載する点で要求を満足させることが できない。In recent years, when considering surface mounting by an automatic inserter, which is widely used, electronic parts are made lighter, thinner, shorter and easier, and easy to insert automatically. It is necessary to withstand the temperature of 260 ° C for 30 seconds. For this reason, the piezoelectric vibrator is required to be thinner, smaller, and have higher heat resistance, but the above method cannot satisfy the requirements described below.

【0004】 圧電材料を支持固定する支持部材と蓋との隙間部にハンダを介在させて圧入す る方法では、小型化は可能であるが、低融点金属であるハンダが支持部材と蓋と の間に介在するため、耐熱性の面で不都合が生じる。The method of press-fitting the piezoelectric material by interposing solder in the gap between the supporting member for fixing and supporting the piezoelectric material and the lid can reduce the size, but the solder, which is a low-melting metal, separates the supporting member and the lid. Since it intervenes between them, there is a problem in terms of heat resistance.

【0005】 一方、支持部材と蓋とを抵抗溶接する方法、および支持部材と蓋との隙間部に 無酸素銅を介在させ冷間圧接する方法では、耐熱性に関しては問題ないが、支持 部材と蓋とには、抵抗溶接や冷間圧接を行うためのつば部が必要であり、このつ ば部が薄型化、小型化の障害となっている。On the other hand, in the method of resistance welding the support member and the lid, and the method of cold pressure welding with oxygen-free copper interposed in the gap between the support member and the lid, there is no problem in heat resistance, but there is no problem with the support member. The lid requires a flange for resistance welding and cold pressure welding, which is an obstacle to thinning and downsizing.

【0006】 また、支持部材と蓋とを低融点ガラスにて接合する方法では、この低融点ガラ スの溶融温度が450℃前後と高いため、圧電材料の接合材や支持部材からガス が放出される。この放出ガスによって、圧電振動子容器内のガス圧が高くなる。 さらにこの放出ガスによって、圧電材料に形成した電極材料の劣化が発生し、圧 電振動子の特性が劣化するという課題がある。Further, in the method of joining the support member and the lid with the low melting point glass, the melting temperature of the low melting point glass is as high as around 450 ° C., so gas is released from the joining material of the piezoelectric material and the support member. It This released gas increases the gas pressure in the piezoelectric vibrator container. Further, the released gas causes deterioration of the electrode material formed on the piezoelectric material, which causes a problem that the characteristics of the piezoelectric vibrator are deteriorated.

【0007】 そこで、圧電振動子の薄型化、小型化、高耐熱化をなし遂げるため、図13に 示すような、圧電振動子の構成が提案されている。図13は従来の圧電振動子を 示す断面図である。Therefore, in order to achieve thinning, miniaturization, and high heat resistance of the piezoelectric vibrator, a structure of the piezoelectric vibrator as shown in FIG. 13 has been proposed. FIG. 13 is a sectional view showing a conventional piezoelectric vibrator.

【0008】 図13に示すように、まず接合材7を用いて圧電材料5を支持する支持部材2 に蓋1を挿入固定し、真空装置内に配置する。このとき、支持部材2に蓋1を挿 入しても、支持部材2と蓋1とには、ハンダなどの低融点金属が形成されていな いため、圧電振動子容器4は気密封止されない。As shown in FIG. 13, first, the lid 1 is inserted and fixed to the support member 2 that supports the piezoelectric material 5 using the bonding material 7, and is placed in the vacuum apparatus. At this time, even if the lid 1 is inserted into the support member 2, the low-melting metal such as solder is not formed on the support member 2 and the lid 1, so that the piezoelectric vibrator container 4 is not hermetically sealed.

【0009】 このため、真空装置内を真空にすると、圧電振動子容器4内部の気体が支持部 材2と蓋1との間の固定部3の隙間部を通過して圧電振動子容器4の外部に出る ので、圧電振動子容器4の内部が真空装置内と同等の真空度となる。Therefore, when the inside of the vacuum oscillator is evacuated, the gas inside the piezoelectric oscillator container 4 passes through the gap of the fixed portion 3 between the support member 2 and the lid 1, and the gas of the piezoelectric oscillator container 4 moves. Since it is exposed to the outside, the inside of the piezoelectric vibrator container 4 has a vacuum degree equivalent to that inside the vacuum device.

