JPH0536028A - Thin-film magnetic head - Google Patents

Thin-film magnetic head

Info

Publication number
JPH0536028A
JPH0536028A JP19148191A JP19148191A JPH0536028A JP H0536028 A JPH0536028 A JP H0536028A JP 19148191 A JP19148191 A JP 19148191A JP 19148191 A JP19148191 A JP 19148191A JP H0536028 A JPH0536028 A JP H0536028A
Authority
JP
Japan
Prior art keywords
coil
gap
thin film
magnetic core
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19148191A
Other languages
Japanese (ja)
Inventor
Hiroyuki Nagatomo
浩之 長友
Masakatsu Saito
正勝 斉藤
Yukiko Ogura
由紀子 小倉
Shigeo Aoki
茂夫 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19148191A priority Critical patent/JPH0536028A/en
Publication of JPH0536028A publication Critical patent/JPH0536028A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To lower the resistance of a thin-film coil and to decrease head noises by optimizing the shape over the entire part of the coil. CONSTITUTION:The thin-film coil 1 is formed so such a shape that the ratio Xa/Ya of the coil width Xa in a track width direction and the coil width Ya in a gap depth direction is between 0.5 and 1.0. The coil is formed to such a shape that the ratio Yb/Yc between the coil width Yb and Yc in the gap depth direction is between 0.4 to 0.7.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気記録再生装置に用
いられる薄膜磁気ヘッドに係り、特に薄膜コイルの低抵
抗化に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head used in a magnetic recording / reproducing apparatus, and more particularly to reducing the resistance of a thin film coil.

【0002】[0002]

【従来の技術】薄膜で形成されたコイルは、従来のバル
ク型ヘッドに用いられている線材を巻いて形成されたコ
イルに比べ、断面積が小さいため、一般に抵抗値が高
く、ノイズの原因になっている。
2. Description of the Related Art A coil formed of a thin film has a smaller cross-sectional area than a coil formed by winding a wire used in a conventional bulk type head, so that it generally has a high resistance value and causes noise. Has become.

【0003】コイルの抵抗を下げる方法は、製造プロセ
スの面から考えるとプロセス技術の変更が必要な方法と
必要でない方法に分けることが出来る。前者はコイル膜
厚の増大、コイル間スペースの減少によるコイル幅の増
大等の方法でコイル断面積を大きくする方法であり、後
者はフォトマスクの変更のみで対応できるコイル平面形
状の最適化である。
The method of lowering the resistance of the coil can be divided into a method requiring a change in the process technology and a method not requiring a change in the process technology from the viewpoint of the manufacturing process. The former is a method of increasing the coil cross-sectional area by increasing the coil film thickness and increasing the coil width by reducing the space between the coils. The latter is an optimization of the coil plane shape that can be handled only by changing the photomask. .

【0004】本発明は従来のプロセス技術で対応できる
後者の方法でコイルの低抵抗化を実現したものである。
後者の方法で低抵抗化を図った他の例として、特開平1
−223612号公報に開示されている方法がある。コ
イルは外周になるほど一周あたりのコイル長が長くなる
ため、各周のコイル幅が同じ場合外周になるほどコイル
抵抗が増大するので外周ほどコイル幅を大きくして各周
の抵抗値を平均化し、コイル全体の抵抗値を低減すると
いうものであった。
The present invention realizes the reduction of the resistance of the coil by the latter method which can be dealt with by the conventional process technology.
As another example in which the latter method is used to reduce the resistance, Japanese Patent Application Laid-Open No. HEI-1
There is a method disclosed in Japanese Patent Publication No. 223612. Since the coil length per one turn becomes longer as the coil becomes closer to the outer circumference, the coil resistance increases as the coil width at each circumference becomes the same at the outer circumference.Therefore, the coil width is made larger at the outer circumference and the resistance value of each circumference is averaged. It was to reduce the overall resistance value.

