JPH0535373Y2 - - Google Patents

Info

Publication number
JPH0535373Y2
JPH0535373Y2 JP16056888U JP16056888U JPH0535373Y2 JP H0535373 Y2 JPH0535373 Y2 JP H0535373Y2 JP 16056888 U JP16056888 U JP 16056888U JP 16056888 U JP16056888 U JP 16056888U JP H0535373 Y2 JPH0535373 Y2 JP H0535373Y2
Authority
JP
Japan
Prior art keywords
base
movable
movable base
motor
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16056888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0281516U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16056888U priority Critical patent/JPH0535373Y2/ja
Priority to US07/431,171 priority patent/US5022619A/en
Publication of JPH0281516U publication Critical patent/JPH0281516U/ja
Application granted granted Critical
Publication of JPH0535373Y2 publication Critical patent/JPH0535373Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Positioning Apparatuses (AREA)
JP16056888U 1988-12-09 1988-12-09 Expired - Lifetime JPH0535373Y2 (enExample)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16056888U JPH0535373Y2 (enExample) 1988-12-09 1988-12-09
US07/431,171 US5022619A (en) 1988-12-09 1989-10-26 Positioning device of table for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16056888U JPH0535373Y2 (enExample) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0281516U JPH0281516U (enExample) 1990-06-22
JPH0535373Y2 true JPH0535373Y2 (enExample) 1993-09-08

Family

ID=31442745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16056888U Expired - Lifetime JPH0535373Y2 (enExample) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0535373Y2 (enExample)

Also Published As

Publication number Publication date
JPH0281516U (enExample) 1990-06-22

Similar Documents

Publication Publication Date Title
US5022619A (en) Positioning device of table for semiconductor wafers
DE69032988T2 (de) Ausrichtungssystem
US9360650B2 (en) Laser alignment device with a movable mirror, laser-target alignment sensor with movable mirrors and laser alignment method
US4370054A (en) Projection exposure apparatus
JPH09115825A (ja) 走査型投影露光装置
JPH0535373Y2 (enExample)
JPH09106941A (ja) 走査型露光装置及び露光方法
CN100478789C (zh) 掩模传输系统四象限对准装置
US4714328A (en) Operating microscope apparatus
JPH0812843B2 (ja) 光学結像装置及び方法
US5078472A (en) Driving device for an optical system
DE69417716T2 (de) Abtastgerät mit einem selbstfahrenden und sich geradlinig bewegenden Wagen
US8056434B2 (en) Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means
US4421405A (en) Multiple mode copying apparatus
US4714933A (en) Laser picture-drawing apparatus
JP2670984B2 (ja) デバイス製造方法
JP2715071B2 (ja) 部品の組み付け位置自動調整装置
JPH04337621A (ja) 位置決めステージ装置
JPS6324215A (ja) 基準形状投影装置
JPS63164213A (ja) 光路変更機構
SU390588A1 (enExample)
JPS58122541A (ja) 投影露光装置
US3527364A (en) Indexing mechanisms
JPH02218110A (ja) 光学結像装置及び方法
JPS5873117A (ja) 外観検査装置