【0010】 しかる後に、たとえばニッケルを真空蒸着法により支持部材2と蓋1との外周 部に薄膜、あるいは厚膜の封止膜6として形成する。Thereafter, for example, nickel is formed as a thin film or a thick film sealing film 6 on the outer periphery of the support member 2 and the lid 1 by a vacuum deposition method.

【0011】 この封止膜6によって、支持部材2と蓋1との間の固定部3の隙間部は、気体 の通過が遮断され、支持部材2と蓋1との気密封止が可能となり、圧電振動子容 器4内部の真空を保つことができる。The sealing film 6 blocks the passage of gas in the gap portion of the fixed portion 3 between the support member 2 and the lid 1, and enables the support member 2 and the lid 1 to be hermetically sealed. The vacuum inside the piezoelectric vibrator container 4 can be maintained.

【0012】[0012]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、図13に示す構造では、支持部材2の側面は、この支持部材2 側面と蓋1の端面とのなす角度が直角となっている。このため、封止膜6を形成 する際、支持部材2と蓋1との固定部3に陰の部分ができ、この固定部3への封 止膜6の形成を充分な膜厚で行うことができず、固定部3で封止膜6の膜厚が薄 くなる。この結果、この固定部3において封止膜6が途切れ易くなる。 However, in the structure shown in FIG. 13, the side surface of the support member 2 forms a right angle with the side surface of the support member 2 and the end surface of the lid 1. Therefore, when the sealing film 6 is formed, a shadow portion is formed on the fixing portion 3 between the supporting member 2 and the lid 1, and the sealing film 6 should be formed on the fixing portion 3 with a sufficient film thickness. Is not possible, and the film thickness of the sealing film 6 becomes thin in the fixed portion 3. As a result, the sealing film 6 is easily broken in the fixing portion 3.

【0013】 すなわち、圧電振動子容器4内部の真空を保つのに充分な膜厚の封止膜6を形 成できなくなる。That is, it becomes impossible to form the sealing film 6 having a film thickness sufficient to maintain the vacuum inside the piezoelectric vibrator container 4.

【0014】 そこで、本考案の目的は、上記課題を解決して、圧電振動子容器内部の真空度 を保つ封止膜を、容易に形成するための封止部構造を有する圧電振動子を提供す ることにある。Therefore, an object of the present invention is to solve the above problems and provide a piezoelectric vibrator having a sealing portion structure for easily forming a sealing film that maintains the degree of vacuum inside a piezoelectric vibrator container. There is something to do.

【0015】[0015]

【課題を解決するための手段】[Means for Solving the Problems]

上記目的を達成するため本考案の圧電振動子の構造では、圧電材料を支持する 支持部材に蓋を挿入し、この支持部材と蓋との外周部に封止膜を形成して圧電振 動子容器を封止する圧電振動子において、支持部材の外周部と、蓋の外周部ある いは内周部との、一方、あるいは支持部材と蓋との両方に傾斜部を設ける。 In order to achieve the above object, in the structure of the piezoelectric vibrator of the present invention, the lid is inserted into the support member that supports the piezoelectric material, and the sealing film is formed on the outer periphery of the support member and the lid to form the piezoelectric vibrator. In the piezoelectric vibrator for sealing the container, an inclined portion is provided on one of the outer peripheral portion of the support member and the outer peripheral portion or the inner peripheral portion of the lid, or on both the support member and the lid.

【0016】[0016]

【実施例】【Example】

以下、図面により本考案の一実施例を説明する。図1(a)、(b)は本考案 における円筒形状の圧電振動子の構造を示し、図1(a)は断面図、図1(b) は図1(a)における固定部3を拡大して示す断面図である。 An embodiment of the present invention will be described below with reference to the drawings. 1 (a) and 1 (b) show the structure of a cylindrical piezoelectric vibrator according to the present invention, FIG. 1 (a) is a sectional view, and FIG. 1 (b) is an enlarged view of the fixing portion 3 in FIG. 1 (a). FIG.

【0017】 図1(a)に示すように、圧電振動子容器4は、接合材7を用いて圧電材料5 を支持する支持部材2と蓋1とで構成する。蓋1端部の外周部は、傾斜部9を有 する形状になっている。この傾斜部9は蓋1の作製時にプレス加工や研削加工な どにより形成する。傾斜部9の角度は、45゜程度あれば良い。As shown in FIG. 1A, the piezoelectric vibrator container 4 is composed of a support member 2 for supporting the piezoelectric material 5 using a bonding material 7 and a lid 1. The outer peripheral portion of the end portion of the lid 1 has a shape having an inclined portion 9. The inclined portion 9 is formed by pressing or grinding when the lid 1 is manufactured. The angle of the inclined portion 9 may be about 45 °.

