JPH0511535U - Crystal oscillator - Google Patents

Abstract

(57) [Abstract] [Purpose] A crystal oscillator in which a lid is inserted into a support member that supports a crystal piece, and a sealing film is formed on an outer peripheral portion of the support member and the lid to seal a crystal oscillator container. (EN) Provided is a sealing portion structure which can easily make a predetermined degree of vacuum inside a container. [Structure] A groove 3 communicating with the inside and outside of a crystal oscillator container 4 is provided in an outer peripheral portion of a support member 2 supporting a crystal piece 5, or an inner peripheral portion of a lid 1. [Effect] It becomes easy for gas to pass, and it is possible to bring the inside of the crystal resonator container to a predetermined vacuum degree in a short time. As a result, the time required for the sealing process is significantly reduced.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

  The present invention is necessary for storing a crystal piece in a vacuum or an inert gas atmosphere. The present invention relates to the structure of a crystal unit.

[0002]

[Prior art]

  Conventionally, a supporting member for supporting and fixing a crystal piece has been used for a method of sealing a container for storing the crystal piece. A low melting point metal such as solder in the gap between the lid and the lid Resistance welding between the material and the lid, or by inserting oxygen-free copper in the gap between the support member and the lid. Cold pressure welding method, joining support member and lid using low melting point glass, etc. There is.

[0003]   Considering the surface mounting by automatic component insertion machine which is widely used in recent years, The products include light and thin electronic devices, easy insertion by an automatic parts insertion machine, and Is the temperature at which the solder melts during reflow to pass through the reflow furnace. It must withstand 260 ° C for 30 seconds. From these things, the crystal unit is thin Miniaturization, miniaturization, and high heat resistance are required.

[0004]   In the various methods described above, in the points described below, thinning of the crystal unit, It is not possible to meet the requirements for downsizing and high heat resistance.

[0005]   Press in with a solder interposed in the gap between the lid and the support member that supports and fixes the crystal piece. Although the method can be miniaturized, a low melting point metal solder is used between the support member and the lid. Since it intervenes, a disadvantage occurs in terms of heat resistance.

[0006]   On the other hand, the method of resistance welding the support member and the lid, and the gap between the support member and the lid With the method of cold pressure welding with oxygen-free copper interposed, there is no problem with heat resistance, but The holding member and the lid have a flange portion for resistance welding or cold pressure welding. But Therefore, it becomes difficult to make the device thinner and smaller.

[0007]   Further, in the method of joining the supporting member and the lid with the low melting point glass, this low melting point glass is used. The melting temperature of the soot is as high as around 450 ° C. Therefore, from the bonding material and support member of the crystal piece The released gas increases the gas pressure inside the crystal unit, and There is a problem that the formed electrode material deteriorates and the characteristics of the crystal unit deteriorate. It

[0008]   Therefore, in order to achieve thinning, miniaturization, and high heat resistance of the crystal unit, the applicant First, we proposed a method for sealing a crystal oscillator container that houses a crystal piece, as shown in Fig. 4. did.

[0009]   In this method, as shown in FIG. 4, first, the bonding material 7 is used to support the crystal piece 5. The lid 1 is inserted and fixed to the support member 2 and placed in a vacuum device. At this time, the support member 2 Since a low melting point metal such as solder is not formed on the lid 1 and the lid 1, the crystal resonator container No. 4 is not hermetically sealed.

[0010]   Therefore, when the vacuum device is evacuated, the gas inside the crystal unit 4 is supported. It passes through the gap between the member 2 and the lid 1 and is discharged to the outside of the crystal oscillator container 4. Therefore, the inside of the crystal oscillator container 4 has a vacuum degree equivalent to that in the vacuum device.

[0011]   Then, for example, nickel is vacuum-deposited on the outer periphery of the support member 2 and the lid 1. If a thin film or a thick film sealing film 6 is formed on the portion, the sealing film 6 supports the film. Gas is blocked from passing through the gap between the holding member 2 and the lid 1, so that the support member 2 and the lid 1 are separated from each other. The sealing becomes possible and the vacuum inside the crystal oscillator container 4 is maintained.

[0012]

[Problems to be solved by the device]

  According to the method proposed by the applicant of the present invention, the vacuum device before the formation of the sealing film 6 can be used. During emptying, the gas passes through the gap between the support member 2 and the lid 1 The inside of the oscillator container 4 becomes a vacuum. However, the passage of gas is limited to this gap. However, it takes a lot of time to bring the inside of the crystal oscillator container 4 to a predetermined vacuum degree.

[0013]   The object of the present invention is to solve the above-mentioned problems and to place the inside of the quartz crystal container in a short time. It is an object of the present invention to provide a sealed structure of a crystal unit capable of achieving a constant degree of vacuum.

[0014]

[Means for Solving the Problems]

  In order to achieve the above object, the crystal unit of the present invention is a support member for supporting a crystal piece. The crystal oscillator container is formed by inserting a lid into the container, and forming a sealing film on the outer periphery of the support member and the lid. In the crystal unit that seals, the outer peripheral part of this support member or the inner peripheral part of the lid. Adopt a structure with grooves.