【0005】[0005]

【発明が解決しようとする課題】ところで上記従来例は
薄膜コイルの各周のコイル幅の最適化に関する発明であ
り、コイルの全体形状すなわちコイルの最外周および最
内周の形状については考慮されていなかった。実際に
は、コイルの全体形状はヘッド性能やヘッド形状とのか
ねあいで制限される。一例として磁気ディスク装置用の
薄膜磁気ヘッドを図1に示す。この場合、コイルの全体
形状は二個所で制限を受ける。一つはフロントギャップ
とリアギャップの間隔で、これは磁気回路の大きさすな
わちヘッド効率との関係で決定される。もう一つはトラ
ック幅方向の最外周コイル間の距離で、スライダの幅に
よって制限を受ける。これに対しその他の部分、例え
ば、ギャップ深さ方向で、バックギャップより後部側
(フロントギャップと反対側)は比較的自由にコイル形
状を設定することができる。
By the way, the above conventional example is an invention relating to optimization of the coil width of each circumference of the thin film coil, and the overall shape of the coil, that is, the shape of the outermost circumference and the innermost circumference of the coil is taken into consideration. There wasn't. In reality, the overall shape of the coil is limited by the head performance and the shape of the head. As an example, a thin film magnetic head for a magnetic disk device is shown in FIG. In this case, the overall shape of the coil is limited in two places. One is the distance between the front gap and the rear gap, which is determined in relation to the size of the magnetic circuit, that is, the head efficiency. The other is the distance between the outermost coils in the track width direction, which is limited by the width of the slider. On the other hand, in other portions, for example, in the gap depth direction, the coil shape can be relatively freely set on the rear side of the back gap (the side opposite to the front gap).

【0006】コイルの低抵抗化を考える場合は、コイル
各周の幅だけでなく、制限を受ける部分と制限がない部
分のバランスを考えたコイル全体形状の最適化も必要で
ある。
In order to reduce the resistance of the coil, it is necessary to optimize not only the width of each circumference of the coil but also the overall shape of the coil in consideration of the balance between the restricted portion and the unrestricted portion.

【0007】本発明の目的は、最適なコイル全体形状を
与え、コイル抵抗を低減することにある。
An object of the present invention is to provide an optimum overall coil shape and reduce coil resistance.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するため
に、本発明は薄膜コイルの形状をコイルのトラック幅方
向の最外周コイル間の距離の最大値をXa、ギャップ深
さ方向の最外周コイル間の距離の最大値をYaとしたと
き、次の関係が成り立つような形状としたものである。
In order to achieve the above object, the present invention defines the shape of a thin-film coil as the outermost circumference in the track width direction of the coil, the maximum value of the distance between the coils being Xa, and the outermost circumference in the gap depth direction. When the maximum value of the distance between the coils is Ya, the shape is such that the following relationship holds.

【0009】[0009]

【数3】 0.5≦Xa/Ya≦1.0
…(1) また、ギャップ深さ方向の最外周コイルと最内周コイル
間の距離で、バックギャップよりフロントギャップ側部
分の最大値をYb、フロントギャップと反対側の部分の
最大値をYcとしたときに次式が成り立つような形状と
したものである。
## EQU00003 ## 0.5 ≦ Xa / Ya ≦ 1.0
(1) In the distance between the outermost coil and the innermost coil in the gap depth direction, the maximum value on the front gap side of the back gap is Yb, and the maximum value on the side opposite to the front gap is Yc. The shape is such that

【0010】[0010]

【数4】 0.4≦Yb/Yc≦0.7
…(2)
## EQU4 ## 0.4 ≦ Yb / Yc ≦ 0.7
… (2)

【0011】[0011]

【作用】上記のようににコイルの全体形状はヘッド性能
やヘッド形状とのかねあいで制限される。一例として図
1に示した磁気ディスク装置用の薄膜磁気ヘッドをとる
と、フロントギャップとリアギャップの間隔およびトラ
ック幅方向の最外周コイル間の距離の二個所で制限を受
ける。これに対しその他の部分、例えば、ギャップ深さ
方向で、バックギャップより後部側(フロントギャップ
と反対側)は比較的自由にコイル形状を設定することが
できる。
As described above, the overall shape of the coil is limited by the head performance and the shape of the head. As an example, when the thin film magnetic head for the magnetic disk device shown in FIG. 1 is taken, there are two restrictions, namely, the distance between the front gap and the rear gap and the distance between the outermost peripheral coils in the track width direction. On the other hand, in other portions, for example, in the gap depth direction, the coil shape can be relatively freely set on the rear side of the back gap (the side opposite to the front gap).