【0018】 支持部材2に蓋1を挿入固定した圧電振動子容器4を、図には示していない真 空装置内に配置して真空引きを行ったのち、単一金属膜、合金膜、窒化膜、酸化 膜、ダイヤモンドライクカーボン膜などの封止膜6を形成する。この封止膜6の 形成により、支持部材2と蓋1との間の固定部3の気体の通り道を遮蔽すること によって、圧電振動子容器4内部の真空状態を保持する。The piezoelectric vibrator container 4 in which the lid 1 is inserted and fixed to the support member 2 is placed in a vacuum device (not shown) to perform vacuuming, and then a single metal film, an alloy film, and a nitride film are formed. A sealing film 6 such as a film, an oxide film or a diamond-like carbon film is formed. The formation of the sealing film 6 blocks the gas passage of the fixed portion 3 between the support member 2 and the lid 1, thereby maintaining the vacuum state inside the piezoelectric vibrator container 4.

【0019】 このとき、蓋1端部の外周部は傾斜部9を有する構造になっており、図13に 示す従来例のように、支持部材2の側面と蓋1の端面とのなす角度が直角ではな く、本考案においては45゜程度となっている。このため、封止膜6を支持部材 2と蓋1との固定部3で途切れることなく、均一な厚さで形成することが可能と なる。このため、圧電振動子容器4の内部の真空度を、完全に、かつ長期間にわ たって保つことができる。At this time, the outer peripheral portion of the end portion of the lid 1 has a structure having an inclined portion 9, and as in the conventional example shown in FIG. It is not a right angle, but is about 45 ° in the present invention. Therefore, the sealing film 6 can be formed with a uniform thickness without being interrupted by the fixing portion 3 between the supporting member 2 and the lid 1. Therefore, the degree of vacuum inside the piezoelectric vibrator container 4 can be maintained completely and for a long period of time.

【0020】 なお、図1(a)、(b)に示す圧電振動子においては、蓋1の外周部のみに 傾斜部9を有する構造である場合を示したが、図2から図6の断面図に示すよう に、支持部材2の外周部と、蓋1の外周部あるいは内周部との、一方、あるいは 支持部材2と蓋1との両方に傾斜部9を設けても、図1と同様に、固定部3で封 止膜6が均一な厚さで形成できるという効果が得られる。In the piezoelectric vibrators shown in FIGS. 1A and 1B, the structure having the inclined portion 9 only on the outer peripheral portion of the lid 1 is shown. As shown in FIG. 1, even if the inclined portion 9 is provided on one of the outer peripheral portion of the supporting member 2 and the outer peripheral portion or the inner peripheral portion of the lid 1, or both the supporting member 2 and the lid 1, Similarly, the effect that the sealing film 6 can be formed in the fixed portion 3 with a uniform thickness can be obtained.

【0021】 図2は、蓋1と支持部材2との両方に傾斜部9を設け、さらに傾斜部9の斜面 がそれぞれ向かい合うように、固定部3をV字状にして、封止膜6を設ける構造 を示す。In FIG. 2, the inclined portion 9 is provided on both the lid 1 and the support member 2, and the fixing portion 3 is V-shaped so that the inclined surfaces of the inclined portion 9 face each other, and the sealing film 6 is formed. The structure to be provided is shown below.

【0022】 図3は、図2に示す実施例と同じように、蓋1と支持部材2との両方に傾斜部 9を設ける実施例であるが、傾斜部9の斜面の向きは、双方の傾斜部9が合致し て、円筒形の圧電振動子容器4の側面部が平坦な形状になるように、傾斜部9を 設けている。FIG. 3 shows an embodiment in which the inclined portion 9 is provided on both the lid 1 and the support member 2 as in the embodiment shown in FIG. The inclined portion 9 is provided so that the inclined portion 9 is aligned and the side surface of the cylindrical piezoelectric vibrator container 4 has a flat shape.

