JPH0536643B2 - - Google Patents

Info

Publication number
JPH0536643B2
JPH0536643B2 JP31614090A JP31614090A JPH0536643B2 JP H0536643 B2 JPH0536643 B2 JP H0536643B2 JP 31614090 A JP31614090 A JP 31614090A JP 31614090 A JP31614090 A JP 31614090A JP H0536643 B2 JPH0536643 B2 JP H0536643B2
Authority
JP
Japan
Prior art keywords
spool
sleeve
servo valve
pressure
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP31614090A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04191507A (ja
Inventor
Eizo Urata
Shinpei Myagawa
Tomoshiro Yamashina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Research Co Ltd
Original Assignee
Ebara Corp
Ebara Research Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Research Co Ltd filed Critical Ebara Corp
Priority to JP31614090A priority Critical patent/JPH04191507A/ja
Publication of JPH04191507A publication Critical patent/JPH04191507A/ja
Publication of JPH0536643B2 publication Critical patent/JPH0536643B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
  • Multiple-Way Valves (AREA)
JP31614090A 1990-11-22 1990-11-22 水圧サーボ弁 Granted JPH04191507A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31614090A JPH04191507A (ja) 1990-11-22 1990-11-22 水圧サーボ弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31614090A JPH04191507A (ja) 1990-11-22 1990-11-22 水圧サーボ弁

Publications (2)

Publication Number Publication Date
JPH04191507A JPH04191507A (ja) 1992-07-09
JPH0536643B2 true JPH0536643B2 (https=) 1993-05-31

Family

ID=18073707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31614090A Granted JPH04191507A (ja) 1990-11-22 1990-11-22 水圧サーボ弁

Country Status (1)

Country Link
JP (1) JPH04191507A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106837940B (zh) * 2017-03-24 2018-03-30 中冶华天工程技术有限公司 可调节流孔面积的抑制伺服阀自激振荡装置

Also Published As

Publication number Publication date
JPH04191507A (ja) 1992-07-09

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