【0012】しかしヘッド性能やヘッド形状の面からは
制限を受けず、自由にコイル形状を設定することができ
る部分も、他の制限を受ける部分とのかねあいで形状が
決定されなければならない。例えば、図1においてバッ
クギャップより後部側のコイル幅を大きくすると、その
部分のコイル抵抗は小さくなるが、それにつながる部分
はコイル長が長くなるため抵抗が大きくなり、コイル全
体の抵抗を考えた場合、必ずしも低抵抗化に有利である
とは限らない。
However, the head performance and the shape of the head are not limited, and the shape of the portion in which the coil shape can be freely set must be determined in balance with the other limited portions. For example, in FIG. 1, if the coil width on the rear side of the back gap is increased, the coil resistance of that portion is reduced, but the coil length of the portion connected to that portion is increased and the resistance is increased. However, it is not always advantageous for lowering the resistance.

【0013】本発明はコイルのトラック幅方向の最外周
コイル間の距離とギャップ深さ方向の最外周コイル間の
距離の比及びギャップ深さ方向の最外周コイルと最内周
コイル間の距離で、バックギャップよりフロントギャッ
プ側とその反対側の距離の比を規定することでコイル全
体形状の最適化を行ったものであり、これによりコイル
抵抗を低減したものである。
According to the present invention, the ratio of the distance between the outermost peripheral coils in the track width direction of the coil to the distance between the outermost peripheral coils in the gap depth direction and the distance between the outermost peripheral coil and the innermost peripheral coil in the gap depth direction are used. The overall shape of the coil is optimized by defining the ratio of the distance between the front gap side and the opposite side of the back gap, whereby the coil resistance is reduced.

【0014】[0014]

【実施例】以下、本発明の一実施例を図1及び図2によ
り詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIGS.

【0015】図1に本発明の薄膜ヘッドの平面図を示
す。薄膜ヘッドは、非磁性基板上に下部磁性層を形成
し、絶縁膜、薄膜コイルを積層した後、上部磁性層を形
成してウエハプロセスが完了する。上部と下部の磁性層
は絶縁膜に開けられた二か所のコンタクトホールによっ
て接続され、この二個所のコンタクトホールがギャップ
となる。ギャップのうち記録媒体と接する方をフロント
ギャップ、他方をバックギャップと呼ぶ。図1では、ギ
ャップとコイル以外は省略してある。薄膜コイルはバッ
クギャップの回りに、同一平面上に渦巻状に形成されて
おり、単層あるいは複数層積層されて成っている。ただ
し、図1では薄膜コイル1、フロントギャップ4、バッ
クギャップ3のみ示し、その他の磁気コア等は省略して
ある。
FIG. 1 is a plan view of the thin film head of the present invention. In the thin film head, a lower magnetic layer is formed on a non-magnetic substrate, an insulating film and a thin film coil are laminated, and then an upper magnetic layer is formed to complete the wafer process. The upper and lower magnetic layers are connected by two contact holes formed in the insulating film, and these two contact holes form a gap. One of the gaps that contacts the recording medium is called a front gap, and the other is called a back gap. In FIG. 1, components other than the gap and the coil are omitted. The thin film coil is spirally formed on the same plane around the back gap, and is formed by laminating a single layer or a plurality of layers. However, in FIG. 1, only the thin film coil 1, the front gap 4, and the back gap 3 are shown, and other magnetic cores and the like are omitted.