【0023】 図4は、図2、図3に示す実施例と同じように、蓋1と支持部材2との両方に 傾斜部9を設ける実施例であり、斜面の向きは双方の傾斜部9が合致ようになっ ている。図4に示す実施例では、図3に示す実施例と異なり、蓋1の外径寸法の 方が支持部材2の外径寸法よりも小さくしている。FIG. 4 shows an embodiment in which the inclined portion 9 is provided on both the lid 1 and the support member 2 as in the embodiment shown in FIGS. Are matched. In the embodiment shown in FIG. 4, unlike the embodiment shown in FIG. 3, the outer diameter of the lid 1 is smaller than that of the support member 2.

【0024】 図5は、支持部材2のみに傾斜部9を設ける実施例であり、蓋1の端面は直角 形状とし、この蓋1の端面と突き当たる支持部材2は、直角部と傾斜部9とを設 ける。FIG. 5 is an embodiment in which the inclined portion 9 is provided only on the support member 2. The end surface of the lid 1 is formed in a right angle shape, and the support member 2 that abuts against the end surface of the lid 1 has a right angle portion and an inclined portion 9. Set up.

【0025】 図6は、蓋1のみに傾斜部9を設ける実施例の構造を示す。蓋1には直角部と 傾斜部9とを設け、この蓋1の直角部と突き当たる支持部材2には、蓋1の直角 部と合致する直角部を設ける。FIG. 6 shows a structure of an embodiment in which the inclined portion 9 is provided only on the lid 1. The lid 1 is provided with a right-angled portion and an inclined portion 9, and the support member 2 that abuts against the right-angled portion of the lid 1 is provided with a right-angled portion that matches the right-angled portion of the lid 1.

【0026】 また、図1(a)では圧電材料5として音叉型の水晶の場合を示したが、この 圧電材料5はAT板など他の水晶片、あるいは水晶以外の圧電材料であっても何 ら問題ない。Although FIG. 1A shows the case where the piezoelectric material 5 is a tuning-fork type crystal, the piezoelectric material 5 may be any other crystal piece such as an AT plate, or a piezoelectric material other than crystal. There is no problem.

【0027】 図1から図6に示す圧電振動子においては、支持部材2および蓋1が円筒型の 実施例を示したが、図7の断面図に示すように、フラット型容器8においては、 傾斜部9を蓋1の端部の外周部に設ければ良い。蓋1端部に傾斜部9を設け、封 止膜6を均一な厚さに形成し、蓋1と支持部材2との間の固定部3の気体の通り 道を遮蔽することにより、フラット型容器8内部の真空状態を保持する。In the piezoelectric vibrator shown in FIGS. 1 to 6, the supporting member 2 and the lid 1 are cylindrical, but as shown in the sectional view of FIG. The inclined portion 9 may be provided on the outer peripheral portion of the end portion of the lid 1. By providing the inclined portion 9 at the end of the lid 1 and forming the sealing film 6 to have a uniform thickness, and blocking the gas passage of the fixed portion 3 between the lid 1 and the support member 2, a flat type The vacuum state inside the container 8 is maintained.

【0028】 また、図7に示す構造は、蓋1の端部の外周部に傾斜部9を設ける実施例を示 したが、図8から図12の断面図に示すように、傾斜部9は、支持部材2の外周 部と、蓋1の外周部あるいは内周部との、どちらか一方、あるいは支持部材2と 蓋1との両方に設けてもよい。The structure shown in FIG. 7 shows the embodiment in which the inclined portion 9 is provided on the outer peripheral portion of the end portion of the lid 1. However, as shown in the sectional views of FIGS. It may be provided on either the outer peripheral portion of the support member 2 or the outer peripheral portion or the inner peripheral portion of the lid 1, or on both the support member 2 and the lid 1.

【0029】 なお、支持部材2に電極10が形成されている場合には、電極10の短絡を防 止するために、封止膜6としては、絶縁膜を用いる。When the electrode 10 is formed on the support member 2, an insulating film is used as the sealing film 6 in order to prevent a short circuit of the electrode 10.