[0015]

【Example】

  An embodiment of the present invention will be described below with reference to the drawings. 1 (a) and 1 (b) show the present invention. 1A shows a longitudinal sectional view, and FIG. 1B shows a transverse sectional view. Is.

[0016]   As shown in FIG. 1, the crystal unit 4 supports the crystal piece 5 by using the bonding material 7. It comprises a supporting member 2 and a lid 1. On the outer peripheral portion of the support member 2, a crystal oscillator volume is A groove 3 having a depth of several microns is provided which communicates with the inside and outside of the container 4. This groove 3 is formed by the support member 2. It is formed by pressing during manufacturing.

[0017]   The crystal unit 4 having the lid 1 inserted and fixed to the support member 2 is not shown in FIG. And place it in a vacuum device, and evacuate the vacuum device. At this time, the support member 2 Since the groove 3 communicating with the inside and outside of the crystal oscillator container 4 is provided on the outer peripheral portion, the crystal oscillator container 4 The gas in 4 can be easily discharged. Therefore, the pressure inside the crystal unit 4 is Compared to the case where there is no groove as in the past, the pressure equivalent to the pressure in the vacuum device is shorter in a short time. It can be a strength.

[0018]   Although not shown in the figure, after the inside of the crystal unit 4 reaches a predetermined pressure, Encapsulation of single metal film, alloy film, nitride film, oxide film, diamond-like carbon film, etc. Form a film. The groove 3 and the outer peripheral portion where the support member 2 and the lid 1 are fixed are sealed. Because it is covered with a membrane, the passage of gas is blocked. This allows the crystal unit 4 The internal vacuum will be maintained.

[0019]   The support member 2 shown in FIG. 1B has four grooves 3 formed in the support member 2. Although the case where the grooves 3 are provided is shown, the number of the grooves 3 may be one or more.

[0020]   1A and 1B show the case where the groove 3 is provided on the outer peripheral portion of the support member 2. However, the groove 3 may be provided in the inner peripheral portion of the lid 1 as shown in FIG. As shown in Figure 2 As described above, by providing the groove 3 on the inner peripheral portion of the lid 1, the gas in the crystal oscillator container 4 is exhausted. It becomes easy to take out, and the inside of the crystal oscillator container 4 can be set to a predetermined vacuum degree in a short time. It will be possible.

[0021]   1 and 2 show the case where the crystal piece 5 is a tuning fork type, the crystal piece is There is no problem even if it is a circular or rectangular AT plate.

[0022]   Further, FIGS. 1 and 2 show a case where the support member 2 and the lid 1 are cylindrical. However, even in the flat type container 8 as shown in FIG. As described above, a groove communicating with the inside and outside of the flat type container 8 is formed in the lid 1 of the fixing portion between the support member 2 and the lid 1. 3 is provided. In this way, the groove 3 is formed in the fixing portion between the supporting member 2 and the lid 1 of the flat type container 8. By providing the above, it is possible to bring the inside of the flat container 8 to a predetermined degree of vacuum in a short time. it can.

[0023]   Although FIG. 3 shows the case where the groove 3 is provided in the lid 1, the groove 3 may be provided in the support member 2. Yes.

[0024]   Note that the quartz crystal unit is sealed in an inert gas atmosphere, not in a vacuum. Then, the sealing film may be formed by using a thermal spraying method.

[0025]

[Effect of device]

  As described above, according to the present invention, the lid is inserted into the supporting member that supports the crystal piece, A crystal for sealing a crystal resonator container by forming a sealing film on the outer periphery of the support member and the lid. In the crystal unit, the inside of the crystal unit is placed on the outer periphery of the support member or the inner periphery of the lid. It has a groove leading to the outside. As a result, it is easy to discharge the gas inside the crystal unit container. Therefore, it is possible to bring the inside of the crystal oscillator container to a predetermined vacuum degree in a short time. As a result, the time required for the sealing process is significantly reduced.

[Brief description of drawings]

FIG. 1 is a view showing a structure of a crystal unit according to an embodiment of the present invention.

FIG. 2 is a view showing a structure of a crystal resonator according to another embodiment of the present invention.

FIG. 3 is a view showing a structure of a crystal resonator according to another embodiment of the present invention.

FIG. 4 is a drawing showing a structure of a crystal resonator in a conventional example.

[Explanation of symbols]

1 lid 2 Support members 3 grooves 4 Crystal oscillator container 5 crystal pieces 6 Sealing film 7 Bonding material 8 Flat type container

Claims (2)

[Scope of utility model registration request] 1. A crystal oscillator, wherein a lid is inserted into a support member that supports a crystal piece, and a sealing film is formed on an outer peripheral portion of the support member and the lid to seal a crystal oscillator container. A crystal resonator, wherein a groove is provided on an outer peripheral portion of a member. 2. A crystal resonator in which a lid is inserted into a support member for supporting a crystal piece, and a sealing film is formed on an outer peripheral portion of the support member and the lid to seal a crystal resonator container, wherein the lid is provided. A crystal unit, wherein a groove is provided on the inner peripheral portion of the crystal unit.