【0016】薄膜コイルは様々な制約によってその全体
形状が規定されている。例えば、図1に示した磁気ディ
スク用の薄膜ヘッドの場合、コイル全体形状に制約を与
えている部分は二か所ある。一つはフロントギャップと
リアギャップの間隔である。磁路長はこの間隔のほぼ二
倍であるから、間隔が広すぎると磁気回路が大型化しヘ
ッド性能が低下するため、制約が必要である。これは、
磁気ディスク用薄膜ヘッドの場合に限らず本タイプの薄
膜コイルをもつヘッドに共通した制約である。また、磁
気ディスク用薄膜ヘッド特有の制約として、ヘッドが取
り付けられるスライダの幅がある。ヘッドはスライダの
幅をはみ出さないように加工され、コイルはヘッド加工
で切断されないように、さらにその内側に形成しなけれ
ばならない。
The overall shape of the thin film coil is regulated by various restrictions. For example, in the case of the thin film head for a magnetic disk shown in FIG. 1, there are two parts that restrict the overall shape of the coil. One is the distance between the front gap and the rear gap. Since the magnetic path length is almost twice this interval, if the interval is too wide, the magnetic circuit becomes large and the head performance deteriorates. Therefore, restrictions are required. this is,
This is a limitation common not only to a thin film head for a magnetic disk but also to a head having a thin film coil of this type. Further, a limitation peculiar to a thin film head for a magnetic disk is a width of a slider to which the head is attached. The head must be processed so as not to exceed the width of the slider, and the coil must be formed further inside thereof so as not to be cut by the head processing.

【0017】図1に示したように、コイルのトラック幅
方向の最外周コイル間の距離の最大値をXa、ギャップ
深さ方向の最外周コイル間の距離の最大値をYaとす
る。図2にこのときの両者の比Xa/Yaとコイル抵抗
Rの関係を示す。コイル抵抗RはXa/Yaが0.6と
なるあたりで最小となる。ただし、コイル抵抗Rが最小
となるときのXa/Yaの値は、コイル巻数、コイル膜
厚や磁路長等の条件によって多少変化する。例えば、コ
イル巻数15ターン、コイル膜厚3μm、磁路長400
μmのときのコイル抵抗RはXa/Yaの値が0.6の
とき最小となり、その時のコイル抵抗Rは4.9Ωであ
る。同様に20ターン、5μm、300μmの場合のX
a/Yaの値は0.9でコイル抵抗Rは8.8Ωであ
る。以上を考慮して、図2においてコイル抵抗Rの最小
値の一割増までをコイル抵抗Rの最適範囲とすると、そ
のときのXa/Yaの値は式(1)となる。
As shown in FIG. 1, the maximum distance between the outermost coils in the track width direction of the coil is Xa, and the maximum distance between the outermost coils in the gap depth direction is Ya. FIG. 2 shows the relationship between the ratio Xa / Ya and the coil resistance R at this time. The coil resistance R is minimum when Xa / Ya is 0.6. However, the value of Xa / Ya when the coil resistance R becomes the minimum changes somewhat depending on conditions such as the number of coil turns, the coil film thickness, and the magnetic path length. For example, the number of coil turns is 15 turns, the coil film thickness is 3 μm, and the magnetic path length is 400.
The coil resistance R when μm is minimum when the value of Xa / Ya is 0.6, and the coil resistance R at that time is 4.9Ω. Similarly, X for 20 turns, 5 μm, and 300 μm
The value of a / Ya is 0.9 and the coil resistance R is 8.8Ω. Taking the above into consideration, when the optimum value of the coil resistance R is set up to 10% of the minimum value of the coil resistance R in FIG. 2, the value of Xa / Ya at that time is given by the expression (1).

【0018】従って、Xa/Yaが上記範囲であるよう
なコイル形状であれば、コイル巻数等の条件が変わって
もコイル抵抗Rは最小値の一割増までの範囲内の値が得
られることがわかる。
Therefore, if the coil shape is such that Xa / Ya is in the above range, the coil resistance R can be obtained within the range of up to 10% of the minimum value even if conditions such as the number of coil turns are changed. Recognize.

【0019】本発明の他の実施例を図1及び図3を用い
て説明する。
Another embodiment of the present invention will be described with reference to FIGS. 1 and 3.

【0020】ヘッド構造は上記実施例と同様である。図
1に示した様にコイルのギャップ深さ方向の最外周コイ
ルと最内周コイル間の距離で、バックギャップよりフロ
ントギャップ側部分の最大値をYb、フロントギャップ
と反対側の部分の最大値をYcとする。
The head structure is similar to that of the above embodiment. As shown in Fig. 1, the distance between the outermost coil and the innermost coil in the gap depth direction of the coil is Yb, the maximum value of the front gap side portion of the back gap, and the maximum value of the portion opposite to the front gap. Be Yc.

