JPH0534105Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Field of Use The present invention relates to an apparatus for visually inspecting semiconductor components such as IC transistors.

BACKGROUND ART Package appearance recognition (voids, chips, damage, stains) using a conventional appearance inspection apparatus is carried out by visual observation using an apparatus shown in the schematic cross-sectional view of FIG. 2. 1 is a lighting device that illuminates the device 2; 3 is a device guide cover; and 4 is a device transport rail.

Problems to be Solved by the Invention In such a conventional configuration, the state of irradiation of light to the device is not uniform, and the state of irradiation is particularly uneven in the frame portion 9 shown in FIG. It was not possible to obtain the same recognition image illuminance as the other parts. Since the image condition is greatly affected by the brightness and darkness of the image, it is not possible to perform inspection with highly accurate recognition using the conventional configuration in which the illumination state in Figure 2 shows high illuminance in area A and low illuminance in area B. Ta.

For example, as shown in FIG.
Often, appearance defects such as voids 10 (holes and small holes caused by the flow of resin during resin sealing) are likely to occur, but it is difficult to detect defects when the surface condition is dark as with conventional appearance inspection equipment. This is difficult to recognize.

The present invention was developed in view of the above, and has a simple configuration that allows for visual inspection that adjusts the state of light irradiation on the device, uniformizes the illuminance over the entire surface of the device, and provides extremely high recognition accuracy. It provides equipment.

Means for Solving the Problems The device of the present invention is provided with a reflecting plate of a plane mirror whose angle can be adjusted to produce an appropriate amount of light to create uniform illuminance over the entire surface of the device, and the reflecting plate is connected to the device and the lighting device. The device is located between the two sides and is positioned so that the entire surface of the device is illuminated from the side.

Effect: By setting the reflector as described above, the light amount on the entire surface of the device can be adjusted by simply adjusting the angle of the reflector to make the recognition state of the entire surface of the device uniform.

Embodiment FIG. 1 is a schematic cross-sectional view of an IC visual inspection apparatus according to an embodiment of the present invention. In Figure 1, 7 is pin 6
An angle adjustment plate 5 is fitted with the pin 6 and is rotatable around the pin 6 and holds the reflector 8;
A support plate that fits into the angle adjustment plate 7 and supports the angle adjustment plate 7 is fixed to the guide rail cover 3 of the device. Reference numeral 1 denotes a lighting device having a light amount that can be captured in image recognition.

With the above configuration, the angle of the reflector 8 that adjusts the amount of light from the illumination device 1 is adjusted, and the illuminance during image recognition of the entire surface state of the device 2 is made uniform, thereby achieving highly accurate package recognition. be. In this embodiment, the light amount is adjusted from two directions, but it goes without saying that better uniform illuminance can be obtained over the entire surface of the device by adjusting the light amount from more directions. However, experiments have shown that uniform illuminance on the device surface is sufficient for recognition even in two directions.

Effects of the invention In this way, by using a reflector in areas that would be shaded under normal lighting, the invention creates a surface illuminance similar to that of other areas, and by making the illumination of all areas to be recognized uniform, it eliminates erroneous recognition due to the brightness of the device surface that is dependent on the lighting system, and makes it possible to perform external inspection of only those areas that are truly desired to be inspected, such as voids, chips, damage, and dirt in the package, which is extremely useful in practical terms.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view of a schematic configuration of a device according to an embodiment of the present invention, Fig. 2 is a cross-sectional view of a schematic configuration of a conventional device, and Fig.
The figure is a plan view seen from the direction of arrow Y in Figure 2.
The figure is a plan view showing a void state in the frame portion in the enlarged view of the device in FIG. 3. DESCRIPTION OF SYMBOLS 1...Lighting device, 2...Device, 3...Device guide rail cover, 4...Transportation rail, 5
...Support plate, 6...Pin, 7...Angle adjustment plate, 8
……a reflector.

Claims (1)

[Scope of utility model registration request] An illumination device that provides the amount of light necessary to image the device; and a reflecting plate that is a plane mirror whose angle is variable to adjust the amount of light irradiated to the device; 1. An IC external appearance inspection apparatus, wherein the IC external appearance inspection apparatus is arranged in a position in which the entire surface of the device is illuminated from the side.