JPH0535821B2 - - Google Patents

Info

Publication number
JPH0535821B2
JPH0535821B2 JP60014860A JP1486085A JPH0535821B2 JP H0535821 B2 JPH0535821 B2 JP H0535821B2 JP 60014860 A JP60014860 A JP 60014860A JP 1486085 A JP1486085 A JP 1486085A JP H0535821 B2 JPH0535821 B2 JP H0535821B2
Authority
JP
Japan
Prior art keywords
metal oxide
gas sensitive
gas
semiconductor metal
sensitive body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60014860A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61173146A (ja
Inventor
Fumio Fukushima
Ryoichi Makimoto
Tooru Hachikawa
Nobumitsu Tanaka
Hiromitsu Tagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60014860A priority Critical patent/JPS61173146A/ja
Publication of JPS61173146A publication Critical patent/JPS61173146A/ja
Publication of JPH0535821B2 publication Critical patent/JPH0535821B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP60014860A 1985-01-29 1985-01-29 ガス感応体 Granted JPS61173146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60014860A JPS61173146A (ja) 1985-01-29 1985-01-29 ガス感応体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60014860A JPS61173146A (ja) 1985-01-29 1985-01-29 ガス感応体

Publications (2)

Publication Number Publication Date
JPS61173146A JPS61173146A (ja) 1986-08-04
JPH0535821B2 true JPH0535821B2 (enExample) 1993-05-27

Family

ID=11872779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60014860A Granted JPS61173146A (ja) 1985-01-29 1985-01-29 ガス感応体

Country Status (1)

Country Link
JP (1) JPS61173146A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57138105A (en) * 1981-02-20 1982-08-26 Gen Corp Moisture sensitive element

Also Published As

Publication number Publication date
JPS61173146A (ja) 1986-08-04

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