【0030】 図8は、蓋1と支持部材2との両方に傾斜部9を設け、傾斜部9の斜面がそれ ぞれ向かい合うように、固定部3をV字状にして、封止膜6を設ける構造の実施 例を示す。In FIG. 8, the inclined portion 9 is provided on both the lid 1 and the support member 2, and the fixing portion 3 is V-shaped so that the inclined surfaces of the inclined portion 9 face each other, and the sealing film 6 is formed. An example of the structure in which the

【0031】 図9は、図8に示す実施例と同じように、蓋1と支持部材2との両方に傾斜部 9を設ける実施例であるが、この傾斜部9の斜面の向きは双方の傾斜部9が合致 して、フラット型容器8の上面が平坦な形状になるように、傾斜部9を設けてい る実施例を示す。FIG. 9 shows an embodiment in which the inclined portion 9 is provided on both the lid 1 and the supporting member 2 as in the embodiment shown in FIG. 8, but the inclined surfaces of the inclined portion 9 are oriented in both directions. An embodiment will be shown in which the inclined portion 9 is provided so that the upper surface of the flat container 8 has a flat shape so that the inclined portion 9 is aligned.

【0032】 図10は、図7、図8に示す実施例と同じように、蓋1と支持部材2との両方 に傾斜部9を設ける実施例であり、傾斜部9の斜面の向きは双方が合わさるよう になっている。図10に示す実施例においては、図9に示す構造と異なり、蓋1 の上面が支持部材2の上面よりも低くなるような構造を示す。FIG. 10 is an embodiment in which the inclined portion 9 is provided on both the lid 1 and the support member 2 as in the embodiment shown in FIG. 7 and FIG. Are designed to fit together. Unlike the structure shown in FIG. 9, the embodiment shown in FIG. 10 shows a structure in which the upper surface of the lid 1 is lower than the upper surface of the support member 2.

【0033】 図11は、支持部材2のみに傾斜部9を設ける構造であり、蓋1の端面は直角 形状とし、この蓋1の端面と突き当たる支持部材2は、直角部と傾斜部9とを設 ける。FIG. 11 shows a structure in which the inclined portion 9 is provided only on the support member 2, and the end surface of the lid 1 is formed in a right angle shape. Set up.

【0034】 図12は、蓋1のみに傾斜部9を設ける構造を示す。蓋1には直角部と傾斜部 9とを設け、この蓋1の直角部と突き当たる支持部材には、蓋1の直角部と合致 する直角部を設ける。FIG. 12 shows a structure in which the inclined portion 9 is provided only on the lid 1. The lid 1 is provided with a right-angled portion and an inclined portion 9, and the support member that abuts against the right-angled portion of the lid 1 is provided with a right-angled portion that matches the right-angled portion of the lid 1.

【0035】 なお、真空中の封止ではなく、不活性ガス雰囲気中の封止では、溶射法を用い て封止膜の形成を行えばよい。Note that the sealing film may be formed by using a thermal spraying method in the sealing in an inert gas atmosphere instead of the sealing in vacuum.

【0036】[0036]

【考案の効果】[Effect of the device]

上記の説明で明らかなように、本考案によれば、圧電材料を支持する支持部材 に蓋を挿入し、この支持部材と蓋との外周部に封止膜を形成して圧電振動子容器 を封止する圧電振動子において、支持部材の外周部と、蓋の外周部あるいは内周 部との、一方、あるいは支持部材と蓋との両方に傾斜部を設けることによって、 封止膜の形成時に陰となる部分がなくなり、封止膜を固定部に、均一な厚さに形 成することが可能となる。 As is clear from the above description, according to the present invention, the piezoelectric vibrator container is formed by inserting the lid into the support member that supports the piezoelectric material and forming the sealing film on the outer periphery of the support member and the lid. In the piezoelectric vibrator to be sealed, by providing an inclined portion on one of the outer peripheral portion of the support member and the outer peripheral portion or the inner peripheral portion of the lid, or on both the support member and the lid, the sealing film is formed. Since there is no shaded portion, it is possible to form the sealing film on the fixed portion with a uniform thickness.

【0037】 この結果、本考案における圧電振動子構造によれば、圧電振動子容器内部の真 空度を保持する封止膜を、容易に形成することが可能となり、圧電振動子容器内 部の気密性を、完全に、かつ長期間にわたり維持することができる。As a result, according to the piezoelectric vibrator structure of the present invention, it becomes possible to easily form the sealing film that maintains the airness inside the piezoelectric vibrator container, and the inside of the piezoelectric vibrator container can be easily formed. Airtightness can be maintained completely and for a long time.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案における圧電振動子容器の形状が円筒形
を有する圧電振動子を示す断面図である。
FIG. 1 is a cross-sectional view showing a piezoelectric vibrator in which a piezoelectric vibrator container according to the present invention has a cylindrical shape.