【0021】図3にこのときの両者の比Yb/Ycとコ
イル抵抗Rの関係を示す。コイル抵抗RはYb/Ycが
0.5となるあたりで最小となる。しかし上記と同様、
コイル抵抗Rが最小となるYb/Ycの値は、磁路長等
の条件によって多少変化する。例えば、コイル巻数15
ターン、コイル膜厚3μm、磁路長400μmのときの
コイル抵抗RはYb/Ycの値が0.5のとき最小とな
り、その時のコイル抵抗Rは4.4Ωである。同様に2
0ターン、5μm、300μmの場合のYb/Ycの値
は0.6でコイル抵抗Rは8.8Ωである。以上を考慮
して、図2においてコイル抵抗Rの最小値の一割増まで
をコイル抵抗Rの最適範囲とすると、そのときのYb/
Ycの値は式(2)となる。
FIG. 3 shows the relationship between the ratio Yb / Yc and the coil resistance R in this case. The coil resistance R is minimum when Yb / Yc is 0.5. But as above
The value of Yb / Yc that minimizes the coil resistance R changes somewhat depending on conditions such as the magnetic path length. For example, the number of coil turns is 15
The coil resistance R when the turn, the coil film thickness is 3 μm, and the magnetic path length is 400 μm is minimum when the value of Yb / Yc is 0.5, and the coil resistance R at that time is 4.4Ω. Similarly 2
In the case of 0 turns, 5 μm and 300 μm, the value of Yb / Yc is 0.6 and the coil resistance R is 8.8Ω. Taking the above into consideration, assuming that the minimum value of the coil resistance R up to 10% is set as the optimum range of the coil resistance R in FIG. 2, Yb /
The value of Yc is given by equation (2).

【0022】従って、Yb/Ycが上記範囲であるよう
なコイル形状であれば、磁路長等の条件が変わってもコ
イル抵抗Rは最小値の一割増までの範囲内の値が得られ
ることがわかる。
Therefore, if the coil shape is such that Yb / Yc is in the above range, the coil resistance R can obtain a value within a range up to 10% even if conditions such as the magnetic path length are changed. I understand.

【0023】[0023]

【発明の効果】本発明によれば、コイルの全体形状を最
適化することができ、コイル抵抗を低減することができ
る。
According to the present invention, the overall shape of the coil can be optimized and the coil resistance can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第一及び第二の実施例を示す薄膜磁気
ヘッドの平面図、
FIG. 1 is a plan view of a thin film magnetic head showing first and second embodiments of the present invention,

【図2】コイル形成領域のトラック幅方向とギャップ深
さ方向の寸法比とコイル抵抗の関係を示す第一の実施例
の効果を表わす説明図、
FIG. 2 is an explanatory view showing the effect of the first embodiment showing the relationship between the coil resistance in the track width direction and the gap depth direction of the coil forming region and the coil resistance;

【図3】コイル形成領域のバックギャップからフロント
ギャップまでの寸法とバックギャップ以降の寸法の比と
コイル抵抗の関係を示す第二の実施例の効果を表わす説
明図。
FIG. 3 is an explanatory diagram showing the effect of the second embodiment showing the relationship between the coil resistance and the ratio of the dimension from the back gap to the front gap in the coil forming region and the dimension after the back gap.

【符号の説明】[Explanation of symbols]

1…薄膜コイル、 2…スライダ、 3…バックギャップ、 4…フロントギャップ。 1 ... Thin film coil, 2 ... slider, 3 ... back gap, 4 ... Front gap.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 青木 茂夫 茨城県勝田市大字稲田1410番地株式会社日 立製作所東海工場内   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Shigeo Aoki             1410 Inada, Katsuta City, Ibaraki Japan             Tachi Works Tokai Factory

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】基板上に下部磁気コア、絶縁膜、同一平面
上に渦巻状に複数回巻回された薄膜コイル、上部磁気コ
ア等を積層形成し、バックギャップにおいて前記下部磁
気コアと前記上部磁気コアは磁気的に接続され、フロン
トギャップでは非磁性薄膜を挾んで前記下部磁気コアと
前記上部磁気コアが対向してなる薄膜磁気ヘッドにおい
て、 薄膜コイルのトラック幅方向の最外周コイル間の距離の
最大値をXa、ギャップ深さ方向の最外周コイル間の距
離の最大値をYaとしたとき、次の関係が成り立つこと
を特徴とする薄膜磁気ヘッド。 【数1】 0.5≦Xa/Ya≦1.0
…(1)
1. A lower magnetic core, an insulating film, a thin film coil spirally wound a plurality of times on the same plane, an upper magnetic core, etc. are laminated on a substrate, and the lower magnetic core and the upper portion are formed in a back gap. In a thin film magnetic head in which the magnetic cores are magnetically connected, and the lower magnetic core and the upper magnetic core face each other across the non-magnetic thin film in the front gap, the distance between the outermost coils of the thin film coil in the track width direction. Is a maximum value of Xa, and a maximum value of the distance between the outermost circumferential coils in the gap depth direction is Ya, the following relationship is established. ## EQU1 ## 0.5 ≦ Xa / Ya ≦ 1.0
… (1)
【請求項2】基板上に下部磁気コア、絶縁膜、同一平面
上に渦巻状に複数回巻回された薄膜コイル、上部磁気コ
ア等を積層形成し、バックギャップにおいて前記下部磁
気コアと前記上部磁気コアは磁気的に接続され、フロン
トギャップでは非磁性薄膜を挾んで前記下部磁気コアと
前記上部磁気コアが対向してなる薄膜磁気ヘッドにおい
て、 薄膜コイルのギャップ深さ方向の最外周コイルと最内周
コイル間の距離で、バックギャップよりフロントギャッ
プ側部分の最大値をYb、フロントギャップと反対側の
部分の最大値をYcとしたときに次式が成り立つことを
特徴とする薄膜磁気ヘッド。 【数2】 0.4≦Yb/Yc≦0.7
…(2)
2. A lower magnetic core, an insulating film, a thin-film coil spirally wound a plurality of times on the same plane, an upper magnetic core, etc. are laminated on a substrate, and the lower magnetic core and the upper portion are formed in a back gap. In a thin film magnetic head in which the magnetic cores are magnetically connected, and the lower magnetic core and the upper magnetic core face each other across the non-magnetic thin film in the front gap, the outermost coil in the gap depth direction of the thin film coil A thin film magnetic head characterized in that the following expression is established, where Yb is a maximum value of a portion on the front gap side with respect to the back gap and Yc is a maximum value of a portion on the side opposite to the front gap in the distance between the inner circumference coils. ## EQU2 ## 0.4 ≦ Yb / Yc ≦ 0.7
… (2)
JP19148191A 1991-07-31 1991-07-31 Thin-film magnetic head Pending JPH0536028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19148191A JPH0536028A (en) 1991-07-31 1991-07-31 Thin-film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19148191A JPH0536028A (en) 1991-07-31 1991-07-31 Thin-film magnetic head

Publications (1)

Publication Number Publication Date
JPH0536028A true JPH0536028A (en) 1993-02-12

Family

ID=16275367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19148191A Pending JPH0536028A (en) 1991-07-31 1991-07-31 Thin-film magnetic head

Country Status (1)

Country Link
JP (1) JPH0536028A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546938A (en) * 1991-08-12 1993-02-26 Tdk Corp Thin film magnetic head
US6507455B1 (en) * 1999-03-18 2003-01-14 Alps Electric Co., Ltd. Thin film magnetic head capable of reducing coil resistance value of entire coil layer formed between core layers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546938A (en) * 1991-08-12 1993-02-26 Tdk Corp Thin film magnetic head
JP2589421B2 (en) * 1991-08-12 1997-03-12 ティーディーケイ株式会社 Thin film magnetic head
US6507455B1 (en) * 1999-03-18 2003-01-14 Alps Electric Co., Ltd. Thin film magnetic head capable of reducing coil resistance value of entire coil layer formed between core layers

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