【図2】本考案における圧電振動子容器の形状が円筒形
を有する他の実施例の圧電振動子を示す断面図である。
FIG. 2 is a cross-sectional view showing another embodiment of the piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

【図3】本考案における圧電振動子容器の形状が円筒形
を有する他の実施例の圧電振動子を示す断面図である。
FIG. 3 is a sectional view showing a piezoelectric vibrator of another embodiment in which the shape of the piezoelectric vibrator container according to the present invention is cylindrical.

【図4】本考案における圧電振動子容器の形状が円筒形
を有する他の実施例の圧電振動子を示す断面図である。
FIG. 4 is a cross-sectional view showing another embodiment of a piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

【図5】本考案における圧電振動子容器の形状が円筒形
を有する他の実施例の圧電振動子を示す断面図である。
FIG. 5 is a sectional view showing another embodiment of the piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

【図6】本考案における圧電振動子容器の形状が円筒形
を有する他の実施例の圧電振動子を示す断面図である。
FIG. 6 is a cross-sectional view showing another embodiment of the piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a cylindrical shape.

【図7】本考案における圧電振動子容器の形状がフラッ
ト型の形状を有する圧電振動子を示す断面図である。
FIG. 7 is a cross-sectional view showing a piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a flat shape.

【図8】本考案における圧電振動子容器の形状がフラッ
ト型の形状を有する他の実施例の圧電振動子を示す断面
図である。
FIG. 8 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention in which the piezoelectric vibrator container has a flat shape.

【図9】本考案における圧電振動子容器の形状がフラッ
ト型の形状を有する他の実施例の圧電振動子を示す断面
図である。
FIG. 9 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention, in which the piezoelectric vibrator container has a flat shape.

【図10】本考案における圧電振動子容器の形状がフラ
ット型の形状を有する他の実施例の圧電振動子を示す断
面図である。
FIG. 10 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention, in which the piezoelectric vibrator container has a flat shape.

【図11】本考案における圧電振動子容器の形状がフラ
ット型の形状を有する他の実施例の圧電振動子を示す断
面図である。
FIG. 11 is a sectional view showing a piezoelectric vibrator according to another embodiment of the present invention in which the piezoelectric vibrator container has a flat shape.

【図12】本考案における圧電振動子容器の形状がフラ
ット型の形状を有する他の実施例の圧電振動子を示す断
面図である。
FIG. 12 is a cross-sectional view showing another embodiment of a piezoelectric vibrator in which the piezoelectric vibrator container according to the present invention has a flat shape.

【図13】従来例における圧電振動子を示す断面図であ
る。
FIG. 13 is a cross-sectional view showing a piezoelectric vibrator in a conventional example.

【符号の説明】[Explanation of symbols]

1 蓋 2 支持部材 4 圧電振動子容器 5 圧電材料 6 封止膜 8 フラット型容器 9 傾斜部 DESCRIPTION OF SYMBOLS 1 Lid 2 Support member 4 Piezoelectric vibrator container 5 Piezoelectric material 6 Sealing film 8 Flat type container 9 Inclined part

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 圧電材料を支持する支持部材に蓋を挿入
し、この支持部材と蓋との外周部に封止膜を形成し圧電
振動子容器を封止する圧電振動子において、前記支持部
材の外周部と、前記蓋の外周部あるいは内周部との、一
方、あるいは前記支持部材と蓋との両方に傾斜部を設け
ることを特徴とする圧電振動子。
1. A piezoelectric vibrator in which a lid is inserted into a support member that supports a piezoelectric material, and a sealing film is formed on an outer peripheral portion of the support member and the lid to seal a piezoelectric vibrator container. A piezoelectric vibrator, wherein an inclined portion is provided on one of the outer peripheral portion and the outer peripheral portion or the inner peripheral portion of the lid, or on both the support member and the lid.
JP9299791U 1991-10-18 1991-10-18 Piezoelectric vibrator Pending JPH0536926U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9299791U JPH0536926U (en) 1991-10-18 1991-10-18 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9299791U JPH0536926U (en) 1991-10-18 1991-10-18 Piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPH0536926U true JPH0536926U (en) 1993-05-18

Family

ID=14070008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9299791U Pending JPH0536926U (en) 1991-10-18 1991-10-18 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPH0536926U (en)

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